AT335579B - Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung - Google Patents

Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung

Info

Publication number
AT335579B
AT335579B AT407575A AT407575A AT335579B AT 335579 B AT335579 B AT 335579B AT 407575 A AT407575 A AT 407575A AT 407575 A AT407575 A AT 407575A AT 335579 B AT335579 B AT 335579B
Authority
AT
Austria
Prior art keywords
electron beam
discharge
generating
glime
help
Prior art date
Application number
AT407575A
Other languages
English (en)
Other versions
ATA407575A (de
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of ATA407575A publication Critical patent/ATA407575A/de
Application granted granted Critical
Publication of AT335579B publication Critical patent/AT335579B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/10—Non-vacuum electron beam-welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Measuring Fluid Pressure (AREA)
AT407575A 1974-05-30 1975-05-28 Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung AT335579B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407253A NL7407253A (nl) 1974-05-30 1974-05-30 Gasontladingselektronenkanon voor het opwekken van een elektronenbundel met behulp van een glimontlading.

Publications (2)

Publication Number Publication Date
ATA407575A ATA407575A (de) 1976-07-15
AT335579B true AT335579B (de) 1977-03-25

Family

ID=19821457

Family Applications (1)

Application Number Title Priority Date Filing Date
AT407575A AT335579B (de) 1974-05-30 1975-05-28 Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung

Country Status (9)

Country Link
JP (1) JPS513571A (de)
AT (1) AT335579B (de)
CA (1) CA1032633A (de)
CH (1) CH581389A5 (de)
DE (1) DE2522072A1 (de)
FR (1) FR2275874A1 (de)
GB (1) GB1517952A (de)
NL (1) NL7407253A (de)
SE (1) SE401425B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492586A1 (fr) * 1980-10-20 1982-04-23 V Elektrotekhnichesky Procede de commande d'un canon electronique a decharge gazeuse
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
US20200260712A1 (en) 2019-02-15 2020-08-20 Novelty Manufacturing Co. Insect trap

Also Published As

Publication number Publication date
CA1032633A (en) 1978-06-06
FR2275874A1 (fr) 1976-01-16
DE2522072A1 (de) 1975-12-11
SE401425B (sv) 1978-05-02
JPS5510096B2 (de) 1980-03-13
NL7407253A (nl) 1975-12-02
JPS513571A (en) 1976-01-13
GB1517952A (en) 1978-07-19
CH581389A5 (de) 1976-10-29
FR2275874B1 (de) 1979-06-15
ATA407575A (de) 1976-07-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee