SE462997B - Accelerometer - Google Patents

Accelerometer

Info

Publication number
SE462997B
SE462997B SE8603209A SE8603209A SE462997B SE 462997 B SE462997 B SE 462997B SE 8603209 A SE8603209 A SE 8603209A SE 8603209 A SE8603209 A SE 8603209A SE 462997 B SE462997 B SE 462997B
Authority
SE
Sweden
Prior art keywords
substrate
acceleration
sensitive mass
accelerometer
mass
Prior art date
Application number
SE8603209A
Other languages
English (en)
Swedish (sv)
Other versions
SE8603209L (sv
SE8603209D0 (sv
Inventor
R E Stewart
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of SE8603209D0 publication Critical patent/SE8603209D0/xx
Publication of SE8603209L publication Critical patent/SE8603209L/
Publication of SE462997B publication Critical patent/SE462997B/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00Joints and connections
    • Y10T403/54Flexible member is joint component

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
SE8603209A 1985-07-25 1986-07-24 Accelerometer SE462997B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/758,692 US4679434A (en) 1985-07-25 1985-07-25 Integrated force balanced accelerometer

Publications (3)

Publication Number Publication Date
SE8603209D0 SE8603209D0 (sv) 1986-07-24
SE8603209L SE8603209L (sv) 1987-01-26
SE462997B true SE462997B (sv) 1990-09-24

Family

ID=25052723

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8603209A SE462997B (sv) 1985-07-25 1986-07-24 Accelerometer

Country Status (11)

Country Link
US (1) US4679434A (de)
JP (1) JPS6227666A (de)
CA (1) CA1273222A (de)
CH (1) CH671290A5 (de)
DE (1) DE3621585A1 (de)
FR (1) FR2585474B1 (de)
GB (1) GB2178856B (de)
IL (1) IL79175A (de)
IT (1) IT1195083B (de)
NO (1) NO862550L (de)
SE (1) SE462997B (de)

