NL7314732A - - Google Patents

Info

Publication number
NL7314732A
NL7314732A NL7314732A NL7314732A NL7314732A NL 7314732 A NL7314732 A NL 7314732A NL 7314732 A NL7314732 A NL 7314732A NL 7314732 A NL7314732 A NL 7314732A NL 7314732 A NL7314732 A NL 7314732A
Authority
NL
Netherlands
Application number
NL7314732A
Other versions
NL182604B (nl
NL182604C (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7314732A publication Critical patent/NL7314732A/xx
Publication of NL182604B publication Critical patent/NL182604B/xx
Application granted granted Critical
Publication of NL182604C publication Critical patent/NL182604C/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/092Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
    • H01L27/0927Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising a P-well only in the substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232Field-effect technology
    • H01L21/8234MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238Complementary field-effect transistors, e.g. CMOS
    • H01L21/823828Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
    • H01L21/823842Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/043Dual dielectric
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/053Field effect transistors fets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/122Polycrystalline

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Weting (AREA)
NLAANVRAGE7314732,A 1972-11-01 1973-10-26 Werkwijze voor het vervaardigen van een geintegreerde halfgeleiderschakeling met ten minste een paar complementaire veldeffecttransistoren met een stuurelektrode van polykristallijn of amorf silicium en een met de werkwijze vervaardigde geintegreerde halfgeleiderschakeling. NL182604C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00302962A US3821781A (en) 1972-11-01 1972-11-01 Complementary field effect transistors having p doped silicon gates

Publications (3)

Publication Number Publication Date
NL7314732A true NL7314732A (fr) 1974-05-03
NL182604B NL182604B (nl) 1987-11-02
NL182604C NL182604C (nl) 1988-04-05

Family

ID=23169988

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7314732,A NL182604C (nl) 1972-11-01 1973-10-26 Werkwijze voor het vervaardigen van een geintegreerde halfgeleiderschakeling met ten minste een paar complementaire veldeffecttransistoren met een stuurelektrode van polykristallijn of amorf silicium en een met de werkwijze vervaardigde geintegreerde halfgeleiderschakeling.

Country Status (14)

