NO20075792L - Anordning for separasjon av substrater fra en stabel - Google Patents

Anordning for separasjon av substrater fra en stabel

Info

Publication number
NO20075792L
NO20075792L NO20075792A NO20075792A NO20075792L NO 20075792 L NO20075792 L NO 20075792L NO 20075792 A NO20075792 A NO 20075792A NO 20075792 A NO20075792 A NO 20075792A NO 20075792 L NO20075792 L NO 20075792L
Authority
NO
Norway
Prior art keywords
stack
disc
separating
rollers
wafers
Prior art date
Application number
NO20075792A
Other languages
English (en)
Other versions
NO333989B1 (no
Inventor
Felix Jager
Wolfgang Schmutz
Michael Kieninger
Original Assignee
Aci Ecotec Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aci Ecotec Gmbh & Co Kg filed Critical Aci Ecotec Gmbh & Co Kg
Publication of NO20075792L publication Critical patent/NO20075792L/no
Publication of NO333989B1 publication Critical patent/NO333989B1/no

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G59/00—De-stacking of articles
    • B65G59/06—De-stacking from the bottom of the stack
    • B65G59/067—De-stacking from the bottom of the stack articles being separated substantially perpendicularly to the axis of the stack
    • B65G59/068—De-stacking from the bottom of the stack articles being separated substantially perpendicularly to the axis of the stack by means of endless elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

Ved en innretning for å skille fuktige silisiumskiver (2) fra en skivestabel (1), der de fuktige skivene (2) kan trekkes enkeltvis ut fra stabelen (1) og skivene (2) kan overgis til en tilhørende transportinnretning (7), skal de fuktige, tynne og bruddømfintlige skivene, som også kan være av stort format, sikkert og raskt bli skilt fra hverandre. For å oppnå dette, er innretningen forsynt med atskillelsesvalser (4), hvor skivestabelen (1) kan plasseres, slik at den nederste skiven (2.1) ved dreining av atskillelsesvalsene (4) kan skyves under ei avstrykningslist (5) og ut gjennom en åpning mellom overflaten på valsene (I) og avstrykerlista (5), på størrelse med tykkelsen på ei skive, slik at skiva (2.1) kan dras ut av skivestabelen (1) gjennom elastisk press fra et par utgangsvalser (6.1 og 6.2) som ligger rett over hverandre og drives med samme turtall.
NO20075792A 2005-05-21 2007-11-12 Anordning for utskilling av våte silikonskiver fra en skivestabel NO333989B1 (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005023618A DE102005023618B3 (de) 2005-05-21 2005-05-21 Einrichtung zum Vereinzeln von Silizium-Wafern von einem Stapel
PCT/EP2006/004699 WO2006125559A1 (de) 2005-05-21 2006-05-18 Einrichtung zum vereinzeln von substraten vom stapel

Publications (2)

Publication Number Publication Date
NO20075792L true NO20075792L (no) 2007-12-20
NO333989B1 NO333989B1 (no) 2013-11-11

Family

ID=36693198

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20075792A NO333989B1 (no) 2005-05-21 2007-11-12 Anordning for utskilling av våte silikonskiver fra en skivestabel

Country Status (7)

Country Link
US (1) US8047761B2 (no)
EP (1) EP1883515B1 (no)
CN (1) CN101180167B (no)
DE (1) DE102005023618B3 (no)
HK (1) HK1115096A1 (no)
NO (1) NO333989B1 (no)
WO (1) WO2006125559A1 (no)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101631733A (zh) * 2007-02-08 2010-01-20 光荣株式会社 纸币转出装置
GB2465591B (en) * 2008-11-21 2011-12-07 Coreflow Ltd Method and device for separating sliced wafers
US8651794B2 (en) * 2010-04-22 2014-02-18 Siemens Industry, Inc. Automated bed-loaded container unloader and method
CN102556681B (zh) * 2012-01-19 2014-03-26 镇江中福马机械有限公司 人造板毛板的卸板系统及卸板方法
DE202012003912U1 (de) 2012-04-19 2012-06-14 Schott Solar Ag Vorrichtung zum Befördern und Vereinzeln von Substraten, insbesondere Siliziumwafern
DE102012221452A1 (de) 2012-07-20 2014-01-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Separieren von Wafern
CN103112611B (zh) * 2013-02-25 2015-12-23 广州达意隆包装机械股份有限公司 托盘码垛包装装置及包装方法
CN104894832A (zh) * 2014-03-07 2015-09-09 黄运新 布料裁片自动打号机
CN106429475A (zh) * 2016-11-30 2017-02-22 合肥亿福自动化科技有限公司 一种用于空调生产的自动化输送系统
CN109018953A (zh) * 2018-08-20 2018-12-18 王国永 一种翻转上料机
CN110371673A (zh) * 2019-07-18 2019-10-25 天津鑫凯达精密机械有限公司 一种分离平稳高效的撤板机构
CN111232655B (zh) * 2020-03-02 2021-10-12 何海瑞 一种铝合金均质用具有整理机构的码垛装置的工作方法
CN111689240B (zh) * 2020-04-29 2021-11-16 鲁帅东 一种自动化佛香分离装置
CN111646168B (zh) * 2020-05-28 2021-10-22 豪德机械（上海）有限公司 一种翻板机

