SE411606B - Halvledardon innefattande bl a ett passiviseringsskikt av polykristallint kisel som innehaller syre - Google Patents

Halvledardon innefattande bl a ett passiviseringsskikt av polykristallint kisel som innehaller syre

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Publication number
SE411606B
SE411606B SE7511927A SE7511927A SE411606B SE 411606 B SE411606 B SE 411606B SE 7511927 A SE7511927 A SE 7511927A SE 7511927 A SE7511927 A SE 7511927A SE 411606 B SE411606 B SE 411606B
Authority
SE
Sweden
Prior art keywords
halfledardon
containing acid
silicone containing
polycrystalline silicone
passivization
Prior art date
Application number
SE7511927A
Other languages
English (en)
Swedish (sv)
Other versions
SE7511927L (sv
Inventor
T Matsushita
H Hayashi
T Aoki
H Mochizuki
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of SE7511927L publication Critical patent/SE7511927L/xx
Publication of SE411606B publication Critical patent/SE411606B/xx

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L23/00Details of semiconductor or other solid state devices
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    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3192Multilayer coating
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    • H01L21/02109Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
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    • H01L21/022Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
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    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/314Inorganic layers
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
  • Non-Volatile Memory (AREA)
  • Formation Of Insulating Films (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Photovoltaic Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
SE7511927A 1974-10-26 1975-10-24 Halvledardon innefattande bl a ett passiviseringsskikt av polykristallint kisel som innehaller syre SE411606B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49123765A JPS6022497B2 (ja) 1974-10-26 1974-10-26 半導体装置

Publications (2)

Publication Number Publication Date
SE7511927L SE7511927L (sv) 1976-04-27
SE411606B true SE411606B (sv) 1980-01-14

Family

ID=14868714

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7511927A SE411606B (sv) 1974-10-26 1975-10-24 Halvledardon innefattande bl a ett passiviseringsskikt av polykristallint kisel som innehaller syre

Country Status (15)

Country Link
US (1) US4063275A (pt)
JP (1) JPS6022497B2 (pt)
AT (1) AT370561B (pt)
AU (1) AU504667B2 (pt)
BR (1) BR7506996A (pt)
CA (1) CA1046650A (pt)
CH (1) CH608653A5 (pt)
DE (1) DE2547304A1 (pt)
DK (1) DK142758B (pt)
ES (1) ES442102A1 (pt)
FR (1) FR2290040A1 (pt)
GB (1) GB1515179A (pt)
IT (1) IT1044592B (pt)
NL (1) NL183260C (pt)
SE (1) SE411606B (pt)

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* Cited by examiner, † Cited by third party
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DE2632647A1 (de) * 1976-07-20 1978-01-26 Siemens Ag Halbleiterbauelement mit passivierender schutzschicht
IN147578B (pt) * 1977-02-24 1980-04-19 Rca Corp
DE2730367A1 (de) * 1977-07-05 1979-01-18 Siemens Ag Verfahren zum passivieren von halbleiterelementen
US4174252A (en) * 1978-07-26 1979-11-13 Rca Corporation Method of defining contact openings in insulating layers on semiconductor devices without the formation of undesirable pinholes
CA1136773A (en) * 1978-08-14 1982-11-30 Norikazu Ohuchi Semiconductor device
FR2459551A1 (fr) * 1979-06-19 1981-01-09 Thomson Csf Procede et structure de passivation a autoalignement sur l'emplacement d'un masque
GB2071411B (en) * 1980-03-07 1983-12-21 Philips Electronic Associated Passivating p-n junction devices
US4344985A (en) * 1981-03-27 1982-08-17 Rca Corporation Method of passivating a semiconductor device with a multi-layer passivant system by thermally growing a layer of oxide on an oxygen doped polycrystalline silicon layer
US4420765A (en) * 1981-05-29 1983-12-13 Rca Corporation Multi-layer passivant system
AT384121B (de) * 1983-03-28 1987-10-12 Shell Austria Verfahren zum gettern von halbleiterbauelementen
JPS6042859A (ja) * 1983-08-19 1985-03-07 Toshiba Corp 高耐圧半導体装置の製造方法
JPS61222172A (ja) * 1985-03-15 1986-10-02 Sharp Corp Mosfetのゲ−ト絶縁膜形成方法
JPS6276673A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 高耐圧半導体装置
DE3542166A1 (de) * 1985-11-29 1987-06-04 Telefunken Electronic Gmbh Halbleiterbauelement
DE69014359T2 (de) * 1989-03-24 1995-05-24 Ibm Halbleitervorrichtung mit einem relativ zu einem vergrabenen Subkollektor selbstausgerichteten Kontakt.
JPH04343479A (ja) * 1991-05-21 1992-11-30 Nec Yamagata Ltd 可変容量ダイオード
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Also Published As

Publication number Publication date
NL183260C (nl) 1988-09-01
US4063275A (en) 1977-12-13
ATA818475A (de) 1982-08-15
GB1515179A (en) 1978-06-21
AU8599175A (en) 1977-04-28
AT370561B (de) 1983-04-11
DE2547304A1 (de) 1976-04-29
NL183260B (nl) 1988-04-05
JPS5149686A (pt) 1976-04-30
DK142758C (pt) 1981-08-10
FR2290040B1 (pt) 1979-08-17
CH608653A5 (pt) 1979-01-15
AU504667B2 (en) 1979-10-25
SE7511927L (sv) 1976-04-27
DK480275A (pt) 1976-04-27
JPS6022497B2 (ja) 1985-06-03
DK142758B (da) 1981-01-12
CA1046650A (en) 1979-01-16
NL7512559A (nl) 1976-04-28
BR7506996A (pt) 1976-08-17
IT1044592B (it) 1980-03-31
DE2547304C2 (pt) 1988-08-11
ES442102A1 (es) 1977-03-16
FR2290040A1 (fr) 1976-05-28

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