CA2519527C - A sensor system and method of operating the same - Google Patents

A sensor system and method of operating the same Download PDF

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Publication number
CA2519527C
CA2519527C CA2519527A CA2519527A CA2519527C CA 2519527 C CA2519527 C CA 2519527C CA 2519527 A CA2519527 A CA 2519527A CA 2519527 A CA2519527 A CA 2519527A CA 2519527 C CA2519527 C CA 2519527C
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CA
Canada
Prior art keywords
sensor
conductive elements
elements
probe
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2519527A
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English (en)
French (fr)
Other versions
CA2519527A1 (en
Inventor
Emad Andarawis Andarawis
Samhita Dasgupta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CA2519527A1 publication Critical patent/CA2519527A1/en
Application granted granted Critical
Publication of CA2519527C publication Critical patent/CA2519527C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electronic Switches (AREA)
CA2519527A 2004-09-28 2005-09-15 A sensor system and method of operating the same Expired - Fee Related CA2519527C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/951,562 US7332915B2 (en) 2004-09-28 2004-09-28 Sensor system and method of operating the same
US10/951,562 2004-09-28

Publications (2)

Publication Number Publication Date
CA2519527A1 CA2519527A1 (en) 2006-03-28
CA2519527C true CA2519527C (en) 2014-03-04

Family

ID=35355727

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2519527A Expired - Fee Related CA2519527C (en) 2004-09-28 2005-09-15 A sensor system and method of operating the same

Country Status (6)

Country Link
US (1) US7332915B2 (enExample)
EP (1) EP1640687B1 (enExample)
JP (1) JP2006098403A (enExample)
CA (1) CA2519527C (enExample)
DE (1) DE602005004217T2 (enExample)
RU (1) RU2392651C2 (enExample)

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US7652489B2 (en) * 2005-12-06 2010-01-26 General Electric Company Multi-range clearance measurement system and method of operation
US7215129B1 (en) * 2006-03-30 2007-05-08 General Electric Company Multi tip clearance measurement system and method of operation
US8615374B1 (en) 2006-06-09 2013-12-24 Rockwell Automation Technologies, Inc. Modular, configurable, intelligent sensor system
US7404331B2 (en) * 2006-09-27 2008-07-29 General Electric Company Sensor assembly, transformers and methods of manufacture
US7605595B2 (en) * 2006-09-29 2009-10-20 General Electric Company System for clearance measurement and method of operating the same
US8177474B2 (en) * 2007-06-26 2012-05-15 General Electric Company System and method for turbine engine clearance control with rub detection
DE102007047716A1 (de) * 2007-10-05 2009-04-09 Robert Bosch Gmbh Sensoreinrichtung zur kapazitiven Abstandsermittlung
US7994800B2 (en) * 2008-03-25 2011-08-09 General Electric Company Systems and methods for online phase calibration
US7852092B2 (en) * 2008-03-25 2010-12-14 General Electric Company Systems for inspection of shrouds
US8272246B2 (en) * 2008-09-30 2012-09-25 General Electric Company Electronic self-calibration for sensor clearance
EP2362178A1 (en) * 2008-10-31 2011-08-31 Fujikura Ltd. Capacitance-type sensor
US8022715B2 (en) * 2009-01-27 2011-09-20 General Electric Company Automated sensor specific calibration through sensor parameter download
JP5391411B2 (ja) * 2009-03-31 2014-01-15 株式会社フジクラ 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置
JP5607335B2 (ja) * 2009-10-19 2014-10-15 アルプス電気株式会社 静電容量式近接センサ装置、静電容量式モーション検出装置及びそれらを用いた入力装置
US8876460B2 (en) 2011-08-11 2014-11-04 General Electric Company Method and apparatus for measuring turbine shell clearance
US8970228B2 (en) 2012-05-31 2015-03-03 General Electric Company Rotational clearance measurement system and method of operation
US9417048B2 (en) 2012-10-31 2016-08-16 General Electric Company Capacitive sensor device and method of manufacture
US9476318B2 (en) * 2013-09-03 2016-10-25 General Electric Company Systems and methods to monitor a rotating component
US9587511B2 (en) 2013-12-13 2017-03-07 General Electric Company Turbomachine cold clearance adjustment
CN113267343B (zh) * 2021-04-26 2024-06-14 中国联合重型燃气轮机技术有限公司 燃气轮机试验设备

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JPS5759101A (en) * 1980-09-26 1982-04-09 Hiromi Ogasawara Noncontacting infinitesimal displacement gauge
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JP4198306B2 (ja) * 1999-07-22 2008-12-17 東京エレクトロン株式会社 静電容量型センサ、半導体製造装置および液晶表示素子製造装置
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JP4336066B2 (ja) * 2001-07-11 2009-09-30 株式会社豊田中央研究所 静電容量型センサ装置
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JP3858865B2 (ja) * 2003-08-29 2006-12-20 セイコーエプソン株式会社 静電容量検出装置
JP2005134131A (ja) 2003-10-28 2005-05-26 Oki Electric Ind Co Ltd 静電容量型距離測定装置

Also Published As

Publication number Publication date
JP2006098403A (ja) 2006-04-13
US20060066318A1 (en) 2006-03-30
CA2519527A1 (en) 2006-03-28
US7332915B2 (en) 2008-02-19
EP1640687A1 (en) 2006-03-29
DE602005004217T2 (de) 2009-01-02
RU2392651C2 (ru) 2010-06-20
DE602005004217D1 (de) 2008-02-21
EP1640687B1 (en) 2008-01-09
RU2005130123A (ru) 2007-04-10

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Effective date: 20190916