RU2430827C2 - Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления - Google Patents

Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления Download PDF

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Publication number
RU2430827C2
RU2430827C2 RU2008110905/02A RU2008110905A RU2430827C2 RU 2430827 C2 RU2430827 C2 RU 2430827C2 RU 2008110905/02 A RU2008110905/02 A RU 2008110905/02A RU 2008110905 A RU2008110905 A RU 2008110905A RU 2430827 C2 RU2430827 C2 RU 2430827C2
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RU
Russia
Prior art keywords
abrasive
grooves
tool according
abrasive tool
elements
Prior art date
Application number
RU2008110905/02A
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English (en)
Russian (ru)
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RU2008110905A (ru
Inventor
Хироси ИСИЗУКА (JP)
Хироси ИСИЗУКА
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Хироси ИСИЗУКА
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Publication of RU2008110905A publication Critical patent/RU2008110905A/ru
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Publication of RU2430827C2 publication Critical patent/RU2430827C2/ru

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/21Circular sheet or circular blank
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/2457Parallel ribs and/or grooves
    • Y10T428/24579Parallel ribs and/or grooves with particulate matter
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612Composite web or sheet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
RU2008110905/02A 2005-08-25 2006-08-25 Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления RU2430827C2 (ru)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005-243529 2005-08-25
JP2005243529 2005-08-25
JP2006-209236 2006-07-31
JP2006209236 2006-07-31

Publications (2)

Publication Number Publication Date
RU2008110905A RU2008110905A (ru) 2009-09-27
RU2430827C2 true RU2430827C2 (ru) 2011-10-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
RU2008110905/02A RU2430827C2 (ru) 2005-08-25 2006-08-25 Инструмент с полирующей поверхностью из спеченного вещества и способ его изготовления

Country Status (12)

Country Link
US (1) US20090215366A1 (zh)
EP (1) EP1944125B1 (zh)
JP (1) JP5033630B2 (zh)
KR (1) KR101293461B1 (zh)
CN (2) CN101247923B (zh)
AU (1) AU2006282293B2 (zh)
BR (1) BRPI0615020A2 (zh)
CA (1) CA2620407A1 (zh)
IL (1) IL189314A (zh)
RU (1) RU2430827C2 (zh)
TW (1) TWI406736B (zh)
WO (1) WO2007023949A1 (zh)

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US20120171935A1 (en) * 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
JP5809880B2 (ja) * 2011-08-25 2015-11-11 新日鉄住金マテリアルズ株式会社 研磨布用ドレッサー
CN109054745A (zh) 2011-12-30 2018-12-21 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
KR102089383B1 (ko) * 2012-08-02 2020-03-16 쓰리엠 이노베이티브 프로퍼티즈 컴파니 정밀하게 형상화된 특징부를 갖는 연마 물품 및 그의 제조 방법
CN102862121B (zh) * 2012-09-17 2015-05-20 上海华力微电子有限公司 一种cmp研磨垫修整结构
EP2835220B1 (de) * 2013-08-07 2019-09-11 Reishauer AG Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung
JP5976228B2 (ja) * 2013-08-26 2016-08-23 株式会社東京精密 ダイシングブレード
KR20160071416A (ko) * 2013-10-18 2016-06-21 쓰리엠 이노베이티브 프로퍼티즈 컴파니 코팅된 연마 용품 및 그의 제조 방법
CN106463379B (zh) * 2014-03-21 2019-08-06 恩特格里斯公司 具有细长切割边缘的化学机械平坦化垫调节器
TWI609742B (zh) * 2015-04-20 2018-01-01 中國砂輪企業股份有限公司 研磨工具
WO2017145491A1 (ja) 2016-02-22 2017-08-31 株式会社アライドマテリアル 砥粒工具
CN106078516B (zh) * 2016-06-21 2018-09-04 大连理工大学 一种cmp抛光垫修整器
CN110650819B (zh) 2017-05-12 2022-08-09 3M创新有限公司 磨料制品中的四面体磨料颗粒
EP3713714B1 (en) 2017-11-21 2022-04-13 3M Innovative Properties Company Coated abrasive disc and methods of making and using the same
JP6899490B2 (ja) 2017-11-21 2021-07-07 スリーエム イノベイティブ プロパティズ カンパニー 被覆研磨ディスク並びにその製造方法及び使用方法
WO2019102329A1 (en) * 2017-11-21 2019-05-31 3M Innovative Properties Company Coated abrasive disc and methods of making and using the same
KR102026250B1 (ko) * 2018-02-05 2019-09-27 에스케이실트론 주식회사 웨이퍼 연마 장치용 연마 패드 및 그의 제조방법
JP6918217B2 (ja) * 2018-04-27 2021-08-11 住友電気工業株式会社 多結晶砥粒およびそれを備えた研削ホイール
TWI735795B (zh) * 2018-08-24 2021-08-11 宋健民 拋光墊修整器及化學機械平坦化的方法
KR102440315B1 (ko) * 2020-05-11 2022-09-06 한국생산기술연구원 패턴구조를 갖는 화학기계적 연마용 패드 및 이의 제조방법
CN112677062B (zh) * 2019-10-18 2022-12-09 江苏韦尔博新材料科技有限公司 一种打磨钢材磨盘的专用磨粒地貌、其金刚石磨盘与制备方法

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Also Published As

Publication number Publication date
EP1944125A1 (en) 2008-07-16
KR20080037693A (ko) 2008-04-30
TWI406736B (zh) 2013-09-01
CA2620407A1 (en) 2007-03-01
JPWO2007023949A1 (ja) 2009-03-05
IL189314A (en) 2013-01-31
EP1944125B1 (en) 2012-01-25
RU2008110905A (ru) 2009-09-27
BRPI0615020A2 (pt) 2009-08-04
KR101293461B1 (ko) 2013-08-07
US20090215366A1 (en) 2009-08-27
JP5033630B2 (ja) 2012-09-26
TW200714416A (en) 2007-04-16
EP1944125A4 (en) 2009-12-16
CN101247923A (zh) 2008-08-20
IL189314A0 (en) 2008-06-05
WO2007023949A1 (ja) 2007-03-01
AU2006282293B2 (en) 2011-06-23
AU2006282293A1 (en) 2007-03-01
CN101247923B (zh) 2010-12-08
CN101693353A (zh) 2010-04-14

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20170826