NO975695L - Fremgangsmåte for fremstilling av en innretning for en flat diffraksjonsgitter-lysventil - Google Patents

Fremgangsmåte for fremstilling av en innretning for en flat diffraksjonsgitter-lysventil

Info

Publication number
NO975695L
NO975695L NO975695A NO975695A NO975695L NO 975695 L NO975695 L NO 975695L NO 975695 A NO975695 A NO 975695A NO 975695 A NO975695 A NO 975695A NO 975695 L NO975695 L NO 975695L
Authority
NO
Norway
Prior art keywords
layer
etched
conducting layer
substrate
forming
Prior art date
Application number
NO975695A
Other languages
English (en)
Norwegian (no)
Other versions
NO975695D0 (no
Inventor
Jonathan G Bornstein
William C Banyai
David M Bloom
Ralph G Whitten
Bryan P Staker
Original Assignee
Silicon Light Machines Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silicon Light Machines Inc filed Critical Silicon Light Machines Inc
Publication of NO975695D0 publication Critical patent/NO975695D0/no
Publication of NO975695L publication Critical patent/NO975695L/no

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Micromachines (AREA)
NO975695A 1995-06-07 1997-12-05 Fremgangsmåte for fremstilling av en innretning for en flat diffraksjonsgitter-lysventil NO975695L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/480,459 US5661592A (en) 1995-06-07 1995-06-07 Method of making and an apparatus for a flat diffraction grating light valve
PCT/US1996/009255 WO1996041226A1 (en) 1995-06-07 1996-06-05 A method of making and an apparatus for a flat diffraction grating light valve

Publications (2)

Publication Number Publication Date
NO975695D0 NO975695D0 (no) 1997-12-05
NO975695L true NO975695L (no) 1997-12-05

Family

ID=23908065

Family Applications (1)

Application Number Title Priority Date Filing Date
NO975695A NO975695L (no) 1995-06-07 1997-12-05 Fremgangsmåte for fremstilling av en innretning for en flat diffraksjonsgitter-lysventil

Country Status (10)

Country Link
US (1) US5661592A (ja)
EP (1) EP0830629B1 (ja)
JP (1) JP3016871B2 (ja)
KR (1) KR100306085B1 (ja)
CN (1) CN1153081C (ja)
AT (1) ATE183590T1 (ja)
AU (1) AU6156496A (ja)
DE (1) DE69603857T2 (ja)
NO (1) NO975695L (ja)
WO (1) WO1996041226A1 (ja)

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US5661592A (en) 1997-08-26
EP0830629B1 (en) 1999-08-18
JP3016871B2 (ja) 2000-03-06
WO1996041226A1 (en) 1996-12-19
AU6156496A (en) 1996-12-30
KR19990022268A (ko) 1999-03-25
EP0830629A1 (en) 1998-03-25
ATE183590T1 (de) 1999-09-15
JPH10510375A (ja) 1998-10-06
DE69603857T2 (de) 2000-01-13
NO975695D0 (no) 1997-12-05
CN1153081C (zh) 2004-06-09
CN1187249A (zh) 1998-07-08
KR100306085B1 (ko) 2001-11-02
DE69603857D1 (de) 1999-09-23

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