PL1883119T3 - Półprzewodnikowa struktura warstwowa z supersiecią - Google Patents

Półprzewodnikowa struktura warstwowa z supersiecią

Info

Publication number
PL1883119T3
PL1883119T3 PL07013823T PL07013823T PL1883119T3 PL 1883119 T3 PL1883119 T3 PL 1883119T3 PL 07013823 T PL07013823 T PL 07013823T PL 07013823 T PL07013823 T PL 07013823T PL 1883119 T3 PL1883119 T3 PL 1883119T3
Authority
PL
Poland
Prior art keywords
superlattice
semiconductor layer
layer structure
semiconductor
layer
Prior art date
Application number
PL07013823T
Other languages
English (en)
Polish (pl)
Inventor
Christoph Eichler
Alfred Lell
Andreas Miler
Marc Schillgalies
Original Assignee
Osram Opto Semiconductors Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102006046228A external-priority patent/DE102006046228A1/de
Application filed by Osram Opto Semiconductors Gmbh filed Critical Osram Opto Semiconductors Gmbh
Publication of PL1883119T3 publication Critical patent/PL1883119T3/pl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/815—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW]
    • H10D62/8161—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices
    • H10D62/8162—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation
    • H10D62/8164—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation of structures having periodic or quasi-periodic potential variation, e.g. superlattices or multiple quantum wells [MQW] potential variation due to variations in composition or crystallinity, e.g. heterojunction superlattices having quantum effects only in the vertical direction, i.e. layered structures having quantum effects solely resulting from vertical potential variation comprising only semiconductor materials 
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/2004—Confining in the direction perpendicular to the layer structure
    • H01S5/2009—Confining in the direction perpendicular to the layer structure by using electron barrier layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H01S5/3215—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities graded composition cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H01S5/3216—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities quantum well or superlattice cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
  • Light Receiving Elements (AREA)
  • Recrystallisation Techniques (AREA)
PL07013823T 2006-07-27 2007-07-13 Półprzewodnikowa struktura warstwowa z supersiecią PL1883119T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006034822 2006-07-27
DE102006046228A DE102006046228A1 (de) 2006-07-27 2006-09-29 Halbleiter-Schichtstruktur mit Übergitter
EP07013823.5A EP1883119B1 (de) 2006-07-27 2007-07-13 Halbleiter-Schichtstruktur mit Übergitter

Publications (1)

Publication Number Publication Date
PL1883119T3 true PL1883119T3 (pl) 2016-04-29

Family

ID=38616313

Family Applications (1)

Application Number Title Priority Date Filing Date
PL07013823T PL1883119T3 (pl) 2006-07-27 2007-07-13 Półprzewodnikowa struktura warstwowa z supersiecią

Country Status (4)

Country Link
US (1) US8022392B2 (enExample)
EP (1) EP1883119B1 (enExample)
JP (1) JP5430829B2 (enExample)
PL (1) PL1883119T3 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060039498A1 (en) * 2004-08-19 2006-02-23 De Figueiredo Rui J P Pre-distorter for orthogonal frequency division multiplexing systems and method of operating the same
EP1883141B1 (de) * 2006-07-27 2017-05-24 OSRAM Opto Semiconductors GmbH LD oder LED mit Übergitter-Mantelschicht
EP1883140B1 (de) * 2006-07-27 2013-02-27 OSRAM Opto Semiconductors GmbH LD oder LED mit Übergitter-Mantelschicht und Dotierungsgradienten
KR101669259B1 (ko) * 2009-09-28 2016-10-25 가부시키가이샤 도쿠야마 적층체의 제조방법
KR102042181B1 (ko) * 2012-10-22 2019-11-07 엘지이노텍 주식회사 발광소자
FR3028670B1 (fr) * 2014-11-18 2017-12-22 Commissariat Energie Atomique Structure semi-conductrice a couche de semi-conducteur du groupe iii-v ou ii-vi comprenant une structure cristalline a mailles cubiques ou hexagonales
US20240379765A1 (en) * 2023-05-10 2024-11-14 Gan Systems Inc. Superlattice epitaxial structure with varying lattice parameter differences

