PT3334260T - Material de núcleo, pacote de semicondutores e método de formação de elétrodo de bossa - Google Patents

Material de núcleo, pacote de semicondutores e método de formação de elétrodo de bossa

Info

Publication number
PT3334260T
PT3334260T PT172054959T PT17205495T PT3334260T PT 3334260 T PT3334260 T PT 3334260T PT 172054959 T PT172054959 T PT 172054959T PT 17205495 T PT17205495 T PT 17205495T PT 3334260 T PT3334260 T PT 3334260T
Authority
PT
Portugal
Prior art keywords
core material
forming method
semiconductor package
bump electrode
bump
Prior art date
Application number
PT172054959T
Other languages
English (en)
Original Assignee
Senju Metal Industry Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senju Metal Industry Co filed Critical Senju Metal Industry Co
Publication of PT3334260T publication Critical patent/PT3334260T/pt

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    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/492Bases or plates or solder therefor
    • H01L23/4924Bases or plates or solder therefor characterised by the materials
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016Brazing of electronic components
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0227Rods, wires
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    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244Powders, particles or spheres; Preforms made therefrom
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    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
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    • B23K35/262Sn as the principal constituent
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    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
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    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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    • H01L23/49816Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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PT172054959T 2016-12-07 2017-12-05 Material de núcleo, pacote de semicondutores e método de formação de elétrodo de bossa PT3334260T (pt)

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JP6376266B1 (ja) 2017-10-24 2018-08-22 千住金属工業株式会社 核材料およびはんだ継手およびバンプ電極の形成方法
JP2018140436A (ja) * 2017-12-19 2018-09-13 千住金属工業株式会社 はんだ材料、はんだペースト、フォームはんだ及びはんだ継手
US20210130659A1 (en) 2018-05-08 2021-05-06 Sekisui Fuller Company, Ltd. Synthetic resin composition, fire-proof material, sealing material, adhesive, and joint structure
JP6493604B1 (ja) * 2018-06-12 2019-04-03 千住金属工業株式会社 Cu核ボール、はんだ継手、はんだペースト及びフォームはんだ
JP6485580B1 (ja) * 2018-06-12 2019-03-20 千住金属工業株式会社 Cu核ボール、はんだ継手、はんだペースト及びフォームはんだ
JP6761199B1 (ja) * 2019-10-25 2020-09-23 千住金属工業株式会社 核材料、電子部品及びバンプ電極の形成方法
JP6892621B1 (ja) 2020-09-10 2021-06-23 千住金属工業株式会社 核材料、電子部品及びバンプ電極の形成方法
CN115106678B (zh) * 2022-07-13 2023-06-13 哈尔滨工业大学(深圳) 一种高温复合钎料及其制备方法和应用

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910459B2 (ja) 1976-11-30 1984-03-09 大成建設株式会社 鉄骨鉄筋フレ−ム加工における鉄筋加工方法
US5367924A (en) * 1993-07-26 1994-11-29 Edlo Sales & Engineering Inc. Support arm for a power screwdriver
JP2003069205A (ja) * 2001-08-28 2003-03-07 Showa Denko Kk プリント配線板用プリフラックス
US8368223B2 (en) * 2003-10-24 2013-02-05 International Rectifier Corporation Paste for forming an interconnect and interconnect formed from the paste
WO2006004809A1 (en) * 2004-06-30 2006-01-12 Unitive International Limited Methods of forming lead free solder bumps and related structures
JP2007046087A (ja) * 2005-08-09 2007-02-22 Millenium Gate Technology Co Ltd 金属ボール
JP2007044718A (ja) * 2005-08-09 2007-02-22 Millenium Gate Technology Co Ltd 金属ボール、金属ボールの作製方法、めっき構造物および半田付け方法
JP2007081141A (ja) * 2005-09-14 2007-03-29 Nippon Steel Materials Co Ltd Cuコアボールとその製造方法
US7745013B2 (en) * 2005-12-30 2010-06-29 Intel Corporation Solder foams, nano-porous solders, foamed-solder bumps in chip packages, methods of assembling same, and systems containing same
KR100722645B1 (ko) * 2006-01-23 2007-05-28 삼성전기주식회사 반도체 패키지용 인쇄회로기판 및 그 제조방법
CN101134272A (zh) 2006-09-01 2008-03-05 浙江亚通焊材有限公司 无铅锡基软钎料
JP5141456B2 (ja) * 2007-10-24 2013-02-13 日立化成工業株式会社 回路接続材料及び接続構造体
JP5829905B2 (ja) * 2010-12-28 2015-12-09 積水化学工業株式会社 導電性粒子の製造方法、異方性導電材料の製造方法及び接続構造体の製造方法
JP6028449B2 (ja) * 2011-10-05 2016-11-16 富士通株式会社 半導体装置、電子装置、半導体装置の製造方法
JP5367924B1 (ja) 2012-03-23 2013-12-11 株式会社Neomaxマテリアル はんだ被覆ボールおよびその製造方法
JP6028593B2 (ja) * 2013-01-28 2016-11-16 富士通株式会社 半導体装置の製造方法
US8920934B2 (en) * 2013-03-29 2014-12-30 Intel Corporation Hybrid solder and filled paste in microelectronic packaging
US10322472B2 (en) * 2013-11-05 2019-06-18 Senju Metal Industry Co., Ltd. Cu core ball, solder paste, formed solder, Cu core column, and solder joint
WO2015118611A1 (ja) 2014-02-04 2015-08-13 千住金属工業株式会社 Cuボール、Cu核ボール、はんだ継手、はんだペースト、およびフォームはんだ
KR20180045051A (ko) * 2014-11-05 2018-05-03 센주긴조쿠고교 가부시키가이샤 납땜 재료, 납땜 페이스트, 폼 납땜, 납땜 이음 및 납땜 재료의 관리 방법

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KR102023821B1 (ko) 2019-09-20
CN108172523B (zh) 2019-03-01
JP2018089677A (ja) 2018-06-14
KR20180065952A (ko) 2018-06-18
JP6217836B1 (ja) 2017-10-25
CN108172523A (zh) 2018-06-15
TWI648416B (zh) 2019-01-21
TW201823482A (zh) 2018-07-01
KR20190040951A (ko) 2019-04-19
US20180174991A1 (en) 2018-06-21
EP3334260B1 (en) 2020-01-29
US10381319B2 (en) 2019-08-13

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