PL2590757T3 - Sposób wytwarzania subtelnie strukturyzowanych powierzchni - Google Patents
Sposób wytwarzania subtelnie strukturyzowanych powierzchniInfo
- Publication number
- PL2590757T3 PL2590757T3 PL11738658T PL11738658T PL2590757T3 PL 2590757 T3 PL2590757 T3 PL 2590757T3 PL 11738658 T PL11738658 T PL 11738658T PL 11738658 T PL11738658 T PL 11738658T PL 2590757 T3 PL2590757 T3 PL 2590757T3
- Authority
- PL
- Poland
- Prior art keywords
- structured surfaces
- finely structured
- producing finely
- producing
- structured
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/31—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier the adhesive effect being based on a Gecko structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Paints Or Removers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010026490A DE102010026490A1 (de) | 2010-07-07 | 2010-07-07 | Verfahren zur Herstellung von feinstrukturierten Oberflächen |
EP11738658.1A EP2590757B1 (de) | 2010-07-07 | 2011-07-06 | Verfahren zur herstellung von feinstrukturierten oberflächen |
Publications (1)
Publication Number | Publication Date |
---|---|
PL2590757T3 true PL2590757T3 (pl) | 2017-06-30 |
Family
ID=44486974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL11738658T PL2590757T3 (pl) | 2010-07-07 | 2011-07-06 | Sposób wytwarzania subtelnie strukturyzowanych powierzchni |
Country Status (8)
Country | Link |
---|---|
US (1) | US10005103B2 (pl) |
EP (1) | EP2590757B1 (pl) |
JP (1) | JP5889294B2 (pl) |
CN (1) | CN103209770B (pl) |
DE (1) | DE102010026490A1 (pl) |
ES (1) | ES2605956T3 (pl) |
PL (1) | PL2590757T3 (pl) |
WO (1) | WO2012004319A1 (pl) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012101072A1 (de) | 2012-02-09 | 2013-08-14 | Visi/One Gmbh | Schautafel |
DE102012008542B4 (de) | 2012-05-02 | 2016-03-24 | epos-service Ltd. | Lagerungselement und medizinische Vorrichtung zur Lagerung von Patienten |
JP5827180B2 (ja) * | 2012-06-18 | 2015-12-02 | 富士フイルム株式会社 | インプリント用硬化性組成物と基板の密着用組成物およびこれを用いた半導体デバイス |
CN102887477B (zh) * | 2012-10-11 | 2015-04-22 | 无锡英普林纳米科技有限公司 | 聚合物表面纳米线阵列及其制备方法 |
US9962863B2 (en) * | 2013-01-03 | 2018-05-08 | Elwha Llc | Nanoimprint lithography |
US9561603B2 (en) | 2013-01-03 | 2017-02-07 | Elwha, Llc | Nanoimprint lithography |
US9302424B2 (en) | 2013-01-03 | 2016-04-05 | Elwha, Llc | Nanoimprint lithography |
KR20160020427A (ko) * | 2013-06-14 | 2016-02-23 | 코베스트로 도이칠란트 아게 | 저-오일링, 내스크래치성, 및 내용매성 폴리카르보네이트 필름 |
US20160124205A1 (en) * | 2014-10-27 | 2016-05-05 | Yale University | Simple, Fast and Plasma-Free Method of Fabricating PDMS Microstructures on Glass by Pop Slide Pattering |
CN107405815A (zh) * | 2014-12-10 | 2017-11-28 | 查尔斯斯塔克布料实验室公司 | 微小楔形物的聚合物及其制造方法 |
KR101694605B1 (ko) * | 2015-01-15 | 2017-01-09 | 재단법인 멀티스케일 에너지시스템 연구단 | 계층적 미세구조물, 이를 제조하기 위한 몰드 및 이 몰드의 제조방법 |
DE102015103965A1 (de) | 2015-03-17 | 2016-09-22 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Komposit-Pillarstrukturen |
US10394126B2 (en) * | 2015-07-17 | 2019-08-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photolithography process and materials |
DE102015115004A1 (de) | 2015-09-07 | 2017-03-09 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Verfahren zur Herstellung von strukturierten Oberflächen |
EP3173449A1 (de) | 2015-11-27 | 2017-05-31 | BASF Coatings GmbH | Verbund aus zwei festkörpern |
DE102015122788A1 (de) | 2015-12-23 | 2017-06-29 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Verfahren zur Herstellung von leitfähigen Strukturen |
DE102016113956A1 (de) * | 2016-07-28 | 2018-02-01 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Vorrichtung mit einer strukturierten Beschichtung |
TWI651203B (zh) * | 2017-03-30 | 2019-02-21 | 台虹科技股份有限公司 | 無膠膠帶的製造方法 |
PL3415316T3 (pl) * | 2017-06-13 | 2020-10-05 | Hymmen GmbH Maschinen- und Anlagenbau | Sposób i urządzenie do wytwarzania strukturyzowanej powierzchni |
US10569298B2 (en) * | 2017-09-27 | 2020-02-25 | Intel Corporation | Substrate with epoxy cured by ultraviolet laser |
JP6640941B2 (ja) * | 2018-08-27 | 2020-02-05 | 住友精化株式会社 | ポジ型フォトレジスト |
CN109264875B (zh) * | 2018-10-12 | 2021-09-28 | 山东理工大学 | Per-pamam和pesa无磷复合阻垢剂 |
