CA1032633A - Gas discharge electron gun for generating an electron beam by means of a glow discharge - Google Patents

Gas discharge electron gun for generating an electron beam by means of a glow discharge

Info

Publication number
CA1032633A
CA1032633A CA228,657A CA228657A CA1032633A CA 1032633 A CA1032633 A CA 1032633A CA 228657 A CA228657 A CA 228657A CA 1032633 A CA1032633 A CA 1032633A
Authority
CA
Canada
Prior art keywords
generating
discharge
electron beam
gas discharge
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA228,657A
Other languages
French (fr)
Inventor
Theodorus M.B. Schoenmakers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1032633A publication Critical patent/CA1032633A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/10—Non-vacuum electron beam-welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Measuring Fluid Pressure (AREA)
CA228,657A 1974-05-30 1975-05-29 Gas discharge electron gun for generating an electron beam by means of a glow discharge Expired CA1032633A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407253A NL7407253A (en) 1974-05-30 1974-05-30 GAS DISCHARGE ELECTRONIC CANNON FOR GENERATING AN ELECTRON BUNDLE WITH THE HELP OF A GLOW DISCHARGE.

Publications (1)

Publication Number Publication Date
CA1032633A true CA1032633A (en) 1978-06-06

Family

ID=19821457

Family Applications (1)

Application Number Title Priority Date Filing Date
CA228,657A Expired CA1032633A (en) 1974-05-30 1975-05-29 Gas discharge electron gun for generating an electron beam by means of a glow discharge

Country Status (9)

Country Link
JP (1) JPS513571A (en)
AT (1) AT335579B (en)
CA (1) CA1032633A (en)
CH (1) CH581389A5 (en)
DE (1) DE2522072A1 (en)
FR (1) FR2275874A1 (en)
GB (1) GB1517952A (en)
NL (1) NL7407253A (en)
SE (1) SE401425B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492586A1 (en) * 1980-10-20 1982-04-23 V Elektrotekhnichesky Control method for gas discharge electron gun - has magnetic coil coaxially wound around anode and bias supply to incident plate
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source
DE4003623A1 (en) * 1990-02-07 1991-08-08 Kloeckner Ionon METHOD FOR CONTROLLING A PLANT TREATMENT SYSTEM FOR WORKPIECES
US20200260712A1 (en) 2019-02-15 2020-08-20 Novelty Manufacturing Co. Insect trap

Also Published As

Publication number Publication date
FR2275874A1 (en) 1976-01-16
DE2522072A1 (en) 1975-12-11
SE401425B (en) 1978-05-02
JPS5510096B2 (en) 1980-03-13
AT335579B (en) 1977-03-25
NL7407253A (en) 1975-12-02
JPS513571A (en) 1976-01-13
GB1517952A (en) 1978-07-19
CH581389A5 (en) 1976-10-29
FR2275874B1 (en) 1979-06-15
ATA407575A (en) 1976-07-15

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