EP1944125A4 - Outil avec surface de polissage de corps fritté et son procédé de fabrication - Google Patents

Outil avec surface de polissage de corps fritté et son procédé de fabrication

Info

Publication number
EP1944125A4
EP1944125A4 EP06796810A EP06796810A EP1944125A4 EP 1944125 A4 EP1944125 A4 EP 1944125A4 EP 06796810 A EP06796810 A EP 06796810A EP 06796810 A EP06796810 A EP 06796810A EP 1944125 A4 EP1944125 A4 EP 1944125A4
Authority
EP
European Patent Office
Prior art keywords
tool
manufacturing
same
sintered body
polishing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06796810A
Other languages
German (de)
English (en)
Other versions
EP1944125A1 (fr
EP1944125B1 (fr
Inventor
Hiroshi Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1944125A1 publication Critical patent/EP1944125A1/fr
Publication of EP1944125A4 publication Critical patent/EP1944125A4/fr
Application granted granted Critical
Publication of EP1944125B1 publication Critical patent/EP1944125B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/2457—Parallel ribs and/or grooves
    • Y10T428/24579—Parallel ribs and/or grooves with particulate matter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
EP06796810A 2005-08-25 2006-08-25 Outil avec surface de polissage de corps fritté et son procédé de fabrication Not-in-force EP1944125B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005243529 2005-08-25
JP2006209236 2006-07-31
PCT/JP2006/316737 WO2007023949A1 (fr) 2005-08-25 2006-08-25 Outil avec surface de polissage de corps fritté et son procédé de fabrication

Publications (3)

Publication Number Publication Date
EP1944125A1 EP1944125A1 (fr) 2008-07-16
EP1944125A4 true EP1944125A4 (fr) 2009-12-16
EP1944125B1 EP1944125B1 (fr) 2012-01-25

Family

ID=37771687

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06796810A Not-in-force EP1944125B1 (fr) 2005-08-25 2006-08-25 Outil avec surface de polissage de corps fritté et son procédé de fabrication

Country Status (12)

Country Link
US (1) US20090215366A1 (fr)
EP (1) EP1944125B1 (fr)
JP (1) JP5033630B2 (fr)
KR (1) KR101293461B1 (fr)
CN (2) CN101247923B (fr)
AU (1) AU2006282293B2 (fr)
BR (1) BRPI0615020A2 (fr)
CA (1) CA2620407A1 (fr)
IL (1) IL189314A (fr)
RU (1) RU2430827C2 (fr)
TW (1) TWI406736B (fr)
WO (1) WO2007023949A1 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009113133A (ja) * 2007-11-05 2009-05-28 Hiroshi Ishizuka Ｃｍｐパッド・コンディショナー
CA2797096C (fr) * 2010-04-27 2018-07-10 3M Innovative Properties Company Particules ceramiques abrasives conformees, procedes de fabrication associes et articles abrasifs contenant ces particules
US20120171935A1 (en) * 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
JP5809880B2 (ja) * 2011-08-25 2015-11-11 新日鉄住金マテリアルズ株式会社 研磨布用ドレッサー
EP3517245B1 (fr) 2011-12-30 2023-12-13 Saint-Gobain Ceramics & Plastics Inc. Particule abrasive façonnée et procédé de formation de celle-ci
EP2879838B1 (fr) * 2012-08-02 2023-09-13 3M Innovative Properties Company Articles abrasifs présentant des caractéristiques de forme précise et leur procédé de fabrication
CN102862121B (zh) * 2012-09-17 2015-05-20 上海华力微电子有限公司 一种cmp研磨垫修整结构
EP2835220B1 (fr) * 2013-08-07 2019-09-11 Reishauer AG Outil d'ajustement et son procédé de fabrication
WO2015029987A1 (fr) * 2013-08-26 2015-03-05 株式会社東京精密 Lame de découpage en dés
CN105636746B (zh) * 2013-10-18 2017-10-13 3M创新有限公司 涂覆磨料制品及其制备方法
KR102304574B1 (ko) * 2014-03-21 2021-09-27 엔테그리스, 아이엔씨. 세장형 절삭 에지를 갖는 화학 기계 평탄화 패드 컨디셔너
TWI609742B (zh) * 2015-04-20 2018-01-01 中國砂輪企業股份有限公司 研磨工具
EP3409422B1 (fr) 2016-02-22 2024-05-22 A.L.M.T. Corp. Outil abrasif
CN106078516B (zh) * 2016-06-21 2018-09-04 大连理工大学 一种cmp抛光垫修整器
US11505730B2 (en) 2017-05-12 2022-11-22 3M Innovative Properties Company Tetrahedral abrasive particles in abrasive articles
WO2019102331A1 (fr) 2017-11-21 2019-05-31 3M Innovative Properties Company Disque abrasif revêtu et ses procédés de fabrication et d'utilisation
EP3713714B1 (fr) 2017-11-21 2022-04-13 3M Innovative Properties Company Disque abrasif revêtu et ses procédés de fabrication et d'utilisation
JP2021504169A (ja) * 2017-11-21 2021-02-15 スリーエム イノベイティブ プロパティズ カンパニー 被覆研磨ディスク並びにその製造方法及び使用方法
KR102026250B1 (ko) 2018-02-05 2019-09-27 에스케이실트론 주식회사 웨이퍼 연마 장치용 연마 패드 및 그의 제조방법
JP6918217B2 (ja) * 2018-04-27 2021-08-11 住友電気工業株式会社 多結晶砥粒およびそれを備えた研削ホイール
TWI735795B (zh) * 2018-08-24 2021-08-11 宋健民 拋光墊修整器及化學機械平坦化的方法
KR102440315B1 (ko) * 2020-05-11 2022-09-06 한국생산기술연구원 패턴구조를 갖는 화학기계적 연마용 패드 및 이의 제조방법
CN112677062B (zh) * 2019-10-18 2022-12-09 江苏韦尔博新材料科技有限公司 一种打磨钢材磨盘的专用磨粒地貌、其金刚石磨盘与制备方法

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JPS5739106A (en) * 1980-08-14 1982-03-04 Hiroshi Ishizuka Production of diamond ultrahard alloy composite
JPS58199776A (ja) * 1982-05-12 1983-11-21 住友電気工業株式会社 工具用ダイヤモンド焼結体及びその製造方法
JPS6184303A (ja) * 1984-09-28 1986-04-28 Ishizuka Kenkyusho:Kk 複合焼結体の製造法
JP2601284B2 (ja) * 1987-09-01 1997-04-16 株式会社石塚研究所 焼結ダイヤモンド複合体、及びその製造方法
US5049165B1 (en) * 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Composite material
US4925457B1 (en) * 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Method for making an abrasive tool
US4954139A (en) * 1989-03-31 1990-09-04 The General Electric Company Method for producing polycrystalline compact tool blanks with flat carbide support/diamond or CBN interfaces
JPH08243927A (ja) * 1995-03-02 1996-09-24 Fuji Xerox Co Ltd 研削工具とその製造方法及び研削装置
US5560754A (en) * 1995-06-13 1996-10-01 General Electric Company Reduction of stresses in the polycrystalline abrasive layer of a composite compact with in situ bonded carbide/carbide support
JPH09254042A (ja) * 1996-03-15 1997-09-30 Symtec:Kk 溝切り用砥石およびその製造方法
JP2957519B2 (ja) * 1996-05-23 1999-10-04 旭ダイヤモンド工業株式会社 半導体ウェーハ研磨パッド用ドレッサ及びその製造方法
JPH10138120A (ja) * 1996-10-31 1998-05-26 Kyocera Corp ドレッシング用治具
US6054183A (en) * 1997-07-10 2000-04-25 Zimmer; Jerry W. Method for making CVD diamond coated substrate for polishing pad conditioning head
US6027659A (en) * 1997-12-03 2000-02-22 Intel Corporation Polishing pad conditioning surface having integral conditioning points
JPH11267902A (ja) * 1998-03-23 1999-10-05 Hiroshi Hashimoto 超微細切刃付き工具及び超微細切刃付き加工具
JP2000190200A (ja) * 1998-12-25 2000-07-11 Mitsubishi Materials Silicon Corp 研磨布のシ―ズニング治具
JP4332980B2 (ja) * 1999-03-18 2009-09-16 株式会社デンソー ハニカム構造体成形用金型の製造方法
JP2001088028A (ja) * 1999-09-17 2001-04-03 Koremura Toishi Seisakusho:Kk ロータリードレッサー
US6439986B1 (en) * 1999-10-12 2002-08-27 Hunatech Co., Ltd. Conditioner for polishing pad and method for manufacturing the same
KR100387954B1 (ko) * 1999-10-12 2003-06-19 (주) 휴네텍 연마패드용 컨디셔너와 이의 제조방법
TW436375B (en) * 1999-11-16 2001-05-28 Asia Ic Mic Process Inc Formation method for dresser of chemical mechanical polishing pad
JP2001347454A (ja) * 2000-06-09 2001-12-18 Koremura Toishi Seisakusho:Kk ドレッサーとその製造方法
US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
US20060258276A1 (en) * 2005-05-16 2006-11-16 Chien-Min Sung Superhard cutters and associated methods

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
CN101247923B (zh) 2010-12-08
BRPI0615020A2 (pt) 2009-08-04
CN101247923A (zh) 2008-08-20
US20090215366A1 (en) 2009-08-27
IL189314A (en) 2013-01-31
KR101293461B1 (ko) 2013-08-07
JPWO2007023949A1 (ja) 2009-03-05
TW200714416A (en) 2007-04-16
AU2006282293B2 (en) 2011-06-23
RU2430827C2 (ru) 2011-10-10
EP1944125A1 (fr) 2008-07-16
KR20080037693A (ko) 2008-04-30
RU2008110905A (ru) 2009-09-27
EP1944125B1 (fr) 2012-01-25
CA2620407A1 (fr) 2007-03-01
WO2007023949A1 (fr) 2007-03-01
JP5033630B2 (ja) 2012-09-26
TWI406736B (zh) 2013-09-01
AU2006282293A1 (en) 2007-03-01
IL189314A0 (en) 2008-06-05
CN101693353A (zh) 2010-04-14

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