DE102019206431A1 (de) | 2019-05-03 | 2020-11-05 | Hymmen GmbH Maschinen- und Anlagenbau | Verfahren zum Herstellen einer Struktur auf einer Oberfläche |
CN113905890A (zh) * | 2019-06-03 | 2022-01-07 | 巴斯夫涂料有限公司 | 通过用于转移的压花工具的预处理将压花结构转移到涂料组合物的方法 |
CN111142336A (zh) * | 2020-01-17 | 2020-05-12 | 天津瑞宏汽车配件制造有限公司 | 一种柔性光刻胶组合物 |
DE102020108107B3 (de) * | 2020-03-24 | 2020-10-15 | Simonswerk Gmbh | Befestigung von Abdeckplatten |
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US6737160B1 (en) | 1999-12-20 | 2004-05-18 | The Regents Of The University Of California | Adhesive microstructure and method of forming same |
US8815385B2 (en) * | 1999-12-20 | 2014-08-26 | The Regents Of The University Of California | Controlling peel strength of micron-scale structures |
DE10001135A1 (de) * | 2000-01-13 | 2001-07-19 | Inst Neue Mat Gemein Gmbh | Verfahren zur Herstellung eines mikrostrukturierten Oberflächenreliefs durch Prägen thixotroper Schichten |
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DE10223234B4 (de) | 2002-05-24 | 2005-02-03 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur Herstellung mikrostrukturierter Oberflächen mit gesteigerter Adhäsion und adhäsionssteigernd modifizierte Oberflächen |
DE10254990A1 (de) * | 2002-11-26 | 2004-07-22 | Technotrans Ag | Verfahren zum Entfernen von organischen Rückständen von feinstrukturierten Oberflächen |
US20050085085A1 (en) | 2003-10-17 | 2005-04-21 | Yan Borodovsky | Composite patterning with trenches |
DE102004009437A1 (de) * | 2004-02-24 | 2005-09-15 | Basf Ag | Strahlungshärtbare Verbundschichtplatte oder -folie |
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US8142700B2 (en) * | 2006-12-14 | 2012-03-27 | Carnegie Mellon University | Dry adhesives and methods for making dry adhesives |
US8027086B2 (en) | 2007-04-10 | 2011-09-27 | The Regents Of The University Of Michigan | Roll to roll nanoimprint lithography |
DE102007021249A1 (de) * | 2007-05-07 | 2008-11-20 | Singulus Technologies Ag | Sauerstoff-Inhibierung eines härtbaren Materials beim Strukturieren von Substraten |
US20090114618A1 (en) | 2007-06-21 | 2009-05-07 | 3M Innovative Properties Company | Method of making hierarchical articles |
WO2009002644A2 (en) * | 2007-06-21 | 2008-12-31 | 3M Innovative Properties Company | Methods of making hierarchical articles |
US20100252177A1 (en) | 2007-10-26 | 2010-10-07 | Bae Systems Plc | Adhesive microstructures |
US8293354B2 (en) * | 2008-04-09 | 2012-10-23 | The Regents Of The University Of Michigan | UV curable silsesquioxane resins for nanoprint lithography |
EP2280813B1 (en) * | 2008-04-18 | 2017-06-07 | Massachusetts Institute Of Technology | Imprint patterning of irregular surface |
JP5325458B2 (ja) | 2008-05-23 | 2013-10-23 | 昭和電工株式会社 | 磁気記録媒体の製造方法 |
WO2009158631A1 (en) * | 2008-06-26 | 2009-12-30 | President And Fellows Of Harvard College | Versatile high aspect ratio actuatable nanostructured materials through replication |
JP5284701B2 (ja) | 2008-07-08 | 2013-09-11 | 三菱レイヨン株式会社 | 硬化性組成物及びパターン形成方法 |
-
2010
- 2010-07-07 DE DE102010026490A patent/DE102010026490A1/de not_active Withdrawn
-
2011
- 2011-07-06 JP JP2013517380A patent/JP5889294B2/ja active Active
- 2011-07-06 WO PCT/EP2011/061440 patent/WO2012004319A1/de active Application Filing
- 2011-07-06 PL PL11738658T patent/PL2590757T3/pl unknown
- 2011-07-06 EP EP11738658.1A patent/EP2590757B1/de active Active
- 2011-07-06 US US13/808,105 patent/US10005103B2/en active Active
- 2011-07-06 CN CN201180043016.5A patent/CN103209770B/zh active Active
- 2011-07-06 ES ES11738658.1T patent/ES2605956T3/es active Active
Also Published As
Publication number | Publication date |
---|---|
CN103209770A (zh) | 2013-07-17 |
US20130101796A1 (en) | 2013-04-25 |
US10005103B2 (en) | 2018-06-26 |
ES2605956T3 (es) | 2017-03-17 |
EP2590757B1 (de) | 2016-09-07 |
EP2590757A1 (de) | 2013-05-15 |
CN103209770B (zh) | 2014-12-17 |
WO2012004319A1 (de) | 2012-01-12 |
DE102010026490A1 (de) | 2012-01-12 |
JP2013539201A (ja) | 2013-10-17 |
JP5889294B2 (ja) | 2016-03-22 |
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