SE463149B - Superreningsanordning foer rening av kvaevgas samt saett att superrena kvaevgas - Google Patents
Superreningsanordning foer rening av kvaevgas samt saett att superrena kvaevgasInfo
- Publication number
- SE463149B SE463149B SE8602870A SE8602870A SE463149B SE 463149 B SE463149 B SE 463149B SE 8602870 A SE8602870 A SE 8602870A SE 8602870 A SE8602870 A SE 8602870A SE 463149 B SE463149 B SE 463149B
- Authority
- SE
- Sweden
- Prior art keywords
- getter
- gas
- super
- nitrogen
- nitrogen gas
- Prior art date
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims description 99
- 229910001873 dinitrogen Inorganic materials 0.000 title claims description 30
- 238000000746 purification Methods 0.000 title claims description 16
- 238000004140 cleaning Methods 0.000 title description 3
- 239000007789 gas Substances 0.000 claims description 52
- 229910052757 nitrogen Inorganic materials 0.000 claims description 34
- 241000283707 Capra Species 0.000 claims description 32
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 24
- 229910045601 alloy Inorganic materials 0.000 claims description 23
- 239000000956 alloy Substances 0.000 claims description 23
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 14
- 239000008188 pellet Substances 0.000 claims description 14
- 229910052726 zirconium Inorganic materials 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 229910052742 iron Inorganic materials 0.000 claims description 11
- 239000000356 contaminant Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 229930195733 hydrocarbon Natural products 0.000 claims description 5
- 150000002430 hydrocarbons Chemical class 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 230000003746 surface roughness Effects 0.000 claims description 5
- 239000003463 adsorbent Substances 0.000 claims description 4
- HZGFMPXURINDAW-UHFFFAOYSA-N iron zirconium Chemical compound [Fe].[Zr].[Zr] HZGFMPXURINDAW-UHFFFAOYSA-N 0.000 claims description 4
- 239000002808 molecular sieve Substances 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 4
- 229910021536 Zeolite Inorganic materials 0.000 claims description 3
- 229910001093 Zr alloy Inorganic materials 0.000 claims description 3
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 239000010457 zeolite Substances 0.000 claims description 3
- 239000003054 catalyst Substances 0.000 claims description 2
- 229910000765 intermetallic Inorganic materials 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000005453 pelletization Methods 0.000 claims description 2
- 238000002203 pretreatment Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 23
- 238000001179 sorption measurement Methods 0.000 description 15
- 239000012535 impurity Substances 0.000 description 13
- 239000000872 buffer Substances 0.000 description 11
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 8
- 239000010935 stainless steel Substances 0.000 description 8
- 239000003344 environmental pollutant Substances 0.000 description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 7
- 231100000719 pollutant Toxicity 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000005485 electric heating Methods 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- 238000001275 scanning Auger electron spectroscopy Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000006228 supernatant Substances 0.000 description 2
- 229910000809 Alumel Inorganic materials 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910011212 Ti—Fe Inorganic materials 0.000 description 1
- 229910000756 V alloy Inorganic materials 0.000 description 1
- ZGTNJINJRMRGNV-UHFFFAOYSA-N [V].[Fe].[Zr] Chemical compound [V].[Fe].[Zr] ZGTNJINJRMRGNV-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 229910001293 incoloy Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000012254 powdered material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0494—Combined chemical and physical processing
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
- C01B21/045—Physical processing only by adsorption in solids
- C01B21/0483—Physical processing only by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0003—Chemical processing
- C01B2210/0004—Chemical processing by oxidation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
- C01B2210/0023—Physical processing by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0042—Making ultrapure specific gas
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60140628A JPS623006A (ja) | 1985-06-28 | 1985-06-28 | 窒素の超精製装置、並びに精製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE8602870D0 SE8602870D0 (sv) | 1986-06-27 |
| SE8602870L SE8602870L (sv) | 1986-12-29 |
| SE463149B true SE463149B (sv) | 1990-10-15 |
Family
ID=15273115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE8602870A SE463149B (sv) | 1985-06-28 | 1986-06-27 | Superreningsanordning foer rening av kvaevgas samt saett att superrena kvaevgas |
Country Status (10)
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1227219B (it) * | 1988-09-26 | 1991-03-27 | Getters Spa | Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno |
| DE3835825C1 (enrdf_load_html_response) * | 1988-10-21 | 1990-03-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De | |
| FR2642678A1 (fr) * | 1989-02-07 | 1990-08-10 | Air Liquide | Procede d'elaboration d'une atmosphere gazeuse en contact avec un metal a haute temperature |
| DE3926015A1 (de) * | 1989-08-05 | 1991-02-07 | Messer Griesheim Gmbh | Verfahren zur feinreinigung von gasen |
| IT1237944B (it) * | 1990-01-05 | 1993-06-19 | Getters Spa | Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura |
| IT1246358B (it) * | 1990-07-12 | 1994-11-17 | Getters Spa | Processo per eliminare impurita' da un gas idruro |
| IT1244006B (it) * | 1990-11-02 | 1994-06-28 | Getters Spa | Procedimento di purificazione dell'ammoniaca. |
| IT1270875B (it) * | 1993-04-29 | 1997-05-13 | Getters Spa | Procedimento di purificazione dell'idrogeno e purificatore relativo |
| US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
| US6436352B1 (en) | 1993-04-29 | 2002-08-20 | Saes Getter, S.P.A. | Hydrogen purification |
| JPH1157371A (ja) * | 1997-08-11 | 1999-03-02 | Taiyo Toyo Sanso Co Ltd | 超清浄空気の製造方法 |
| EP1028798B1 (en) | 1997-10-15 | 2002-01-02 | SAES PURE GAS, Inc. | Gas purification system with safety device and method for purifying gases |
| US6068685A (en) * | 1997-10-15 | 2000-05-30 | Saes Pure Gas, Inc. | Semiconductor manufacturing system with getter safety device |
| US6299670B1 (en) * | 1999-06-10 | 2001-10-09 | Saes Pure Gas, Inc. | Integrated heated getter purifier system |
| KR100356611B1 (ko) * | 2000-08-10 | 2002-10-18 | 주식회사 아토 | 질소 정제 방법 및 정제 장치 |
| ITMI20010930A1 (it) | 2001-05-07 | 2002-11-07 | Getters Spa | Metodo per la misura della concentrazione di idrogeno e metano in azoto mediante spetroscopia di mobilita' ionica |
| ITMI20011193A1 (it) | 2001-06-06 | 2002-12-06 | Getters Spa | Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio |
| JP4918255B2 (ja) * | 2005-12-22 | 2012-04-18 | ウチヤ・サーモスタット株式会社 | 窒素ガス発生装置 |
| CN110759323A (zh) * | 2018-07-27 | 2020-02-07 | 隆基绿能科技股份有限公司 | 一种气体纯化反应器及气体纯化方法 |
| CN112978692B (zh) * | 2021-03-04 | 2022-08-05 | 北京高麦克仪器科技有限公司 | 780氦气纯化器 |
| JP7210803B1 (ja) * | 2022-10-04 | 2023-01-23 | レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | ガス精製装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535074A (en) * | 1965-10-29 | 1970-10-20 | Hitachi Ltd | Method and apparatus for purifying crude inert gases |
| BE792561A (en) * | 1972-12-11 | 1973-03-30 | Getters Spa | Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges |
| IT1115156B (it) * | 1979-04-06 | 1986-02-03 | Getters Spa | Leghe zr-fe per l'assorbimento di idrogeno a basse temperature |
| DE3137569A1 (de) * | 1981-09-22 | 1983-04-21 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zur herstellung von hochreinem stickstoff |
| JPS6020323A (ja) * | 1983-07-15 | 1985-02-01 | Toshiba Corp | デイスク装置 |
-
1985
- 1985-06-28 JP JP60140628A patent/JPS623006A/ja active Granted
-
1986
- 1986-06-23 DE DE3621013A patent/DE3621013C2/de not_active Expired - Lifetime
- 1986-06-23 FR FR8609026A patent/FR2584062B1/fr not_active Expired - Lifetime
- 1986-06-23 CA CA000512229A patent/CA1300346C/en not_active Expired - Fee Related
- 1986-06-26 KR KR1019860005146A patent/KR930006690B1/ko not_active Expired - Lifetime
- 1986-06-26 GB GB8615619A patent/GB2177080B/en not_active Expired
- 1986-06-26 BE BE2/61004A patent/BE904998A/fr not_active IP Right Cessation
- 1986-06-27 SE SE8602870A patent/SE463149B/sv not_active IP Right Cessation
- 1986-06-27 NL NL8601692A patent/NL192104C/nl not_active IP Right Cessation
- 1986-06-27 IT IT20963/86A patent/IT1204420B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| GB2177080A (en) | 1987-01-14 |
| NL192104B (nl) | 1996-10-01 |
| NL192104C (nl) | 1997-02-04 |
| DE3621013C2 (de) | 1996-02-15 |
| FR2584062B1 (fr) | 1990-12-21 |
| DE3621013A1 (de) | 1987-01-08 |
| IT1204420B (it) | 1989-03-01 |
| KR870000237A (ko) | 1987-02-17 |
| GB8615619D0 (en) | 1986-07-30 |
| JPS623006A (ja) | 1987-01-09 |
| KR930006690B1 (ko) | 1993-07-22 |
| SE8602870L (sv) | 1986-12-29 |
| IT8620963A0 (it) | 1986-06-27 |
| GB2177080B (en) | 1989-08-31 |
| JPH0456763B2 (enrdf_load_html_response) | 1992-09-09 |
| CA1300346C (en) | 1992-05-12 |
| FR2584062A1 (fr) | 1987-01-02 |
| NL8601692A (nl) | 1987-01-16 |
| BE904998A (fr) | 1986-10-16 |
| SE8602870D0 (sv) | 1986-06-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NAL | Patent in force |
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| NUG | Patent has lapsed |