SE520802C2 - Skärverktyg belagt med aluminiumoxid och process för dess tillverkning - Google Patents
Skärverktyg belagt med aluminiumoxid och process för dess tillverkningInfo
- Publication number
- SE520802C2 SE520802C2 SE9704066A SE9704066A SE520802C2 SE 520802 C2 SE520802 C2 SE 520802C2 SE 9704066 A SE9704066 A SE 9704066A SE 9704066 A SE9704066 A SE 9704066A SE 520802 C2 SE520802 C2 SE 520802C2
- Authority
- SE
- Sweden
- Prior art keywords
- al2o3
- layer
- coating
- layers
- coated
- Prior art date
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 238000005520 cutting process Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000008569 process Effects 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 238000000576 coating method Methods 0.000 claims abstract description 54
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 50
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract description 50
- 239000011248 coating agent Substances 0.000 claims abstract description 42
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 18
- 239000012535 impurity Substances 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 7
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 6
- 150000002367 halogens Chemical class 0.000 claims abstract description 6
- 230000011514 reflex Effects 0.000 claims abstract description 5
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims abstract description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 49
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 17
- 238000005240 physical vapour deposition Methods 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 14
- 238000005516 engineering process Methods 0.000 claims description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 229910010037 TiAlN Inorganic materials 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 238000005555 metalworking Methods 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 claims description 2
- 238000002447 crystallographic data Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 abstract description 7
- 239000010959 steel Substances 0.000 abstract description 7
- 238000003754 machining Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 229910001018 Cast iron Inorganic materials 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 abstract description 4
- 230000009977 dual effect Effects 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract description 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 9
- 229910003158 γ-Al2O3 Inorganic materials 0.000 description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 230000035882 stress Effects 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- KJPRLNWUNMBNBZ-QPJJXVBHSA-N (E)-cinnamaldehyde Chemical compound O=C\C=C\C1=CC=CC=C1 KJPRLNWUNMBNBZ-QPJJXVBHSA-N 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007514 turning Methods 0.000 description 2
- -1 AlCl 3 Chemical class 0.000 description 1
- 240000004808 Saccharomyces cerevisiae Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229920001887 crystalline plastic Polymers 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000007735 ion beam assisted deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010705 motor oil Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/354—Introduction of auxiliary energy into the plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/10—Coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Chemical Vapour Deposition (AREA)
- Drilling Tools (AREA)
- Chemically Coating (AREA)
Priority Applications (17)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| DE69821516T DE69821516T2 (de) | 1997-11-06 | 1998-11-06 | PVD Al2O3 BESCHICHTETES SCHNEIDWERKZEUG |
| CN98810834A CN1278307A (zh) | 1997-11-06 | 1998-11-06 | PVDAl2O3涂层刀具 |
| US09/187,006 US6210726B1 (en) | 1997-11-06 | 1998-11-06 | PVD Al2O3 coated cutting tool |
| EP02013750A EP1253215B1 (de) | 1997-11-06 | 1998-11-06 | Mit PVD-Al2O3 beschichtetes Schneidwerkzeug |
| DE69828453T DE69828453T2 (de) | 1997-11-06 | 1998-11-06 | Mit PVD-Al2O3 beschichtetes Schneidwerkzeug |
| PCT/SE1998/002009 WO1999024634A1 (en) | 1997-11-06 | 1998-11-06 | PVD Al2O3 COATED CUTTING TOOL |
| RU2000114171/02A RU2206432C2 (ru) | 1997-11-06 | 1998-11-06 | Режущий инструмент и способ его изготовления |
