PT1222196E - Deposicao de peliculas utilizando precursores de organossilsesquioxano - Google Patents

Deposicao de peliculas utilizando precursores de organossilsesquioxano

Info

Publication number
PT1222196E
PT1222196E PT00973601T PT00973601T PT1222196E PT 1222196 E PT1222196 E PT 1222196E PT 00973601 T PT00973601 T PT 00973601T PT 00973601 T PT00973601 T PT 00973601T PT 1222196 E PT1222196 E PT 1222196E
Authority
PT
Portugal
Prior art keywords
precursors
films
organosylschoxane
deposition
alkyl groups
Prior art date
Application number
PT00973601T
Other languages
English (en)
Inventor
Nigel P Hacker
Original Assignee
Honeywell Intellectual Propert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Intellectual Propert filed Critical Honeywell Intellectual Propert
Publication of PT1222196E publication Critical patent/PT1222196E/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • C09D183/08—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen, and oxygen
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/21—Cyclic compounds having at least one ring containing silicon, but no carbon in the ring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/24999—Inorganic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicon Polymers (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
PT00973601T 1999-10-18 2000-10-17 Deposicao de peliculas utilizando precursores de organossilsesquioxano PT1222196E (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/420,218 US6472076B1 (en) 1999-10-18 1999-10-18 Deposition of organosilsesquioxane films

Publications (1)

Publication Number Publication Date
PT1222196E true PT1222196E (pt) 2004-05-31

Family

ID=23665555

Family Applications (1)

Application Number Title Priority Date Filing Date
PT00973601T PT1222196E (pt) 1999-10-18 2000-10-17 Deposicao de peliculas utilizando precursores de organossilsesquioxano

Country Status (10)

Country Link
US (1) US6472076B1 (pt)
EP (1) EP1222196B1 (pt)
JP (1) JP2003512383A (pt)
KR (1) KR100591917B1 (pt)
AT (1) ATE257839T1 (pt)
AU (1) AU1209701A (pt)
DE (1) DE60007769T2 (pt)
DK (1) DK1222196T3 (pt)
PT (1) PT1222196E (pt)
WO (1) WO2001029052A1 (pt)

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KR100591917B1 (ko) 2006-06-22
AU1209701A (en) 2001-04-30
EP1222196B1 (en) 2004-01-14
EP1222196A1 (en) 2002-07-17
ATE257839T1 (de) 2004-01-15
DE60007769D1 (de) 2004-02-19
KR20020042727A (ko) 2002-06-05
US6472076B1 (en) 2002-10-29
JP2003512383A (ja) 2003-04-02
DK1222196T3 (da) 2004-04-13
DE60007769T2 (de) 2004-12-02
WO2001029052A1 (en) 2001-04-26

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