CA2519527C - A sensor system and method of operating the same - Google Patents
A sensor system and method of operating the same Download PDFInfo
- Publication number
- CA2519527C CA2519527C CA2519527A CA2519527A CA2519527C CA 2519527 C CA2519527 C CA 2519527C CA 2519527 A CA2519527 A CA 2519527A CA 2519527 A CA2519527 A CA 2519527A CA 2519527 C CA2519527 C CA 2519527C
- Authority
- CA
- Canada
- Prior art keywords
- sensor
- conductive elements
- elements
- probe
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title description 18
- 230000008859 change Effects 0.000 claims abstract description 7
- 239000000523 sample Substances 0.000 claims description 54
- 230000035945 sensitivity Effects 0.000 claims 3
- 238000000926 separation method Methods 0.000 description 42
- 238000005259 measurement Methods 0.000 description 13
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000004020 conductor Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Electronic Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/951,562 US7332915B2 (en) | 2004-09-28 | 2004-09-28 | Sensor system and method of operating the same |
| US10/951,562 | 2004-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2519527A1 CA2519527A1 (en) | 2006-03-28 |
| CA2519527C true CA2519527C (en) | 2014-03-04 |
Family
ID=35355727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2519527A Expired - Fee Related CA2519527C (en) | 2004-09-28 | 2005-09-15 | A sensor system and method of operating the same |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7332915B2 (enExample) |
| EP (1) | EP1640687B1 (enExample) |
| JP (1) | JP2006098403A (enExample) |
| CA (1) | CA2519527C (enExample) |
| DE (1) | DE602005004217T2 (enExample) |
| RU (1) | RU2392651C2 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7466143B2 (en) * | 2005-09-16 | 2008-12-16 | General Electric Company | Clearance measurement systems and methods of operation |
| US7652489B2 (en) * | 2005-12-06 | 2010-01-26 | General Electric Company | Multi-range clearance measurement system and method of operation |
| US7215129B1 (en) * | 2006-03-30 | 2007-05-08 | General Electric Company | Multi tip clearance measurement system and method of operation |
| US8615374B1 (en) | 2006-06-09 | 2013-12-24 | Rockwell Automation Technologies, Inc. | Modular, configurable, intelligent sensor system |
| US7404331B2 (en) * | 2006-09-27 | 2008-07-29 | General Electric Company | Sensor assembly, transformers and methods of manufacture |
| US7605595B2 (en) * | 2006-09-29 | 2009-10-20 | General Electric Company | System for clearance measurement and method of operating the same |
| US8177474B2 (en) * | 2007-06-26 | 2012-05-15 | General Electric Company | System and method for turbine engine clearance control with rub detection |
| DE102007047716A1 (de) * | 2007-10-05 | 2009-04-09 | Robert Bosch Gmbh | Sensoreinrichtung zur kapazitiven Abstandsermittlung |
| US7994800B2 (en) * | 2008-03-25 | 2011-08-09 | General Electric Company | Systems and methods for online phase calibration |
| US7852092B2 (en) * | 2008-03-25 | 2010-12-14 | General Electric Company | Systems for inspection of shrouds |
| US8272246B2 (en) * | 2008-09-30 | 2012-09-25 | General Electric Company | Electronic self-calibration for sensor clearance |
| EP2362178A1 (en) * | 2008-10-31 | 2011-08-31 | Fujikura Ltd. | Capacitance-type sensor |
| US8022715B2 (en) * | 2009-01-27 | 2011-09-20 | General Electric Company | Automated sensor specific calibration through sensor parameter download |
| JP5391411B2 (ja) * | 2009-03-31 | 2014-01-15 | 株式会社フジクラ | 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置 |
| JP5607335B2 (ja) * | 2009-10-19 | 2014-10-15 | アルプス電気株式会社 | 静電容量式近接センサ装置、静電容量式モーション検出装置及びそれらを用いた入力装置 |
| US8876460B2 (en) | 2011-08-11 | 2014-11-04 | General Electric Company | Method and apparatus for measuring turbine shell clearance |
| US8970228B2 (en) | 2012-05-31 | 2015-03-03 | General Electric Company | Rotational clearance measurement system and method of operation |
| US9417048B2 (en) | 2012-10-31 | 2016-08-16 | General Electric Company | Capacitive sensor device and method of manufacture |