| EP98954899A EP1029105B1 (de) | 1997-11-06 | 1998-11-06 | PVD Al2O3 BESCHICHTETES SCHNEIDWERKZEUG |
| BR9813186-9A BR9813186A (pt) | 1997-11-06 | 1998-11-06 | Ferramenta de corte revestida pela deposição fìsica de vapor (pvd) deai2o3 |
| JP2000519623A JP2001522725A (ja) | 1997-11-06 | 1998-11-06 | ＰＶＤＡｌ２Ｏ３被覆切削工具 |
| PL98340602A PL340602A1 (en) | 1997-11-06 | 1998-11-06 | Cutting tool plated with a1203 by pvd (physical vacuum depositing) process |
| AT02013750T ATE286155T1 (de) | 1997-11-06 | 1998-11-06 | Mit pvd-al2o3 beschichtetes schneidwerkzeug |
| KR1020007003870A KR100614961B1 (ko) | 1997-11-06 | 1998-11-06 | ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구 |
| AT98954899T ATE259003T1 (de) | 1997-11-06 | 1998-11-06 | Pvd al2o3 beschichtetes schneidwerkzeug |
| US09/782,226 US6423403B2 (en) | 1997-11-06 | 2001-02-14 | PVD Al2O3 coated cutting tool |
| US10/151,821 US6673430B2 (en) | 1997-11-06 | 2002-05-22 | PVD Al2O3 coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE9704066D0 SE9704066D0 (sv) | 1997-11-06 |
| SE9704066L SE9704066L (sv) | 1999-05-07 |
| SE520802C2 true SE520802C2 (sv) | 2003-08-26 |
Family
ID=20408890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE9704066A SE520802C2 (sv) | 1997-11-06 | 1997-11-06 | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
Country Status (12)
| Country | Link |
|---|---|
| US (3) | US6210726B1 (de) |
| EP (2) | EP1029105B1 (de) |
| JP (1) | JP2001522725A (de) |
| KR (1) | KR100614961B1 (de) |
| CN (1) | CN1278307A (de) |
| AT (2) | ATE286155T1 (de) |
| BR (1) | BR9813186A (de) |
| DE (2) | DE69821516T2 (de) |
| PL (1) | PL340602A1 (de) |
| RU (1) | RU2206432C2 (de) |
| SE (1) | SE520802C2 (de) |
| WO (1) | WO1999024634A1 (de) |
Families Citing this family (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE520802C2 (sv) | 1997-11-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| SE518134C2 (sv) * | 1997-12-10 | 2002-09-03 | Sandvik Ab | Multiskiktbelagt skärverktyg |
| SE520795C2 (sv) | 1999-05-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
| SE519921C2 (sv) | 1999-05-06 | 2003-04-29 | Sandvik Ab | PVD-belagt skärverktyg och metod för dess framställning |
| SE521284C2 (sv) * | 1999-05-19 | 2003-10-21 | Sandvik Ab | Aluminiumoxidbelagt skärverktyg för metallbearbetning |
| US6572991B1 (en) | 2000-02-04 | 2003-06-03 | Seco Tools Ab | Deposition of γ-Al2O3 by means of CVD |
| AT5008U1 (de) * | 2001-02-09 | 2002-02-25 | Plansee Tizit Ag | Hartmetallverschleissteil mit mischoxidschicht |
| US6689450B2 (en) * | 2001-03-27 | 2004-02-10 | Seco Tools Ab | Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature |
| EP1323847A3 (de) | 2001-12-28 | 2005-09-14 | Seco Tools Ab | Beschichteter Hartmetallkörper und Verfahren zu seiner Herstellung |
| DE10314929B9 (de) * | 2002-04-17 | 2010-12-23 | Cemecon Ag | Körper mit einer Beschichtung in R-3c Struktur, Verfahren und Vorrichtung zur PVD-Beschichtung |
| JP2003340602A (ja) * | 2002-05-29 | 2003-12-02 | Kyocera Corp | 回路付き切削工具およびその製造方法 |
| JP2004060741A (ja) * | 2002-07-26 | 2004-02-26 | Motoyama Eng Works Ltd | ダイアフラム及びダイアフラム弁並びに成膜装置 |
| EP2865784A1 (de) * | 2002-08-08 | 2015-04-29 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Verfahren zur Herstellung einer Aluminiumoxidbeschichtung hauptsächlich zusammengesetzt aus einer Alpha-Typ-Kristallstruktur |
| JP4205546B2 (ja) * | 2003-09-16 | 2009-01-07 | 株式会社神戸製鋼所 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
| US7693855B2 (en) * | 2003-10-28 | 2010-04-06 | Media Cybernetics, Inc. | Method, system, and computer program product for managing data associated with a document stored in an electronic form |
| US20060008676A1 (en) * | 2004-07-07 | 2006-01-12 | General Electric Company | Protective coating on a substrate and method of making thereof |
| JP2006028600A (ja) * | 2004-07-16 | 2006-02-02 | Kobe Steel Ltd | 耐摩耗性と耐熱性に優れた積層皮膜 |
| JP4593994B2 (ja) * | 2004-07-23 | 2010-12-08 | 住友電工ハードメタル株式会社 | 表面被覆切削工具 |
| DE102004044240A1 (de) | 2004-09-14 | 2006-03-30 | Walter Ag | Schneidwerkzeug mit oxidischer Beschichtung |
| US20070116631A1 (en) * | 2004-10-18 | 2007-05-24 | The Regents Of The University Of California | Arrays of long carbon nanotubes for fiber spinning |
| SE529015C2 (sv) * | 2005-09-09 | 2007-04-10 | Sandvik Intellectual Property | PVD-belagt skärverktygsskär tillverkat av hårdmetall |
