EP1944125A4 - Tool with sintered body polishing surface and method of manufacturing the same - Google Patents

Tool with sintered body polishing surface and method of manufacturing the same

Info

Publication number
EP1944125A4
EP1944125A4 EP06796810A EP06796810A EP1944125A4 EP 1944125 A4 EP1944125 A4 EP 1944125A4 EP 06796810 A EP06796810 A EP 06796810A EP 06796810 A EP06796810 A EP 06796810A EP 1944125 A4 EP1944125 A4 EP 1944125A4
Authority
EP
European Patent Office
Prior art keywords
tool
manufacturing
same
sintered body
polishing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06796810A
Other languages
German (de)
French (fr)
Other versions
EP1944125A1 (en
EP1944125B1 (en
Inventor
Hiroshi Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1944125A1 publication Critical patent/EP1944125A1/en
Publication of EP1944125A4 publication Critical patent/EP1944125A4/en
Application granted granted Critical
Publication of EP1944125B1 publication Critical patent/EP1944125B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/2457—Parallel ribs and/or grooves
    • Y10T428/24579—Parallel ribs and/or grooves with particulate matter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet
EP06796810A 2005-08-25 2006-08-25 Tool with sintered body polishing surface and method of manufacturing the same Not-in-force EP1944125B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005243529 2005-08-25
JP2006209236 2006-07-31
PCT/JP2006/316737 WO2007023949A1 (en) 2005-08-25 2006-08-25 Tool with sintered body polishing surface and method of manufacturing the same

Publications (3)

Publication Number Publication Date
EP1944125A1 EP1944125A1 (en) 2008-07-16
EP1944125A4 true EP1944125A4 (en) 2009-12-16
EP1944125B1 EP1944125B1 (en) 2012-01-25

Family

ID=37771687

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06796810A Not-in-force EP1944125B1 (en) 2005-08-25 2006-08-25 Tool with sintered body polishing surface and method of manufacturing the same

Country Status (12)

Country Link
US (1) US20090215366A1 (en)
EP (1) EP1944125B1 (en)
JP (1) JP5033630B2 (en)
KR (1) KR101293461B1 (en)
CN (2) CN101693353A (en)
AU (1) AU2006282293B2 (en)
BR (1) BRPI0615020A2 (en)
CA (1) CA2620407A1 (en)
IL (1) IL189314A (en)
RU (1) RU2430827C2 (en)
TW (1) TWI406736B (en)
WO (1) WO2007023949A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009113133A (en) * 2007-11-05 2009-05-28 Hiroshi Ishizuka Cmp-pad conditioner
BR112012027030B1 (en) * 2010-04-27 2020-05-19 3M Innovative Properties Co abrasive article, method of abrasion of a workpiece and method of preparing a ceramic shaped abrasive particle
US20120171935A1 (en) * 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
JP5809880B2 (en) * 2011-08-25 2015-11-11 新日鉄住金マテリアルズ株式会社 Polishing cloth dresser
KR20140106713A (en) 2011-12-30 2014-09-03 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 Shaped abrasive particle and method of forming same
CN102862121B (en) * 2012-09-17 2015-05-20 上海华力微电子有限公司 Chemical mechanical polishing (CMP) grinding pad finishing structure
ES2756849T3 (en) * 2013-08-07 2020-04-27 Reishauer Ag Grinding tool and manufacturing procedure
JP5976228B2 (en) * 2013-08-26 2016-08-23 株式会社東京精密 Dicing blade
EP3057739B1 (en) * 2013-10-18 2020-12-09 3M Innovative Properties Company Coated abrasive article and method of making the same
US10293463B2 (en) * 2014-03-21 2019-05-21 Entegris, Inc. Chemical mechanical planarization pad conditioner with elongated cutting edges
TWI609742B (en) * 2015-04-20 2018-01-01 中國砂輪企業股份有限公司 Grinding tool
EP3409422A4 (en) * 2016-02-22 2019-08-14 A.L.M.T. Corp. Abrasive tool
CN106078516B (en) * 2016-06-21 2018-09-04 大连理工大学 A kind of CMP pad trimmer
JP2020519468A (en) * 2017-05-12 2020-07-02 スリーエム イノベイティブ プロパティズ カンパニー Tetrahedral abrasive particles in abrasive articles
US11607775B2 (en) 2017-11-21 2023-03-21 3M Innovative Properties Company Coated abrasive disc and methods of making and using the same
CN111372728B (en) 2017-11-21 2022-08-09 3M创新有限公司 Coated abrasive disk and methods of making and using same
JP2021504169A (en) * 2017-11-21 2021-02-15 スリーエム イノベイティブ プロパティズ カンパニー Coated polishing disc and its manufacturing method and usage method
KR102026250B1 (en) * 2018-02-05 2019-09-27 에스케이실트론 주식회사 Wafer polishing pad and Manufacturing Method of it
KR20210002494A (en) * 2018-04-27 2021-01-08 스미토모덴키고교가부시키가이샤 Polycrystalline abrasive grain and grinding wheel equipped with it
TWI735795B (en) * 2018-08-24 2021-08-11 宋健民 Polishing pad dresser and chemical mechanical planarization method
KR102440315B1 (en) * 2020-05-11 2022-09-06 한국생산기술연구원 Pad for chemical mechanical polishing having pattern structure and manufacturing method therefor
CN112677062B (en) * 2019-10-18 2022-12-09 江苏韦尔博新材料科技有限公司 Special abrasive grain landform for polishing steel grinding disc, diamond grinding disc and preparation method thereof

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JPS5739106A (en) * 1980-08-14 1982-03-04 Hiroshi Ishizuka Production of diamond ultrahard alloy composite
JPS58199776A (en) * 1982-05-12 1983-11-21 住友電気工業株式会社 Diamond sintered body for tool and manufacture
JPS6184303A (en) * 1984-09-28 1986-04-28 Ishizuka Kenkyusho:Kk Manufacture of composite sintered body
JP2601284B2 (en) * 1987-09-01 1997-04-16 株式会社石塚研究所 Sintered diamond composite and manufacturing method thereof
US4925457B1 (en) * 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Method for making an abrasive tool
US5049165B1 (en) * 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Composite material
US4954139A (en) * 1989-03-31 1990-09-04 The General Electric Company Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces
JPH08243927A (en) * 1995-03-02 1996-09-24 Fuji Xerox Co Ltd Grinding tool and its manufacture and grinding device
US5560754A (en) * 1995-06-13 1996-10-01 General Electric Company Reduction of stresses in the polycrystalline abrasive layer of a composite compact with in situ bonded carbide/carbide support
JPH09254042A (en) * 1996-03-15 1997-09-30 Symtec:Kk Grinding wheel for cutting groove and manufacture thereof
JP2957519B2 (en) * 1996-05-23 1999-10-04 旭ダイヤモンド工業株式会社 Dresser for semiconductor wafer polishing pad and method of manufacturing the same
JPH10138120A (en) * 1996-10-31 1998-05-26 Kyocera Corp Jig for dressing
US6054183A (en) * 1997-07-10 2000-04-25 Zimmer; Jerry W. Method for making CVD diamond coated substrate for polishing pad conditioning head
US6027659A (en) * 1997-12-03 2000-02-22 Intel Corporation Polishing pad conditioning surface having integral conditioning points
JPH11267902A (en) * 1998-03-23 1999-10-05 Hiroshi Hashimoto Tool having ultra-fine cutting blade and processing tool having ultra-fine cutting blade
JP2000190200A (en) * 1998-12-25 2000-07-11 Mitsubishi Materials Silicon Corp Seasoning jig for polishing cloth
JP4332980B2 (en) * 1999-03-18 2009-09-16 株式会社デンソー Manufacturing method of mold for forming honeycomb structure
JP2001088028A (en) * 1999-09-17 2001-04-03 Koremura Toishi Seisakusho:Kk Rotary dressor
US6439986B1 (en) * 1999-10-12 2002-08-27 Hunatech Co., Ltd. Conditioner for polishing pad and method for manufacturing the same
KR100387954B1 (en) * 1999-10-12 2003-06-19 (주) 휴네텍 Conditioner for polishing pad and method of manufacturing the same
TW436375B (en) * 1999-11-16 2001-05-28 Asia Ic Mic Process Inc Formation method for dresser of chemical mechanical polishing pad
JP2001347454A (en) * 2000-06-09 2001-12-18 Koremura Toishi Seisakusho:Kk Dresser and method of manufacturing the same
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods
US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
JP5033630B2 (en) 2012-09-26
EP1944125A1 (en) 2008-07-16
IL189314A (en) 2013-01-31
CN101247923A (en) 2008-08-20
JPWO2007023949A1 (en) 2009-03-05
KR20080037693A (en) 2008-04-30
KR101293461B1 (en) 2013-08-07
CN101247923B (en) 2010-12-08
CA2620407A1 (en) 2007-03-01
BRPI0615020A2 (en) 2009-08-04
IL189314A0 (en) 2008-06-05
EP1944125B1 (en) 2012-01-25
AU2006282293A1 (en) 2007-03-01
RU2008110905A (en) 2009-09-27
RU2430827C2 (en) 2011-10-10
TWI406736B (en) 2013-09-01
US20090215366A1 (en) 2009-08-27
CN101693353A (en) 2010-04-14
AU2006282293B2 (en) 2011-06-23
WO2007023949A1 (en) 2007-03-01
TW200714416A (en) 2007-04-16

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