DE3673917D1 - Verfahren und vorrichtung zum absoluten wegmessen. - Google Patents

Verfahren und vorrichtung zum absoluten wegmessen.

Info

Publication number
DE3673917D1
DE3673917D1 DE8686107711T DE3673917T DE3673917D1 DE 3673917 D1 DE3673917 D1 DE 3673917D1 DE 8686107711 T DE8686107711 T DE 8686107711T DE 3673917 T DE3673917 T DE 3673917T DE 3673917 D1 DE3673917 D1 DE 3673917D1
Authority
DE
Germany
Prior art keywords
absolutely measuring
absolutely
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686107711T
Other languages
English (en)
Inventor
Norihiro Iwamoto
Hiroyuki Tsuboi
Yoshitami Hakata
Kimio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Application granted granted Critical
Publication of DE3673917D1 publication Critical patent/DE3673917D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/243—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of ac
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
DE8686107711T 1985-06-07 1986-06-06 Verfahren und vorrichtung zum absoluten wegmessen. Expired - Fee Related DE3673917D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60123984A JPS61281902A (ja) 1985-06-07 1985-06-07 絶対位置検出装置

Publications (1)

Publication Number Publication Date
DE3673917D1 true DE3673917D1 (de) 1990-10-11

Family

ID=14874163

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686107711T Expired - Fee Related DE3673917D1 (de) 1985-06-07 1986-06-06 Verfahren und vorrichtung zum absoluten wegmessen.

Country Status (4)

Country Link
US (1) US4757244A (de)
EP (1) EP0212104B2 (de)
JP (1) JPS61281902A (de)
DE (1) DE3673917D1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2554465B2 (ja) * 1985-08-09 1996-11-13 株式会社 エスジー アブソリユ−ト位置検出装置
JP2648181B2 (ja) * 1988-08-31 1997-08-27 オ−クマ株式会社 リニアエンコーダ
GB2273166B (en) * 1989-09-05 1994-08-31 Kelly H P G Improvements in or relating to the control of linear motors
JP3029657B2 (ja) * 1990-09-28 2000-04-04 カヤバ工業株式会社 位置検出装置
US5115195A (en) * 1991-01-22 1992-05-19 Mts Systems Corporation System and method for measuring the absolute position of one body which is constrained to move with respect to another body
US5442313A (en) * 1994-05-27 1995-08-15 The Torrington Company Resolution multiplying circuit
DE19501617C2 (de) * 1995-01-20 1997-04-03 Stegmann Max Antriebstech Gerät zur Bestimmung eines drehwinkelabhängigen Meßwertes
EP0743508A2 (de) * 1995-05-16 1996-11-20 Mitutoyo Corporation Positionssensor unter Anwendung des Strominduktionsprinzips
US5704268A (en) * 1995-07-26 1998-01-06 Thermo Fibertek Inc. Electro-hydraulic shower oscillator for papermaking
US6552666B1 (en) * 1996-03-16 2003-04-22 Atsutoshi Goto Phase difference detection device and method for a position detector
US5973494A (en) * 1996-05-13 1999-10-26 Mitutoyo Corporation Electronic caliper using a self-contained, low power inductive position transducer
US6002250A (en) * 1996-05-13 1999-12-14 Mitutoyo Corporation Electronic linear scale using a self-contained, low-power inductive position transducer
US5886519A (en) * 1997-01-29 1999-03-23 Mitutoyo Corporation Multi-scale induced current absolute position transducer
DE19754524A1 (de) * 1997-12-09 1999-06-10 Mannesmann Vdo Ag Wegsensor
JP4088073B2 (ja) * 2002-01-11 2008-05-21 株式会社ミツトヨ 絶対位置測定装置
US6533076B1 (en) 2002-02-06 2003-03-18 Crown Equipment Corporation Materials handling vehicle mast height sensor
GB0401748D0 (en) 2004-01-27 2004-03-03 Copley Motion Systems Llc Linear motor and transducer arrangement therefor
WO2006035055A2 (de) * 2004-09-30 2006-04-06 Continental Teves Ag & Co. Ohg Magnetischer absolutpositionssensor mit variierender länge der einzelnen kodierungssegmente
JP6103927B2 (ja) * 2012-12-27 2017-03-29 キヤノン株式会社 位置検出装置、駆動制御装置及びレンズ装置
EP2995910B1 (de) * 2014-09-11 2016-11-16 Baumüller Nürnberg GmbH Absolutlage-Messsystem und -Verfahren
DE102017222676A1 (de) * 2016-12-29 2018-07-05 Robert Bosch Gmbh Wegsensor
EP3410075B1 (de) * 2017-05-30 2020-10-07 MEAS France Temperaturkompensation für magnetfeldmessvorrichtungen und magnetfeldmessvorrichtung damit
DE102020202147A1 (de) 2020-02-19 2021-08-19 Hawe Hydraulik Se Hydraulikkomponente, hydraulisches Stellsystem mit einer solchen Hydraulikkomponente und Fahrzeug mit einem solchen hydraulischen Stellsystem
US11719527B2 (en) * 2021-11-04 2023-08-08 Allegro Microsystems, Llc Angle sensor with a single die using a single target
EP4279874A1 (de) * 2022-05-19 2023-11-22 Dr. Johannes Heidenhain GmbH Induktive positionsmesseinrichtung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3083324A (en) * 1959-02-26 1963-03-26 Contraves Ag Phase modulated positioning servo-system
US3505576A (en) * 1966-07-12 1970-04-07 Litton Business Systems Inc Digital servomechanism including an inductive position encoder
GB1206591A (en) * 1966-10-05 1970-09-23 Nat Res Dev Improvements in or relating to positional displacement transducer arrangements
US4528448A (en) * 1982-05-13 1985-07-09 Benson, Inc. Plane linear grating for optically encoding information
GB2126444B (en) * 1982-09-01 1986-03-19 Rosemount Eng Co Ltd Position measuring apparatus
JPS59117902A (ja) * 1982-12-23 1984-07-07 S G:Kk 流体圧シリンダの位置決め制御装置
JPS59221616A (ja) * 1983-05-31 1984-12-13 Tohoku Metal Ind Ltd 磁気ロ−タリエンコ−ダ
JPS59226806A (ja) * 1983-06-08 1984-12-20 Fanuc Ltd 絶対位置検出装置
DE3325353A1 (de) * 1983-07-14 1985-01-24 Honeywell Gmbh Positionssensor

Also Published As

Publication number Publication date
EP0212104A3 (en) 1988-09-21
EP0212104B1 (de) 1990-09-05
JPH0575041B2 (de) 1993-10-19
EP0212104A2 (de) 1987-03-04
JPS61281902A (ja) 1986-12-12
US4757244A (en) 1988-07-12
EP0212104B2 (de) 1995-04-26

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee