SE441134B - Felteffekttransistor med isolerad styrelektrod - Google Patents
Felteffekttransistor med isolerad styrelektrodInfo
- Publication number
- SE441134B SE441134B SE7906288A SE7906288A SE441134B SE 441134 B SE441134 B SE 441134B SE 7906288 A SE7906288 A SE 7906288A SE 7906288 A SE7906288 A SE 7906288A SE 441134 B SE441134 B SE 441134B
- Authority
- SE
- Sweden
- Prior art keywords
- region
- junction
- field effect
- zone
- effect transistor
- Prior art date
Links
- 230000005669 field effect Effects 0.000 title claims description 25
- 230000015556 catabolic process Effects 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 4
- 239000000615 nonconductor Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000007704 transition Effects 0.000 description 16
- 239000004020 conductor Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000007812 deficiency Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 101150068246 V-MOS gene Proteins 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
Landscapes
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NLAANVRAGE7807834,A NL184551C (nl) | 1978-07-24 | 1978-07-24 | Veldeffekttransistor met geisoleerde stuurelektrode. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| SE7906288L SE7906288L (sv) | 1980-01-25 |
| SE441134B true SE441134B (sv) | 1985-09-09 |
Family
ID=19831290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7906288A SE441134B (sv) | 1978-07-24 | 1979-07-23 | Felteffekttransistor med isolerad styrelektrod |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4233617A (ja) |
| JP (1) | JPS5518100A (ja) |
| CA (1) | CA1134056A (ja) |
| CH (1) | CH648694A5 (ja) |
| DE (1) | DE2927560C2 (ja) |
| FR (1) | FR2436503A1 (ja) |
| GB (1) | GB2026239B (ja) |
| IT (1) | IT1122227B (ja) |
| NL (1) | NL184551C (ja) |
| SE (1) | SE441134B (ja) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1131801A (en) * | 1978-01-18 | 1982-09-14 | Johannes A. Appels | Semiconductor device |
| NL186665C (nl) * | 1980-03-10 | 1992-01-16 | Philips Nv | Halfgeleiderinrichting. |
| US4345265A (en) * | 1980-04-14 | 1982-08-17 | Supertex, Inc. | MOS Power transistor with improved high-voltage capability |
| US4379305A (en) * | 1980-05-29 | 1983-04-05 | General Instrument Corp. | Mesh gate V-MOS power FET |
| NL187415C (nl) * | 1980-09-08 | 1991-09-16 | Philips Nv | Halfgeleiderinrichting met gereduceerde oppervlakteveldsterkte. |
| GB2103419A (en) * | 1981-08-04 | 1983-02-16 | Siliconix Inc | Field effect transistor with metal source |
| JPS58106870A (ja) * | 1981-12-18 | 1983-06-25 | Nissan Motor Co Ltd | パワ−ｍｏｓｆｅｔ |
| EP0326187A3 (en) * | 1982-05-20 | 1989-09-27 | Fairchild Semiconductor Corporation | Power mosfet structure |
| US4974059A (en) * | 1982-12-21 | 1990-11-27 | International Rectifier Corporation | Semiconductor high-power mosfet device |
| US4862242A (en) * | 1983-12-05 | 1989-08-29 | General Electric Company | Semiconductor wafer with an electrically-isolated semiconductor device |
| US4639761A (en) * | 1983-12-16 | 1987-01-27 | North American Philips Corporation | Combined bipolar-field effect transistor resurf devices |
| JPS61150378A (ja) * | 1984-12-25 | 1986-07-09 | Toshiba Corp | 電界効果トランジスタ |
| JPS6252969A (ja) * | 1985-08-30 | 1987-03-07 | Nippon Texas Instr Kk | 絶縁ゲ−ト型電界効果半導体装置 |
| US4755867A (en) * | 1986-08-15 | 1988-07-05 | American Telephone And Telegraph Company, At&T Bell Laboratories | Vertical Enhancement-mode Group III-V compound MISFETs |
