NL2007473C2 - Method and apparatus for the generation of euv radiation from a gas discharge plasma. - Google Patents
Method and apparatus for the generation of euv radiation from a gas discharge plasma. Download PDFInfo
- Publication number
- NL2007473C2 NL2007473C2 NL2007473A NL2007473A NL2007473C2 NL 2007473 C2 NL2007473 C2 NL 2007473C2 NL 2007473 A NL2007473 A NL 2007473A NL 2007473 A NL2007473 A NL 2007473A NL 2007473 C2 NL2007473 C2 NL 2007473C2
- Authority
- NL
- Netherlands
- Prior art keywords
- channel
- electrodes
- discharge
- generating
- radiation
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 22
- 230000001960 triggered effect Effects 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 56
- 239000007788 liquid Substances 0.000 claims description 10
- 230000001154 acute effect Effects 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims 6
- 238000001704 evaporation Methods 0.000 claims 6
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 46
- 230000008016 vaporization Effects 0.000 description 29
- 238000007493 shaping process Methods 0.000 description 25
- 210000002381 plasma Anatomy 0.000 description 19
- 210000001624 hip Anatomy 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 7
- 239000007787 solid Substances 0.000 description 6
- 238000009834 vaporization Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
- H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
- H05G2/0086—Optical arrangements for conveying the laser beam to the plasma generation location
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
- H05G2/002—Supply of the plasma generating material
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010047419 | 2010-10-01 | ||
| DE102010047419A DE102010047419B4 (de) | 2010-10-01 | 2010-10-01 | Verfahren und Vorrichtung zur Erzeugung von EUV-Strahlung aus einem Gasentladungsplasma |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NL2007473A NL2007473A (en) | 2012-04-03 |
| NL2007473C2 true NL2007473C2 (en) | 2013-07-30 |
Family
ID=44993840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2007473A NL2007473C2 (en) | 2010-10-01 | 2011-09-26 | Method and apparatus for the generation of euv radiation from a gas discharge plasma. |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8426834B2 (https=) |
| JP (1) | JP5534613B2 (https=) |
| DE (1) | DE102010047419B4 (https=) |
| NL (1) | NL2007473C2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8881526B2 (en) | 2009-03-10 | 2014-11-11 | Bastian Family Holdings, Inc. | Laser for steam turbine system |
| WO2014127151A1 (en) | 2013-02-14 | 2014-08-21 | Kla-Tencor Corporation | System and method for producing an exclusionary buffer gas flow in an euv light source |
| CN115119373B (zh) * | 2022-05-31 | 2025-12-05 | 广东省智能机器人研究院 | 极紫外光产生方法及装置 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4504964A (en) * | 1982-09-20 | 1985-03-12 | Eaton Corporation | Laser beam plasma pinch X-ray system |
| JPH08213192A (ja) * | 1995-02-02 | 1996-08-20 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線発生装置およびその発生方法 |
| US6815700B2 (en) * | 1997-05-12 | 2004-11-09 | Cymer, Inc. | Plasma focus light source with improved pulse power system |
| JP3698677B2 (ja) * | 2002-03-15 | 2005-09-21 | 川崎重工業株式会社 | レーザパルス制御方法と装置およびｘ線発生方法と装置 |
| US6787788B2 (en) * | 2003-01-21 | 2004-09-07 | Melissa Shell | Electrode insulator materials for use in extreme ultraviolet electric discharge sources |
| FR2859545B1 (fr) * | 2003-09-05 | 2005-11-11 | Commissariat Energie Atomique | Procede et dispositif de lithographie par rayonnement dans l'extreme utraviolet |