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US1976788A (en) * 1933-03-21 1934-10-16 Kurth Herman Machine for delivering sheets from a stack
US3625384A (en) * 1968-09-26 1971-12-07 Ibm Article-handling apparatus
US3707752A (en) * 1970-10-28 1973-01-02 Beloit Corp Roll covering
US3988017A (en) * 1975-03-20 1976-10-26 Lockheed Electronics Co., Inc. Workpiece feeding device
US4524558A (en) * 1983-08-05 1985-06-25 Bernard Miles Sheet holder for food dispenser
KR890000910B1 (ko) * 1984-06-29 1989-04-13 가부시기가이샤 히다찌세이사꾸쇼 지엽류의 분리 반송장치
US4961566A (en) * 1986-11-14 1990-10-09 International Paper Box Machine Co., Inc. Apparatus for feeding sheets from a stack of sheets
GB8901055D0 (en) * 1989-01-18 1989-03-15 Simon Container Mach Ltd Apparatus for feeding boards or sheets from a stack
US5050852A (en) * 1989-08-23 1991-09-24 Rengo Co. Ltd. Blank feeder and method for controlling the same
US5172898A (en) * 1990-07-05 1992-12-22 Mitsubishi Jukogyo Kabushiki Kaisha Paperboard feeding apparatus
JPH04354746A (ja) * 1991-05-29 1992-12-09 Omron Corp 紙葉類の繰出し隙間調整装置
US5297785A (en) * 1992-08-28 1994-03-29 Bell & Howell Phillipsburg Company Pre-feed shingling device for flat-article feeder
GB9303093D0 (en) * 1993-02-16 1993-03-31 Rue Inter Innovation De Ab Sheet stacking and processing apparatus
FR2701938B1 (fr) * 1993-02-23 1995-05-24 Cuir Jean Pierre Dispositif de distribution de feuilles semi-rigides, notamment de carton, à partir d'un empilement.
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
CH691169A5 (fr) * 1996-04-16 2001-05-15 Hct Shaping Systems Sa Dispositif pour la mise en élément de stockage de tranches obtenues par découpage d'un bloc.
DE19900671C2 (de) * 1999-01-11 2002-04-25 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Vereinzeln von scheibenförmigen Substraten, insbesondere zur Waferherstellung
DE19904834A1 (de) * 1999-02-07 2000-08-10 Acr Automation In Cleanroom Vorrichtung zum Ablösen, Vereinzeln und Einlagern von dünnen, bruchempfindlichen scheibenförmigen Substraten
WO2000058190A1 (en) * 1999-03-31 2000-10-05 John Anthony Sullivan Apparatus for feeding sheet material
DE19950068B4 (de) * 1999-10-16 2006-03-02 Schmid Technology Systems Gmbh Verfahren und Vorrichtung zum Vereinzeln und Ablösen von Substratscheiben
SE515516C2 (sv) * 2000-08-03 2001-08-20 Emba Machinery Ab Förfarande och anordning för att mata ett ark i sänder från en arkstapel
US7036815B2 (en) * 2002-07-17 2006-05-02 Canon Kabushiki Kaisha Sheet material conveying apparatus, recording apparatus and recording system

Also Published As

Publication number Publication date
CN101180167A (zh) 2008-05-14
WO2006125559A1 (de) 2006-11-30
US20080135186A1 (en) 2008-06-12
EP1883515B1 (de) 2012-08-29
NO333989B1 (no) 2013-11-11
EP1883515A1 (de) 2008-02-06
CN101180167B (zh) 2012-11-07
US8047761B2 (en) 2011-11-01
DE102005023618B3 (de) 2006-12-07
HK1115096A1 (en) 2008-11-21

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