RU2392651C2 - Сенсорная система и способ ее функционирования - Google Patents

Сенсорная система и способ ее функционирования Download PDF

Info

Publication number
RU2392651C2
RU2392651C2 RU2005130123/09A RU2005130123A RU2392651C2 RU 2392651 C2 RU2392651 C2 RU 2392651C2 RU 2005130123/09 A RU2005130123/09 A RU 2005130123/09A RU 2005130123 A RU2005130123 A RU 2005130123A RU 2392651 C2 RU2392651 C2 RU 2392651C2
Authority
RU
Russia
Prior art keywords
sensor
conductive elements
area
output signal
probe
Prior art date
Application number
RU2005130123/09A
Other languages
English (en)
Russian (ru)
Other versions
RU2005130123A (ru
Inventor
Эмад Андаравис АНДАРАВИС (US)
Эмад Андаравис АНДАРАВИС
Самхита ДАСГУПТА (US)
Самхита ДАСГУПТА
Original Assignee
Дженерал Электрик Компани
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Дженерал Электрик Компани filed Critical Дженерал Электрик Компани
Publication of RU2005130123A publication Critical patent/RU2005130123A/ru
Application granted granted Critical
Publication of RU2392651C2 publication Critical patent/RU2392651C2/ru

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electronic Switches (AREA)
RU2005130123/09A 2004-09-28 2005-09-27 Сенсорная система и способ ее функционирования RU2392651C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/951,562 US7332915B2 (en) 2004-09-28 2004-09-28 Sensor system and method of operating the same
US10/951,562 2004-09-28

Publications (2)

Publication Number Publication Date
RU2005130123A RU2005130123A (ru) 2007-04-10
RU2392651C2 true RU2392651C2 (ru) 2010-06-20

Family

ID=35355727

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2005130123/09A RU2392651C2 (ru) 2004-09-28 2005-09-27 Сенсорная система и способ ее функционирования

Country Status (6)

Country Link
US (1) US7332915B2 (enExample)
EP (1) EP1640687B1 (enExample)
JP (1) JP2006098403A (enExample)
CA (1) CA2519527C (enExample)
DE (1) DE602005004217T2 (enExample)
RU (1) RU2392651C2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466143B2 (en) * 2005-09-16 2008-12-16 General Electric Company Clearance measurement systems and methods of operation
US7652489B2 (en) * 2005-12-06 2010-01-26 General Electric Company Multi-range clearance measurement system and method of operation
US7215129B1 (en) * 2006-03-30 2007-05-08 General Electric Company Multi tip clearance measurement system and method of operation
US8615374B1 (en) 2006-06-09 2013-12-24 Rockwell Automation Technologies, Inc. Modular, configurable, intelligent sensor system
US7404331B2 (en) * 2006-09-27 2008-07-29 General Electric Company Sensor assembly, transformers and methods of manufacture
US7605595B2 (en) * 2006-09-29 2009-10-20 General Electric Company System for clearance measurement and method of operating the same
US8177474B2 (en) * 2007-06-26 2012-05-15 General Electric Company System and method for turbine engine clearance control with rub detection
DE102007047716A1 (de) * 2007-10-05 2009-04-09 Robert Bosch Gmbh Sensoreinrichtung zur kapazitiven Abstandsermittlung
US7994800B2 (en) * 2008-03-25 2011-08-09 General Electric Company Systems and methods for online phase calibration
US7852092B2 (en) * 2008-03-25 2010-12-14 General Electric Company Systems for inspection of shrouds
US8272246B2 (en) * 2008-09-30 2012-09-25 General Electric Company Electronic self-calibration for sensor clearance
EP2362178A1 (en) * 2008-10-31 2011-08-31 Fujikura Ltd. Capacitance-type sensor
US8022715B2 (en) * 2009-01-27 2011-09-20 General Electric Company Automated sensor specific calibration through sensor parameter download
JP5391411B2 (ja) * 2009-03-31 2014-01-15 株式会社フジクラ 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置
JP5607335B2 (ja) * 2009-10-19 2014-10-15 アルプス電気株式会社 静電容量式近接センサ装置、静電容量式モーション検出装置及びそれらを用いた入力装置
US8876460B2 (en) 2011-08-11 2014-11-04 General Electric Company Method and apparatus for measuring turbine shell clearance
US8970228B2 (en) 2012-05-31 2015-03-03 General Electric Company Rotational clearance measurement system and method of operation
US9417048B2 (en) 2012-10-31 2016-08-16 General Electric Company Capacitive sensor device and method of manufacture
US9476318B2 (en) * 2013-09-03 2016-10-25 General Electric Company Systems and methods to monitor a rotating component
US9587511B2 (en) 2013-12-13 2017-03-07 General Electric Company Turbomachine cold clearance adjustment
CN113267343B (zh) * 2021-04-26 2024-06-14 中国联合重型燃气轮机技术有限公司 燃气轮机试验设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1557546A1 (ru) * 1988-06-06 1990-04-15 Ленинградский Институт Водного Транспорта Устройство дл определени состо ни технического объекта
SU1684691A1 (ru) * 1989-05-03 1991-10-15 Институт Прикладной Физики Ан Бсср Способ измерени электрических параметров датчика
DE4119244A1 (de) * 1991-06-11 1992-12-17 Weidmueller Interface Kapazitive sensoreinrichtung

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526295Y2 (enExample) * 1972-08-23 1977-02-09
SU964437A2 (ru) 1976-07-19 1982-10-07 Институт Электродинамики Ан Усср Емкостной трансформаторный мост дл измерени перемещений
JPS5759101A (en) * 1980-09-26 1982-04-09 Hiromi Ogasawara Noncontacting infinitesimal displacement gauge
JPS5914007U (ja) * 1982-07-20 1984-01-27 イ−グル工業株式会社 表面粗さ計
JPS6280502A (ja) * 1985-10-03 1987-04-14 Stanley Electric Co Ltd 静電容量型近接検出装置
US5119036A (en) 1990-05-29 1992-06-02 General Electric Company Electrical capacitance clearanceometer
US5166626A (en) 1990-05-29 1992-11-24 General Electric Company Electrical capacitance clearanceometer
US5101165A (en) * 1990-05-29 1992-03-31 General Electric Company Electrical capacitance clearanceometer
FR2712690B1 (fr) * 1993-11-17 1995-12-15 Snecma Dispositif pour effectuer la mesure dynamique de la distance entre les faces en regard du rotor et du stator d'une machine tournante.
JPH09203681A (ja) * 1996-01-29 1997-08-05 Fuji Electric Co Ltd 圧力検出装置
JP3602259B2 (ja) * 1996-05-02 2004-12-15 本田技研工業株式会社 マルチビーム・レーダ装置
JP3732919B2 (ja) * 1996-12-19 2006-01-11 トヨタ自動車株式会社 静電容量式角度検出装置
JP3447946B2 (ja) * 1998-03-11 2003-09-16 三菱電機株式会社 レーダ装置
JP4365908B2 (ja) * 1998-09-04 2009-11-18 キヤノン株式会社 面位置検出装置、露光装置およびデバイス製造方法
JP4198306B2 (ja) * 1999-07-22 2008-12-17 東京エレクトロン株式会社 静電容量型センサ、半導体製造装置および液晶表示素子製造装置
US6441623B1 (en) * 1999-07-29 2002-08-27 Ab Automotive Electronics Ltd. Capacitive proximity sensor for automotive use
US6401541B1 (en) 1999-11-03 2002-06-11 Kulite Semiconductor Products, Inc. Multiple pressure sensing system
US6593755B1 (en) * 2000-07-31 2003-07-15 Banner Engineering Corporation Method and apparatus for detection sensor shielding
JP2003021566A (ja) * 2001-07-10 2003-01-24 Teijin Seiki Co Ltd シリコンダイアフラム型真空圧力センサ装置およびその装置を用いた圧力測定方法
JP4336066B2 (ja) * 2001-07-11 2009-09-30 株式会社豊田中央研究所 静電容量型センサ装置
US6744264B2 (en) * 2002-04-25 2004-06-01 Motorola, Inc. Testing circuit and method for MEMS sensor packaged with an integrated circuit
US6774642B2 (en) * 2002-08-27 2004-08-10 Delphi Technologies, Inc. Capacitive angular position sensor
JP3858865B2 (ja) * 2003-08-29 2006-12-20 セイコーエプソン株式会社 静電容量検出装置
JP2005134131A (ja) 2003-10-28 2005-05-26 Oki Electric Ind Co Ltd 静電容量型距離測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1557546A1 (ru) * 1988-06-06 1990-04-15 Ленинградский Институт Водного Транспорта Устройство дл определени состо ни технического объекта
SU1684691A1 (ru) * 1989-05-03 1991-10-15 Институт Прикладной Физики Ан Бсср Способ измерени электрических параметров датчика
DE4119244A1 (de) * 1991-06-11 1992-12-17 Weidmueller Interface Kapazitive sensoreinrichtung

