KR910008918A - 위치화 장치 - Google Patents

위치화 장치 Download PDF

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Publication number
KR910008918A
KR910008918A KR1019900015470A KR900015470A KR910008918A KR 910008918 A KR910008918 A KR 910008918A KR 1019900015470 A KR1019900015470 A KR 1019900015470A KR 900015470 A KR900015470 A KR 900015470A KR 910008918 A KR910008918 A KR 910008918A
Authority
KR
South Korea
Prior art keywords
positioning device
magnetic
coil system
base
coil
Prior art date
Application number
KR1019900015470A
Other languages
English (en)
Other versions
KR100221442B1 (ko
Inventor
반 엥게렌 게라르드
게라르두스 보우버 아드라아누스
Original Assignee
프레데릭 얀 스미트
엔.브이.필립스 글로아이람펜파브리켄
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 프레데릭 얀 스미트, 엔.브이.필립스 글로아이람펜파브리켄 filed Critical 프레데릭 얀 스미트
Publication of KR910008918A publication Critical patent/KR910008918A/ko
Application granted granted Critical
Publication of KR100221442B1 publication Critical patent/KR100221442B1/ko

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C37/00—Cooling of bearings
    • F16C37/002—Cooling of bearings of fluid bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Abstract

내용 없음.

Description

위치화장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 위치화 장치의 부분사시도.
제2도는 본 발명에 따른 위치화 장치의 평면도.
제3도는 제2도의 라인 III-III을 따라 취해진 단면도.
제4도는 제1도에 도시된 위치화 장치의 측면도.

Claims (5)

  1. 적어도 하나의 전동 X모터 및 적어도 하나의 선형 전동 Y모터에 의해 적어도 두 좌표 방향(X, Y)으로 이동가능하고, 베이스상에서 접촉하지 않고 정적 가스 베어링에 의해 지지되는 테이블과, 베이스 및 테이블에 각각 접속된 2개의 모터에 부합하는 코일 시스템 및 자기 시스템을 구비하는 위치화 장치에 있어서, 대체로 일정하고, 코일 시스템의 영향을 받지 않는 정적 가스 베어링의 에어갭 두께를 가지고 동작하는 동안, 코일 시스템 및 자기 시스템은 서로 적절하게 안내되고, 코일 시스템 및 자기 시스템에 의해 유도된 로렌쯔의 힘에 의해서만 서로 결합되는 것을 특징으로 하는 위치화 장치.
  2. 제1항에 있어서, 적어도 베이스 일부분은 자기 전도성이 있고, 한쌍의 영구자석 사이에 브리지를 형성하고, 정적 가스 베어링내의 예비 응력은 베이스의 장기 전도물질 및 에에푸트내의 영구자석 사이의 자기 유도에 의해 결정되는 것을 특징으로 하는 위치화 장치.
  3. 제1항 또는 제2항에 있어서, 한쌍의 코일 시스템 및 자기 시스템은 두 좌표 방향의 각각에 결합되는 것을 특징으로 하는 위치화 장치.
  4. 제3항에 있어서, 코일 시스템은 자기 시스템으로부터 이격된 모든 코일 시스템의 측면에서 공통의 냉각기와 열교환을 하는 것을 특징으로 하는 위치화 장치.
  5. 제4항에 있어서 냉각기는 X-Y평면에 평행인 평면에 위치하며 사각 단면의 휘어진 냉각 파이프를 포함하는 것을 특징으로 하는 위치화 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900015470A 1989-10-05 1990-09-28 위치 결정 장치 KR100221442B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8902472 1989-10-05
NL8902472A NL8902472A (nl) 1989-10-05 1989-10-05 Positioneerinrichting.

Publications (2)

Publication Number Publication Date
KR910008918A true KR910008918A (ko) 1991-05-31
KR100221442B1 KR100221442B1 (ko) 1999-09-15

Family

ID=19855400

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900015470A KR100221442B1 (ko) 1989-10-05 1990-09-28 위치 결정 장치

Country Status (6)

Country Link
US (1) US5327060A (ko)
EP (1) EP0421528B1 (ko)
JP (1) JP3226044B2 (ko)
KR (1) KR100221442B1 (ko)
DE (1) DE69018750T2 (ko)
NL (1) NL8902472A (ko)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2716884B2 (ja) * 1991-07-12 1998-02-18 住友重機械工業株式会社 平面モータ装置
DE4322011C1 (de) * 1993-07-02 1994-09-08 Jenoptik Jena Gmbh Einrichtung zur Beseitigung von Verkippungen in Antrieben mit Gaslagern
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US6989647B1 (en) * 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US5874820A (en) * 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US5850280A (en) * 1994-06-16 1998-12-15 Nikon Corporation Stage unit, drive table, and scanning exposure and apparatus using same
US6721034B1 (en) 1994-06-16 2004-04-13 Nikon Corporation Stage unit, drive table, and scanning exposure apparatus using the same
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6008500A (en) * 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
TW318255B (ko) 1995-05-30 1997-10-21 Philips Electronics Nv
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
JPH10521A (ja) * 1996-06-07 1998-01-06 Nikon Corp 支持装置
US6437864B1 (en) * 1997-11-25 2002-08-20 Ebara Corporation Stage positioning device
TWI242113B (en) * 1998-07-17 2005-10-21 Asml Netherlands Bv Positioning device and lithographic projection apparatus comprising such a device
US6097114A (en) * 1998-08-17 2000-08-01 Nikon Corporation Compact planar motor having multiple degrees of freedom
US6355994B1 (en) * 1999-11-05 2002-03-12 Multibeam Systems, Inc. Precision stage
US6405659B1 (en) 2000-05-01 2002-06-18 Nikon Corporation Monolithic stage
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6597435B2 (en) 2001-10-09 2003-07-22 Nikon Corporation Reticle stage with reaction force cancellation
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
JP4146825B2 (ja) * 2003-08-27 2008-09-10 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィック装置、デバイス製造方法及びスライド・アセンブリ
CN1838330B (zh) * 2006-04-21 2011-06-29 清华大学 电磁力并联驱动式平面三自由度精密微动台
CN101804568B (zh) * 2010-03-19 2011-06-15 中国电子科技集团公司第二研究所 直线电机驱动的气悬浮运动平台
CN103286615A (zh) * 2012-02-27 2013-09-11 沈阳工业大学 一种无接触导向方法

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JPH0227900B2 (ja) * 1981-09-29 1990-06-20 Tokyo Shibaura Electric Co Kaitentaishugosochi
JPS5963952A (ja) * 1982-10-04 1984-04-11 Nec Corp 流体軸受付電動機
US4506205A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic alignment apparatus
US4485339A (en) * 1983-06-10 1984-11-27 The Perkin-Elmer Corporation Electro-magnetic alignment device
US4506204A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
US4507597A (en) * 1983-06-10 1985-03-26 The Perkin-Elmer Corporation Electro-magnetic alignment assemblies
NL8500930A (nl) * 1985-03-29 1986-10-16 Philips Nv Verplaatsingsinrichting met voorgespannen contactloze lagers.
NL8701139A (nl) * 1987-05-13 1988-12-01 Philips Nv Geleideinrichting.
US4952858A (en) * 1988-05-18 1990-08-28 Galburt Daniel N Microlithographic apparatus

Also Published As

Publication number Publication date
US5327060A (en) 1994-07-05
DE69018750T2 (de) 1996-01-04
EP0421528A1 (en) 1991-04-10
JP3226044B2 (ja) 2001-11-05
EP0421528B1 (en) 1995-04-19
KR100221442B1 (ko) 1999-09-15
DE69018750D1 (de) 1995-05-24
JPH03131912A (ja) 1991-06-05
NL8902472A (nl) 1991-05-01

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