AT331371B - Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung - Google Patents

Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung

Info

Publication number
AT331371B
AT331371B AT399575A AT399575A AT331371B AT 331371 B AT331371 B AT 331371B AT 399575 A AT399575 A AT 399575A AT 399575 A AT399575 A AT 399575A AT 331371 B AT331371 B AT 331371B
Authority
AT
Austria
Prior art keywords
electron beam
discharge
generating
glime
help
Prior art date
Application number
AT399575A
Other languages
English (en)
Other versions
ATA399575A (de
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of ATA399575A publication Critical patent/ATA399575A/de
Application granted granted Critical
Publication of AT331371B publication Critical patent/AT331371B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Lasers (AREA)
  • Discharge Lamp (AREA)
  • Particle Accelerators (AREA)
AT399575A 1974-05-27 1975-05-26 Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung AT331371B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407059.A NL160114C (nl) 1974-05-27 1974-05-27 Gasontladingselektronenkanon van het holle anodetype voor het opwekken van een elektronenbundel met behulp van een glimontlading.

Publications (2)

Publication Number Publication Date
ATA399575A ATA399575A (de) 1975-11-15
AT331371B true AT331371B (de) 1976-08-25

Family

ID=19821436

Family Applications (1)

Application Number Title Priority Date Filing Date
AT399575A AT331371B (de) 1974-05-27 1975-05-26 Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung

Country Status (10)

Country Link
US (1) US4004172A (de)
JP (1) JPS514496A (de)
AT (1) AT331371B (de)
CA (1) CA1011385A (de)
CH (1) CH588161A5 (de)
DE (1) DE2523360B2 (de)
FR (1) FR2273368B1 (de)
GB (1) GB1518161A (de)
NL (1) NL160114C (de)
SE (1) SE398022B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492587A1 (fr) * 1980-10-20 1982-04-23 V Elektrotekhnichesky Canon electronique a decharge dans un gaz avec cathode froide
JPS5927652Y2 (ja) * 1980-10-27 1984-08-10 矢崎総業株式会社 プリント配線板の取付構造
JPS5776739A (en) * 1980-10-31 1982-05-13 Efuimoobitsuchi Kureind Yuurii Electron/ion source
JPS60217339A (ja) * 1984-04-13 1985-10-30 Matsushita Electric Ind Co Ltd 液晶表示パネルおよびその製造方法
US5319481A (en) * 1986-12-23 1994-06-07 Raychem Corporation Encapsulated liquid crystal optical read/write storage medium and system
DE102010049521B3 (de) 2010-10-25 2012-04-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Erzeugen eines Elektronenstrahls

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices

Also Published As

Publication number Publication date
CA1011385A (en) 1977-05-31
ATA399575A (de) 1975-11-15
GB1518161A (en) 1978-07-19
NL160114C (nl) 1979-09-17
DE2523360B2 (de) 1976-11-04
CH588161A5 (de) 1977-05-31
JPS514496A (de) 1976-01-14
SE398022B (sv) 1977-11-28
SE7505870L (sv) 1975-11-28
NL160114B (nl) 1979-04-17
US4004172A (en) 1977-10-18
NL7407059A (nl) 1975-12-01
FR2273368B1 (de) 1979-06-15
DE2523360A1 (de) 1975-12-11
FR2273368A1 (de) 1975-12-26

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
ELJ Ceased due to non-payment of the annual fee