| GB2227605A (en) * | 1989-01-30 | 1990-08-01 | Philips Electronic Associated | A vertical field effect semiconductor device |
| JPH073409U (ja) * | 1993-06-24 | 1995-01-20 | 株式会社九州ハマフオーム | 座布団 |
| AU6722396A (en) * | 1995-08-21 | 1997-03-12 | Siliconix Incorporated | Low voltage short channel trench dmos transistor |
| US6864520B2 (en) * | 2002-04-04 | 2005-03-08 | International Business Machines Corporation | Germanium field effect transistor and method of fabricating the same |
| JP4320167B2 (ja) * | 2002-12-12 | 2009-08-26 | 忠弘 大見 | 半導体素子及びシリコン酸化窒化膜の製造方法 |
| US7417266B1 (en) * | 2004-06-10 | 2008-08-26 | Qspeed Semiconductor Inc. | MOSFET having a JFET embedded as a body diode |
| JP2013069817A (ja) * | 2011-09-21 | 2013-04-18 | Toshiba Corp | 半導体装置 |
| US8633094B2 (en) | 2011-12-01 | 2014-01-21 | Power Integrations, Inc. | GaN high voltage HFET with passivation plus gate dielectric multilayer structure |
| US8940620B2 (en) | 2011-12-15 | 2015-01-27 | Power Integrations, Inc. | Composite wafer for fabrication of semiconductor devices |
| US8928037B2 (en) | 2013-02-28 | 2015-01-06 | Power Integrations, Inc. | Heterostructure power transistor with AlSiN passivation layer |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3924265A (en) * | 1973-08-29 | 1975-12-02 | American Micro Syst | Low capacitance V groove MOS NOR gate and method of manufacture |
| US4003036A (en) * | 1975-10-23 | 1977-01-11 | American Micro-Systems, Inc. | Single IGFET memory cell with buried storage element |
| DE2619713C2 (de) * | 1976-05-04 | 1984-12-20 | Siemens AG, 1000 Berlin und 8000 München | Halbleiterspeicher |
| DE2642615C2 (de) * | 1976-09-22 | 1986-04-24 | Siemens AG, 1000 Berlin und 8000 München | Halbleiterspeicher |
| US4084175A (en) * | 1976-09-30 | 1978-04-11 | Research Corporation | Double implanted planar mos device with v-groove and process of manufacture thereof |
| JPS5367381A (en) * | 1976-11-27 | 1978-06-15 | Mitsubishi Electric Corp | Semiconductor device |
| US4145703A (en) * | 1977-04-15 | 1979-03-20 | Supertex, Inc. | High power MOS device and fabrication method therefor |
-
1978
- 1978-07-24 NL NLAANVRAGE7807834,A patent/NL184551C/xx not_active IP Right Cessation
-
1979
- 1979-01-16 US US06/004,003 patent/US4233617A/en not_active Expired - Lifetime
- 1979-07-07 DE DE2927560A patent/DE2927560C2/de not_active Expired
- 1979-07-19 CA CA332,196A patent/CA1134056A/en not_active Expired
- 1979-07-20 IT IT24515/79A patent/IT1122227B/it active
- 1979-07-20 GB GB7925315A patent/GB2026239B/en not_active Expired
- 1979-07-20 CH CH6784/79A patent/CH648694A5/de not_active IP Right Cessation
- 1979-07-23 SE SE7906288A patent/SE441134B/sv not_active IP Right Cessation
- 1979-07-23 FR FR7918940A patent/FR2436503A1/fr active Granted
- 1979-07-24 JP JP9417279A patent/JPS5518100A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2927560C2 (de) | 1983-12-22 |
| NL184551B (nl) | 1989-03-16 |
| US4233617A (en) | 1980-11-11 |
| NL7807834A (nl) | 1980-01-28 |
| FR2436503A1 (fr) | 1980-04-11 |
| FR2436503B1 (ja) | 1983-05-06 |
| GB2026239B (en) | 1983-02-02 |
| CA1134056A (en) | 1982-10-19 |
| DE2927560A1 (de) | 1980-02-07 |
| SE7906288L (sv) | 1980-01-25 |
| JPS644352B2 (ja) | 1989-01-25 |
| IT1122227B (it) | 1986-04-23 |
| JPS5518100A (en) | 1980-02-07 |
| NL184551C (nl) | 1989-08-16 |
| IT7924515A0 (it) | 1979-07-20 |
| GB2026239A (en) | 1980-01-30 |
| CH648694A5 (de) | 1985-03-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NUG | Patent has lapsed |
Ref document number: 7906288-1 Effective date: 19930204 Format of ref document f/p: F |