RU2018126626A - Способ изготовления pvd-слоя и режущий инструмент с покрытием - Google Patents

Способ изготовления pvd-слоя и режущий инструмент с покрытием Download PDF

Info

Publication number
RU2018126626A
RU2018126626A RU2018126626A RU2018126626A RU2018126626A RU 2018126626 A RU2018126626 A RU 2018126626A RU 2018126626 A RU2018126626 A RU 2018126626A RU 2018126626 A RU2018126626 A RU 2018126626A RU 2018126626 A RU2018126626 A RU 2018126626A
Authority
RU
Russia
Prior art keywords
pvd layer
cutting tool
coated cutting
tool according
formula
Prior art date
Application number
RU2018126626A
Other languages
English (en)
Other versions
RU2018126626A3 (ru
RU2730312C2 (ru
Inventor
Ларс ЙОНСОН
Марта САРАЙВА
Original Assignee
Сандвик Интеллекчуал Проперти Аб
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сандвик Интеллекчуал Проперти Аб filed Critical Сандвик Интеллекчуал Проперти Аб
Publication of RU2018126626A publication Critical patent/RU2018126626A/ru
Publication of RU2018126626A3 publication Critical patent/RU2018126626A3/ru
Application granted granted Critical
Publication of RU2730312C2 publication Critical patent/RU2730312C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)

Claims (34)

1. Способ изготовления покрытия на подложке, причем покрытие включает PVD-слой (A), представляющий собой соединение формулы
MexSiyAlzCaNbOc, x+y+z=1, 0≤a≤1, 0≤b≤1, 0≤c≤0,2, a+b+c=1, и
0≤x≤1, 0≤y≤0,4, 0≤z≤0,1, или
0≤x≤1, 0≤y≤0,1, 0≤z≤0,75,
причем Me представляет один или более металлов групп 4, 5 и 6 периодической таблицы элементов ИЮПАК, при этом PVD-слой (A) осаждают катодно-дуговым испарением с приложением импульсного напряжения смещения от около -40 до около -450 В к подложке, и с использованием рабочего цикла менее, чем около 12%, и частоты импульсного смещения менее, чем около 10 кГц.
2. Способ по п.1, в котором рабочий цикл составляет от около 2 до около 10%.
3. Способ по любому из пп. 1-2, в котором частота импульсного смещения составляет от около 0,1 до около 8 кГц.
4. Способ по любому из пп. 1-3, в котором импульсное напряжение смещения составляет от около -50 до около -350 В.
5. Режущий инструмент с покрытием, содержащий подложку и покрытие, причем покрытие включает PVD-слой (A), представляющий собой соединение формулы
MexSiyAlzCaNbOc, в которой x+y+z=1, 0≤a≤1, 0≤b≤1, 0≤c≤0,2, a+b+c=1, и
0≤x≤1, 0≤y≤0,4, 0≤z≤0,1, или
0≤x≤1, 0≤y≤0,1, 0≤z≤0,75,