| DE10359464A1 (de) * | 2003-12-17 | 2005-07-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Röntgenstrahlung |
| US7164144B2 (en) * | 2004-03-10 | 2007-01-16 | Cymer Inc. | EUV light source |
| FR2871622B1 (fr) * | 2004-06-14 | 2008-09-12 | Commissariat Energie Atomique | Dispositif de generation de lumiere dans l'extreme ultraviolet et application a une source de lithographie par rayonnement dans l'extreme ultraviolet |
| US7605385B2 (en) * | 2004-07-28 | 2009-10-20 | Board of Regents of the University and Community College System of Nevada, on behlaf of the University of Nevada | Electro-less discharge extreme ultraviolet light source |
| DE102005007884A1 (de) * | 2005-02-15 | 2006-08-24 | Xtreme Technologies Gmbh | Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter (EUV-) Strahlung |
| DE102005020521B4 (de) * | 2005-04-29 | 2013-05-02 | Xtreme Technologies Gmbh | Verfahren und Anordnung zur Unterdrückung von Debris bei der Erzeugung kurzwelliger Strahlung auf Basis eines Plasmas |
| DE102005039849B4 (de) | 2005-08-19 | 2011-01-27 | Xtreme Technologies Gmbh | Vorrichtung zur Strahlungserzeugung mittels einer Gasentladung |
| US7501642B2 (en) * | 2005-12-29 | 2009-03-10 | Asml Netherlands B.V. | Radiation source |
| DE102006003683B3 (de) * | 2006-01-24 | 2007-09-13 | Xtreme Technologies Gmbh | Anordnung und Verfahren zur Erzeugung von EUV-Strahlung hoher Durchschnittsleistung |
| DE102006027856B3 (de) * | 2006-06-13 | 2007-11-22 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von extrem ultravioletter Strahlung mittels elektrischer Entladung an regenerierbaren Elektroden |
| JP5358060B2 (ja) * | 2007-02-20 | 2013-12-04 | ギガフォトン株式会社 | 極端紫外光源装置 |
| JP5179776B2 (ja) * | 2007-04-20 | 2013-04-10 | ギガフォトン株式会社 | 極端紫外光源用ドライバレーザ |
| US7615767B2 (en) * | 2007-05-09 | 2009-11-10 | Asml Netherlands B.V. | Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| JP2009099390A (ja) * | 2007-10-17 | 2009-05-07 | Tokyo Institute Of Technology | 極端紫外光光源装置および極端紫外光発生方法 |
| JP4952513B2 (ja) * | 2007-10-31 | 2012-06-13 | ウシオ電機株式会社 | 極端紫外光光源装置 |
| WO2009105247A1 (en) * | 2008-02-21 | 2009-08-27 | Plex Llc | Laser heated discharge plasma euv source with plasma assisted lithium reflux |
| JP4623192B2 (ja) * | 2008-09-29 | 2011-02-02 | ウシオ電機株式会社 | 極端紫外光光源装置および極端紫外光発生方法 |
| CN102257883B (zh) * | 2008-12-16 | 2014-06-25 | 皇家飞利浦电子股份有限公司 | 用于以提高的效率生成euv辐射或软x射线的方法和装置 |
| US8436328B2 (en) * | 2008-12-16 | 2013-05-07 | Gigaphoton Inc. | Extreme ultraviolet light source apparatus |
| JP4893730B2 (ja) | 2008-12-25 | 2012-03-07 | ウシオ電機株式会社 | 極端紫外光光源装置 |
| WO2011013779A1 (ja) * | 2009-07-29 | 2011-02-03 | 株式会社小松製作所 | 極端紫外光源装置、極端紫外光源装置の制御方法、およびそのプログラムを記録した記録媒体 |
-
2010
- 2010-10-01 DE DE102010047419A patent/DE102010047419B4/de not_active Expired - Fee Related
-
2011
- 2011-09-22 US US13/239,564 patent/US8426834B2/en not_active Expired - Fee Related
- 2011-09-26 NL NL2007473A patent/NL2007473C2/en not_active IP Right Cessation
- 2011-09-27 JP JP2011210468A patent/JP5534613B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| NL2007473A (en) | 2012-04-03 |
| DE102010047419B4 (de) | 2013-09-05 |
| DE102010047419A1 (de) | 2012-04-05 |
| JP2012079693A (ja) | 2012-04-19 |
| JP5534613B2 (ja) | 2014-07-02 |
| US20120080619A1 (en) | 2012-04-05 |
| US8426834B2 (en) | 2013-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| SD | Assignments of patents |
Effective date: 20140214 |
|
| MM | Lapsed because of non-payment of the annual fee |
Effective date: 20211001 |