NL1031619A1 - Discrete kwartgolfplaten voor verplaatsingsmetingsinterferometers. - Google Patents

Discrete kwartgolfplaten voor verplaatsingsmetingsinterferometers.

Info

Publication number
NL1031619A1
NL1031619A1 NL1031619A NL1031619A NL1031619A1 NL 1031619 A1 NL1031619 A1 NL 1031619A1 NL 1031619 A NL1031619 A NL 1031619A NL 1031619 A NL1031619 A NL 1031619A NL 1031619 A1 NL1031619 A1 NL 1031619A1
Authority
NL
Netherlands
Prior art keywords
quarter wave
displacement measurement
wave plates
measurement interferometers
discrete quarter
Prior art date
Application number
NL1031619A
Other languages
English (en)
Other versions
NL1031619C2 (nl
Inventor
Robert Todd Belt
Eric Stephen Johnstone
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of NL1031619A1 publication Critical patent/NL1031619A1/nl
Application granted granted Critical
Publication of NL1031619C2 publication Critical patent/NL1031619C2/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Polarising Elements (AREA)
NL1031619A 2005-04-29 2006-04-19 Discrete kwartgolfplaten voor verplaatsingsmetingsinterferometers. NL1031619C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/119,220 US7330272B2 (en) 2005-04-29 2005-04-29 Discrete quarter wave plates for displacement measuring interferometers
US11922005 2005-04-29

Publications (2)

Publication Number Publication Date
NL1031619A1 true NL1031619A1 (nl) 2006-11-01
NL1031619C2 NL1031619C2 (nl) 2007-09-28

Family

ID=37111643

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1031619A NL1031619C2 (nl) 2005-04-29 2006-04-19 Discrete kwartgolfplaten voor verplaatsingsmetingsinterferometers.

Country Status (5)

Country Link
US (1) US7330272B2 (nl)
JP (1) JP2006308589A (nl)
CN (1) CN1854679A (nl)
DE (1) DE102006017235A1 (nl)
NL (1) NL1031619C2 (nl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7561278B2 (en) * 2005-10-18 2009-07-14 Zygo Corporation Interferometer using integrated retarders to reduce physical volume
US8223342B2 (en) * 2009-03-16 2012-07-17 Alliant Techsystems Inc. Methods and systems for measuring target movement with an interferometer
CN102147505B (zh) 2010-02-08 2015-06-03 菲尼萨公司 增强型多体式光学设备
CN110487172A (zh) * 2019-08-02 2019-11-22 南京法珀仪器设备有限公司 多光束激光回馈干涉仪
US11360294B2 (en) * 2020-05-15 2022-06-14 Samsung Electronics Co., Ltd. Optical sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05504833A (ja) * 1990-04-30 1993-07-22 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン ２軸平面鏡干渉計
US5677768A (en) * 1996-07-03 1997-10-14 Hewlett-Packard Company Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US6542247B2 (en) * 2001-06-06 2003-04-01 Agilent Technologies, Inc. Multi-axis interferometer with integrated optical structure and method for manufacturing rhomboid assemblies
US6778280B2 (en) * 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
JP2007526450A (ja) * 2003-06-19 2007-09-13 ザイゴ　コーポレーション 平面ミラー干渉計測定システムにおけるビーム・ミスアライメントの幾何学的な影響に対する補償
US20060017933A1 (en) * 2004-07-23 2006-01-26 Schluchter W C Heterodyne laser interferometer with porro prisms for measuring stage displacement

Also Published As

Publication number Publication date
CN1854679A (zh) 2006-11-01
US20060244971A1 (en) 2006-11-02
JP2006308589A (ja) 2006-11-09
NL1031619C2 (nl) 2007-09-28
DE102006017235A1 (de) 2006-11-09
US7330272B2 (en) 2008-02-12

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Legal Events

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AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20070523

PD2B A search report has been drawn up
PD2B A search report has been drawn up
V1 Lapsed because of non-payment of the annual fee

Effective date: 20101101