JP6892621B1 - 核材料、電子部品及びバンプ電極の形成方法 - Google Patents
核材料、電子部品及びバンプ電極の形成方法 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
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Abstract
Description
核と、前記核の外方に設けられたSnと、Ag、Cu、Sb、Ni、Co、Ge、Ga,Fe、Al、In、Cd、Zn、Pb、Au、P、S、Si、Ti、Mg、Pd及びPtのうち少なくともいずれか1つ以上の元素を含むはんだ合金からなるはんだ層と、前記はんだ層の外方に設けられたSn層とを備え、
前記はんだ層の厚さが片側1μm以上となり、
前記Sn層の厚さが片側0.1μm以上となり、
前記Sn層の厚さが前記はんだ層の厚さの0.215%以上36%以下の厚さとなってもよい。
前記はんだ層が(Sn−Ag−Cu)系はんだであってもよい。
前記核と前記はんだ層との間に、Ni、Co、Ni−Co、Ni―P及びNi―Bのいずれかで形成された下地めっき層が設けられてもよい。
上記の核材料がはんだバンプとして使用されてもよい。
上記の核材料を電極上に搭載する工程と、
搭載した前記核材料を加熱することによりバンプ電極を形成する工程と、
を備えてもよい。
Ag0.05Cu0.05Sn残部 変色あり
Ag0.1Sn残部 変色あり
Cu0.1Sn残部 変色あり
Sb0.1Sn残部 変色あり
In0.1Sn残部 変色あり
Pb0.1Sn残部 変色あり
核としては、Cu以外にも、Ni、Ag、Bi、Pb、Al、Sn、Fe、Zn、In、Ge、Sb、Co、Mn、Au、Si、Pt、Cr、La、Mo、Nb、Pd、Ti、Zr、Mgの金属単体やこれらの二種以上の合金、金属酸化物、あるいは金属混合酸化物により構成してもよいし、樹脂材料によって構成してもよい。樹脂材料としては、例えばアミノ樹脂、アクリル樹脂、エチレン−酢酸ビニル樹脂、スチレン−ブタジエンブロック共重合体、ポリエステル樹脂、メラミン樹脂、フェノール樹脂、アルキド樹脂、ポリイミド樹脂、ウレタン樹脂、エポキシ樹脂、架橋樹脂等からなるものが挙げられる。中でもポリアセチレン、ポリピロール、ポリチオフェン、ポリアニリンなどの導電性プラスチック等を使用するのが好ましい。核を樹脂材料とした場合、樹脂の核と、樹脂の核の外方を被覆するCuめっき層と、Cuめっき層の表面を被覆するNi等の下地めっき層と、下地めっき層の表面を被覆するはんだめっき層によりCu核ボールを構成することができる。なお、Cu核ボールの積層構造は、上記例に限定されるものではない。
めっき液としては、形成するはんだ組成に応じて公知のめっき液を適宜使用することができる。
<黄色度>
核ボールの黄色度は、コニカミノルタ製CM−2600d型分光測色計を使用して測定した。L*a*b*表色系における黄色度が8.5以下のものを「良」とし、各表では「○」で表示し、L*a*b*表色系における黄色度が8.5超過のものを「不良」と判定し、各表では「×」と表示した。
<接合時の不良>
黄色度を測定した各サンプルと同じ製造バッチで作製した各実施例及び各比較例における組成からなる核ボール(サンプル)を10個準備し、それぞれを基板に通常のリフロー処理により接合した。接合時の不良については、10個全てのサンプルにおいて接合不良が測定されなかったものを「良」とし各表では「○」で表示した。他方、1つのサンプルでも接合時に位置ずれ又はボールミッシングが発生するか、1つのサンプルでも接合時に核がはじけ飛ばされたものを「不良」と判定し、表では「×」で表示した。
・核12の直径 :300μm
・Ni下地めっき層14の膜厚 :片側2μm
・はんだめっき層16の膜厚 :片側1μm、片側18μm又は38μm
・Snめっき層20を除く核ボール10の直径:306μm、340μm又は380μm
Ni下地めっき層14のめっき方法は、核がCuのサンプルについては、電気めっき工法(バレル電気めっき)を使用し、核が樹脂であるサンプルについては、無電解めっき工法を使用し、核がアルミニウムであるサンプルについては、核であるアルミニウムに対してダブルジンケート処理を施し、処理後のアルミニウムに対して、無電解めっき工法にてNiめっきを薄くめっきし、その後、電気めっき工法にて狙いの厚さに成長させる方法を使用した。
はんだめっき層16のめっき方法は電気めっき工法(バレル電気めっき)にて作製した。
その後、試料をメタンスルホン酸Sn、有機酸及び界面活性剤を含むめっき液に投入し、各実施例及び各比較例(Snめっき層20を形成しない比較例を除く)に記載のSnめっき層20の厚さになるまでバレル電気めっきを行った。
12 核
14 下地めっき層
16 はんだめっき層(はんだ層)
20 Snめっき層(Sn層)
Claims (6)
- 核と、前記核の外方に設けられたSnと、Ag、Cu、Sb、Ni、Co、Ge、Ga,Fe、Al、In、Cd、Zn、Pb、Au、P、S、Si、Ti、Mg、Pd及びPtのうち少なくともいずれか1つ以上の元素のみを含むはんだ合金からなるはんだ層と、前記はんだ層の外方に設けられたSn層とを備え、
前記はんだ層の厚さが片側1μm以上となり、
前記Sn層の厚さが片側0.1μm以上となり、
前記Sn層の厚さが前記はんだ層の厚さの0.215%以上36%以下の厚さとなることを特徴とする核材料。 - 前記はんだ層が(Sn−Ag−Cu)系はんだであることを特徴とする請求項1に記載の核材料。
- 前記核と前記はんだ層との間に、Ni、Co、Ni−Co、Ni―P及びNi―Bのいずれかで形成された下地めっき層が設けられることを特徴とする請求項1又は2のいずれかに記載の核材料。
- 請求項1乃至3のいずれか1項に記載の核材料であって、核としてCuボール又はCuカラムが用いられていることを特徴とする核材料。
- 請求項1乃至4のいずれか1項に記載の核材料がはんだバンプとして使用されることを特徴とする電子部品。
- 請求項1乃至5のいずれか1項に記載の核材料を電極上に搭載する工程と、
搭載した前記核材料を加熱することによりバンプ電極を形成する工程と、
を備えることを特徴とするバンプ電極の形成方法。
Priority Applications (6)
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