Family Cites Families (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145686A (ja) 1984-01-09 1985-08-01 Nec Corp 半導体レ−ザ
US4882734A (en) 1988-03-09 1989-11-21 Xerox Corporation Quantum well heterostructure lasers with low current density threshold and higher TO values
US4839899A (en) * 1988-03-09 1989-06-13 Xerox Corporation Wavelength tuning of multiple quantum well (MQW) heterostructure lasers
JPH01241192A (ja) 1988-03-23 1989-09-26 Fujitsu Ltd 半導体装置
US4961197A (en) 1988-09-07 1990-10-02 Hitachi, Ltd. Semiconductor laser device
CA1299719C (en) 1989-01-13 1992-04-28 Hui Chun Liu Semiconductor superlattice infrared source
US5060028A (en) 1989-01-19 1991-10-22 Hewlett-Packard Company High band-gap opto-electronic device
US4984242A (en) 1989-09-18 1991-01-08 Spectra Diode Laboratories, Inc. GaAs/AlGaAs heterostructure laser containing indium
US5319657A (en) 1991-10-08 1994-06-07 Matsushita Electric Industrial Co., Ltd. Semiconductor laser of modulation doping quantum well structure with stopper against dopant dispersion and manufacturing method thereof
US5198682A (en) 1991-11-12 1993-03-30 Hughes Aircraft Company Multiple quantum well superlattice infrared detector with graded conductive band
JPH0794829A (ja) * 1993-04-05 1995-04-07 Matsushita Electric Ind Co Ltd 半導体レーザ
US5395793A (en) 1993-12-23 1995-03-07 National Research Council Of Canada Method of bandgap tuning of semiconductor quantum well structures
US5570386A (en) 1994-04-04 1996-10-29 Lucent Technologies Inc. Semiconductor laser
US5497012A (en) 1994-06-15 1996-03-05 Hewlett-Packard Company Unipolar band minima devices
US5670798A (en) 1995-03-29 1997-09-23 North Carolina State University Integrated heterostructures of Group III-V nitride semiconductor materials including epitaxial ohmic contact non-nitride buffer layer and methods of fabricating same
US5588015A (en) 1995-08-22 1996-12-24 University Of Houston Light emitting devices based on interband transitions in type-II quantum well heterostructures
JPH1022524A (ja) * 1996-07-02 1998-01-23 Omron Corp 半導体発光素子
US5936989A (en) 1997-04-29 1999-08-10 Lucent Technologies, Inc. Quantum cascade laser
US6677619B1 (en) 1997-01-09 2004-01-13 Nichia Chemical Industries, Ltd. Nitride semiconductor device
WO1998031055A1 (en) 1997-01-09 1998-07-16 Nichia Chemical Industries, Ltd. Nitride semiconductor device
JP3014339B2 (ja) 1997-04-25 2000-02-28 カナレ電気株式会社 量子波干渉層を有した半導体素子
JP3642157B2 (ja) 1997-05-26 2005-04-27 ソニー株式会社 ｐ型ＩＩＩ族ナイトライド化合物半導体、発光ダイオードおよび半導体レーザ
CA2298491C (en) 1997-07-25 2009-10-06 Nichia Chemical Industries, Ltd. Nitride semiconductor device
JPH1168158A (ja) 1997-08-20 1999-03-09 Sanyo Electric Co Ltd 窒化ガリウム系化合物半導体装置
JP3468082B2 (ja) 1998-02-26 2003-11-17 日亜化学工業株式会社 窒化物半導体素子
JP2000091708A (ja) * 1998-09-14 2000-03-31 Toshiba Corp 半導体発光素子
JP2000244070A (ja) * 1999-02-19 2000-09-08 Sony Corp 半導体装置および半導体発光素子
CN1347581A (zh) * 1999-03-26 2002-05-01 松下电器产业株式会社 带有应变补偿层的半导体结构及其制备方法
GB9913950D0 (en) 1999-06-15 1999-08-18 Arima Optoelectronics Corp Unipolar light emitting devices based on iii-nitride semiconductor superlattices
DE19955747A1 (de) 1999-11-19 2001-05-23 Osram Opto Semiconductors Gmbh Optische Halbleitervorrichtung mit Mehrfach-Quantentopf-Struktur
US6441393B2 (en) 1999-11-17 2002-08-27 Lumileds Lighting U.S., Llc Semiconductor devices with selectively doped III-V nitride layers
JP2001168385A (ja) 1999-12-06 2001-06-22 Toyoda Gosei Co Ltd Ｉｉｉ族窒化物系化合物半導体素子及びｉｉｉ族窒化物系化合物半導体発光素子
US6535536B2 (en) 2000-04-10 2003-03-18 Fuji Photo Film Co., Ltd. Semiconductor laser element
JP2002057410A (ja) * 2000-05-29 2002-02-22 Fuji Photo Film Co Ltd 半導体レーザ素子
US6556604B1 (en) * 2000-11-08 2003-04-29 Lucent Technologies Inc. Flat minibands with spatially symmetric wavefunctions in intersubband superlattice light emitters
JP3453558B2 (ja) 2000-12-25 2003-10-06 松下電器産業株式会社 窒化物半導体素子
DE60230602D1 (de) 2001-03-28 2009-02-12 Nichia Corp Nitrid-halbleiterelement
US6489636B1 (en) 2001-03-29 2002-12-03 Lumileds Lighting U.S., Llc Indium gallium nitride smoothing structures for III-nitride devices
US6649942B2 (en) 2001-05-23 2003-11-18 Sanyo Electric Co., Ltd. Nitride-based semiconductor light-emitting device
US6630692B2 (en) 2001-05-29 2003-10-07 Lumileds Lighting U.S., Llc III-Nitride light emitting devices with low driving voltage
US7692182B2 (en) 2001-05-30 2010-04-06 Cree, Inc. Group III nitride based quantum well light emitting device structures with an indium containing capping structure
US6958497B2 (en) 2001-05-30 2005-10-25 Cree, Inc. Group III nitride based light emitting diode structures with a quantum well and superlattice, group III nitride based quantum well structures and group III nitride based superlattice structures
JP4057802B2 (ja) 2001-09-05 2008-03-05 株式会社日立製作所 半導体光素子
US6618413B2 (en) * 2001-12-21 2003-09-09 Xerox Corporation Graded semiconductor layers for reducing threshold voltage for a nitride-based laser diode structure
US7919791B2 (en) 2002-03-25 2011-04-05 Cree, Inc. Doped group III-V nitride materials, and microelectronic devices and device precursor structures comprising same
JP4119158B2 (ja) * 2002-04-23 2008-07-16 三菱電機株式会社 傾斜状多重量子バリアを用いた半導体発光素子
JP4221697B2 (ja) 2002-06-17 2009-02-12 日本電気株式会社 半導体装置
US20030235224A1 (en) 2002-06-19 2003-12-25 Ohlander Ulf Roald Strained quantum-well structure having ternary-alloy material in both quantum-well layers and barrier layers
US20060139743A1 (en) 2002-11-20 2006-06-29 Marsh John H Semiconductor optical device with beam focusing
GB0306279D0 (en) * 2003-03-19 2003-04-23 Bookham Technology Plc High power semiconductor laser with large optical superlattice waveguide
WO2005006506A1 (ja) * 2003-07-10 2005-01-20 Nichia Corporation 窒化物半導体レーザ素子及びそれを用いたレーザー装置
KR100580623B1 (ko) 2003-08-04 2006-05-16 삼성전자주식회사 초격자 구조의 반도체층을 갖는 반도체 소자 및 그 제조방법
TWI228320B (en) 2003-09-09 2005-02-21 Ind Tech Res Inst An avalanche photo-detector(APD) with high saturation power, high gain-bandwidth product
JP3909605B2 (ja) 2003-09-25 2007-04-25 松下電器産業株式会社 窒化物半導体素子およびその製造方法
DE102004009531B4 (de) 2004-02-20 2007-03-01 Forschungszentrum Rossendorf E.V. Quanten-Kaskaden-Laser-Struktur
US7294868B2 (en) 2004-06-25 2007-11-13 Finisar Corporation Super lattice tunnel junctions
KR100662191B1 (ko) 2004-12-23 2006-12-27 엘지이노텍 주식회사 질화물 반도체 발광소자 및 그 제조방법
US7885306B2 (en) 2006-06-30 2011-02-08 Osram Opto Semiconductors Gmbh Edge-emitting semiconductor laser chip
EP1883141B1 (de) 2006-07-27 2017-05-24 OSRAM Opto Semiconductors GmbH LD oder LED mit Übergitter-Mantelschicht
EP1883140B1 (de) 2006-07-27 2013-02-27 OSRAM Opto Semiconductors GmbH LD oder LED mit Übergitter-Mantelschicht und Dotierungsgradienten