Country Link
US (1) US3821781A (fr)
JP (2) JPS5513431B2 (fr)
BE (1) BE805485A (fr)
BR (1) BR7307671D0 (fr)
CA (1) CA1061012A (fr)
CH (1) CH553482A (fr)
DE (1) DE2352762C2 (fr)
ES (1) ES419843A1 (fr)
FR (1) FR2204896B1 (fr)
GB (1) GB1423183A (fr)
IL (1) IL43098A (fr)
IT (1) IT1001557B (fr)
NL (1) NL182604C (fr)
SE (1) SE389227B (fr)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4016016A (en) * 1975-05-22 1977-04-05 Rca Corporation Method of simultaneously forming a polycrystalline silicon gate and a single crystal extension of said gate in silicon on sapphire MOS devices
JPS51147274A (en) * 1975-06-13 1976-12-17 Fujitsu Ltd Manufacturing process of integrated circuit
JPS51147982A (en) * 1975-06-13 1976-12-18 Nec Corp Integrated circuit
JPS5214381A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Mis-type semiconductor device
JPS5267276A (en) * 1975-10-29 1977-06-03 Toshiba Corp Manufacture of semiconductor unit
US4035826A (en) * 1976-02-23 1977-07-12 Rca Corporation Reduction of parasitic bipolar effects in integrated circuits employing insulated gate field effect transistors via the use of low resistance substrate contacts extending through source region
JPS606105B2 (ja) * 1976-03-29 1985-02-15 三菱電機株式会社 絶縁ゲ−ト型電界効果トランジスタの製造方法
US4124807A (en) * 1976-09-14 1978-11-07 Solid State Scientific Inc. Bistable semiconductor flip-flop having a high resistance feedback
US4045259A (en) * 1976-10-26 1977-08-30 Harris Corporation Process for fabricating diffused complementary field effect transistors
US4157268A (en) * 1977-06-16 1979-06-05 International Business Machines Corporation Localized oxidation enhancement for an integrated injection logic circuit
JPS5413779A (en) * 1977-07-04 1979-02-01 Toshiba Corp Semiconductor integrated circuit device
JPS54110068U (fr) * 1978-01-20 1979-08-02
US4559694A (en) * 1978-09-13 1985-12-24 Hitachi, Ltd. Method of manufacturing a reference voltage generator device
US4785341A (en) * 1979-06-29 1988-11-15 International Business Machines Corporation Interconnection of opposite conductivity type semiconductor regions
EP0024905B1 (fr) * 1979-08-25 1985-01-16 Zaidan Hojin Handotai Kenkyu Shinkokai Transistor à effet de champ à porte isolée
US4295897B1 (en) * 1979-10-03 1997-09-09 Texas Instruments Inc Method of making cmos integrated circuit device
JPS5661139A (en) * 1979-10-25 1981-05-26 Seiko Epson Corp Manufacture of semiconductor device
JPS5664465A (en) * 1979-10-29 1981-06-01 Seiko Epson Corp C-mos integrated circuit
JPS5663874A (en) * 1979-10-29 1981-05-30 Hitachi Metals Ltd Hard tool material
US4684971A (en) * 1981-03-13 1987-08-04 American Telephone And Telegraph Company, At&T Bell Laboratories Ion implanted CMOS devices
DE3133468A1 (de) * 1981-08-25 1983-03-17 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von hochintegrierten komplementaeren mos-feldeffekttransistorschaltungen in siliziumgate-technologie
DE3133841A1 (de) * 1981-08-27 1983-03-17 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von hochintegrierten komplementaeren mos-feldeffekttransistorschaltungen
DE3149185A1 (de) * 1981-12-11 1983-06-23 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung benachbarter mit dotierstoffionen implantierter wannen bei der herstellung von hochintegrierten komplementaeren mos-feldeffekttransistorschaltungen
US4474624A (en) * 1982-07-12 1984-10-02 Intel Corporation Process for forming self-aligned complementary source/drain regions for MOS transistors
JPS5955054A (ja) * 1982-09-24 1984-03-29 Hitachi Ltd 半導体装置の製造方法
JPH0636425B2 (ja) * 1983-02-23 1994-05-11 テキサス インスツルメンツ インコ−ポレイテツド Cmos装置の製造方法
JPS6024620U (ja) * 1983-07-27 1985-02-20 トヨタ自動車株式会社 自動車用ドアウエザストリップ
JPS5956758A (ja) * 1983-08-31 1984-04-02 Hitachi Ltd 電界効果半導体装置の製法
US5257095A (en) * 1985-12-04 1993-10-26 Advanced Micro Devices, Inc. Common geometry high voltage tolerant long channel and high speed short channel field effect transistors
EP0248267A3 (fr) * 1986-06-06 1990-04-25 Siemens Aktiengesellschaft Circuit intégré monolithiques à branches de circuit parallèles entre elles
EP0248266A3 (fr) * 1986-06-06 1990-04-25 Siemens Aktiengesellschaft Circuit logique à plusieurs transistors à effet de champ complémentaires
US4707455A (en) * 1986-11-26 1987-11-17 General Electric Company Method of fabricating a twin tub CMOS device
US5060037A (en) * 1987-04-03 1991-10-22 Texas Instruments Incorporated Output buffer with enhanced electrostatic discharge protection
JPS63147A (ja) * 1987-06-12 1988-01-05 Seiko Epson Corp 半導体装置
JPS63146A (ja) * 1987-06-12 1988-01-05 Seiko Epson Corp 半導体装置
JPH01164062A (ja) * 1988-11-18 1989-06-28 Hitachi Ltd 半導体装置の製造方法
US5289027A (en) * 1988-12-09 1994-02-22 Hughes Aircraft Company Ultrathin submicron MOSFET with intrinsic channel
JP2572653B2 (ja) * 1989-12-29 1997-01-16 セイコーエプソン株式会社 半導体装置の製造方法
JPH02224269A (ja) * 1989-12-29 1990-09-06 Seiko Epson Corp 半導体装置
US5849601A (en) 1990-12-25 1998-12-15 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7115902B1 (en) 1990-11-20 2006-10-03 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7098479B1 (en) * 1990-12-25 2006-08-29 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device and method for manufacturing the same
US7576360B2 (en) * 1990-12-25 2009-08-18 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device which comprises thin film transistors and method for manufacturing the same
JPH0575042A (ja) * 1992-03-05 1993-03-26 Seiko Epson Corp 半導体装置
KR0131741B1 (ko) * 1993-12-31 1998-04-15 김주용 반도체 기억장치 및 그 제조방법
WO1997032343A1 (fr) * 1996-02-28 1997-09-04 Sierra Semiconductor Coporation Condensateurs lineaires de haute precision, en technologie mos
US6172402B1 (en) * 1998-06-04 2001-01-09 Advanced Micro Devices Integrated circuit having transistors that include insulative punchthrough regions and method of formation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3646665A (en) * 1970-05-22 1972-03-07 Gen Electric Complementary mis-fet devices and method of fabrication
DE2058660B1 (de) * 1970-11-28 1972-06-08 Itt Ind Gmbh Deutsche Verfahren zum Herstellen einer monolithischen Festkoerperschaltung

Also Published As

Publication number Publication date
BE805485A (fr) 1974-01-16
JPS5513431B2 (fr) 1980-04-09
US3821781A (en) 1974-06-28
SE389227B (sv) 1976-10-25
GB1423183A (en) 1976-01-28
DE2352762C2 (de) 1984-02-16
JPS5548460B2 (fr) 1980-12-05
NL182604B (nl) 1987-11-02
JPS5533096A (en) 1980-03-08
IT1001557B (it) 1976-04-30
IL43098A (en) 1976-04-30
FR2204896A1 (fr) 1974-05-24
CH553482A (de) 1974-08-30
FR2204896B1 (fr) 1978-08-11
CA1061012A (fr) 1979-08-21
DE2352762A1 (de) 1974-05-16
IL43098A0 (en) 1973-11-28
NL182604C (nl) 1988-04-05
BR7307671D0 (pt) 1974-10-22
ES419843A1 (es) 1976-04-01
JPS4979189A (fr) 1974-07-31

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Legal Events

Date Code Title Description
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee