RU2589272C2 - Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой - Google Patents

Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой Download PDF

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Publication number
RU2589272C2
RU2589272C2 RU2013146954/28A RU2013146954A RU2589272C2 RU 2589272 C2 RU2589272 C2 RU 2589272C2 RU 2013146954/28 A RU2013146954/28 A RU 2013146954/28A RU 2013146954 A RU2013146954 A RU 2013146954A RU 2589272 C2 RU2589272 C2 RU 2589272C2
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Russia
Prior art keywords
cmut
massive
substrate
cell
cells
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RU2013146954/28A
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English (en)
Russian (ru)
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RU2013146954A (ru
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Джон Дуглас ФРЕЙЗЕР
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Конинклейке Филипс Н.В.
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Biomedical Technology (AREA)
  • Animal Behavior & Ethology (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
RU2013146954/28A 2011-03-22 2012-03-13 Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой RU2589272C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161466172P 2011-03-22 2011-03-22
US61/466,172 2011-03-22
PCT/IB2012/051173 WO2012127360A2 (en) 2011-03-22 2012-03-13 Ultrasonic cmut with suppressed acoustic coupling to the substrate

Publications (2)

Publication Number Publication Date
RU2013146954A RU2013146954A (ru) 2015-04-27
RU2589272C2 true RU2589272C2 (ru) 2016-07-10

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RU2013146954/28A RU2589272C2 (ru) 2011-03-22 2012-03-13 Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой

Country Status (7)

Country Link
US (1) US20130331705A1 (https=)
EP (1) EP2688686B1 (https=)
JP (1) JP5961246B2 (https=)
CN (1) CN103501922B (https=)
BR (1) BR112013023981A2 (https=)
RU (1) RU2589272C2 (https=)
WO (1) WO2012127360A2 (https=)

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WO2017001965A1 (en) 2015-07-02 2017-01-05 Koninklijke Philips N.V. Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods
DE102015212683A1 (de) * 2015-07-07 2017-01-12 Robert Bosch Gmbh Schallwandler und Einbauanordnung mit einem Schallwandler
US10818162B2 (en) 2015-07-16 2020-10-27 Ultrahaptics Ip Ltd Calibration techniques in haptic systems
US9751108B2 (en) 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
US10795042B2 (en) 2015-11-24 2020-10-06 Halliburton Energy Services, Inc. Ultrasonic transducer with suppressed lateral mode
TWI721183B (zh) 2016-06-20 2021-03-11 美商蝴蝶網路公司 用於微製造超音波傳感器的電接點配置
US10268275B2 (en) 2016-08-03 2019-04-23 Ultrahaptics Ip Ltd Three-dimensional perceptions in haptic systems
WO2018095833A1 (en) * 2016-11-22 2018-05-31 Koninklijke Philips N.V. Ultrasound device and acoustic component for use in such a device
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US10943578B2 (en) 2016-12-13 2021-03-09 Ultrahaptics Ip Ltd Driving techniques for phased-array systems
US11531395B2 (en) 2017-11-26 2022-12-20 Ultrahaptics Ip Ltd Haptic effects from focused acoustic fields
EP3729418B1 (en) 2017-12-22 2024-11-20 Ultrahaptics Ip Ltd Minimizing unwanted responses in haptic systems
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US10966683B2 (en) * 2018-03-22 2021-04-06 Exo Imaging Inc. Integrated ultrasonic transducers
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
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WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
JP7515182B2 (ja) 2018-08-01 2024-07-12 エコー イメージング，インク． ハイブリッド端子を備えた超音波トランスデューサの統合のためのシステムおよび方法
US11098951B2 (en) 2018-09-09 2021-08-24 Ultrahaptics Ip Ltd Ultrasonic-assisted liquid manipulation
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US11842517B2 (en) 2019-04-12 2023-12-12 Ultrahaptics Ip Ltd Using iterative 3D-model fitting for domain adaptation of a hand-pose-estimation neural network
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2769757C2 (ru) * 2017-09-22 2022-04-05 Конинклейке Филипс Н.В. Ультразвуковое преобразующее устройство и способ управления им

Also Published As

Publication number Publication date
RU2013146954A (ru) 2015-04-27
CN103501922A (zh) 2014-01-08
BR112013023981A2 (pt) 2016-12-13
EP2688686B1 (en) 2022-08-17
JP2014510489A (ja) 2014-04-24
EP2688686A2 (en) 2014-01-29
WO2012127360A3 (en) 2013-04-25
WO2012127360A2 (en) 2012-09-27
CN103501922B (zh) 2016-08-17
US20130331705A1 (en) 2013-12-12
JP5961246B2 (ja) 2016-08-02

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Effective date: 20190314