KR940022091A - 가속도 센서 - Google Patents

가속도 센서 Download PDF

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Publication number
KR940022091A
KR940022091A KR1019940006494A KR19940006494A KR940022091A KR 940022091 A KR940022091 A KR 940022091A KR 1019940006494 A KR1019940006494 A KR 1019940006494A KR 19940006494 A KR19940006494 A KR 19940006494A KR 940022091 A KR940022091 A KR 940022091A
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KR
South Korea
Prior art keywords
main part
finger
silicon layer
acceleration sensor
electrode
Prior art date
Application number
KR1019940006494A
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English (en)
Inventor
마르쿠스 비벨
토마스 샤이터
헬무트 클로제
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발도로프, 피켄셔
지멘스 악티엔게젤샤프트
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Application filed by 발도로프, 피켄셔, 지멘스 악티엔게젤샤프트 filed Critical 발도로프, 피켄셔
Publication of KR940022091A publication Critical patent/KR940022091A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

가속도 센서
본 발명은 가속도 센서에 관한 것으로, 주부(2)가 SOI 기판상의 실리콘층에서 미세기계 부품으로서 스프링(3)에 형성되며, 기판의 가속의 결과로서 상기 주부(2)의 순환을 검출할 수 있도록 하기 위해서 그리고 전자 회로내의[이러한 순환을]평가할 수 있도록 하기 위해서 예로서 피에조 저항(4)와 같은 수단이 존재한다.

Description

가속도 센서
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 SOI기판상의 피에조 저항 가속도 센서의 구조를 도시한 평면도,
제 2 도는 용량 측정을 위한 본 발명의 가속도 센서의 구성에 대한 평면도.

Claims (6)

  1. 가속도 센서에서, 주부(2) SOI 기판상의 결정 실리콘층(1)내의 하나 이상의 스프링(3)에 형성되며, 상기 주부(2)의 자유로운 이동을 위해 적당한 크기의 영역에서 절연층이 제거되며, 정지위치 및 전자 회로로 부터 주부(2)의 순환을 판단하기 위한 수단이 존재하는데, 이러한 수단은 기판의 가속도로 부터 오는 주판(2)상의 관성력의 발생으로 가속도의 크기를 판단하는 것을 특징으로 하는 가속도 센서.
  2. 제 1 항에 있어서, 스프링(3)내에 전기 단자를 갖는 피에조 저항(4)이 관성력을 확인하기 위해 존재하는 것을 특징으로 하는 가속도 센서.
  3. 제 1 항에 있어서, 상기 주부(2)는 전기 도전성으로 도프되며, 스프링(3)을 통해서 나머지 실리콘층(1)에 전기 도전성으로 연결되며, 상기 주부(2) 반대편에 놓인 기판의 영역은 관성력의 용량성 측정을 위해 코포레이팅 전극(5)으로서 전기 도전성으로 도프되는 것을 특징으로 하는 가속도 센서.
  4. 제 1 항에 잇어서, 상기 주부(2)는 실리콘층(1)의 평면에서 이동이 가능하며, 상기 주부(2)는 전기 도전성으로 도프되며 스프링(3)을 통해서 실리콘층(1)의 나머지에 전기 도전성으로 연결되며, 상기 주부(2)는 손가락 모양의 전극(6)을 포함하며, 상기 전극은 나머지 실리콘층(1)의 손가락 모양의 전극(7,8)및 일체의 전기 단자와 함게 관성력의 용량성 측정을 위해 캐패시터(91,92)를 형성하는 것을 특징으로 하는 가속도 센서.
  5. 제 4 항에 있어서, 손가락 모양의 전극(6)이 상기 주부(2)의 두 대향측면에 놓이며, 상기 주부(2)는 손가락 모양의 전극(6)의 길이방향으로 이동이 가능하며, 나머지 실리콘층 (1)에 놓인 손가락 모양의 전극(7,8)은 주부(2)의 각 측면에 서로 전기 접속되며 동일 측면에 배치된 주부(2)의 손가락 모양의 전극과 함께 캐패시터(91,92)를 형성하는 것을 특징으로 하는 가속도 센서.
  6. 제 4 항에 있어서, 손가락 모양의 전극(6)이 상기 주부(2)의 두 대향측면에 놓이며, 상기 주부(2)는 이러한 손가락 모양의 전극(6)의 길이방향에 수직으로 이동이 가능하며, 나머지 실리콘층(1)에 놓인 손가락 모양의 전극(7,8)은 상기 주부(2)의 각 측면에서 서로 전기 접속되어 길이방향에 수직한 양 방향으로 실리콘층(1)의 평면에서 주부(2)의 각각 연결된 손가락 모양의 전극(6)으로 각각의 캐패시터(91,92)를 형성하는 것을 특징으로 하는 가속도 센서.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940006494A 1993-03-30 1994-03-30 가속도 센서 KR940022091A (ko)

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Application Number Priority Date Filing Date Title
DE4310352 1993-03-30
DEP4310352.9 1993-03-30

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KR940022091A true KR940022091A (ko) 1994-10-20

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US (1) US5447067A (ko)
EP (1) EP0618450A1 (ko)
JP (1) JPH06302832A (ko)
KR (1) KR940022091A (ko)
TW (1) TW230237B (ko)

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EP0618450A1 (de) 1994-10-05
US5447067A (en) 1995-09-05
TW230237B (en) 1994-09-11
JPH06302832A (ja) 1994-10-28

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