BRPI0615020A2 - ferramenta com superfìcie de polimento de corpo sinterizada e método de fabricação da mesma - Google Patents

ferramenta com superfìcie de polimento de corpo sinterizada e método de fabricação da mesma

Info

Publication number
BRPI0615020A2
BRPI0615020A2 BRPI0615020-9A BRPI0615020A BRPI0615020A2 BR PI0615020 A2 BRPI0615020 A2 BR PI0615020A2 BR PI0615020 A BRPI0615020 A BR PI0615020A BR PI0615020 A2 BRPI0615020 A2 BR PI0615020A2
Authority
BR
Brazil
Prior art keywords
polishing
tool
manufacturing
sintered
sintered body
Prior art date
Application number
BRPI0615020-9A
Other languages
English (en)
Inventor
Hiroshi Ishizuka
Original Assignee
Hiroshi Ishizuka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hiroshi Ishizuka filed Critical Hiroshi Ishizuka
Publication of BRPI0615020A2 publication Critical patent/BRPI0615020A2/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/2457—Parallel ribs and/or grooves
    • Y10T428/24579—Parallel ribs and/or grooves with particulate matter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet

Abstract

FERRAMENTA COM SUPERFìCIE DE POLIMENTO DE CORPO SINTERIZADA E MéTODO DE FABRICAçãO DA MESMA. Uma ferramenta de polimento eficientemente processável, particularmente usada para um condicionador de disco de polimento CMP, capaz de solucionar problemas na força de fixação para fixar grãos abrasivos a uma chapa de base e problemas na superfície polida não uniforme e um método de efetivamente fabricar a ferramenta de polimento. A ferramenta de polimento (1) compreende uma peça de polimento feita de um corpo sinterizado de grãos super-abrasivos integralmente sinterizado com o material de revestimento de um carbureto cimentado. A peça de polimento compreende uma pluralidade de unidades de polimento (2) com peças de topo. As peças de topo são posicionadas sobre um plano aproximadamente igual. As unidades de polimento (2) são formadas por meio da formação de um grupo de ranhuras lineares (3) na peça de polimento.
BRPI0615020-9A 2005-08-25 2006-08-25 ferramenta com superfìcie de polimento de corpo sinterizada e método de fabricação da mesma BRPI0615020A2 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005243529 2005-08-25
JP2006209236 2006-07-31
PCT/JP2006/316737 WO2007023949A1 (ja) 2005-08-25 2006-08-25 焼結体研磨部を持つ工具およびその製造方法

Publications (1)

Publication Number Publication Date
BRPI0615020A2 true BRPI0615020A2 (pt) 2009-08-04

Family

ID=37771687

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0615020-9A BRPI0615020A2 (pt) 2005-08-25 2006-08-25 ferramenta com superfìcie de polimento de corpo sinterizada e método de fabricação da mesma

Country Status (12)

Country Link
US (1) US20090215366A1 (pt)
EP (1) EP1944125B1 (pt)
JP (1) JP5033630B2 (pt)
KR (1) KR101293461B1 (pt)
CN (2) CN101247923B (pt)
AU (1) AU2006282293B2 (pt)
BR (1) BRPI0615020A2 (pt)
CA (1) CA2620407A1 (pt)
IL (1) IL189314A (pt)
RU (1) RU2430827C2 (pt)
TW (1) TWI406736B (pt)
WO (1) WO2007023949A1 (pt)

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JP2009113133A (ja) * 2007-11-05 2009-05-28 Hiroshi Ishizuka Ｃｍｐパッド・コンディショナー
WO2011139562A2 (en) * 2010-04-27 2011-11-10 3M Innovative Properties Company Ceramic shaped abrasive particles, methods of making the same, and abrasive articles containing the same
US20120171935A1 (en) * 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
JP5809880B2 (ja) * 2011-08-25 2015-11-11 新日鉄住金マテリアルズ株式会社 研磨布用ドレッサー
KR102187425B1 (ko) 2011-12-30 2020-12-09 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성방법
CN102862121B (zh) * 2012-09-17 2015-05-20 上海华力微电子有限公司 一种cmp研磨垫修整结构
ES2756849T3 (es) * 2013-08-07 2020-04-27 Reishauer Ag Herramienta rectificadora y procedimiento para su fabricación
JP5976228B2 (ja) * 2013-08-26 2016-08-23 株式会社東京精密 ダイシングブレード
WO2015057562A1 (en) * 2013-10-18 2015-04-23 3M Innovative Properties Company Coated abrasive article and method of making the same
WO2015143278A1 (en) * 2014-03-21 2015-09-24 Entegris, Inc. Chemical mechanical planarization pad conditioner with elongated cutting edges
TWI609742B (zh) * 2015-04-20 2018-01-01 中國砂輪企業股份有限公司 研磨工具
US11819979B2 (en) 2016-02-22 2023-11-21 A.L.M.T. Corp. Abrasive tool
CN106078516B (zh) * 2016-06-21 2018-09-04 大连理工大学 一种cmp抛光垫修整器
CN110650819B (zh) * 2017-05-12 2022-08-09 3M创新有限公司 磨料制品中的四面体磨料颗粒
JP2021504171A (ja) 2017-11-21 2021-02-15 スリーエム イノベイティブ プロパティズ カンパニー 被覆研磨ディスク並びにその製造方法及び使用方法
US11607775B2 (en) 2017-11-21 2023-03-21 3M Innovative Properties Company Coated abrasive disc and methods of making and using the same
WO2019102329A1 (en) * 2017-11-21 2019-05-31 3M Innovative Properties Company Coated abrasive disc and methods of making and using the same
KR102026250B1 (ko) * 2018-02-05 2019-09-27 에스케이실트론 주식회사 웨이퍼 연마 장치용 연마 패드 및 그의 제조방법
MX2020011232A (es) * 2018-04-27 2020-11-11 Sumitomo Electric Industries Granos abrasivos policristalinos y muela abrasiva que comprenden los mismos.
TWI735795B (zh) * 2018-08-24 2021-08-11 宋健民 拋光墊修整器及化學機械平坦化的方法
KR102440315B1 (ko) * 2020-05-11 2022-09-06 한국생산기술연구원 패턴구조를 갖는 화학기계적 연마용 패드 및 이의 제조방법
CN112677062B (zh) * 2019-10-18 2022-12-09 江苏韦尔博新材料科技有限公司 一种打磨钢材磨盘的专用磨粒地貌、其金刚石磨盘与制备方法

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Also Published As

Publication number Publication date
EP1944125A1 (en) 2008-07-16
CN101247923B (zh) 2010-12-08
IL189314A (en) 2013-01-31
JP5033630B2 (ja) 2012-09-26
IL189314A0 (en) 2008-06-05
WO2007023949A1 (ja) 2007-03-01
AU2006282293B2 (en) 2011-06-23
CA2620407A1 (en) 2007-03-01
AU2006282293A1 (en) 2007-03-01
KR20080037693A (ko) 2008-04-30
RU2430827C2 (ru) 2011-10-10
CN101247923A (zh) 2008-08-20
TWI406736B (zh) 2013-09-01
RU2008110905A (ru) 2009-09-27
JPWO2007023949A1 (ja) 2009-03-05
KR101293461B1 (ko) 2013-08-07
US20090215366A1 (en) 2009-08-27
EP1944125B1 (en) 2012-01-25
TW200714416A (en) 2007-04-16
CN101693353A (zh) 2010-04-14
EP1944125A4 (en) 2009-12-16

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

Free format text: REFERENTE A 7A ANUIDADE.

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 2260 DE 29/04/2014.