NO20082195L - Abrasivt partikkelmateriale, og fremgangsmate for a gjore er arbeidsstykke plant ved anvendelse derav - Google Patents

Abrasivt partikkelmateriale, og fremgangsmate for a gjore er arbeidsstykke plant ved anvendelse derav

Info

Publication number
NO20082195L
NO20082195L NO20082195A NO20082195A NO20082195L NO 20082195 L NO20082195 L NO 20082195L NO 20082195 A NO20082195 A NO 20082195A NO 20082195 A NO20082195 A NO 20082195A NO 20082195 L NO20082195 L NO 20082195L
Authority
NO
Norway
Prior art keywords
particulate material
planted
abrasive particulate
making workpiece
alumina particles
Prior art date
Application number
NO20082195A
Other languages
English (en)
Inventor
Andrew G Haerle
Jun Wang
Original Assignee
Saint Gobain Ceramics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Ceramics filed Critical Saint Gobain Ceramics
Publication of NO20082195L publication Critical patent/NO20082195L/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/02—Amorphous compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/54—Particles characterised by their aspect ratio, i.e. the ratio of sizes in the longest to the shortest dimension
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/10—Solid density
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Abrasivt partikkelmateriale som innbefatter aluminapartikler. Aluminapartiklene innbefatter et transisjonsalumina og minst 5,0 vekt% av en amorf fase. Partiklene av transisjonsalumina har en densitet som er ikke større enn 3,20 g/CM3.
NO20082195A 2005-10-14 2008-05-13 Abrasivt partikkelmateriale, og fremgangsmate for a gjore er arbeidsstykke plant ved anvendelse derav NO20082195L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/251,633 US8685123B2 (en) 2005-10-14 2005-10-14 Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
PCT/US2006/040295 WO2007047547A2 (en) 2005-10-14 2006-10-13 Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

Publications (1)

Publication Number Publication Date
NO20082195L true NO20082195L (no) 2008-07-03

Family

ID=37722443

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20082195A NO20082195L (no) 2005-10-14 2008-05-13 Abrasivt partikkelmateriale, og fremgangsmate for a gjore er arbeidsstykke plant ved anvendelse derav

Country Status (18)

Country Link
US (1) US8685123B2 (no)
EP (1) EP1934300B1 (no)
JP (1) JP5384938B2 (no)
KR (1) KR101120417B1 (no)
CN (1) CN101370896B (no)
AT (1) ATE555179T1 (no)
AU (1) AU2006304356B2 (no)
BR (1) BRPI0617413A2 (no)
CA (1) CA2625273C (no)
IL (1) IL190737A0 (no)
MY (1) MY145461A (no)
NO (1) NO20082195L (no)
NZ (1) NZ567318A (no)
RU (1) RU2401856C2 (no)
TW (1) TWI308928B (no)
UA (1) UA87938C2 (no)
WO (1) WO2007047547A2 (no)
ZA (1) ZA200803185B (no)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8685123B2 (en) 2005-10-14 2014-04-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
US20070287004A1 (en) * 2006-05-25 2007-12-13 Gottzmann Andreas M Laminate and Method of Manufacture
FR2906800B1 (fr) * 2006-10-09 2008-11-28 Rhodia Recherches & Tech Suspension liquide et poudre de particules d'oxyde de cerium, procedes de preparation de celles-ci et utilisation dans le polissage
US7837888B2 (en) * 2006-11-13 2010-11-23 Cabot Microelectronics Corporation Composition and method for damascene CMP
US20110003142A1 (en) * 2008-03-03 2011-01-06 University Of Florida Research Foundation, Inc. Nanoparticle sol-gel composite hybrid transparent coating materials
WO2009151120A1 (ja) † 2008-06-13 2009-12-17 株式会社 フジミインコーポレーテッド アルミニウム酸化物粒子及びそれを含有する研磨用組成物
US8382016B2 (en) * 2009-02-25 2013-02-26 Thiele Kaolin Company Nano particle mineral pigment
CA2755096A1 (en) * 2009-03-11 2010-09-16 Saint-Gobain Abrasives, Inc. Abrasive articles including fused zirconia alumina grain having an improved shape
KR20140000496A (ko) * 2012-06-22 2014-01-03 에스케이하이닉스 주식회사 연마 조성물, 이의 제조 방법 및 이를 이용한 화학적 기계적 연마 방법
MX2016004000A (es) * 2013-09-30 2016-06-02 Saint Gobain Ceramics Particulas abrasivas moldeadas y metodos para formación de ellas.
CN104726061A (zh) * 2013-12-19 2015-06-24 3M创新有限公司 磨料、研磨件及其制备方法
CN103952084B (zh) * 2014-04-29 2016-03-23 德米特（苏州）电子环保材料有限公司 一种氧化铝基质的金属抛光液的制备方法
JP6233296B2 (ja) * 2014-12-26 2017-11-22 株式会社Sumco 砥粒の評価方法、および、シリコンウェーハの製造方法
JP6803176B2 (ja) * 2016-08-26 2020-12-23 一般財団法人ファインセラミックスセンター 多孔質アルミナ粒子材料の製造方法
WO2021049154A1 (ja) * 2019-09-11 2021-03-18 株式会社フジミインコーポレーテッド 研磨用組成物およびこれを用いた研磨方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4318896A (en) * 1980-04-14 1982-03-09 Uop Inc. Manufacture of alumina particles
US4835124A (en) * 1985-09-30 1989-05-30 Aluminum Company Of America Alumina ceramic product from colloidal alumina
US5302368A (en) * 1987-01-29 1994-04-12 Sumitomo Chemical Company, Limited Process for preparation of alumina
US4797139A (en) * 1987-08-11 1989-01-10 Norton Company Boehmite produced by a seeded hydyothermal process and ceramic bodies produced therefrom
JPH04193712A (ja) 1990-11-26 1992-07-13 Sumitomo Chem Co Ltd 遷移アルミナおよびその製造方法
DE4118564A1 (de) 1991-06-06 1992-12-17 Vaw Ver Aluminium Werke Ag Teilkristalline uebergangsaluminiumoxide, verfahren zu deren herstellung und verwendung zur gewinnung von formkoerpern, die im wesentlichen aus gamma-al(pfeil abwaerts)2(pfeil abwaerts)o(pfeil abwaerts)3(pfeil abwaerts) bestehen
FR2678922B1 (fr) * 1991-07-08 1994-03-25 Sumitomo Chemical Cy Ltd Poudre d'alumine theta, son procede de preparation et support d'enregistrement magnetique la contenant.
US5527423A (en) * 1994-10-06 1996-06-18 Cabot Corporation Chemical mechanical polishing slurry for metal layers
KR960041316A (ko) * 1995-05-22 1996-12-19 고사이 아키오 연마용 입상체, 이의 제조방법 및 이의 용도
US5693239A (en) 1995-10-10 1997-12-02 Rodel, Inc. Polishing slurries comprising two abrasive components and methods for their use
KR19980019046A (ko) * 1996-08-29 1998-06-05 고사이 아키오 연마용 조성물 및 이의 용도(Abrasive composition and use of the same)
JPH10125638A (ja) 1996-08-29 1998-05-15 Sumitomo Chem Co Ltd 研磨用組成物及びそれを使用した半導体基板上の金属膜の平坦化方法
US6194317B1 (en) * 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
TW555696B (en) * 1998-01-08 2003-10-01 Nissan Chemical Ind Ltd Alumina powder, process for producing the same and polishing composition
JPH11268911A (ja) 1998-01-08 1999-10-05 Nissan Chem Ind Ltd アルミナ粉末及びその製造方法並びに研磨用組成物
JP3545950B2 (ja) 1998-10-29 2004-07-21 ロデール・ニッタ株式会社 研磨用組成物
JP4134458B2 (ja) 1999-06-23 2008-08-20 Ｊｓｒ株式会社 半導体部品用洗浄剤、半導体部品の洗浄方法
WO2001047812A1 (fr) 1999-12-27 2001-07-05 Showa Denko K.K. Particules d'alumine, procede de production correspondant. composition comprenant lesdites particules, et boue d'alumine a polir
US7067105B2 (en) * 1999-12-27 2006-06-27 Showa Denko K.K. Alumina particles, production process thereof, composition comprising the particles and alumina slurry for polishing
TWI272249B (en) * 2001-02-27 2007-02-01 Nissan Chemical Ind Ltd Crystalline ceric oxide sol and process for producing the same
US6756340B2 (en) * 2002-04-08 2004-06-29 Uop Llc Dehydrogenation catalyst composition
TWI307712B (en) * 2002-08-28 2009-03-21 Kao Corp Polishing composition
US7344988B2 (en) * 2003-10-27 2008-03-18 Dupont Air Products Nanomaterials Llc Alumina abrasive for chemical mechanical polishing
DE10360087A1 (de) 2003-12-20 2005-07-21 Degussa Ag Flammenhydrolytisch hergestelltes, hochoberflächiges Aluminiumoxidpulver
JP4193712B2 (ja) * 2004-01-30 2008-12-10 株式会社デンソー ランドを備える基板の製造方法
TW200531924A (en) * 2004-03-12 2005-10-01 Sumitomo Chemical Co Method for producing α-alumina particle
US20060104895A1 (en) 2004-11-18 2006-05-18 Saint-Gobain Ceramics & Plastics, Inc. Transitional alumina particulate materials having controlled morphology and processing for forming same
TWI271555B (en) 2005-06-13 2007-01-21 Basf Ag Slurry composition for polishing color filter
US8685123B2 (en) 2005-10-14 2014-04-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

Also Published As

Publication number Publication date
KR101120417B1 (ko) 2012-03-16
KR20080066799A (ko) 2008-07-16
EP1934300A2 (en) 2008-06-25
RU2008114107A (ru) 2009-11-20
AU2006304356A1 (en) 2007-04-26
TW200724657A (en) 2007-07-01
RU2401856C2 (ru) 2010-10-20
CN101370896A (zh) 2009-02-18
BRPI0617413A2 (pt) 2011-07-26
IL190737A0 (en) 2008-11-03
WO2007047547A2 (en) 2007-04-26
CN101370896B (zh) 2012-10-17
ZA200803185B (en) 2009-01-28
CA2625273A1 (en) 2007-04-26
ATE555179T1 (de) 2012-05-15
JP5384938B2 (ja) 2014-01-08
US20070084134A1 (en) 2007-04-19
US8685123B2 (en) 2014-04-01
CA2625273C (en) 2011-08-23
WO2007047547A3 (en) 2007-06-14
JP2009511719A (ja) 2009-03-19
UA87938C2 (ru) 2009-08-25
AU2006304356B2 (en) 2010-07-01
NZ567318A (en) 2011-06-30
EP1934300B1 (en) 2012-04-25
MY145461A (en) 2012-02-15
TWI308928B (en) 2009-04-21

Similar Documents

Publication Publication Date Title
NO20082195L (no) Abrasivt partikkelmateriale, og fremgangsmate for a gjore er arbeidsstykke plant ved anvendelse derav
HK1081945A1 (en) Process for the synthesis of 4,5-dimethoxy-1-(methylaminomethyl)-benzocy clobutane, and the use thereof
EP1821316A4 (en) FINE METAL PARTICLE, PROCESS FOR PRODUCING THE SAME, COMPOSITION CONTAINING SAME, AND USE THEREOF
EP1769838A3 (en) Honeycomb filter
DE602004012521D1 (de) Sinterkarbideinsatz und Method zu dessen Herstellung.
UA90293C2 (en) Process for preparing lansoprazole
MY154171A (en) In-situ cleaning of an imprint lithography tool
NZ542616A (en) P38 inhibitors and methods of use thereof
AU2003234019A8 (en) Process for processing carbon material
SI1610878T1 (sl) Postopek za proizvodnjo delcev
EP1878701A4 (en) ALUNITIC COMPOSITION PARTICLES, PRODUCTION METHOD THEREFOR AND USE THEREOF
MY146028A (en) Benzothiazole cyclobutyl amine derivatives
IL188861A0 (en) 1,4-dihydropyridine-fused heterocycles, process for preparing the same, use and compositions containing them
IL167500A (en) Soaps from residues from the processing of plant materials and method of producing the same
GB2410023B (en) Carbon material and process for producing the same
AU2003299932A1 (en) Modeling an abrasive process to achieve controlled material removal
AU2001233088A1 (en) Process for removing fine particulate soil from hard surfaces
EP1703967A4 (en) PROCESS FOR EXTRACTING HEAVY GAS METALS AND COMPOSITIONS THEREFOR
EP1693130A4 (en) ISOSTAT FOR THE TREATMENT OF MATERIALS AND METHOD OF EVACUATING CERAMIC MATERIAL CONTAINED IN METAL ARTICLES USING SAID ISOSTAT
EP1854791A4 (en) NOVEL THIOPHENE COMPOUND AND PROCESS FOR PRODUCING CAFFENOFURAN OR ANALOGUE THEREFROM
WO2007068003A3 (en) COMPOSITIONS AND METHODS FOR MODULATING OSTEOBLAST CELL DIFFERENTIATION AND BONE GENERATION THROUGH HIF-1a
ATE296713T1 (de) Verfahren und vorrichtung zum kantenformen
BR0206822A (pt) Composição, artigo abrasivo revestido, e, métodos para produzir um artigo abrasivo revestido, e para abradar uma peça de trabalho
ITRE20040112A1 (it) Impianto scagliatore per la produzione di scaglie di polveri fini
TW200740828A (en) New physical form of N,N'-disubstituted oxabispidines

Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application