Also Published As

Publication number Publication date
JP2006098403A (ja) 2006-04-13
US20060066318A1 (en) 2006-03-30
CA2519527A1 (en) 2006-03-28
US7332915B2 (en) 2008-02-19
EP1640687A1 (en) 2006-03-29
DE602005004217T2 (de) 2009-01-02
DE602005004217D1 (de) 2008-02-21
EP1640687B1 (en) 2008-01-09
RU2005130123A (ru) 2007-04-10
CA2519527C (en) 2014-03-04

Similar Documents

Publication Publication Date Title
RU2392651C2 (ru) Сенсорная система и способ ее функционирования
KR100538405B1 (ko) 개선된 정확도를 갖춘 자동화된 마이크로웨이브 테스트시스템
KR101050786B1 (ko) 전기용량 터치 센싱 장치의 생산 테스트
KR20110090732A (ko) 고주파 신호 송신기의 임피던스 정합 방법 및 장치
WO2017141743A1 (en) Method and device for determining junction temperature of die of semiconductor power module
JP2017511516A (ja) 電界型指紋認証装置及びその状態制御方法、プロテーゼ認証方法
KR0144437B1 (ko) 서모커플의 개방회로 검출장치와 서모커플 테스팅방법 및 테스트 신호의 주파수 검출방법
EP4177618A1 (en) Circuit for impedance measurements
CN120595072A (zh) Mos晶体管的封装级测试方法及装置
JP4059056B2 (ja) センサ装置およびセンサ装置の出力特性切換方法
CN105759194A (zh) 基于调配器的半导体阻抗测试的最佳阻抗点快速定位方法
CN1849517B (zh) 测量系统、组件有功及无功功率和电组件阻抗的方法和装置
US10528189B2 (en) Evaluation of touch screen display capacitance using a touch screen controller
Geldart et al. A 50 Hz‐250 MHz Computer‐Operated Transmission Measuring Set
JP2005077408A (ja) 無線周波電力計および無線周波信号の電力を測定する方法
KR100707585B1 (ko) Ｍｏｓ 트랜지스터 소자의 정전용량-전압 특성을 이용한캐리어 농도 분포 측정 자동화 시스템 및 방법
EP3404425B1 (en) Dynamic probe, dynamic measurement system and method for probing a dynamic data signal
KR100465401B1 (ko) 마이크로 전자 회로의 전기 특성을 세팅하기 위한 방법 및시스템
US8461913B2 (en) Integrated circuit and a method for selecting a voltage in an integrated circuit
Lapsa et al. Measurement of current consumption in a wireless sensor network testbed
US6856143B2 (en) System and method for measuring a capacitance of a conductor
CN113347644B (zh) 介质移相器信号相位检测方法、介质移相器及天线
EP4614842A1 (en) Receiver, system comprising such a receiver, and receiving method
CN106990347A (zh) 适用于毫米波分频器的在片测试系统及测试方法
Semenov et al. Digitally Controllable Multifrequency Impedance Emulator for Bioimpedance Hardware Validation

Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20180928