JP2006098403A - センサシステムおよびその動作方法 - Google Patents

センサシステムおよびその動作方法 Download PDF

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Publication number
JP2006098403A
JP2006098403A JP2005279269A JP2005279269A JP2006098403A JP 2006098403 A JP2006098403 A JP 2006098403A JP 2005279269 A JP2005279269 A JP 2005279269A JP 2005279269 A JP2005279269 A JP 2005279269A JP 2006098403 A JP2006098403 A JP 2006098403A
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Japan
Prior art keywords
sensor
conductive elements
operable
probe
output signal
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JP2005279269A
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English (en)
Japanese (ja)
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JP2006098403A5 (enExample
Inventor
Emad Andarawis Andarawis
オマーン・アランドラウィス・アランドラウィス
Dasgupta Samhita
サムヒタ・ダスグプタ
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General Electric Co
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General Electric Co
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Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2006098403A publication Critical patent/JP2006098403A/ja
Publication of JP2006098403A5 publication Critical patent/JP2006098403A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electronic Switches (AREA)
JP2005279269A 2004-09-28 2005-09-27 センサシステムおよびその動作方法 Pending JP2006098403A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/951,562 US7332915B2 (en) 2004-09-28 2004-09-28 Sensor system and method of operating the same

Publications (2)

Publication Number Publication Date
JP2006098403A true JP2006098403A (ja) 2006-04-13
JP2006098403A5 JP2006098403A5 (enExample) 2008-11-13

Family

ID=35355727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005279269A Pending JP2006098403A (ja) 2004-09-28 2005-09-27 センサシステムおよびその動作方法

Country Status (6)

Country Link
US (1) US7332915B2 (enExample)
EP (1) EP1640687B1 (enExample)
JP (1) JP2006098403A (enExample)
CA (1) CA2519527C (enExample)
DE (1) DE602005004217T2 (enExample)
RU (1) RU2392651C2 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007155734A (ja) * 2005-12-06 2007-06-21 General Electric Co <Ge> マルチレンジ間隙測定システム及びそれを動作させる方法
JP2010175539A (ja) * 2009-01-27 2010-08-12 General Electric Co <Ge> センサパラメータダウンロードによるセンサの自動較正
JP2010237144A (ja) * 2009-03-31 2010-10-21 Fujikura Ltd 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置
JP2011085549A (ja) * 2009-10-19 2011-04-28 Alps Electric Co Ltd 静電容量式近接センサ装置、静電容量式モーション検出装置及びそれらを用いた入力装置
JPWO2010050607A1 (ja) * 2008-10-31 2012-03-29 株式会社フジクラ 静電容量型センサ

Families Citing this family (16)

* Cited by examiner, † Cited by third party
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US7466143B2 (en) * 2005-09-16 2008-12-16 General Electric Company Clearance measurement systems and methods of operation
US7215129B1 (en) * 2006-03-30 2007-05-08 General Electric Company Multi tip clearance measurement system and method of operation
US8615374B1 (en) 2006-06-09 2013-12-24 Rockwell Automation Technologies, Inc. Modular, configurable, intelligent sensor system
US7404331B2 (en) * 2006-09-27 2008-07-29 General Electric Company Sensor assembly, transformers and methods of manufacture
US7605595B2 (en) * 2006-09-29 2009-10-20 General Electric Company System for clearance measurement and method of operating the same
US8177474B2 (en) * 2007-06-26 2012-05-15 General Electric Company System and method for turbine engine clearance control with rub detection
DE102007047716A1 (de) * 2007-10-05 2009-04-09 Robert Bosch Gmbh Sensoreinrichtung zur kapazitiven Abstandsermittlung
US7994800B2 (en) * 2008-03-25 2011-08-09 General Electric Company Systems and methods for online phase calibration
US7852092B2 (en) * 2008-03-25 2010-12-14 General Electric Company Systems for inspection of shrouds
US8272246B2 (en) * 2008-09-30 2012-09-25 General Electric Company Electronic self-calibration for sensor clearance
US8876460B2 (en) 2011-08-11 2014-11-04 General Electric Company Method and apparatus for measuring turbine shell clearance
US8970228B2 (en) 2012-05-31 2015-03-03 General Electric Company Rotational clearance measurement system and method of operation
US9417048B2 (en) 2012-10-31 2016-08-16 General Electric Company Capacitive sensor device and method of manufacture
US9476318B2 (en) * 2013-09-03 2016-10-25 General Electric Company Systems and methods to monitor a rotating component
US9587511B2 (en) 2013-12-13 2017-03-07 General Electric Company Turbomachine cold clearance adjustment
CN113267343B (zh) * 2021-04-26 2024-06-14 中国联合重型燃气轮机技术有限公司 燃气轮机试验设备

