UA87938C2 - Зернистый абразивный материал, способ его формирования и способ полирования изделия с использованием зернистого абразивного материала - Google Patents

Зернистый абразивный материал, способ его формирования и способ полирования изделия с использованием зернистого абразивного материала

Info

Publication number
UA87938C2
UA87938C2 UAA200804717A UAA200804717A UA87938C2 UA 87938 C2 UA87938 C2 UA 87938C2 UA A200804717 A UAA200804717 A UA A200804717A UA A200804717 A UAA200804717 A UA A200804717A UA 87938 C2 UA87938 C2 UA 87938C2
Authority
UA
Ukraine
Prior art keywords
particulate material
abrasive particulate
planarizing
workpiece
abrasive
Prior art date
Application number
UAA200804717A
Other languages
English (en)
Ukrainian (uk)
Inventor
Эндрю Дж. Хаерле
Джун Ванг
Original Assignee
Сейнт-Гобейн Серамикс Энд Пластикс, Инк.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Сейнт-Гобейн Серамикс Энд Пластикс, Инк. filed Critical Сейнт-Гобейн Серамикс Энд Пластикс, Инк.
Publication of UA87938C2 publication Critical patent/UA87938C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/02—Amorphous compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/20—Particle morphology extending in two dimensions, e.g. plate-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/54—Particles characterised by their aspect ratio, i.e. the ratio of sizes in the longest to the shortest dimension
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/10—Solid density
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

Раскрыт зернистый абразивный материал, который содержит частицы оксида алюминия. Частицы оксида алюминия включают переходной оксид алюминия и, по меньшей мере, 5,0 вес. % аморфной фазы. Частицы переходного оксида алюминия также имеют плотность, не более чем 3,20 г/см.
UAA200804717A 2005-10-14 2006-10-13 Зернистый абразивный материал, способ его формирования и способ полирования изделия с использованием зернистого абразивного материала UA87938C2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/251,633 US8685123B2 (en) 2005-10-14 2005-10-14 Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material

Publications (1)

Publication Number Publication Date
UA87938C2 true UA87938C2 (ru) 2009-08-25

Family

ID=37722443

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200804717A UA87938C2 (ru) 2005-10-14 2006-10-13 Зернистый абразивный материал, способ его формирования и способ полирования изделия с использованием зернистого абразивного материала

Country Status (18)

Country Link
US (1) US8685123B2 (ru)
EP (1) EP1934300B1 (ru)
JP (1) JP5384938B2 (ru)
KR (1) KR101120417B1 (ru)
CN (1) CN101370896B (ru)
AT (1) ATE555179T1 (ru)
AU (1) AU2006304356B2 (ru)
BR (1) BRPI0617413A2 (ru)
CA (1) CA2625273C (ru)
IL (1) IL190737A0 (ru)
MY (1) MY145461A (ru)
NO (1) NO20082195L (ru)
NZ (1) NZ567318A (ru)
RU (1) RU2401856C2 (ru)
TW (1) TWI308928B (ru)
UA (1) UA87938C2 (ru)
WO (1) WO2007047547A2 (ru)
ZA (1) ZA200803185B (ru)

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US8685123B2 (en) 2005-10-14 2014-04-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
US20070287004A1 (en) * 2006-05-25 2007-12-13 Gottzmann Andreas M Laminate and Method of Manufacture
FR2906800B1 (fr) * 2006-10-09 2008-11-28 Rhodia Recherches & Tech Suspension liquide et poudre de particules d'oxyde de cerium, procedes de preparation de celles-ci et utilisation dans le polissage
US7837888B2 (en) * 2006-11-13 2010-11-23 Cabot Microelectronics Corporation Composition and method for damascene CMP
EP2250226A4 (en) * 2008-03-03 2012-05-23 Univ Florida HYBRID TRANSPARENT COATING MATERIALS FROM NANOTEILIC SOL-GEL COMPOSITE MATERIAL
TWI417245B (zh) † 2008-06-13 2013-12-01 Fujimi Inc 氧化鋁粒子及含有該氧化鋁粒子之研磨用組成物
US8382016B2 (en) * 2009-02-25 2013-02-26 Thiele Kaolin Company Nano particle mineral pigment
BRPI1009360A2 (pt) * 2009-03-11 2016-03-08 Saint Gobain Abrasifs Sa artigos abrasivos incluindo grãos de alumina zircônia fundidos tendo um formato aperfeiçoado
KR20140000496A (ko) * 2012-06-22 2014-01-03 에스케이하이닉스 주식회사 연마 조성물, 이의 제조 방법 및 이를 이용한 화학적 기계적 연마 방법
RU2643004C2 (ru) * 2013-09-30 2018-01-29 Сен-Гобен Серэмикс Энд Пластикс, Инк. Формованные абразивные частицы и способы их получения
CN104726061A (zh) * 2013-12-19 2015-06-24 3M创新有限公司 磨料、研磨件及其制备方法
CN103952084B (zh) * 2014-04-29 2016-03-23 德米特（苏州）电子环保材料有限公司 一种氧化铝基质的金属抛光液的制备方法
JP6233296B2 (ja) * 2014-12-26 2017-11-22 株式会社Sumco 砥粒の評価方法、および、シリコンウェーハの製造方法
JP6803176B2 (ja) * 2016-08-26 2020-12-23 一般財団法人ファインセラミックスセンター 多孔質アルミナ粒子材料の製造方法
WO2021049154A1 (ja) * 2019-09-11 2021-03-18 株式会社フジミインコーポレーテッド 研磨用組成物およびこれを用いた研磨方法

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Also Published As

Publication number Publication date
ZA200803185B (en) 2009-01-28
IL190737A0 (en) 2008-11-03
BRPI0617413A2 (pt) 2011-07-26
AU2006304356A1 (en) 2007-04-26
TWI308928B (en) 2009-04-21
KR101120417B1 (ko) 2012-03-16
JP5384938B2 (ja) 2014-01-08
CA2625273C (en) 2011-08-23
EP1934300B1 (en) 2012-04-25
WO2007047547A2 (en) 2007-04-26
KR20080066799A (ko) 2008-07-16
JP2009511719A (ja) 2009-03-19
US20070084134A1 (en) 2007-04-19
EP1934300A2 (en) 2008-06-25
NZ567318A (en) 2011-06-30
US8685123B2 (en) 2014-04-01
TW200724657A (en) 2007-07-01
MY145461A (en) 2012-02-15
AU2006304356B2 (en) 2010-07-01
CN101370896B (zh) 2012-10-17
NO20082195L (no) 2008-07-03
RU2008114107A (ru) 2009-11-20
WO2007047547A3 (en) 2007-06-14
RU2401856C2 (ru) 2010-10-20
CA2625273A1 (en) 2007-04-26
CN101370896A (zh) 2009-02-18
ATE555179T1 (de) 2012-05-15

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