причем Me представляет один или более металлов групп 4, 5 и 6 периодической таблицы элементов ИЮПАК, PVD-слой (A) имеет кристаллическую структуру, имеющую значение FWHM (полной ширины на половине пика) для (111)-пика кубической структуры в картине рентгеновской дифракции, составляющее ≤0,3 градуса (2тета).
6. Режущий инструмент с покрытием по п.5, в котором PVD-слой (A) имеет значение FWHM для (111)-пика кубической структуры в картине рентгеновской дифракции, составляющее ≤0,25 градуса (2тета).
7. Режущий инструмент с покрытием по любому из пп. 5-6, в котором PVD-слой (A) имеет соотношение максимумов интенсивности пиков I(111)/I(200) в картине рентгеновской дифракции, составляющее ≥0,6.
8. Режущий инструмент с покрытием по любому из пп. 5-7, в котором PVD-слой (A) имеет остаточное напряжение, составляющее >-3 ГПа.
9. Режущий инструмент с покрытием по любому из пп. 5-8, в котором PVD-слой (A) включает ограненные кристаллические зерна на своей поверхности.
10. Режущий инструмент с покрытием по любому из пп. 5-9, в котором толщина PVD-слоя (A) составляет от около 0,5 до около 20 мкм.
11. Режущий инструмент с покрытием по любому из пп. 5-10, в котором PVD-слой (A) представляет собой соединение формулы
TipZrqCrrSisAltCaNbOc,
0≤p≤1, 0≤q≤1, 0≤r≤1, 0≤s≤0,4, 0≤t≤0,1, p+q+r+s+t=1,
0≤a≤1, 0≤b≤1, 0≤c≤0,2, a+b+c=1
или
TipZrqCrrSisAltCaNbOc,
0≤p≤1, 0≤q≤1, 0≤r≤1, 0≤s≤0,1, 0≤t≤0,75, p+q+r+s+t=1,
0≤a≤1, 0≤b≤1, 0≤c≤0,2, a+b+c=1.
12. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0,9≤p≤1, 0≤q≤0,1, 0≤r≤0,1, 0≤s≤0,1, 0≤t≤0,1.
13. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0,25≤p≤0,9, 0≤q≤0,1, 0≤r≤0,1, 0≤s≤0,1, 0.1≤t≤0,75.
14. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0≤p≤0,1, 0≤q≤0,1, 0,2≤r≤1, 0≤s≤0,1, 0,1≤t≤0,8.
15. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0,1≤p≤0,5, 0,1≤q≤0,5, 0≤r≤0,1, 0≤s≤0,1, 0,25≤t≤0,6.
16. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0≤p≤0,1, 0,4≤q≤1, 0≤r≤0,1, 0≤s≤0,1, 0≤t≤0,5.
17. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0,2≤p≤0,6, 0≤q≤0,1, 0≤r≤0,1, 0<s≤0,1, 0,35≤t≤0,75.
18. Режущий инструмент с покрытием по п.11, в котором в формуле для PVD-слоя (А) 0,7≤p≤0,95, 0≤q≤0,1, 0≤r≤0,1, 0,01<s≤0,3, 0≤t≤0,1.
19. Режущий инструмент с покрытием по любому из пп. 5-18, в котором в формуле для PVD-слоя (А) 0≤a≤0,25, 0,75≤b≤1, 0≤c≤0,05, a+b+c=1.
RU2018126626A 2015-12-22 2016-12-20 Способ изготовления pvd-слоя и режущий инструмент с покрытием RU2730312C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15201990.7 2015-12-22
EP15201990 2015-12-22
PCT/EP2016/081989 WO2017108833A1 (en) 2015-12-22 2016-12-20 Method of producing a pvd layer and a coated cutting tool