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4955360U (enExample) * 1972-08-23 1974-05-16
JPS5759101A (en) * 1980-09-26 1982-04-09 Hiromi Ogasawara Noncontacting infinitesimal displacement gauge
JPS5914007U (ja) * 1982-07-20 1984-01-27 イ−グル工業株式会社 表面粗さ計
JPS6280502A (ja) * 1985-10-03 1987-04-14 Stanley Electric Co Ltd 静電容量型近接検出装置
JPH04231802A (ja) * 1990-05-29 1992-08-20 General Electric Co <Ge> 電気キャパシタンス間隙計
JPH07198312A (ja) * 1993-11-17 1995-08-01 Soc Natl Etud Constr Mot Aviat <Snecma> 回転式機械におけるロータ及びステータの対向面間距離を動的に測定する装置
JPH07198309A (ja) * 1991-06-11 1995-08-01 Weidmueller Interface Gmbh & Co 容量センサ装置
JPH09203681A (ja) * 1996-01-29 1997-08-05 Fuji Electric Co Ltd 圧力検出装置
JPH09297174A (ja) * 1996-05-02 1997-11-18 Honda Motor Co Ltd マルチビーム・レーダ装置
JPH11258331A (ja) * 1998-03-11 1999-09-24 Mitsubishi Electric Corp レーダ装置
JP2000082658A (ja) * 1998-09-04 2000-03-21 Canon Inc 面位置検出装置、露光装置およびデバイス製造方法
JP2001094408A (ja) * 1999-07-22 2001-04-06 Sumitomo Metal Ind Ltd 静電容量型センサ、静電容量型センサ部品および物体搭載体
US6401541B1 (en) * 1999-11-03 2002-06-11 Kulite Semiconductor Products, Inc. Multiple pressure sensing system
JP2003021566A (ja) * 2001-07-10 2003-01-24 Teijin Seiki Co Ltd シリコンダイアフラム型真空圧力センサ装置およびその装置を用いた圧力測定方法
JP2003028741A (ja) * 2001-07-11 2003-01-29 Toyota Central Res & Dev Lab Inc 静電容量型センサ装置
JP2005134131A (ja) * 2003-10-28 2005-05-26 Oki Electric Ind Co Ltd 静電容量型距離測定装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU964437A2 (ru) 1976-07-19 1982-10-07 Институт Электродинамики Ан Усср Емкостной трансформаторный мост дл измерени перемещений
SU1557546A1 (ru) * 1988-06-06 1990-04-15 Ленинградский Институт Водного Транспорта Устройство дл определени состо ни технического объекта
SU1684691A1 (ru) * 1989-05-03 1991-10-15 Институт Прикладной Физики Ан Бсср Способ измерени электрических параметров датчика
US5119036A (en) 1990-05-29 1992-06-02 General Electric Company Electrical capacitance clearanceometer
US5166626A (en) 1990-05-29 1992-11-24 General Electric Company Electrical capacitance clearanceometer
JP3732919B2 (ja) * 1996-12-19 2006-01-11 トヨタ自動車株式会社 静電容量式角度検出装置
US6441623B1 (en) * 1999-07-29 2002-08-27 Ab Automotive Electronics Ltd. Capacitive proximity sensor for automotive use
US6593755B1 (en) * 2000-07-31 2003-07-15 Banner Engineering Corporation Method and apparatus for detection sensor shielding
US6744264B2 (en) * 2002-04-25 2004-06-01 Motorola, Inc. Testing circuit and method for MEMS sensor packaged with an integrated circuit
US6774642B2 (en) * 2002-08-27 2004-08-10 Delphi Technologies, Inc. Capacitive angular position sensor
JP3858865B2 (ja) * 2003-08-29 2006-12-20 セイコーエプソン株式会社 静電容量検出装置