| US7670674B2 (en) * | 2005-09-09 | 2010-03-02 | Sandvik Intellectual Property Ab | PVD coated cutting tool |
| US20070078521A1 (en) * | 2005-09-30 | 2007-04-05 | Depuy Products, Inc. | Aluminum oxide coated implants and components |
| RU2316613C1 (ru) * | 2006-04-19 | 2008-02-10 | Институт сильноточной электроники СО РАН | Способ получения пленок оксида цинка |
| NZ575279A (en) * | 2006-09-26 | 2012-05-25 | Oerlikon Trading Ag | Metal cutting tools with hard coating applied by a physical vapour deposition process |
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| RU2667187C2 (ru) * | 2013-06-27 | 2018-09-17 | Сандвик Интеллекчуал Проперти Аб | Снабженный покрытием режущий инструмент |
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| US11326248B2 (en) * | 2017-11-07 | 2022-05-10 | Walter Ag | PVD process for the deposition of Al2O3 and a coated cutting tool with at least one layer of Al2O3 |
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| RU2676719C1 (ru) * | 2018-02-14 | 2019-01-10 | Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук | Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия |
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| SE9101953D0 (sv) | 1991-06-25 | 1991-06-25 | Sandvik Ab | A1203 coated sintered body |
| DE4209975A1 (de) | 1992-03-27 | 1993-09-30 | Krupp Widia Gmbh | Verbundkörper und dessen Verwendung |
| EP0592986B1 (de) | 1992-10-12 | 1998-07-08 | Sumitomo Electric Industries, Limited | Ultradünnes Filmlaminat |
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| SE509201C2 (sv) | 1994-07-20 | 1998-12-14 | Sandvik Ab | Aluminiumoxidbelagt verktyg |
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| US5698314A (en) | 1995-05-22 | 1997-12-16 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Compound body of vacuum-coated sintered material and process for its production |
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| SE520802C2 (sv) | 1997-11-06 | 2003-08-26 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och process för dess tillverkning |
-
1997
- 1997-11-06 SE SE9704066A patent/SE520802C2/sv unknown
-
1998
- 1998-11-06 EP EP98954899A patent/EP1029105B1/de not_active Expired - Lifetime
- 1998-11-06 CN CN98810834A patent/CN1278307A/zh active Pending
- 1998-11-06 EP EP02013750A patent/EP1253215B1/de not_active Expired - Lifetime
- 1998-11-06 US US09/187,006 patent/US6210726B1/en not_active Expired - Lifetime
- 1998-11-06 BR BR9813186-9A patent/BR9813186A/pt not_active IP Right Cessation
- 1998-11-06 AT AT02013750T patent/ATE286155T1/de active
- 1998-11-06 KR KR1020007003870A patent/KR100614961B1/ko not_active Expired - Fee Related
- 1998-11-06 AT AT98954899T patent/ATE259003T1/de active
- 1998-11-06 PL PL98340602A patent/PL340602A1/xx unknown
- 1998-11-06 DE DE69821516T patent/DE69821516T2/de not_active Expired - Lifetime
- 1998-11-06 DE DE69828453T patent/DE69828453T2/de not_active Expired - Lifetime
- 1998-11-06 WO PCT/SE1998/002009 patent/WO1999024634A1/en not_active Ceased
- 1998-11-06 RU RU2000114171/02A patent/RU2206432C2/ru not_active IP Right Cessation
- 1998-11-06 JP JP2000519623A patent/JP2001522725A/ja active Pending
-
2001
- 2001-02-14 US US09/782,226 patent/US6423403B2/en not_active Expired - Lifetime
-
2002
- 2002-05-22 US US10/151,821 patent/US6673430B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| SE9704066L (sv) | 1999-05-07 |
| EP1029105A1 (de) | 2000-08-23 |
| KR100614961B1 (ko) | 2006-08-25 |
| EP1253215A3 (de) | 2003-01-02 |
| US6423403B2 (en) | 2002-07-23 |
| EP1029105B1 (de) | 2004-02-04 |
| SE9704066D0 (sv) | 1997-11-06 |
| EP1253215B1 (de) | 2004-12-29 |
| CN1278307A (zh) | 2000-12-27 |
| RU2206432C2 (ru) | 2003-06-20 |
| ATE286155T1 (de) | 2005-01-15 |
| DE69821516T2 (de) | 2004-07-01 |
| EP1253215A2 (de) | 2002-10-30 |
| WO1999024634A1 (en) | 1999-05-20 |
| KR20010072535A (ko) | 2001-07-31 |
| US6673430B2 (en) | 2004-01-06 |
| DE69828453D1 (de) | 2005-02-03 |
| PL340602A1 (en) | 2001-02-12 |
| US20030027015A1 (en) | 2003-02-06 |
| US6210726B1 (en) | 2001-04-03 |
| US20010049011A1 (en) | 2001-12-06 |
| DE69828453T2 (de) | 2005-06-02 |
| DE69821516D1 (de) | 2004-03-11 |
| JP2001522725A (ja) | 2001-11-20 |
| ATE259003T1 (de) | 2004-02-15 |
| BR9813186A (pt) | 2000-08-22 |
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