SE520802C2 - Skärverktyg belagt med aluminiumoxid och process för dess tillverkning - Google Patents
Skärverktyg belagt med aluminiumoxid och process för dess tillverkningInfo
- Publication number
- SE520802C2 SE520802C2 SE9704066A SE9704066A SE520802C2 SE 520802 C2 SE520802 C2 SE 520802C2 SE 9704066 A SE9704066 A SE 9704066A SE 9704066 A SE9704066 A SE 9704066A SE 520802 C2 SE520802 C2 SE 520802C2
- Authority
- SE
- Sweden
- Prior art keywords
- al2o3
- layer
- coating
- layers
- coated
- Prior art date
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 238000005520 cutting process Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000008569 process Effects 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000000576 coating method Methods 0.000 claims abstract description 54
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 50
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 50
- 239000011248 coating agent Substances 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 18
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 6
- 150000002367 halogens Chemical class 0.000 claims abstract description 6
- 230000011514 reflex Effects 0.000 claims abstract description 5
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 49
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 17
- 238000005240 physical vapour deposition Methods 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 14
- 238000005516 engineering process Methods 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 229910010037 TiAlN Inorganic materials 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 238000005555 metalworking Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 2
- 238000002447 crystallographic data Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 abstract description 7
- 239000010959 steel Substances 0.000 abstract description 7
- 238000003754 machining Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 229910001018 Cast iron Inorganic materials 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 abstract description 4
- 230000009977 dual effect Effects 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 9
- 229910003158 γ-Al2O3 Inorganic materials 0.000 description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- KJPRLNWUNMBNBZ-QPJJXVBHSA-N (E)-cinnamaldehyde Chemical compound O=C\C=C\C1=CC=CC=C1 KJPRLNWUNMBNBZ-QPJJXVBHSA-N 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007514 turning Methods 0.000 description 2
- -1 AlCl 3 Chemical class 0.000 description 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229920001887 crystalline plastic Polymers 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000007735 ion beam assisted deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Chemical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Drilling Tools (AREA)
Priority Applications (17)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| BR9813186-9A BR9813186A (pt) | 1997-11-06 | 1998-11-06 | Ferramenta de corte revestida pela deposição fìsica de vapor (pvd) deai2o3 |
| DE69821516T DE69821516T2 (de) | 1997-11-06 | 1998-11-06 | PVD Al2O3 BESCHICHTETES SCHNEIDWERKZEUG |
| PCT/SE1998/002009 WO1999024634A1 (en) | 1997-11-06 | 1998-11-06 | PVD Al2O3 COATED CUTTING TOOL |
| PL98340602A PL340602A1 (en) | 1997-11-06 | 1998-11-06 | Cutting tool plated with a1203 by pvd (physical vacuum depositing) process |
| US09/187,006 US6210726B1 (en) | 1997-11-06 | 1998-11-06 | PVD Al2O3 coated cutting tool |
| RU2000114171/02A RU2206432C2 (ru) | 1997-11-06 | 1998-11-06 | Режущий инструмент и способ его изготовления |
| KR1020007003870A KR100614961B1 (ko) | 1997-11-06 | 1998-11-06 | ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구 |
| JP2000519623A JP2001522725A (ja) | 1997-11-06 | 1998-11-06 | ＰＶＤＡｌ２Ｏ３被覆切削工具 |
