NL8602175A - Werkwijze voor bundelcentrering. - Google Patents

Werkwijze voor bundelcentrering. Download PDF

Info

Publication number
NL8602175A
NL8602175A NL8602175A NL8602175A NL8602175A NL 8602175 A NL8602175 A NL 8602175A NL 8602175 A NL8602175 A NL 8602175A NL 8602175 A NL8602175 A NL 8602175A NL 8602175 A NL8602175 A NL 8602175A
Authority
NL
Netherlands
Prior art keywords
objective lens
lens
image
charged particle
exposure
Prior art date
Application number
NL8602175A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8602175A priority Critical patent/NL8602175A/nl
Priority to DE87201431T priority patent/DE3785706T2/de
Priority to EP87201431A priority patent/EP0257679B1/de
Priority to US07/085,992 priority patent/US4820921A/en
Priority to KR870009219A priority patent/KR880003389A/ko
Priority to JP62211489A priority patent/JPS63114035A/ja
Publication of NL8602175A publication Critical patent/NL8602175A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
NL8602175A 1986-08-27 1986-08-27 Werkwijze voor bundelcentrering. NL8602175A (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL8602175A NL8602175A (nl) 1986-08-27 1986-08-27 Werkwijze voor bundelcentrering.
DE87201431T DE3785706T2 (de) 1986-08-27 1987-07-24 Strahlzentrierungsverfahren.
EP87201431A EP0257679B1 (de) 1986-08-27 1987-07-24 Strahlzentrierungsverfahren
US07/085,992 US4820921A (en) 1986-08-27 1987-08-14 Method of beam centering
KR870009219A KR880003389A (ko) 1986-08-27 1987-08-24 비임 센터링 방법 및 장치
JP62211489A JPS63114035A (ja) 1986-08-27 1987-08-27 ビ−ムの心合せ方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8602175A NL8602175A (nl) 1986-08-27 1986-08-27 Werkwijze voor bundelcentrering.
NL8602175 1986-08-27

Publications (1)

Publication Number Publication Date
NL8602175A true NL8602175A (nl) 1988-03-16

Family

ID=19848461

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8602175A NL8602175A (nl) 1986-08-27 1986-08-27 Werkwijze voor bundelcentrering.

Country Status (6)

Country Link
US (1) US4820921A (de)
EP (1) EP0257679B1 (de)
JP (1) JPS63114035A (de)
KR (1) KR880003389A (de)
DE (1) DE3785706T2 (de)
NL (1) NL8602175A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0245734A (ja) * 1988-08-05 1990-02-15 Mitsubishi Heavy Ind Ltd 自動組織解析処理装置
US5300776A (en) * 1992-09-16 1994-04-05 Gatan, Inc. Autoadjusting electron microscope
JP5188846B2 (ja) * 2008-03-10 2013-04-24 日本電子株式会社 走査型透過電子顕微鏡の収差補正装置及び収差補正方法
JP7208212B2 (ja) * 2020-11-30 2023-01-18 日本電子株式会社 透過電子顕微鏡および光学系の調整方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4095104A (en) * 1975-09-01 1978-06-13 U.S. Philips Corporation Electron microscope
JPS6091540A (ja) * 1983-10-25 1985-05-22 Jeol Ltd 透過電子顕微鏡における軸合せ方法
NL8304217A (nl) * 1983-12-07 1985-07-01 Philips Nv Automatisch instelbare electronenmicroscoop.
US4680469A (en) * 1984-08-17 1987-07-14 Hitachi, Ltd. Focusing device for a television electron microscope
JPS61168852A (ja) * 1985-01-23 1986-07-30 Hitachi Ltd 透過形電子顕微鏡の焦点合せ装置
JPH0691540A (ja) * 1992-09-16 1994-04-05 Osaka Diamond Ind Co Ltd 総形研削砥石

Also Published As

Publication number Publication date
US4820921A (en) 1989-04-11
EP0257679A1 (de) 1988-03-02
EP0257679B1 (de) 1993-05-05
JPS63114035A (ja) 1988-05-18
DE3785706T2 (de) 1993-11-18
DE3785706D1 (de) 1993-06-09
KR880003389A (ko) 1988-05-16

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BV The patent application has lapsed