DE602006001900D1 - Laseroszillator - Google Patents

Laseroszillator

Info

Publication number
DE602006001900D1
DE602006001900D1 DE602006001900T DE602006001900T DE602006001900D1 DE 602006001900 D1 DE602006001900 D1 DE 602006001900D1 DE 602006001900 T DE602006001900 T DE 602006001900T DE 602006001900 T DE602006001900 T DE 602006001900T DE 602006001900 D1 DE602006001900 D1 DE 602006001900D1
Authority
DE
Germany
Prior art keywords
laser oscillator
oscillator
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006001900T
Other languages
English (en)
Inventor
Akira Egawa
Minoru Ando
Eiji Kobayashi
Takeshi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of DE602006001900D1 publication Critical patent/DE602006001900D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09702—Details of the driver electronics and electric discharge circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10038—Amplitude control

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE602006001900T 2005-06-08 2006-05-26 Laseroszillator Active DE602006001900D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005168075A JP4012216B2 (ja) 2005-06-08 2005-06-08 レーザ発振器

Publications (1)

Publication Number Publication Date
DE602006001900D1 true DE602006001900D1 (de) 2008-09-04

Family

ID=36693953

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006001900T Active DE602006001900D1 (de) 2005-06-08 2006-05-26 Laseroszillator

Country Status (5)

Country Link
US (1) US20060280213A1 (de)
EP (1) EP1732185B1 (de)
JP (1) JP4012216B2 (de)
CN (1) CN100446356C (de)
DE (1) DE602006001900D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5241520B2 (ja) * 2009-01-05 2013-07-17 キヤノン株式会社 ワークフロー管理装置、タスク連携処理システム、ワークフロー管理方法、及びプログラム
JP4855529B2 (ja) * 2010-04-05 2012-01-18 ファナック株式会社 微小なレーザ出力を安定に制御するレーザ装置
JP5172996B2 (ja) * 2011-07-15 2013-03-27 ファナック株式会社 高速、高精度に指令が可能なガスレーザ発振器における指令装置
JP5813152B2 (ja) * 2014-02-27 2015-11-17 ファナック株式会社 レーザ電源の調整レベルを制御するガスレーザ発振器
JP6162768B2 (ja) 2015-10-05 2017-07-12 ファナック株式会社 補助電極を備えたガスレーザ発振器
CN110729625A (zh) * 2019-10-28 2020-01-24 上海华力微电子有限公司 改善激光发射源的方法、激光发射源以及光刻系统

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4677636A (en) * 1985-10-23 1987-06-30 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multiplex electric discharge gas laser system
US5642371A (en) * 1993-03-12 1997-06-24 Kabushiki Kaisha Toshiba Optical transmission apparatus
JP3515146B2 (ja) * 1993-10-20 2004-04-05 株式会社アマダ 放電励起式レーザ発振器の出力制御方法および放電励起式レーザ発振器
JP3157470B2 (ja) * 1996-10-29 2001-04-16 ファナック株式会社 ガス放電励起レーザ装置
US6240117B1 (en) * 1998-01-30 2001-05-29 Cymer, Inc. Fluorine control system with fluorine monitor
JP3036514B2 (ja) * 1998-06-26 2000-04-24 松下電器産業株式会社 ガスレーザ発振装置
US6865210B2 (en) * 2001-05-03 2005-03-08 Cymer, Inc. Timing control for two-chamber gas discharge laser system
JP2001027512A (ja) * 1999-07-14 2001-01-30 Mitsutoyo Corp 波長安定化可干渉性光源装置
JP3787120B2 (ja) * 2002-12-10 2006-06-21 ファナック株式会社 ガスレーザ発振装置

Also Published As

Publication number Publication date
JP4012216B2 (ja) 2007-11-21
CN1877927A (zh) 2006-12-13
EP1732185B1 (de) 2008-07-23
CN100446356C (zh) 2008-12-24
EP1732185A1 (de) 2006-12-13
JP2006344722A (ja) 2006-12-21
US20060280213A1 (en) 2006-12-14

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