JPS55133428U
(nl)
*
|
1979-03-16 |
1980-09-22 |
|
|
US4326940A
(en)
*
|
1979-05-21 |
1982-04-27 |
Rohco Incorporated |
Automatic analyzer and control system for electroplating baths
|
SE451604B
(sv)
*
|
1979-07-27 |
1987-10-19 |
Cominco Ltd |
Sett att styra en process for galvanisk utfellning av en metall
|
US4340458A
(en)
*
|
1980-06-02 |
1982-07-20 |
Joslin Diabetes Center, Inc. |
Glucose sensor
|
DE3030664C2
(de)
*
|
1980-08-13 |
1982-10-21 |
Siemens AG, 1000 Berlin und 8000 München |
Verfahren zur Bestimmung der Stromausbeute bei galvanischen Bädern
|
CA1179751A
(en)
*
|
1982-01-07 |
1984-12-18 |
Robert C. Kerby |
Controlling metal electro-deposition using electrolyte containing, two polarizing agents
|
US4479852A
(en)
*
|
1983-01-21 |
1984-10-30 |
International Business Machines Corporation |
Method for determination of concentration of organic additive in plating bath
|
JPS6014155A
(ja)
*
|
1983-07-06 |
1985-01-24 |
Hideaki Takahashi |
経年脆化検出法
|
FR2551548B1
(fr)
*
|
1983-08-31 |
1991-06-07 |
United Kingdom Government |
Voltametre a decollement anodique pour mesure de concentrations ioniques
|
DE3404267A1
(de)
*
|
1984-02-03 |
1985-08-08 |
Schering AG, 1000 Berlin und 4709 Bergkamen |
Verfahren zur vollautomatischen steuerung der galvanischen abscheidung von kupferueberzuegen aus sauren kupferbaedern
|
US4725339A
(en)
*
|
1984-02-13 |
1988-02-16 |
International Business Machines Corporation |
Method for monitoring metal ion concentrations in plating baths
|
US4628726A
(en)
*
|
1984-03-29 |
1986-12-16 |
Etd Technology, Inc. |
Analysis of organic compounds in baths used in the manufacture of printed circuit board using novel chromatographic methods
|
FR2566535B1
(fr)
*
|
1984-06-22 |
1986-09-12 |
Elf Aquitaine |
Procede pour la determination et l'ajustement de la concentration des brillanteurs dans les bains de cuivrage, ainsi que dispositif pour la mise en oeuvre de ce procede, notamment pour application a l'industrie des circuits imprimes
|
DE3668915D1
(de)
*
|
1985-02-28 |
1990-03-15 |
Uemura Kogyo Kk |
Verfahren und vorrichtung zum feststellen des beginns des stromlosen plattierungsvorgangs.
|
US4631116A
(en)
*
|
1985-06-05 |
1986-12-23 |
Hughes Aircraft Company |
Method of monitoring trace constituents in plating baths
|
JPS628245U
(nl)
*
|
1985-06-29 |
1987-01-19 |
|
|
US4654126A
(en)
*
|
1985-10-07 |
1987-03-31 |
International Business Machines Corporation |
Process for determining the plating activity of an electroless plating bath
|
US4820643A
(en)
*
|
1986-03-10 |
1989-04-11 |
International Business Machines Corporation |
Process for determining the activity of a palladium-tin catalyst
|
US4692346A
(en)
*
|
1986-04-21 |
1987-09-08 |
International Business Machines Corporation |
Method and apparatus for controlling the surface chemistry on objects plated in an electroless plating bath
|
US4917777A
(en)
*
|
1986-04-24 |
1990-04-17 |
Shipley Company Inc. |
Method for analyzing additive concentration
|
US4917774A
(en)
*
|
1986-04-24 |
1990-04-17 |
Shipley Company Inc. |
Method for analyzing additive concentration
|
US4908242A
(en)
*
|
1986-10-31 |
1990-03-13 |
Kollmorgen Corporation |
Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures
|
US4814197A
(en)
*
|
1986-10-31 |
1989-03-21 |
Kollmorgen Corporation |
Control of electroless plating baths
|
US4810520A
(en)
*
|
1987-09-23 |
1989-03-07 |
Magnetic Peripherals Inc. |
Method for controlling electroless magnetic plating
|
US4812210A
(en)
*
|
1987-10-16 |
1989-03-14 |
The United States Department Of Energy |
Measuring surfactant concentration in plating solutions
|
US5124011A
(en)
*
|
1989-10-24 |
1992-06-23 |
Inco Limited |
Cyclic voltammetry
|
JPH03193899A
(ja)
*
|
1989-12-22 |
1991-08-23 |
Ebara Yuujiraito Kk |
電解液の自動管理方法
|
US5071527A
(en)
*
|
1990-06-29 |
1991-12-10 |
University Of Dayton |
Complete oil analysis technique
|
US5223118A
(en)
*
|
1991-03-08 |
1993-06-29 |
Shipley Company Inc. |
Method for analyzing organic additives in an electroplating bath
|
US5262022A
(en)
*
|
1991-05-28 |
1993-11-16 |
Rockwell International Corporation |
Method of assessing solderability
|
US5425859A
(en)
*
|
1991-05-28 |
1995-06-20 |
Rockwell International Corporation |
Method and apparatus for assessing and restoring solderability
|
JPH0526846A
(ja)
*
|
1991-07-19 |
1993-02-02 |
Nippon Filcon Co Ltd |
生体液中の塩素イオンと臭素イオンの濃度を同一液と同一電極を用いて連続的に測定する方法
|
DE69331566T2
(de)
*
|
1992-05-11 |
2002-10-31 |
Nippon Telegraph And Telephone Corp., Tokio/Tokyo |
Elektrochemisches Nachweisverfahren und Vorrichtung dazu
|
JP2706206B2
(ja)
*
|
1992-07-08 |
1998-01-28 |
三菱電機株式会社 |
用紙カセット
|
US5298145A
(en)
*
|
1992-10-13 |
1994-03-29 |
Hughes Aircraft Company |
Signal subtraction apparatus and method
|
US5389215A
(en)
*
|
1992-11-05 |
1995-02-14 |
Nippon Telegraph And Telephone Corporation |
Electrochemical detection method and apparatus therefor
|
US5320724A
(en)
*
|
1992-11-17 |
1994-06-14 |
Hughes Aircraft Company |
Method of monitoring constituents in plating baths
|
EP0665431A3
(de)
*
|
1994-01-14 |
1996-11-13 |
Fraunhofer Ges Forschung |
Verfahren und Vorrichtung zur Detektion von Nitrotoluolen.
|
DE19546206A1
(de)
*
|
1994-12-19 |
1996-06-20 |
At & T Corp |
Verfahren zum Prüfen von Materialien zur Verwendung bei der chemischen oder außenstromlosen Beschichtung
|
US5650061A
(en)
*
|
1995-09-18 |
1997-07-22 |
The Regents Of The University Of California |
Large amplitude sinusoidal voltammetry
|
US6814855B2
(en)
*
|
1998-05-01 |
2004-11-09 |
Semitool, Inc. |
Automated chemical management system having improved analysis unit
|
US6365033B1
(en)
|
1999-05-03 |
2002-04-02 |
Semitoof, Inc. |
Methods for controlling and/or measuring additive concentration in an electroplating bath
|
KR20010014440A
(ko)
*
|
1998-05-01 |
2001-02-26 |
세미툴 인코포레이티드 |
전기도금조 내의 첨가제 농도 측정방법
|
USRE38931E1
(en)
*
|
1998-05-01 |
2006-01-10 |
Semitool, Inc. |
Methods for controlling and/or measuring additive concentration in an electroplating bath
|
US6899805B2
(en)
*
|
1998-05-01 |
2005-05-31 |
Semitool, Inc. |
Automated chemical management system executing improved electrolyte analysis method
|
US6200531B1
(en)
*
|
1998-05-11 |
2001-03-13 |
Igen International, Inc. |
Apparatus for carrying out electrochemiluminescence test measurements
|
DE69929607T2
(de)
|
1998-06-30 |
