SE8603209L - Integrerad, kraftbalanserad accelerometer - Google Patents

Integrerad, kraftbalanserad accelerometer

Info

Publication number
SE8603209L
SE8603209L SE8603209A SE8603209A SE8603209L SE 8603209 L SE8603209 L SE 8603209L SE 8603209 A SE8603209 A SE 8603209A SE 8603209 A SE8603209 A SE 8603209A SE 8603209 L SE8603209 L SE 8603209L
Authority
SE
Sweden
Prior art keywords
accelerometer
substrate
integrated
mass
power balanced
Prior art date
Application number
SE8603209A
Other languages
Unknown language ( )
English (en)
Other versions
SE8603209D0 (sv
SE462997B (sv
Inventor
R E Stewart
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of SE8603209D0 publication Critical patent/SE8603209D0/sv
Publication of SE8603209L publication Critical patent/SE8603209L/sv
Publication of SE462997B publication Critical patent/SE462997B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00—Joints and connections
    • Y10T403/54—Flexible member is joint component

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
SE8603209A 1985-07-25 1986-07-24 Accelerometer SE462997B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/758,692 US4679434A (en) 1985-07-25 1985-07-25 Integrated force balanced accelerometer

Publications (3)

Publication Number Publication Date
SE8603209D0 SE8603209D0 (sv) 1986-07-24
SE8603209L true SE8603209L (sv) 1987-01-26
SE462997B SE462997B (sv) 1990-09-24

Family

ID=25052723

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8603209A SE462997B (sv) 1985-07-25 1986-07-24 Accelerometer

Country Status (11)

Country Link
US (1) US4679434A (sv)
JP (1) JPS6227666A (sv)
CA (1) CA1273222A (sv)
CH (1) CH671290A5 (sv)
DE (1) DE3621585A1 (sv)
FR (1) FR2585474B1 (sv)
GB (1) GB2178856B (sv)
IL (1) IL79175A (sv)
IT (1) IT1195083B (sv)
NO (1) NO862550L (sv)
SE (1) SE462997B (sv)

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DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement
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US4882933A (en) * 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping
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US5085079A (en) * 1990-06-11 1992-02-04 Sundstrand Data Control, Inc. Accelerometer with mounting/coupling structure for an electronics assembly
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US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
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US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
GB2247717B (en) * 1990-09-06 1995-03-08 Raymond Guthrie Hinge element
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5428996A (en) * 1990-12-24 1995-07-04 Litton Systems, Inc. Hinge assembly for integrated accelerometer
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
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US5275048A (en) * 1992-01-21 1994-01-04 Sundstrand Corporation Acceleration overload protection mechanism for sensor devices
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US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
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US5461916A (en) * 1992-08-21 1995-10-31 Nippondenso Co., Ltd. Mechanical force sensing semiconductor device
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FR2697628B1 (fr) * 1992-10-29 1995-02-03 Sextant Avionique Capteur d'une grandeur physique orientée.
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
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US5503285A (en) * 1993-07-26 1996-04-02 Litton Systems, Inc. Method for forming an electrostatically force balanced silicon accelerometer
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Also Published As

Publication number Publication date
IL79175A (en) 1990-09-17
NO862550L (no) 1987-01-26
JPH0455267B2 (sv) 1992-09-02
GB2178856B (en) 1989-08-09
GB2178856A (en) 1987-02-18
IL79175A0 (en) 1986-09-30
GB8617299D0 (en) 1986-08-20
FR2585474B1 (fr) 1989-06-30
IT1195083B (it) 1988-10-12
CH671290A5 (sv) 1989-08-15
FR2585474A1 (fr) 1987-01-30
JPS6227666A (ja) 1987-02-05
IT8648238A0 (it) 1986-07-07
DE3621585A1 (de) 1987-02-05
SE8603209D0 (sv) 1986-07-24
NO862550D0 (no) 1986-06-25
SE462997B (sv) 1990-09-24
US4679434A (en) 1987-07-14
CA1273222A (en) 1990-08-28

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