NL8902472A - Positioneerinrichting. - Google Patents

Positioneerinrichting. Download PDF

Info

Publication number
NL8902472A
NL8902472A NL8902472A NL8902472A NL8902472A NL 8902472 A NL8902472 A NL 8902472A NL 8902472 A NL8902472 A NL 8902472A NL 8902472 A NL8902472 A NL 8902472A NL 8902472 A NL8902472 A NL 8902472A
Authority
NL
Netherlands
Prior art keywords
systems
coil
positioning device
base
magnetic
Prior art date
Application number
NL8902472A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8902472A priority Critical patent/NL8902472A/nl
Priority to KR1019900015470A priority patent/KR100221442B1/ko
Priority to DE69018750T priority patent/DE69018750T2/de
Priority to EP90202583A priority patent/EP0421528B1/de
Priority to JP26652790A priority patent/JP3226044B2/ja
Publication of NL8902472A publication Critical patent/NL8902472A/nl
Priority to US08/024,919 priority patent/US5327060A/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/002—Cooling of bearings of fluid bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Control Of Position Or Direction (AREA)
NL8902472A 1989-10-05 1989-10-05 Positioneerinrichting. NL8902472A (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL8902472A NL8902472A (nl) 1989-10-05 1989-10-05 Positioneerinrichting.
KR1019900015470A KR100221442B1 (ko) 1989-10-05 1990-09-28 위치 결정 장치
DE69018750T DE69018750T2 (de) 1989-10-05 1990-10-01 Positioniervorrichtung.
EP90202583A EP0421528B1 (de) 1989-10-05 1990-10-01 Positioniervorrichtung
JP26652790A JP3226044B2 (ja) 1989-10-05 1990-10-05 位置決め装置
US08/024,919 US5327060A (en) 1989-10-05 1993-03-02 Positioning device using Lorentz forces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8902472 1989-10-05
NL8902472A NL8902472A (nl) 1989-10-05 1989-10-05 Positioneerinrichting.

Publications (1)

Publication Number Publication Date
NL8902472A true NL8902472A (nl) 1991-05-01

Family

ID=19855400

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8902472A NL8902472A (nl) 1989-10-05 1989-10-05 Positioneerinrichting.

Country Status (6)

Country Link
US (1) US5327060A (de)
EP (1) EP0421528B1 (de)
JP (1) JP3226044B2 (de)
KR (1) KR100221442B1 (de)
DE (1) DE69018750T2 (de)
NL (1) NL8902472A (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2716884B2 (ja) * 1991-07-12 1998-02-18 住友重機械工業株式会社 平面モータ装置
DE4322011C1 (de) * 1993-07-02 1994-09-08 Jenoptik Jena Gmbh Einrichtung zur Beseitigung von Verkippungen in Antrieben mit Gaslagern
US6989647B1 (en) * 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US5874820A (en) 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5850280A (en) * 1994-06-16 1998-12-15 Nikon Corporation Stage unit, drive table, and scanning exposure and apparatus using same
US6721034B1 (en) 1994-06-16 2004-04-13 Nikon Corporation Stage unit, drive table, and scanning exposure apparatus using the same
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6008500A (en) * 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
TW318255B (de) 1995-05-30 1997-10-21 Philips Electronics Nv
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
JPH10521A (ja) * 1996-06-07 1998-01-06 Nikon Corp 支持装置
EP1071097A4 (de) * 1997-11-25 2007-07-25 Ebara Corp Vorrichtung zur positionierung einer platte
TWI242113B (en) * 1998-07-17 2005-10-21 Asml Netherlands Bv Positioning device and lithographic projection apparatus comprising such a device
US6097114A (en) * 1998-08-17 2000-08-01 Nikon Corporation Compact planar motor having multiple degrees of freedom
US6355994B1 (en) * 1999-11-05 2002-03-12 Multibeam Systems, Inc. Precision stage
US6405659B1 (en) 2000-05-01 2002-06-18 Nikon Corporation Monolithic stage
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6597435B2 (en) 2001-10-09 2003-07-22 Nikon Corporation Reticle stage with reaction force cancellation
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
JP4146825B2 (ja) * 2003-08-27 2008-09-10 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィック装置、デバイス製造方法及びスライド・アセンブリ
CN1838330B (zh) * 2006-04-21 2011-06-29 清华大学 电磁力并联驱动式平面三自由度精密微动台
CN101804568B (zh) * 2010-03-19 2011-06-15 中国电子科技集团公司第二研究所 直线电机驱动的气悬浮运动平台
CN103286615A (zh) * 2012-02-27 2013-09-11 沈阳工业大学 一种无接触导向方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0227900B2 (ja) * 1981-09-29 1990-06-20 Tokyo Shibaura Electric Co Kaitentaishugosochi
JPS5963952A (ja) * 1982-10-04 1984-04-11 Nec Corp 流体軸受付電動機
US4506205A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic alignment apparatus
US4485339A (en) * 1983-06-10 1984-11-27 The Perkin-Elmer Corporation Electro-magnetic alignment device
US4507597A (en) * 1983-06-10 1985-03-26 The Perkin-Elmer Corporation Electro-magnetic alignment assemblies
US4506204A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
NL8500930A (nl) * 1985-03-29 1986-10-16 Philips Nv Verplaatsingsinrichting met voorgespannen contactloze lagers.
NL8701139A (nl) * 1987-05-13 1988-12-01 Philips Nv Geleideinrichting.
US4952858A (en) * 1988-05-18 1990-08-28 Galburt Daniel N Microlithographic apparatus

Also Published As

Publication number Publication date
JPH03131912A (ja) 1991-06-05
EP0421528A1 (de) 1991-04-10
KR100221442B1 (ko) 1999-09-15
JP3226044B2 (ja) 2001-11-05
DE69018750T2 (de) 1996-01-04
KR910008918A (ko) 1991-05-31
US5327060A (en) 1994-07-05
EP0421528B1 (de) 1995-04-19
DE69018750D1 (de) 1995-05-24

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