2006-07-27 |
Semitool, Inc., Kalispell |
Metallisierungsstrukturen für mikroelektronische anwendungen und verfahren zur herstellung dieser strukturen
|
DE19911447C2
(de)
*
|
1999-03-08 |
2001-10-11 |
Atotech Deutschland Gmbh |
Verfahren zum analytischen Ermitteln der Konzentration von Zusatzstoffen in galvanischen Metallabscheidebädern
|
KR100709369B1
(ko)
*
|
1999-08-30 |
2007-04-20 |
가부시키가이샤 에바라 세이사꾸쇼 |
도금액 관리방법 및 관리장치
|
US6709564B1
(en)
|
1999-09-30 |
2004-03-23 |
Rockwell Scientific Licensing, Llc |
Integrated circuit plating using highly-complexed copper plating baths
|
US6508924B1
(en)
|
2000-05-31 |
2003-01-21 |
Shipley Company L.L.C. |
Control of breakdown products in electroplating baths
|
TW562878B
(en)
*
|
2000-06-30 |
2003-11-21 |
Ebara Corp |
Copper-plating liquid, plating method and plating apparatus
|
US6645364B2
(en)
|
2000-10-20 |
2003-11-11 |
Shipley Company, L.L.C. |
Electroplating bath control
|
EP1203950B1
(en)
*
|
2000-11-02 |
2005-09-07 |
Shipley Company LLC |
Plating bath analysis
|
US6440297B1
(en)
*
|
2000-12-18 |
2002-08-27 |
General Electric Company |
System and method for determining noble metal concentrations in reactor coolant streams
|
US6402592B1
(en)
*
|
2001-01-17 |
2002-06-11 |
Steag Cutek Systems, Inc. |
Electrochemical methods for polishing copper films on semiconductor substrates
|
US6974951B1
(en)
|
2001-01-29 |
2005-12-13 |
Metara, Inc. |
Automated in-process ratio mass spectrometry
|
US6592736B2
(en)
|
2001-07-09 |
2003-07-15 |
Semitool, Inc. |
Methods and apparatus for controlling an amount of a chemical constituent of an electrochemical bath
|
US7220383B2
(en)
|
2001-07-13 |
2007-05-22 |
Metara, Inc. |
Method and instrument for automated analysis of fluid-based processing systems
|
US6991710B2
(en)
*
|
2002-02-22 |
2006-01-31 |
Semitool, Inc. |
Apparatus for manually and automatically processing microelectronic workpieces
|
US6878245B2
(en)
*
|
2002-02-27 |
2005-04-12 |
Applied Materials, Inc. |
Method and apparatus for reducing organic depletion during non-processing time periods
|
US20030159937A1
(en)
*
|
2002-02-27 |
2003-08-28 |
Applied Materials, Inc. |
Method to reduce the depletion of organics in electroplating baths
|
US7531134B1
(en)
|
2002-03-08 |
2009-05-12 |
Metara, Inc. |
Method and apparatus for automated analysis and characterization of chemical constituents of process solutions
|
US6773569B2
(en)
*
|
2002-05-08 |
2004-08-10 |
Applied Materials Inc. |
Potential pulse-scan methods of analyzing organic additives in plating baths with multi-component additives
|
US7144488B2
(en)
*
|
2002-06-05 |
2006-12-05 |
Shipley Company, L.L.C. |
Electrode, electrochemical cell, and method for analysis of electroplating baths
|
US6709568B2
(en)
*
|
2002-06-13 |
2004-03-23 |
Advanced Technology Materials, Inc. |
Method for determining concentrations of additives in acid copper electrochemical deposition baths
|
AU2003249350A1
(en)
*
|
2002-06-20 |
2004-01-06 |
Igen International, Inc |
Electrochemiluminescence flow cell and flow cell components
|
US6808611B2
(en)
|
2002-06-27 |
2004-10-26 |
Applied Materials, Inc. |
Methods in electroanalytical techniques to analyze organic components in plating baths
|
JP3860111B2
(ja)
*
|
2002-12-19 |
2006-12-20 |
大日本スクリーン製造株式会社 |
メッキ装置およびメッキ方法
|
DE60336539D1
(de)
*
|
2002-12-20 |
2011-05-12 |
Shipley Co Llc |
Methode zum Elektroplattieren mit Umkehrpulsstrom
|
JP4303484B2
(ja)
*
|
2003-01-21 |
2009-07-29 |
大日本スクリーン製造株式会社 |
メッキ装置
|
JP2004323971A
(ja)
*
|
2003-04-25 |
2004-11-18 |
Rohm & Haas Electronic Materials Llc |
改良された浴分析
|
JP2004325441A
(ja)
*
|
2003-04-25 |
2004-11-18 |
Rohm & Haas Electronic Materials Llc |
分析方法
|
US20050067304A1
(en)
*
|
2003-09-26 |
2005-03-31 |
King Mackenzie E. |
Electrode assembly for analysis of metal electroplating solution, comprising self-cleaning mechanism, plating optimization mechanism, and/or voltage limiting mechanism
|
US20050109624A1
(en)
*
|
2003-11-25 |
2005-05-26 |
Mackenzie King |
On-wafer electrochemical deposition plating metrology process and apparatus
|
US20050224370A1
(en)
*
|
2004-04-07 |
2005-10-13 |
Jun Liu |
Electrochemical deposition analysis system including high-stability electrode
|
US6984299B2
(en)
*
|
2004-04-27 |
2006-01-10 |
Advanced Technology Material, Inc. |
Methods for determining organic component concentrations in an electrolytic solution
|
US7435320B2
(en)
|
2004-04-30 |
2008-10-14 |
Advanced Technology Materials, Inc. |
Methods and apparatuses for monitoring organic additives in electrochemical deposition solutions
|
US7291253B2
(en)
*
|
2004-05-04 |
2007-11-06 |
Eci Technology, Inc. |
Detection of an unstable additive breakdown product in a plating bath
|
US7427346B2
(en)
*
|
2004-05-04 |
2008-09-23 |
Advanced Technology Materials, Inc. |
Electrochemical drive circuitry and method
|
JP5590796B2
(ja)
|
2005-06-03 |
2014-09-17 |
ボード・オブ・リージェンツ・オブ・ザ・ユニバーシティ・オブ・テキサス・システム |
電気化学および単一ファラデー電極による電気化学発光
|
US7851222B2
(en)
*
|
2005-07-26 |
2010-12-14 |
Applied Materials, Inc. |
System and methods for measuring chemical concentrations of a plating solution
|
US20070261963A1
(en)
*
|
2006-02-02 |
2007-11-15 |
Advanced Technology Materials, Inc. |
Simultaneous inorganic, organic and byproduct analysis in electrochemical deposition solutions
|
US20070215490A1
(en)
*
|
2006-03-18 |
2007-09-20 |
Rockwood Electrochemicals Asia Ltd. |
Method of analyzing accelerator for copper electroplating
|
US20080156653A1
(en)
*
|
2006-12-28 |
2008-07-03 |
Chang Gung University |
Cyanide-free pre-treating solution for electroplating copper coating layer on magnesium alloy surface and a pre-treating method thereof
|
US20080156652A1
(en)
*
|
2006-12-28 |
2008-07-03 |
Chang Gung University |
Cyanide-free pre-treating solution for electroplating copper coating layer on zinc alloy surface and a pre-treating method thereof
|
DE102008056470B3
(de)
*
|
2008-11-05 |
2010-04-22 |
Atotech Deutschland Gmbh |
Verfahren zum Untersuchen einer Metallschicht und Verfahren zur analytischen Kontrolle eines zum Abscheiden der Metallschicht dienenden Abscheideelektrolyten
|
KR102020572B1
(ko)
|
2012-10-23 |
2019-09-10 |
모세 레이크 인더스트리즈, 인코포레이티드 |
도금욕 계측의 개선
|
US9964518B2
(en)
*
|
2014-11-21 |
2018-05-08 |
Hioki Denki Kabushiki Kaisha |
Electroplating solution analyzing apparatus
|