Also Published As

Publication number Publication date
JP5430829B2 (ja) 2014-03-05
US8022392B2 (en) 2011-09-20
EP1883119B1 (de) 2015-11-04
US20080054252A1 (en) 2008-03-06
EP1883119A3 (de) 2008-11-26
JP2008034850A (ja) 2008-02-14
EP1883119A2 (de) 2008-01-30

Similar Documents

Publication Publication Date Title
EP2028692A4 (en) Semiconductor device
BRPI0717328A2 (pt) Composto orgânico, camada fotovoltaica e dispositivo fotovoltaico orgânico
DE602007013318D1 (de) Halbleiterbauelement
EP2248406A4 (en) HEATSINK DEVICE
EP1942028A4 (en) SEAT
DE602007001614D1 (de) Wabenstruktur
EP2159852A4 (en) SEMICONDUCTOR LIGHT EMITTING DEVICE
EP1944192A4 (en) SEAT
DE602007013972D1 (de) Halbleiterbauelement
DE602007002105D1 (de) Halbleiterbauelement
DE102009052393B8 (de) Halbleiterherstellungsverfahren
EP2224484A4 (en) SEMICONDUCTOR MODULE
GB0722016D0 (en) A semiconductor layer structure
TWI346983B (en) Wafer level package structure with build up layers
EP1985804A4 (en) COOLING STRUCTURE
DE602008004858D1 (de) Halbleiterpaket
TWI340470B (en) Semiconductor structure
DE112008003200A5 (de) Strahlungsemittierender Halbleiterkörper
DE602007005033D1 (de) Verschlossene Wabenstruktur
EP2047013A4 (en) BROADBAND SEMICONDUCTOR MATERIALS
PL1883119T3 (pl) Półprzewodnikowa struktura warstwowa z supersiecią
DK2209958T3 (da) Strukturbærer
TWI373136B (en) Multiple-transistor semiconductor structure
ATE488617T1 (de) Al-ti-ru-n-c hartstoffschicht
TWI420605B (zh) 半導體元件及製造方法