Families Citing this family (109)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
US4779463A (en) * 1987-01-13 1988-10-25 Systron Donner Corporation Servo accelerometer
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement
US4841773A (en) * 1987-05-01 1989-06-27 Litton Systems, Inc. Miniature inertial measurement unit
US4788864A (en) * 1987-05-26 1988-12-06 Litton Systems, Inc. Bleed path for electric charge
US4851080A (en) * 1987-06-29 1989-07-25 Massachusetts Institute Of Technology Resonant accelerometer
FR2617607B1 (fr) * 1987-06-30 1989-12-01 Applic Gles Electrici Meca Accelerometre pendulaire a reequilibrage et procede de fabrication d'un tel accelerometre
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
FI81915C (fi) * 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5195371A (en) * 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
JPH01197661A (ja) * 1988-02-02 1989-08-09 Tdk Corp 加速度センサ
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ
US4882933A (en) * 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping
US4945765A (en) * 1988-08-31 1990-08-07 Kearfott Guidance & Navigation Corp. Silicon micromachined accelerometer
US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
US5007289A (en) * 1988-09-30 1991-04-16 Litton Systems, Inc. Three axis inertial measurement unit with counterbalanced, low inertia mechanical oscillator
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US4928203A (en) * 1989-02-28 1990-05-22 United Technologies Capacitive accelerometer with hinges on top and bottom surface
US4930043A (en) * 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US4930042A (en) * 1989-02-28 1990-05-29 United Technologies Capacitive accelerometer with separable damping and sensitivity
CA2010437A1 (en) * 1989-02-28 1990-08-31 Winthrop H. Mcclure Iii Electrostatic force nulling accelerometer
US4987779A (en) * 1989-02-28 1991-01-29 United Technologies Corporation Pulse-driven accelerometer arrangement
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US5045152A (en) * 1989-03-06 1991-09-03 Ford Motor Company Force transducer etched from silicon
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
US5044201A (en) * 1989-06-05 1991-09-03 Motorola, Inc. Double-integrating silicon acceleration sensing device
US5253510A (en) * 1989-06-22 1993-10-19 I C Sensors Self-testable micro-accelerometer
US4955108A (en) * 1989-07-14 1990-09-11 Litton Systems, Inc. Protected hinge assembly for mechanical accelerometer
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
JP2512171B2 (ja) * 1989-10-18 1996-07-03 株式会社日立製作所 加速度検出器
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
DE69104349T2 (de) * 1990-02-14 1995-05-24 Endevco Corp Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung.
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
EP0459723B1 (de) * 1990-05-30 1996-01-17 Hitachi, Ltd. Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
EP0543901B1 (de) * 1990-08-17 1995-10-04 Analog Devices, Inc. Monolithischer beschleunigungsmesser
GB2247717B (en) * 1990-09-06 1995-03-08 Raymond Guthrie Hinge element
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5428996A (en) * 1990-12-24 1995-07-04 Litton Systems, Inc. Hinge assembly for integrated accelerometer
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
DE69124377T2 (de) * 1991-03-30 1997-06-12 Kazuhiro Okada Beschleunigungssensor mit Selbsttest
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
JP2728807B2 (ja) * 1991-07-24 1998-03-18 株式会社日立製作所 静電容量式加速度センサ
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5275048A (en) * 1992-01-21 1994-01-04 Sundstrand Corporation Acceleration overload protection mechanism for sensor devices
DE9202533U1 (de) * 1992-02-27 1992-04-23 Mannesmann Kienzle Gmbh, 78052 Villingen-Schwenningen Beschleunigungsgeber
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
JP3367113B2 (ja) 1992-04-27 2003-01-14 株式会社デンソー 加速度センサ
US5461916A (en) 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
JP3151956B2 (ja) * 1992-09-04 2001-04-03 株式会社村田製作所 加速度センサ
FR2697628B1 (fr) * 1992-10-29 1995-02-03 Sextant Avionique Capteur d'une grandeur physique orientée.
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
JP3119542B2 (ja) * 1993-05-25 2000-12-25 日本電気株式会社 半導体加速度センサおよび製造方法
US5503285A (en) * 1993-07-26 1996-04-02 Litton Systems, Inc. Method for forming an electrostatically force balanced silicon accelerometer
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US5563630A (en) * 1993-10-28 1996-10-08 Mind Path Technologies, Inc. Computer mouse
DE69432396T2 (de) 1993-12-27 2004-03-04 Hitachi, Ltd. Beschleunigungsmessaufnehmer
WO1995026509A1 (en) * 1994-03-28 1995-10-05 I/O Sensors, Inc. Sensor structure with l-shaped spring legs
US5484073A (en) * 1994-03-28 1996-01-16 I/O Sensors, Inc. Method for fabricating suspension members for micromachined sensors
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5473946A (en) * 1994-09-09 1995-12-12 Litton Systems, Inc. Accelerometer using pulse-on-demand control
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
DE69514343T2 (de) * 1994-11-23 2000-08-10 Koninklijke Philips Electronics N.V., Eindhoven Halbleitereinrichtung mit einer mikrokomponente, die eine starre und eine bewegliche elektrode aufweist
US5674258A (en) * 1995-03-08 1997-10-07 Medtronic, Inc. Packaged integrated accelerometer
US5911738A (en) * 1997-07-31 1999-06-15 Medtronic, Inc. High output sensor and accelerometer implantable medical device
JP2728237B2 (ja) * 1995-03-27 1998-03-18 株式会社日立製作所 静電容量式加速度センサ
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5978972A (en) * 1996-06-14 1999-11-09 Johns Hopkins University Helmet system including at least three accelerometers and mass memory and method for recording in real-time orthogonal acceleration data of a head
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5983718A (en) * 1997-07-14 1999-11-16 Litton Systems, Inc. Signal processing system for inertial sensor
US6161440A (en) 1997-08-14 2000-12-19 Alliedsignal Inc. Low metalization creep sensor
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法
US6216537B1 (en) 1999-03-31 2001-04-17 Medtronic, Inc. Accelerometer for implantable medical device
US6386032B1 (en) 1999-08-26 2002-05-14 Analog Devices Imi, Inc. Micro-machined accelerometer with improved transfer characteristics
US6868726B2 (en) * 2000-01-20 2005-03-22 Analog Devices Imi, Inc. Position sensing with improved linearity
US6595056B2 (en) 2001-02-07 2003-07-22 Litton Systems, Inc Micromachined silicon gyro using tuned accelerometer
US6474160B1 (en) 2001-05-24 2002-11-05 Northrop Grumman Corporation Counterbalanced silicon tuned multiple accelerometer-gyro
US6619121B1 (en) 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
EP1490699A1 (de) * 2002-03-26 2004-12-29 The Charles Stark Draper Laboratory, INC. Mikroelektromechanische sensoren mit verringerten signal-bias-fehlern und verfahren zu ihrer herstellung
WO2005069016A1 (en) * 2004-01-07 2005-07-28 Northrop Grumman Corporation Coplanar proofmasses employable to sense acceleration along three axes
US7334474B2 (en) * 2005-01-07 2008-02-26 Litton Systems, Inc. Force balanced instrument system and method for mitigating errors
CA2569159C (en) * 2006-11-28 2015-01-13 Nanometrics Inc. Inertial sensor
US7614300B2 (en) * 2007-05-30 2009-11-10 Northrop Grumman Corporation System and method for mitigating errors in electrostatic force balanced instrument
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US9341646B2 (en) 2012-12-19 2016-05-17 Northrop Grumman Guidance And Electronics Company, Inc. Bias reduction in force rebalanced accelerometers
DE102015212669B4 (de) * 2015-07-07 2018-05-03 Infineon Technologies Ag Kapazitive mikroelektromechanische Vorrichtung und Verfahren zum Ausbilden einer kapazitiven mikroelektromechanischen Vorrichtung
US10330696B2 (en) * 2016-03-24 2019-06-25 Northrop Grumman Systems Corporation Accelerometer sensor system
US10180445B2 (en) 2016-06-08 2019-01-15 Honeywell International Inc. Reducing bias in an accelerometer via current adjustment

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2793028A (en) * 1954-09-10 1957-05-21 Hughes Aircraft Co Cross-spring flexure pivot
US2947067A (en) * 1957-12-09 1960-08-02 Sandberg Serrell Corp Method of manufacture of flexure member
US3226981A (en) * 1962-10-29 1966-01-04 North American Aviation Inc Condition responsive signal generator for producing a variable frequency signal
US3713088A (en) * 1970-08-13 1973-01-23 Inst Of Technology Remotely operated seismometer
US3897997A (en) * 1974-02-01 1975-08-05 Charles G Kalt Electrostatic display device with variable reflectivity
US3978715A (en) * 1974-07-15 1976-09-07 Ird Mechanalysis, Inc. Low frequency, high sensitivity electromechanical transducer
US4009607A (en) * 1975-12-24 1977-03-01 The Bendix Corporation Force measuring system including combined electrostatic sensing and torquing means
CA1094229A (en) * 1976-11-08 1981-01-20 Henry Guckel Electrostatically deformable thin silicon membranes
US4102202A (en) * 1976-11-26 1978-07-25 The Singer Company Electrostatic accelerometer
US4188829A (en) * 1978-10-25 1980-02-19 Bourns, Inc. Flexure pivot accelerometer
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
FR2503387B1 (fr) * 1981-04-03 1986-05-23 Reosc Dispositif de liaison entre une piece optique et un support situe a distance de cette piece
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
GB2102579B (en) * 1981-07-14 1984-11-21 Sundstrand Data Control Force transducer flexure reed bearing electrical connectors
US4435737A (en) * 1981-12-16 1984-03-06 Rockwell International Corporation Low cost capacitive accelerometer
US4498342A (en) * 1983-04-18 1985-02-12 Honeywell Inc. Integrated silicon accelerometer with stress-free rebalancing
GB2146697B (en) * 1983-09-17 1986-11-05 Stc Plc Flexible hinge device
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor

Also Published As

Publication number Publication date
US4679434A (en) 1987-07-14
NO862550D0 (no) 1986-06-25
JPH0455267B2 (de) 1992-09-02
GB2178856B (en) 1989-08-09
DE3621585A1 (de) 1987-02-05
GB8617299D0 (en) 1986-08-20
FR2585474A1 (fr) 1987-01-30
SE8603209L (sv) 1987-01-26
JPS6227666A (ja) 1987-02-05
IT8648238A0 (it) 1986-07-07
CH671290A5 (de) 1989-08-15
CA1273222A (en) 1990-08-28
NO862550L (no) 1987-01-26
IL79175A (en) 1990-09-17
SE8603209D0 (sv) 1986-07-24
IT1195083B (it) 1988-10-12
FR2585474B1 (fr) 1989-06-30
GB2178856A (en) 1987-02-18
IL79175A0 (en) 1986-09-30

Similar Documents

Publication Publication Date Title
SE462997B (sv) Accelerometer
JP3457037B2 (ja) 集積型加速度計
US4744249A (en) Vibrating accelerometer-multisensor
US4744248A (en) Vibrating accelerometer-multisensor
US20240230332A1 (en) Multi-mass mems motion sensor
US6829937B2 (en) Monolithic silicon acceleration sensor
CN100373162C (zh) 加速度传感器
US5596194A (en) Single-wafer tunneling sensor and low-cost IC manufacturing method
US6128953A (en) Dynamical quantity sensor
KR100906573B1 (ko) 가속도 센서장치
US8322216B2 (en) Micromachined accelerometer with monolithic electrodes and method of making the same
US20030048036A1 (en) MEMS comb-finger actuator
KR940022091A (ko) 가속도 센서
JPH04252961A (ja) 角加速度センサ
KR100591392B1 (ko) 용량식 역학량 센서, 용량식 역학량 센서의 제조 방법, 및용량식 역학량 센서를 포함하는 검출장치
EP1891450A1 (de) Verfahren zur herstellung eines kapazitiven beschleunigungssensors und kapazitiver beschleunigungssensor
GB2156523A (en) Planar inertial sensor
TW201730535A (zh) 微機電力量感測器以及力量感測裝置
KR100236486B1 (ko) 용량성 가속센서
US7308827B2 (en) Integrated gyroscope and temperature sensor
JP4403607B2 (ja) 半導体力学量センサ
JP5333354B2 (ja) 力学量センサ
JP2000031503A (ja) センサ構造および分離構造の相互接続方法
JP2009068936A (ja) 物理量検出装置
US20230266126A1 (en) Physical Quantity Sensor, Inertial Measurement Unit, And Manufacturing Method

Legal Events

Date Code Title Description
NAL Patent in force

Ref document number: 8603209-1

Format of ref document f/p: F

NUG Patent has lapsed

Ref document number: 8603209-1

Format of ref document f/p: F