Publications (3)

Publication Number Publication Date
RU2018126626A true RU2018126626A (ru) 2020-01-24
RU2018126626A3 RU2018126626A3 (ru) 2020-03-03
RU2730312C2 RU2730312C2 (ru) 2020-08-21

Family

ID=55083296

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2018126626A RU2730312C2 (ru) 2015-12-22 2016-12-20 Способ изготовления pvd-слоя и режущий инструмент с покрытием

Country Status (7)

Country Link
US (1) US10837100B2 (ru)
EP (1) EP3394320B1 (ru)
JP (1) JP7075342B2 (ru)
KR (1) KR102457549B1 (ru)
CN (1) CN108368618B (ru)
RU (1) RU2730312C2 (ru)
WO (1) WO2017108833A1 (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017108836A1 (en) * 2015-12-22 2017-06-29 Sandvik Intellectual Property Ab A coated cutting tool and method
JP6798534B2 (ja) * 2018-09-11 2020-12-09 株式会社タンガロイ 被覆切削工具
WO2020196631A1 (ja) * 2019-03-27 2020-10-01 京セラ株式会社 被覆工具及びこれを備えた切削工具

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
KR100305885B1 (ko) * 1999-10-20 2001-11-14 유창종 절삭공구/내마모성 공구용 표면 피복 경질합금
JP3931325B2 (ja) * 2001-10-03 2007-06-13 三菱マテリアル株式会社 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
SE529161C2 (sv) * 2005-06-22 2007-05-22 Seco Tools Ab Skärverktyg med kompositbeläggning för finbearbetning av härdade stål
TWI411696B (zh) * 2006-07-19 2013-10-11 Oerlikon Trading Ag 沉積電絕緣層之方法
JP2008240079A (ja) * 2007-03-28 2008-10-09 Tungaloy Corp 被覆部材
KR20160049022A (ko) * 2007-04-18 2016-05-04 산드빅 인터렉츄얼 프로퍼티 에이비 코팅된 절삭 공구 및 이의 제조 방법
KR20100116682A (ko) * 2008-02-21 2010-11-01 쎄코 툴스 에이비 다층 코팅 절삭 공구
JP5370808B2 (ja) * 2008-06-13 2013-12-18 Ｎｔｎ株式会社 耐摩耗性ＴｉＮ膜およびその形成体
SE533884C2 (sv) * 2009-06-01 2011-02-22 Seco Tools Ab Nanolaminerat belagt skärverktyg
CN102459688B (zh) * 2009-06-18 2014-06-11 苏舍梅塔普拉斯有限责任公司 保护性涂层、具有保护性涂层的涂覆构件以及生产保护性涂层的方法
JP5190971B2 (ja) * 2009-12-16 2013-04-24 住友電気工業株式会社 被膜、切削工具および被膜の製造方法
JP2012001383A (ja) * 2010-06-16 2012-01-05 Ngk Spark Plug Co Ltd セラミックス焼結体および切削インサート
JP6093363B2 (ja) * 2011-09-30 2017-03-08 セメコン アーゲー Ｈｉｐｉｍｓを用いた基材のコーティング
EP2669401A1 (en) * 2012-05-29 2013-12-04 Seco Tools AB Method for depositing a coating and a coated cutting tool
CN105593397A (zh) * 2013-09-05 2016-05-18 山高刀具公司 一种涂覆的切削工具和涂覆切削工具的方法

Also Published As

Publication number Publication date
KR102457549B1 (ko) 2022-10-20
EP3394320B1 (en) 2020-07-29
WO2017108833A1 (en) 2017-06-29
RU2018126626A3 (ru) 2020-03-03
RU2730312C2 (ru) 2020-08-21
KR20180089532A (ko) 2018-08-08
EP3394320A1 (en) 2018-10-31
US20180371607A1 (en) 2018-12-27
CN108368618B (zh) 2020-12-11
CN108368618A (zh) 2018-08-03
JP7075342B2 (ja) 2022-05-25
US10837100B2 (en) 2020-11-17
JP2019501294A (ja) 2019-01-17

Similar Documents

Publication Publication Date Title
RU2018126626A (ru) Способ изготовления pvd-слоя и режущий инструмент с покрытием
ES2763959T3 (es) Recubrimiento de nanocapas para herramientas de alto rendimiento
RU2015131332A (ru) Режущий инструмент с покрытием и способ изготовления режущего инструмента с покрытием
RU2018126628A (ru) Режущий инструмент с покрытием и способ
RU2014137156A (ru) Режущий инструмент с износостойким покрытием и способ его изготовления
US20120107557A1 (en) Manufacturing method of piezoelectric-body film, and piezoelectric-body film manufactured by the manufacturing method
JP2012528732A (ja) ナノ積層コーティングされた切削工具
RU2009117577A (ru) Слоистая система с по меньшей мере одним слоем смешанных кристаллов многокомпонентного оксида
EP1564312A3 (en) Hard coating and its formation method, and hard-coated tool
AR063347A1 (es) Formas cristalinas de docetaxel y proceso para su preparacion
EP2525391A3 (en) Method for producing ferroelectric thin film
RU2009139089A (ru) Износостойкое твердое покрытие для заготовки и способ его получения
RU2014117178A (ru) Покрытие из нитрида алюминия-титана с адаптированной морфологией для повышенной износостойкости при операциях обработки резанием и соответствующий способ
JP2014055349A5 (ja) 金属酸化物膜
RU2019119882A (ru) Антимикробные покрытия на основе меди, нанесенные способом физического осаждения из газовой фазы
KR20160029815A (ko) Tib2 층 및 그의 사용
RU2012150041A (ru) Покрытие конденсацией из паровой фазы для механической обработки металла
DE602006006959D1 (de) Verfahren zur Dampfphasenabscheidung von dünnen Schichten der Dialkylamidodihydroaluminium-Verbindung
RU2015104267A (ru) Способ нанесения покрытия при помощи высокомощных импульсов
CN106062237B (zh) 包含具有氮化钼δ相的基于MoN的层的涂层
DE102010052687A1 (de) Hartstoff-Beschichtung für Maschinenteile und Werkzeuge zum Verschleißschutz und zur Wärmedämmung
CN113874540B (zh) 从陶瓷靶沉积的立方富铝AlTiN涂层
RU2015123046A (ru) Стекло с оптически прозрачным защитным покрытием и способ его изготовления
RU2013121750A (ru) Многослойное защитное покрытие для конструкционных материалов
BR112015032169B1 (pt) Método para o revestimento de uma peça de trabalho