| EP02013750A EP1253215B1 (en) | 1997-11-06 | 1998-11-06 | PVD Al2O3 coated cutting tool |
| CN98810834A CN1278307A (zh) | 1997-11-06 | 1998-11-06 | PVDAl2O3涂层刀具 |
| EP98954899A EP1029105B1 (en) | 1997-11-06 | 1998-11-06 | PVD Al2O3 COATED CUTTING TOOL |
| AT98954899T ATE259003T1 (de) | 1997-11-06 | 1998-11-06 | Pvd al2o3 beschichtetes schneidwerkzeug |
| DE69828453T DE69828453T2 (de) | 1997-11-06 | 1998-11-06 | Mit PVD-Al2O3 beschichtetes Schneidwerkzeug |
| AT02013750T ATE286155T1 (de) | 1997-11-06 | 1998-11-06 | Mit pvd-al2o3 beschichtetes schneidwerkzeug |
| US09/782,226 US6423403B2 (en) | 1997-11-06 | 2001-02-14 | PVD Al2O3 coated cutting tool |
| US10/151,821 US6673430B2 (en) | 1997-11-06 | 2002-05-22 | PVD Al2O3 coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE9704066D0 SE9704066D0 (sv) | 1997-11-06 |
| SE9704066L SE9704066L (sv) | 1999-05-07 |
| SE520802C2 true SE520802C2 (sv) | 2003-08-26 |
Family
ID=20408890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
Country Status (12)
| Country | Link |
|---|---|
| US (3) | US6210726B1 (enExample) |
| EP (2) | EP1029105B1 (enExample) |
| JP (1) | JP2001522725A (enExample) |
| KR (1) | KR100614961B1 (enExample) |
| CN (1) | CN1278307A (enExample) |
| AT (2) | ATE259003T1 (enExample) |
| BR (1) | BR9813186A (enExample) |
| DE (2) | DE69821516T2 (enExample) |
| PL (1) | PL340602A1 (enExample) |
| RU (1) | RU2206432C2 (enExample) |
| SE (1) | SE520802C2 (enExample) |
| WO (1) | WO1999024634A1 (enExample) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE520802C2 (sv) | 1997-11-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| SE518134C2 (sv) * | 1997-12-10 | 2002-09-03 | Sandvik Ab | Multiskiktbelagt skärverktyg |
| SE520795C2 (sv) * | 1999-05-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| SE519921C2 (sv) | 1999-05-06 | 2003-04-29 | Sandvik Ab | PVD-belagt skärverktyg och metod för dess framställning |
| SE521284C2 (sv) * | 1999-05-19 | 2003-10-21 | Sandvik Ab | Aluminiumoxidbelagt skärverktyg för metallbearbetning |
| US6572991B1 (en) * | 2000-02-04 | 2003-06-03 | Seco Tools Ab | Deposition of γ-Al2O3 by means of CVD |
| AT5008U1 (de) * | 2001-02-09 | 2002-02-25 | Plansee Tizit Ag | Hartmetallverschleissteil mit mischoxidschicht |
| US6689450B2 (en) * | 2001-03-27 | 2004-02-10 | Seco Tools Ab | Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature |
| EP1323847A3 (en) * | 2001-12-28 | 2005-09-14 | Seco Tools Ab | Coated cemented carbide body and method for use |
| DE10314929B9 (de) * | 2002-04-17 | 2010-12-23 | Cemecon Ag | Körper mit einer Beschichtung in R-3c Struktur, Verfahren und Vorrichtung zur PVD-Beschichtung |
| JP2003340602A (ja) * | 2002-05-29 | 2003-12-02 | Kyocera Corp | 回路付き切削工具およびその製造方法 |
| JP2004060741A (ja) * | 2002-07-26 | 2004-02-26 | Motoyama Eng Works Ltd | ダイアフラム及びダイアフラム弁並びに成膜装置 |
| WO2004015170A1 (ja) * | 2002-08-08 | 2004-02-19 | Kabushiki Kaisha Kobe Seiko Sho | α型結晶構造主体のアルミナ皮膜の製造方法、α型結晶構造主体のアルミナ皮膜と該アルミナ皮膜を含む積層皮膜、該アルミナ皮膜または該積層皮膜で被覆された部材とその製造方法、および物理的蒸着装置 |
| JP4205546B2 (ja) * | 2003-09-16 | 2009-01-07 | 株式会社神戸製鋼所 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
| US7693855B2 (en) * | 2003-10-28 | 2010-04-06 | Media Cybernetics, Inc. | Method, system, and computer program product for managing data associated with a document stored in an electronic form |
| CN101048531A (zh) * | 2004-07-07 | 2007-10-03 | 通用电气公司 | 基材上的保护涂层及其制备方法 |
| JP2006028600A (ja) * | 2004-07-16 | 2006-02-02 | Kobe Steel Ltd | 耐摩耗性と耐熱性に優れた積層皮膜 |
| JP4593994B2 (ja) * | 2004-07-23 | 2010-12-08 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| DE102004044240A1 (de) * | 2004-09-14 | 2006-03-30 | Walter Ag | Schneidwerkzeug mit oxidischer Beschichtung |