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4955360U (enExample) * 1972-08-23 1974-05-16
JPS5759101A (en) * 1980-09-26 1982-04-09 Hiromi Ogasawara Noncontacting infinitesimal displacement gauge
JPS5914007U (ja) * 1982-07-20 1984-01-27 イ−グル工業株式会社 表面粗さ計
JPS6280502A (ja) * 1985-10-03 1987-04-14 Stanley Electric Co Ltd 静電容量型近接検出装置
JPH04231802A (ja) * 1990-05-29 1992-08-20 General Electric Co <Ge> 電気キャパシタンス間隙計
JPH07198309A (ja) * 1991-06-11 1995-08-01 Weidmueller Interface Gmbh & Co 容量センサ装置
JPH07198312A (ja) * 1993-11-17 1995-08-01 Soc Natl Etud Constr Mot Aviat <Snecma> 回転式機械におけるロータ及びステータの対向面間距離を動的に測定する装置
JPH09203681A (ja) * 1996-01-29 1997-08-05 Fuji Electric Co Ltd 圧力検出装置
JPH09297174A (ja) * 1996-05-02 1997-11-18 Honda Motor Co Ltd マルチビーム・レーダ装置
JPH11258331A (ja) * 1998-03-11 1999-09-24 Mitsubishi Electric Corp レーダ装置
JP2000082658A (ja) * 1998-09-04 2000-03-21 Canon Inc 面位置検出装置、露光装置およびデバイス製造方法
JP2001094408A (ja) * 1999-07-22 2001-04-06 Sumitomo Metal Ind Ltd 静電容量型センサ、静電容量型センサ部品および物体搭載体
US6401541B1 (en) * 1999-11-03 2002-06-11 Kulite Semiconductor Products, Inc. Multiple pressure sensing system
JP2003021566A (ja) * 2001-07-10 2003-01-24 Teijin Seiki Co Ltd シリコンダイアフラム型真空圧力センサ装置およびその装置を用いた圧力測定方法
JP2003028741A (ja) * 2001-07-11 2003-01-29 Toyota Central Res & Dev Lab Inc 静電容量型センサ装置
JP2005134131A (ja) * 2003-10-28 2005-05-26 Oki Electric Ind Co Ltd 静電容量型距離測定装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007155734A (ja) * 2005-12-06 2007-06-21 General Electric Co <Ge> マルチレンジ間隙測定システム及びそれを動作させる方法
JPWO2010050607A1 (ja) * 2008-10-31 2012-03-29 株式会社フジクラ 静電容量型センサ
JP2010175539A (ja) * 2009-01-27 2010-08-12 General Electric Co <Ge> センサパラメータダウンロードによるセンサの自動較正
JP2010237144A (ja) * 2009-03-31 2010-10-21 Fujikura Ltd 車両用障害物検出装置および歩行者保護用エアバッグ展開制御装置
JP2011085549A (ja) * 2009-10-19 2011-04-28 Alps Electric Co Ltd 静電容量式近接センサ装置、静電容量式モーション検出装置及びそれらを用いた入力装置

Also Published As

Publication number Publication date
US20060066318A1 (en) 2006-03-30
CA2519527A1 (en) 2006-03-28
US7332915B2 (en) 2008-02-19
EP1640687A1 (en) 2006-03-29
DE602005004217T2 (de) 2009-01-02
RU2392651C2 (ru) 2010-06-20
DE602005004217D1 (de) 2008-02-21
EP1640687B1 (en) 2008-01-09
RU2005130123A (ru) 2007-04-10
CA2519527C (en) 2014-03-04

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