| US9476318B2 (en) * | 2013-09-03 | 2016-10-25 | General Electric Company | Systems and methods to monitor a rotating component |
| US9587511B2 (en) | 2013-12-13 | 2017-03-07 | General Electric Company | Turbomachine cold clearance adjustment |
| CN113267343B (zh) * | 2021-04-26 | 2024-06-14 | 中国联合重型燃气轮机技术有限公司 | 燃气轮机试验设备 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526295Y2 (enExample) * | 1972-08-23 | 1977-02-09 | ||
| SU964437A2 (ru) | 1976-07-19 | 1982-10-07 | Институт Электродинамики Ан Усср | Емкостной трансформаторный мост дл измерени перемещений |
| JPS5759101A (en) * | 1980-09-26 | 1982-04-09 | Hiromi Ogasawara | Noncontacting infinitesimal displacement gauge |
| JPS5914007U (ja) * | 1982-07-20 | 1984-01-27 | イ−グル工業株式会社 | 表面粗さ計 |
| JPS6280502A (ja) * | 1985-10-03 | 1987-04-14 | Stanley Electric Co Ltd | 静電容量型近接検出装置 |
| SU1557546A1 (ru) * | 1988-06-06 | 1990-04-15 | Ленинградский Институт Водного Транспорта | Устройство дл определени состо ни технического объекта |
| SU1684691A1 (ru) * | 1989-05-03 | 1991-10-15 | Институт Прикладной Физики Ан Бсср | Способ измерени электрических параметров датчика |
| US5119036A (en) | 1990-05-29 | 1992-06-02 | General Electric Company | Electrical capacitance clearanceometer |
| US5166626A (en) | 1990-05-29 | 1992-11-24 | General Electric Company | Electrical capacitance clearanceometer |
| US5101165A (en) * | 1990-05-29 | 1992-03-31 | General Electric Company | Electrical capacitance clearanceometer |
| DE4119244A1 (de) | 1991-06-11 | 1992-12-17 | Weidmueller Interface | Kapazitive sensoreinrichtung |
| FR2712690B1 (fr) * | 1993-11-17 | 1995-12-15 | Snecma | Dispositif pour effectuer la mesure dynamique de la distance entre les faces en regard du rotor et du stator d'une machine tournante. |
| JPH09203681A (ja) * | 1996-01-29 | 1997-08-05 | Fuji Electric Co Ltd | 圧力検出装置 |
| JP3602259B2 (ja) * | 1996-05-02 | 2004-12-15 | 本田技研工業株式会社 | マルチビーム・レーダ装置 |
| JP3732919B2 (ja) * | 1996-12-19 | 2006-01-11 | トヨタ自動車株式会社 | 静電容量式角度検出装置 |
| JP3447946B2 (ja) * | 1998-03-11 | 2003-09-16 | 三菱電機株式会社 | レーダ装置 |
| JP4365908B2 (ja) * | 1998-09-04 | 2009-11-18 | キヤノン株式会社 | 面位置検出装置、露光装置およびデバイス製造方法 |
| JP4198306B2 (ja) * | 1999-07-22 | 2008-12-17 | 東京エレクトロン株式会社 | 静電容量型センサ、半導体製造装置および液晶表示素子製造装置 |
| US6441623B1 (en) * | 1999-07-29 | 2002-08-27 | Ab Automotive Electronics Ltd. | Capacitive proximity sensor for automotive use |
| US6401541B1 (en) | 1999-11-03 | 2002-06-11 | Kulite Semiconductor Products, Inc. | Multiple pressure sensing system |
| US6593755B1 (en) * | 2000-07-31 | 2003-07-15 | Banner Engineering Corporation | Method and apparatus for detection sensor shielding |
| JP2003021566A (ja) * | 2001-07-10 | 2003-01-24 | Teijin Seiki Co Ltd | シリコンダイアフラム型真空圧力センサ装置およびその装置を用いた圧力測定方法 |
| JP4336066B2 (ja) * | 2001-07-11 | 2009-09-30 | 株式会社豊田中央研究所 | 静電容量型センサ装置 |
| US6744264B2 (en) * | 2002-04-25 | 2004-06-01 | Motorola, Inc. | Testing circuit and method for MEMS sensor packaged with an integrated circuit |
| US6774642B2 (en) * | 2002-08-27 | 2004-08-10 | Delphi Technologies, Inc. | Capacitive angular position sensor |
| JP3858865B2 (ja) * | 2003-08-29 | 2006-12-20 | セイコーエプソン株式会社 | 静電容量検出装置 |
| JP2005134131A (ja) | 2003-10-28 | 2005-05-26 | Oki Electric Ind Co Ltd | 静電容量型距離測定装置 |
-
2004
- 2004-09-28 US US10/951,562 patent/US7332915B2/en not_active Expired - Lifetime
-
2005
- 2005-09-15 CA CA2519527A patent/CA2519527C/en not_active Expired - Fee Related
- 2005-09-26 EP EP05255982A patent/EP1640687B1/en not_active Expired - Lifetime
- 2005-09-26 DE DE602005004217T patent/DE602005004217T2/de active Active
- 2005-09-27 JP JP2005279269A patent/JP2006098403A/ja active Pending
- 2005-09-27 RU RU2005130123/09A patent/RU2392651C2/ru not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006098403A (ja) | 2006-04-13 |
| US20060066318A1 (en) | 2006-03-30 |
| CA2519527A1 (en) | 2006-03-28 |
| US7332915B2 (en) | 2008-02-19 |
| EP1640687A1 (en) | 2006-03-29 |
| DE602005004217T2 (de) | 2009-01-02 |
| RU2392651C2 (ru) | 2010-06-20 |
| DE602005004217D1 (de) | 2008-02-21 |
| EP1640687B1 (en) | 2008-01-09 |
| RU2005130123A (ru) | 2007-04-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |
Effective date: 20190916 |