NL1032924A1 - Monolithische verplaatsingsmetingsinterferometer. - Google Patents

Monolithische verplaatsingsmetingsinterferometer.

Info

Publication number
NL1032924A1
NL1032924A1 NL1032924A NL1032924A NL1032924A1 NL 1032924 A1 NL1032924 A1 NL 1032924A1 NL 1032924 A NL1032924 A NL 1032924A NL 1032924 A NL1032924 A NL 1032924A NL 1032924 A1 NL1032924 A1 NL 1032924A1
Authority
NL
Netherlands
Prior art keywords
displacement measurement
measurement interferometer
monolithic
monolithic displacement
interferometer
Prior art date
Application number
NL1032924A
Other languages
English (en)
Other versions
NL1032924C2 (nl
Inventor
Alan B Ray
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of NL1032924A1 publication Critical patent/NL1032924A1/nl
Application granted granted Critical
Publication of NL1032924C2 publication Critical patent/NL1032924C2/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NL1032924A 2005-11-23 2006-11-23 Monolithische verplaatsingsmetingsinterferometer. NL1032924C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28681705 2005-11-23
US11/286,817 US7705994B2 (en) 2005-11-23 2005-11-23 Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs

Publications (2)

Publication Number Publication Date
NL1032924A1 true NL1032924A1 (nl) 2007-05-24
NL1032924C2 NL1032924C2 (nl) 2009-05-26

Family

ID=38037884

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1032924A NL1032924C2 (nl) 2005-11-23 2006-11-23 Monolithische verplaatsingsmetingsinterferometer.

Country Status (5)

Country Link
US (1) US7705994B2 (nl)
JP (1) JP2007147618A (nl)
CN (1) CN1971202A (nl)
DE (1) DE102006031917A1 (nl)
NL (1) NL1032924C2 (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7796267B2 (en) * 2006-09-28 2010-09-14 Si-Ware Systems System, method and apparatus for a micromachined interferometer using optical splitting
US20090135430A1 (en) * 2007-11-26 2009-05-28 Miao Zhu Systems and Methods for Reducing Nonlinearity in an Interferometer
US8223342B2 (en) * 2009-03-16 2012-07-17 Alliant Techsystems Inc. Methods and systems for measuring target movement with an interferometer
US20110157595A1 (en) * 2009-12-30 2011-06-30 Yerazunis William S Rotary Interferometer
US10378933B2 (en) * 2013-10-18 2019-08-13 Nikon Corporation Encoder head designs
KR101812608B1 (ko) * 2016-02-04 2017-12-27 전북대학교산학협력단 일체형 편광간섭계 및 이를 적용한 스냅샷 분광편광계
JP7128648B2 (ja) * 2018-04-25 2022-08-31 株式会社日立エルジーデータストレージ ヘッドマウントディスプレイ
CN112747667B (zh) * 2019-10-31 2022-03-18 上海微电子装备（集团）股份有限公司 差分干涉仪装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4802764A (en) * 1986-03-28 1989-02-07 Young Peter S Differential plane mirror interferometer having beamsplitter/beam folder assembly
US4784490A (en) * 1987-03-02 1988-11-15 Hewlett-Packard Company High thermal stability plane mirror interferometer
EP0433008B1 (en) * 1989-12-11 1995-02-22 Konica Corporation Laser interferometric measuring apparatus
US5191391A (en) * 1991-01-29 1993-03-02 Excel Precision High resolution plane mirror interferometer
DE4221850A1 (de) 1992-07-03 1994-01-05 Jenoptik Jena Gmbh Mehrarmiges Interferometer
CH693968A5 (de) * 1993-04-21 2004-05-14 Fraunhofer Ges Forschung Verfahren und Vorrichtung fuer die Topographiepruefung von Oberflaechen.
DE4436922C2 (de) 1994-10-15 1997-07-31 Jenoptik Technologie Gmbh Interferometeranordnung zur frequenz- und umweltunabhängigen Längenmessung
JPH09178415A (ja) * 1995-12-25 1997-07-11 Nikon Corp 光波干渉測定装置
US6313918B1 (en) * 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
US6181420B1 (en) * 1998-10-06 2001-01-30 Zygo Corporation Interferometry system having reduced cyclic errors
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
US7277180B2 (en) 2004-11-09 2007-10-02 Zygo Corporation Optical connection for interferometry

Also Published As

Publication number Publication date
JP2007147618A (ja) 2007-06-14
US20070115478A1 (en) 2007-05-24
DE102006031917A1 (de) 2007-05-31
NL1032924C2 (nl) 2009-05-26
CN1971202A (zh) 2007-05-30
US7705994B2 (en) 2010-04-27

Similar Documents

Publication Publication Date Title
NL1033095A1 (nl) Littrow-interferometer.
NL300935I2 (nl) guselkumab.
SE0500752L (sv) Förskjutningssensor
NL1031170A1 (nl) Bevestigingselement.
DE602006021542D1 (de) Resolver-anordnung
NO20051199D0 (no) Rorhandteringsutstyr.
DE602006020042D1 (de) Zusammengesetzter sensor
DE602006000455D1 (de) Sensormessfehler
NL1031618A1 (nl) Interferometer voor kleine niet-lineaire foutverplaatsingsmeting.
NL1032924A1 (nl) Monolithische verplaatsingsmetingsinterferometer.
NL1032046A1 (nl) Prostaglandinederivaten.
FI20055020A0 (fi) Paineprofiilin ON-linemittaus
NO20053362L (no) Syklofuge.
FI20055042A (fi) Asennontunnistin
ITPI20050020A1 (it) Calorimetri multimodo a basso costo (cmbc)
DE602005016843D1 (de) Interferometrisches messsystem
NL1035300A1 (nl) Optische interferometer.
DE502006003633D1 (de) Interferometrische messeinrichtung
DE602006020662D1 (de) Aussenspiegelanordnung
FR2892508B1 (fr) Jauge capacitive
DE502005006600D1 (de) Drucksensor
NL1031619A1 (nl) Discrete kwartgolfplaten voor verplaatsingsmetingsinterferometers.
FR2888926B1 (fr) Interferometre ewod
DE502006003086D1 (de) Gleitpendellager
SE0400111L (sv) Sensorarrangemang

Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20090317

PD2B A search report has been drawn up
V1 Lapsed because of non-payment of the annual fee

Effective date: 20100601