NL1031618A1 - Interferometer voor kleine niet-lineaire foutverplaatsingsmeting. - Google Patents

Interferometer voor kleine niet-lineaire foutverplaatsingsmeting.

Info

Publication number
NL1031618A1
NL1031618A1 NL1031618A NL1031618A NL1031618A1 NL 1031618 A1 NL1031618 A1 NL 1031618A1 NL 1031618 A NL1031618 A NL 1031618A NL 1031618 A NL1031618 A NL 1031618A NL 1031618 A1 NL1031618 A1 NL 1031618A1
Authority
NL
Netherlands
Prior art keywords
interferometer
displacement measurement
small non
linear error
error displacement
Prior art date
Application number
NL1031618A
Other languages
English (en)
Other versions
NL1031618C2 (nl
Inventor
William Clay Schluchter
Robert Todd Belt
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of NL1031618A1 publication Critical patent/NL1031618A1/nl
Application granted granted Critical
Publication of NL1031618C2 publication Critical patent/NL1031618C2/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NL1031618A 2005-04-29 2006-04-19 Interferometer voor kleine niet-lineaire foutverplaatsingsmeting. NL1031618C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/118,949 US7251039B1 (en) 2005-04-29 2005-04-29 Low non-linear error displacement measuring interferometer
US11894905 2005-04-29

Publications (2)

Publication Number Publication Date
NL1031618A1 true NL1031618A1 (nl) 2006-11-01
NL1031618C2 NL1031618C2 (nl) 2007-09-25

Family

ID=37111644

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1031618A NL1031618C2 (nl) 2005-04-29 2006-04-19 Interferometer voor kleine niet-lineaire foutverplaatsingsmeting.

Country Status (5)

Country Link
US (1) US7251039B1 (nl)
JP (1) JP2006308594A (nl)
CN (1) CN1854678A (nl)
DE (1) DE102006017253A1 (nl)
NL (1) NL1031618C2 (nl)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
KR100898327B1 (ko) 2008-03-26 2009-05-20 한국과학기술원 파장판의 각도 정렬을 통한 간섭계의 비선형 오차 보상방법
NL2003134C (nl) * 2008-09-11 2010-03-16 Univ Delft Tech Laser interferometer.
CN102147505B (zh) 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
CN101782368A (zh) * 2010-03-03 2010-07-21 福州高意通讯有限公司 一种干涉仪装置
JP5588769B2 (ja) * 2010-07-01 2014-09-10 株式会社 光コム 光学式計測装置
TW201219746A (en) * 2010-11-01 2012-05-16 Prec Machinery Res & Amp Dev Ct used in gantry type processing machine for measuring errors in linear displacement of lead screws
TWI619927B (zh) * 2015-05-25 2018-04-01 Ckd Corp Three-dimensional measuring device
JP6271493B2 (ja) 2015-05-25 2018-01-31 Ckd株式会社 三次元計測装置
US11156449B2 (en) 2016-01-31 2021-10-26 Keysight Technologies, Inc. Separated beams displacement measurement with a grating
US20190113329A1 (en) 2017-10-12 2019-04-18 Keysight Technologies, Inc. Systems and methods for cyclic error correction in a heterodyne interferometer
JP7123333B2 (ja) * 2018-03-06 2022-08-23 中央精機株式会社 変位計測装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806608A1 (de) * 1987-03-18 1988-09-29 Deutsches Textilforschzentrum Verfahren zur geschwindigkeits- und/oder laengenmessung von endlosen textilen warenbahnen sowie vorrichtung zur durchfuehrung des verfahrens
US5064289A (en) * 1989-02-23 1991-11-12 Hewlett-Packard Company Linear-and-angular measuring plane mirror interferometer
US5677768A (en) * 1996-07-03 1997-10-14 Hewlett-Packard Company Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US6313918B1 (en) * 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies
US7009710B2 (en) * 2001-08-20 2006-03-07 Agilent Technologies, Inc. Direct combination of fiber optic light beams
EP1419361A1 (en) * 2001-08-23 2004-05-19 Zygo Corporation Dynamic interferometric controlling direction of input beam

Also Published As

Publication number Publication date
JP2006308594A (ja) 2006-11-09
DE102006017253A1 (de) 2006-11-09
NL1031618C2 (nl) 2007-09-25
CN1854678A (zh) 2006-11-01
US7251039B1 (en) 2007-07-31
US20070171426A1 (en) 2007-07-26

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20070523

PD2B A search report has been drawn up
PD2B A search report has been drawn up
SD Assignments of patents

Effective date: 20141103

MM Lapsed because of non-payment of the annual fee

Effective date: 20170501