| US20070116631A1 (en) * | 2004-10-18 | 2007-05-24 | The Regents Of The University Of California | Arrays of long carbon nanotubes for fiber spinning |
| ATE541068T1 (de) | 2005-09-09 | 2012-01-15 | Sandvik Intellectual Property | Pvd-beschichtetes schneidwerkzeug |
| SE529015C2 (sv) * | 2005-09-09 | 2007-04-10 | Sandvik Intellectual Property | PVD-belagt skärverktygsskär tillverkat av hårdmetall |
| US20070078521A1 (en) | 2005-09-30 | 2007-04-05 | Depuy Products, Inc. | Aluminum oxide coated implants and components |
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| KR102652515B1 (ko) * | 2017-11-07 | 2024-03-28 | 발터 악티엔게젤샤프트 | Al2O3 증착을 위한 PVD 프로세스 및 적어도 하나의 Al2O3 층으로 코팅된 절삭 공구 |
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| RU2676719C1 (ru) * | 2018-02-14 | 2019-01-10 | Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук | Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия |
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| DE4209975A1 (de) | 1992-03-27 | 1993-09-30 | Krupp Widia Gmbh | Verbundkörper und dessen Verwendung |
| DE69319531T2 (de) | 1992-10-12 | 1999-04-15 | Sumitomo Electric Industries, Ltd., Osaka | Ultradünnes Filmlaminat |
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| DE19518779C1 (de) | 1995-05-22 | 1996-07-18 | Fraunhofer Ges Forschung | Verbundkörper aus vakuumbeschichtetem Sinterwerkstoff und Verfahren zu seiner Herstellung |
| DE19518781C1 (de) * | 1995-05-22 | 1996-09-05 | Fraunhofer Ges Forschung | Vakuumbeschichteter Verbundkörper und Verfahren zu seiner Herstellung |
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-
1997
- 1997-11-06 SE SE9704066A patent/SE520802C2/sv unknown
-
1998
- 1998-11-06 WO PCT/SE1998/002009 patent/WO1999024634A1/en not_active Ceased
- 1998-11-06 PL PL98340602A patent/PL340602A1/xx unknown
- 1998-11-06 AT AT98954899T patent/ATE259003T1/de active
- 1998-11-06 AT AT02013750T patent/ATE286155T1/de active
- 1998-11-06 DE DE69821516T patent/DE69821516T2/de not_active Expired - Lifetime
- 1998-11-06 EP EP98954899A patent/EP1029105B1/en not_active Expired - Lifetime
- 1998-11-06 DE DE69828453T patent/DE69828453T2/de not_active Expired - Lifetime
- 1998-11-06 BR BR9813186-9A patent/BR9813186A/pt not_active IP Right Cessation
- 1998-11-06 KR KR1020007003870A patent/KR100614961B1/ko not_active Expired - Fee Related
- 1998-11-06 EP EP02013750A patent/EP1253215B1/en not_active Expired - Lifetime
- 1998-11-06 JP JP2000519623A patent/JP2001522725A/ja active Pending
- 1998-11-06 RU RU2000114171/02A patent/RU2206432C2/ru not_active IP Right Cessation
- 1998-11-06 CN CN98810834A patent/CN1278307A/zh active Pending
- 1998-11-06 US US09/187,006 patent/US6210726B1/en not_active Expired - Lifetime
-
2001
- 2001-02-14 US US09/782,226 patent/US6423403B2/en not_active Expired - Lifetime
-
2002
- 2002-05-22 US US10/151,821 patent/US6673430B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010072535A (ko) | 2001-07-31 |
| RU2206432C2 (ru) | 2003-06-20 |
| US6210726B1 (en) | 2001-04-03 |
| US20010049011A1 (en) | 2001-12-06 |
| DE69828453T2 (de) | 2005-06-02 |
| JP2001522725A (ja) | 2001-11-20 |
| US6423403B2 (en) | 2002-07-23 |
| US6673430B2 (en) | 2004-01-06 |
| EP1029105B1 (en) | 2004-02-04 |
| EP1253215A3 (en) | 2003-01-02 |
| PL340602A1 (en) | 2001-02-12 |
| DE69821516D1 (de) | 2004-03-11 |
| SE9704066D0 (sv) | 1997-11-06 |
| DE69828453D1 (de) | 2005-02-03 |
| SE9704066L (sv) | 1999-05-07 |
| KR100614961B1 (ko) | 2006-08-25 |
| US20030027015A1 (en) | 2003-02-06 |
| CN1278307A (zh) | 2000-12-27 |
| BR9813186A (pt) | 2000-08-22 |
| EP1029105A1 (en) | 2000-08-23 |
| ATE259003T1 (de) | 2004-02-15 |
| ATE286155T1 (de) | 2005-01-15 |
| DE69821516T2 (de) | 2004-07-01 |
| WO1999024634A1 (en) | 1999-05-20 |
| EP1253215B1 (en) | 2004-12-29 |
| EP1253215A2 (en) | 2002-10-30 |
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