DE3668915D1 - Verfahren und vorrichtung zum feststellen des beginns des stromlosen plattierungsvorgangs. - Google Patents

Verfahren und vorrichtung zum feststellen des beginns des stromlosen plattierungsvorgangs.

Info

Publication number
DE3668915D1
DE3668915D1 DE8686301416T DE3668915T DE3668915D1 DE 3668915 D1 DE3668915 D1 DE 3668915D1 DE 8686301416 T DE8686301416 T DE 8686301416T DE 3668915 T DE3668915 T DE 3668915T DE 3668915 D1 DE3668915 D1 DE 3668915D1
Authority
DE
Germany
Prior art keywords
determining
plating process
electric plating
electric
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686301416T
Other languages
English (en)
Inventor
Shigeo Hashimoto
Yataka Sugiura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Uemera Kogyo Co Ltd
C Uyemura and Co Ltd
Original Assignee
Uemera Kogyo Co Ltd
C Uyemura and Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3995285A external-priority patent/JPS61199070A/ja
Priority claimed from JP11086285A external-priority patent/JPS61266578A/ja
Application filed by Uemera Kogyo Co Ltd, C Uyemura and Co Ltd filed Critical Uemera Kogyo Co Ltd
Application granted granted Critical
Publication of DE3668915D1 publication Critical patent/DE3668915D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1675—Process conditions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1655—Process features
    • C23C18/1664—Process features with additional means during the plating process
    • C23C18/1671—Electric field
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/187—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating means therefor, e.g. baths, apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
DE8686301416T 1985-02-28 1986-02-27 Verfahren und vorrichtung zum feststellen des beginns des stromlosen plattierungsvorgangs. Expired - Lifetime DE3668915D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3995285A JPS61199070A (ja) 1985-02-28 1985-02-28 無電解めつきスタ−ト検知方法
JP11086285A JPS61266578A (ja) 1985-05-22 1985-05-22 無電解めつきスタ−ト検知装置

Publications (1)

Publication Number Publication Date
DE3668915D1 true DE3668915D1 (de) 1990-03-15

Family

ID=26379355

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686301416T Expired - Lifetime DE3668915D1 (de) 1985-02-28 1986-02-27 Verfahren und vorrichtung zum feststellen des beginns des stromlosen plattierungsvorgangs.

Country Status (3)

Country Link
US (1) US4718990A (de)
EP (1) EP0194103B1 (de)
DE (1) DE3668915D1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4810520A (en) * 1987-09-23 1989-03-07 Magnetic Peripherals Inc. Method for controlling electroless magnetic plating
US5262022A (en) * 1991-05-28 1993-11-16 Rockwell International Corporation Method of assessing solderability
US5425859A (en) * 1991-05-28 1995-06-20 Rockwell International Corporation Method and apparatus for assessing and restoring solderability
US5324399A (en) * 1992-05-12 1994-06-28 Hughes Aircraft Company Method and system for monitoring quality of phosphate coating
EP0769572A1 (de) * 1995-06-06 1997-04-23 ENTHONE-OMI, Inc. Verfahren und Bad zur stromlosen Plattierung mit einer Nickel-Kobalt-Phosphorlegierung
KR20080018774A (ko) * 2003-09-19 2008-02-28 어플라이드 머티어리얼스, 인코포레이티드 무전해 증착 종료점 검출 장치 및 방법
US20060062897A1 (en) * 2004-09-17 2006-03-23 Applied Materials, Inc Patterned wafer thickness detection system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3138479A (en) * 1961-12-20 1964-06-23 Burroughs Corp Method for the electroless deposition of high coercive magnetic film
US3438875A (en) * 1966-04-14 1969-04-15 Beckman Instruments Inc Method of forming reference electrodes
DE2521282C2 (de) * 1975-05-13 1977-03-03 Siemens Ag Prozessteueranlage zum selbsttaetigen analysieren und auffrischen von galvanischen baedern
CA1064852A (en) * 1975-12-31 1979-10-23 Cominco Ltd. Method for evaluating a system for electrodeposition of metals
US4132605A (en) * 1976-12-27 1979-01-02 Rockwell International Corporation Method for evaluating the quality of electroplating baths
JPS58104167A (ja) * 1981-12-14 1983-06-21 Oki Electric Ind Co Ltd 無電解めつき厚さ連続測定方法
JPS58104166A (ja) * 1981-12-14 1983-06-21 Oki Electric Ind Co Ltd 無電解めつき厚さ連続測定方法
US4477484A (en) * 1982-12-10 1984-10-16 International Business Machines Corporation Electroless plating monitor
JPS59226171A (ja) * 1983-06-07 1984-12-19 Brother Ind Ltd 無電解めつき速度の自動モニタ−装置
JPS60104246A (ja) * 1983-11-11 1985-06-08 C Uyemura & Co Ltd 化学銅めつき浴中のホルムアルデヒドの分析方法
US4479980A (en) * 1983-12-16 1984-10-30 International Business Machines Corporation Plating rate monitor

Also Published As

Publication number Publication date
US4718990A (en) 1988-01-12
EP0194103B1 (de) 1990-02-07
EP0194103A2 (de) 1986-09-10
EP0194103A3 (en) 1987-04-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee