SE445362B - Forangningsskepp for metall - Google Patents
Forangningsskepp for metallInfo
- Publication number
- SE445362B SE445362B SE7900185A SE7900185A SE445362B SE 445362 B SE445362 B SE 445362B SE 7900185 A SE7900185 A SE 7900185A SE 7900185 A SE7900185 A SE 7900185A SE 445362 B SE445362 B SE 445362B
- Authority
- SE
- Sweden
- Prior art keywords
- boron nitride
- graphite
- coating
- rod
- ship
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5062—Borides, Nitrides or Silicides
- C04B41/5064—Boron nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Ceramic Products (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/868,446 US4264803A (en) | 1978-01-10 | 1978-01-10 | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
Publications (2)
Publication Number | Publication Date |
---|---|
SE7900185L SE7900185L (sv) | 1979-07-11 |
SE445362B true SE445362B (sv) | 1986-06-16 |
Family
ID=25351701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE7900185A SE445362B (sv) | 1978-01-10 | 1979-01-09 | Forangningsskepp for metall |
Country Status (10)
Country | Link |
---|---|
US (1) | US4264803A (cs) |
JP (1) | JPS5919192B2 (cs) |
CA (1) | CA1115604A (cs) |
DE (1) | DE2900490C2 (cs) |
DK (1) | DK147529C (cs) |
FR (1) | FR2414078A1 (cs) |
GB (1) | GB2012251B (cs) |
IT (1) | IT1113740B (cs) |
NL (1) | NL7900171A (cs) |
SE (1) | SE445362B (cs) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4405300A (en) * | 1981-02-27 | 1983-09-20 | Tri-Dynamics Dental Co., Inc. | Furnace tray with carbon plate |
US4446357A (en) * | 1981-10-30 | 1984-05-01 | Kennecott Corporation | Resistance-heated boat for metal vaporization |
JPS61236655A (ja) * | 1985-04-13 | 1986-10-21 | 電気化学工業株式会社 | 熱分解窒化ホウ素物品およびその製法 |
JPS62101026A (ja) * | 1985-10-26 | 1987-05-11 | Shin Etsu Chem Co Ltd | 不純物拡散源 |
JPS62176904A (ja) * | 1986-01-30 | 1987-08-03 | Kawasaki Steel Corp | 水可溶性硼素化合物の少ない六方晶窒化硼素とその製造方法 |
GB2192643A (en) * | 1986-07-14 | 1988-01-20 | Universal High Technologies | Method of coating refractory vessels with boron nitride |
DE3640966A1 (de) * | 1986-11-29 | 1988-06-09 | Klaus Kalwar | Verfahren zur herstellung einer koronaelektrode |
US5054418A (en) * | 1989-05-23 | 1991-10-08 | Union Oil Company Of California | Cage boat having removable slats |
US5182149A (en) * | 1990-04-30 | 1993-01-26 | Praxair S.T. Technology, Inc. | Boron nitride boat and process for producing it |
US5032366A (en) * | 1990-04-30 | 1991-07-16 | Union Carbide Coatings Service Technology Corporation | Boron nitride boat and process for producing it |
DE4016225C2 (de) * | 1990-05-19 | 1997-08-14 | Leybold Ag | Reihenverdampfer für Vakuumbedampfungsanlagen |
US5158750A (en) * | 1990-06-06 | 1992-10-27 | Praxair S.T. Technology, Inc. | Boron nitride crucible |
US5075055A (en) * | 1990-06-06 | 1991-12-24 | Union Carbide Coatings Service Technology Corporation | Process for producing a boron nitride crucible |
US5182567A (en) * | 1990-10-12 | 1993-01-26 | Custom Metallizing Services, Inc. | Retrofittable vapor source for vacuum metallizing utilizing spatter reduction means |
US5035201A (en) * | 1990-12-28 | 1991-07-30 | Gte Products Corporation | Evaporating boat having parallel inclined cavities |
US5350720A (en) * | 1991-03-18 | 1994-09-27 | Shin-Etsu Chemical Co., Ltd. | Triple-layered ceramic heater |
US5239612A (en) * | 1991-12-20 | 1993-08-24 | Praxair S.T. Technology, Inc. | Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat |
US5343022A (en) * | 1992-09-29 | 1994-08-30 | Advanced Ceramics Corporation | Pyrolytic boron nitride heating unit |
US5410631A (en) * | 1993-09-10 | 1995-04-25 | Advanced Ceramics Corporation | Clamp assembly for a vaporization boat |
US5537507A (en) * | 1994-09-28 | 1996-07-16 | Advanced Ceramics Corporation | Coated flash evaporator heater |
US5493630A (en) * | 1994-09-28 | 1996-02-20 | Advanced Ceramics Corporation | Pyrolytic boron nitride coated flash evaporator |
US5495550A (en) * | 1994-09-28 | 1996-02-27 | Advanced Ceramics Corporation | Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating |
JP3415626B2 (ja) | 1994-09-28 | 2003-06-09 | アドヴァンスト・セラミックス・コーポレイション | 高密度フラッシュエバポレーター |
US5671322A (en) * | 1996-01-17 | 1997-09-23 | Advanced Ceramics Corporation | Lateral flash evaporator |
JP3212522B2 (ja) * | 1996-12-27 | 2001-09-25 | 信越化学工業株式会社 | 分子線エピタキシー用熱分解窒化硼素るつぼ |
CA2388178A1 (en) * | 1999-10-22 | 2001-05-03 | Kurt J. Lesker Company | Method and apparatus for coating a substrate in a vacuum |
US20050147753A1 (en) * | 1999-10-22 | 2005-07-07 | Kurt J. Lesker Company | Material deposition system and a method for coating a substrate or thermally processing a material in a vacuum |
US6830626B1 (en) | 1999-10-22 | 2004-12-14 | Kurt J. Lesker Company | Method and apparatus for coating a substrate in a vacuum |
US6229956B1 (en) * | 2000-03-22 | 2001-05-08 | Advanced Ceramics Corporation | Flash evaporator vessel |
CN1332061C (zh) * | 2000-12-14 | 2007-08-15 | 通用电气公司 | 闪蒸器皿 |
JP4509433B2 (ja) * | 2001-07-12 | 2010-07-21 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
US20040074898A1 (en) * | 2002-10-21 | 2004-04-22 | Mariner John T. | Encapsulated graphite heater and process |
KR100489304B1 (ko) * | 2002-12-23 | 2005-05-17 | 재단법인 포항산업과학연구원 | 저항가열 보트 및 그 제조방법 |
US20050000447A1 (en) * | 2003-07-04 | 2005-01-06 | Jan Koninckx | Crucible for evaporation of raw materials |
US20060013966A1 (en) * | 2003-09-08 | 2006-01-19 | Jan Koninckx | Crucible for evaporation of raw materials |
EP1688514B1 (en) * | 2003-11-20 | 2010-08-25 | Denki Kagaku Kogyo Kabushiki Kaisha | Metal vaporizing heating element and metal vaporizing method |
US20050164143A1 (en) * | 2004-01-14 | 2005-07-28 | Holcombe Cressie E. | Continuous pusher-type furnacing system for the production of high-quality uniform boron nitride |
US20050153082A1 (en) * | 2004-01-14 | 2005-07-14 | Holcombe Cressie E. | Boron nitride reaction capsule/vessel |
DE112005001601T5 (de) * | 2004-07-07 | 2007-05-16 | Gen Electric | Schützende Beschichtung auf einem Substrat und Verfahren zum Herstellen derselben |
DE102005030862B4 (de) * | 2005-07-01 | 2009-12-24 | Sintec Keramik Gmbh | Erstbenetzungshilfsmaterial für einen Verdampferkörper, seine Verwendung zum Herrichten der Verdampferfläche eines Verdampferkörpers und ein elektrisch beheizbarer keramischer Verdampferkörper |
GB2432830A (en) * | 2005-12-02 | 2007-06-06 | Morganite Elect Carbon | Formation of thermally anisotropic carbon material |
DE102006001855A1 (de) * | 2006-01-13 | 2007-07-19 | Sintec Keramik Gmbh | Verdampferkörper und Verfahren zum Bereitstellen eines Verdampferkörpers |
US7741584B2 (en) * | 2007-01-21 | 2010-06-22 | Momentive Performance Materials Inc. | Encapsulated graphite heater and process |
KR101457653B1 (ko) * | 2007-03-22 | 2014-11-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 성막장치, 제조장치, 성막방법, 및 발광장치의 제조방법 |
EP2019156A1 (en) * | 2007-07-27 | 2009-01-28 | Applied Materials, Inc. | Shaped crucible and evaporation apparatus having same |
DE102007035856B8 (de) * | 2007-07-31 | 2009-04-16 | Sintec Keramik Gmbh | Widerstandsheizer und Verfahren zum Herstellen desselben |
US20160208373A1 (en) | 2015-01-20 | 2016-07-21 | Kennametal Inc. | Imc evaporator boat assembly |
US10184168B2 (en) | 2015-01-20 | 2019-01-22 | Kennametal Inc. | IMC evaporator boat-thermal insulation cartridge assembly |
JP6478364B2 (ja) * | 2015-04-09 | 2019-03-06 | 信越化学工業株式会社 | 被覆グラファイト部材及びこれと保持手段とのアセンブリ |
DE102019110950A1 (de) | 2019-04-29 | 2020-10-29 | Kennametal Inc. | Hartmetallzusammensetzungen und deren Anwendungen |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2665229A (en) * | 1951-11-05 | 1954-01-05 | Nat Res Corp | Method of coating by vapor deposition |
DE1019885B (de) * | 1956-07-13 | 1957-11-21 | Siemens Ag | Verdampfer zum Bedampfen mit Metallen |
US2962538A (en) * | 1958-01-30 | 1960-11-29 | Continental Can Co | Vaporizing heater for vacuum deposition and method of employing the same |
US2996412A (en) * | 1958-10-10 | 1961-08-15 | Continental Can Co | Art of depositing metals |
US3063858A (en) * | 1959-07-22 | 1962-11-13 | Nat Res Corp | Vapor source and processes for vaporizing iron, nickel and copper |
DE1193765B (de) * | 1960-03-31 | 1965-05-26 | Nat Res Corp | Verdampfergefaess zum Vakuumbedampfen von beweglichen Unterlagen mit Aluminium und Verfahren zu dessen Herstellung |
FR1253106A (fr) * | 1960-04-01 | 1961-02-03 | Nat Res Corp | Perfectionnements apportés aux procédés et appareils pour la production de revêtements d'aluminium sous vide |
US3152006A (en) * | 1961-06-29 | 1964-10-06 | High Temperature Materials Inc | Boron nitride coating and a process of producing the same |
US3367811A (en) * | 1962-11-08 | 1968-02-06 | Nat Res Corp | Process of joining bodies with boron nitride |
US3345448A (en) * | 1964-07-28 | 1967-10-03 | Union Carbide Corp | High temperature electrical connection |
US3372671A (en) * | 1965-05-26 | 1968-03-12 | Westinghouse Electric Corp | Apparatus for producing vapor growth of silicon crystals |
US3430937A (en) * | 1966-02-17 | 1969-03-04 | Nasa | Evaporant holder |
US3452970A (en) * | 1967-05-12 | 1969-07-01 | Siemens Ag | Vaporization vessel for use in vapor deposition upon a carrier support |
FR94385E (fr) * | 1967-11-06 | 1969-08-08 | Comp Generale Electricite | Source pour évaporation sous vide. |
US3544486A (en) * | 1968-05-23 | 1970-12-01 | Sylvania Electric Prod | Refractory bodies containing aluminum nitride,boron nitride and titanium boride |
US3609829A (en) * | 1968-07-12 | 1971-10-05 | Texas Instruments Inc | Apparatus for the formation of silica articles |
US3576932A (en) * | 1969-02-17 | 1971-04-27 | Texas Instruments Inc | Sintering vapor deposited silica on a mandrel designed to reduce shrinkage |
US3658032A (en) * | 1970-11-05 | 1972-04-25 | Fairchild Camera Instr Co | Reactor for the formation of material on a substrate |
US3724996A (en) * | 1971-03-12 | 1973-04-03 | Union Carbide Corp | Boron nitride containing vessel having a surface coating of zirconium silicon |
SU420559A1 (ru) * | 1971-10-08 | 1974-03-25 | В. П. Соседов, В. С. Дергунова, Е. Г. Власов, Н. А. Новикова | Способ защиты графита |
JPS4897741A (cs) * | 1972-03-27 | 1973-12-12 | ||
US3986822A (en) * | 1975-02-27 | 1976-10-19 | Union Carbide Corporation | Boron nitride crucible |
US4058579A (en) * | 1975-02-27 | 1977-11-15 | Union Carbide Corporation | Process for producing an improved boron nitride crucible |
-
1978
- 1978-01-10 US US05/868,446 patent/US4264803A/en not_active Expired - Lifetime
-
1979
- 1979-01-02 CA CA318,961A patent/CA1115604A/en not_active Expired
- 1979-01-08 DE DE2900490A patent/DE2900490C2/de not_active Expired
- 1979-01-09 JP JP54000460A patent/JPS5919192B2/ja not_active Expired
- 1979-01-09 NL NL7900171A patent/NL7900171A/xx active Search and Examination
- 1979-01-09 FR FR7900445A patent/FR2414078A1/fr active Granted
- 1979-01-09 SE SE7900185A patent/SE445362B/sv not_active IP Right Cessation
- 1979-01-09 DK DK9179A patent/DK147529C/da not_active IP Right Cessation
- 1979-01-09 GB GB79728A patent/GB2012251B/en not_active Expired
- 1979-01-10 IT IT47576/79A patent/IT1113740B/it active
Also Published As
Publication number | Publication date |
---|---|
DK147529C (da) | 1985-02-25 |
FR2414078B1 (cs) | 1984-04-06 |
GB2012251A (en) | 1979-07-25 |
NL7900171A (nl) | 1979-07-12 |
IT7947576A0 (it) | 1979-01-10 |
JPS5919192B2 (ja) | 1984-05-02 |
GB2012251B (en) | 1982-08-04 |
IT1113740B (it) | 1986-01-20 |
DE2900490C2 (de) | 1982-12-30 |
FR2414078A1 (fr) | 1979-08-03 |
CA1115604A (en) | 1982-01-05 |
DE2900490A1 (de) | 1979-07-12 |
US4264803A (en) | 1981-04-28 |
DK147529B (da) | 1984-09-17 |
JPS54101781A (en) | 1979-08-10 |
SE7900185L (sv) | 1979-07-11 |
DK9179A (da) | 1979-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE445362B (sv) | Forangningsskepp for metall | |
US4446357A (en) | Resistance-heated boat for metal vaporization | |
RU99108464A (ru) | Деталь, в частности, лопатка газовой турбины с теплоизоляционным слоем, а также способ и устройство для изготовления теплоизоляционного слоя | |
EP0119250B1 (en) | Self protecting carbon bodies and method for making same | |
US20070169703A1 (en) | Advanced ceramic heater for substrate processing | |
WO2004068541A2 (en) | Wafer handling apparatus | |
SE458205B (sv) | Foerfarande och anordning foer belaeggning av ett substrat med material, som paa elektrisk vaeg har oeverfoerts till aangfas | |
KR20080071973A (ko) | 스퍼터링에 의한 코팅 증착법 | |
CA1220617A (en) | Process for improving the high temperature flexural strength of titanium diboride-boron nitride intermetallic compositions | |
CA2328266A1 (en) | Corrosion and erosion resistant thin film diamond coating and applications therefor | |
US3216710A (en) | Aluminum vaporizer | |
US6404982B1 (en) | High density flash evaporator | |
EP0806488A1 (en) | Aluminum-chromium alloy, method for its production and its applications | |
EP0031197B1 (en) | A method of coating a substrate and an alkali metal/polysulfide battery containing such substrate so coated | |
JPS61268442A (ja) | 多層構造の耐熱容器 | |
Becker et al. | TiB2-coated cathodes for aluminum smelting cells | |
EP0785290B1 (en) | Lateral flash evaporator | |
US3636303A (en) | Apparatus for metal vaporization comprising a reduced cross sectio heater and a refractory vessel | |
JP3355148B2 (ja) | 改良された初期濡れ性能を有するセラミック蒸発ボート及びその製造方法 | |
KR20000028899A (ko) | 염소계 가스에 대한 내식성 부재 | |
US5383981A (en) | Reusable crucible for containing corrosive liquids | |
EP0967189A1 (en) | A highly resistive recrystallized silicon carbide, an anti-corrosive member, a method for producing the highly resistive recrystallized silicon carbide, and a method for producing the anti-corrosive member | |
RU2008298C1 (ru) | Способ пропитки кремнием полых изделий из пористого материала, содержащего карбид кремния и/или углерод, и устройство для его осуществления | |
JP3901338B2 (ja) | BN−AlN積層体及びその用途 | |
JP3907132B2 (ja) | ダイヤモンドコーティングが施されたるつぼを用いる蒸着または堆積方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
NAL | Patent in force |
Ref document number: 7900185-5 Format of ref document f/p: F |
|
NUG | Patent has lapsed |
Ref document number: 7900185-5 Format of ref document f/p: F |