NL1016431C2 - Werkwijze voor het scheiden van een film en een substraat. - Google Patents

Werkwijze voor het scheiden van een film en een substraat. Download PDF

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Publication number
NL1016431C2
NL1016431C2 NL1016431A NL1016431A NL1016431C2 NL 1016431 C2 NL1016431 C2 NL 1016431C2 NL 1016431 A NL1016431 A NL 1016431A NL 1016431 A NL1016431 A NL 1016431A NL 1016431 C2 NL1016431 C2 NL 1016431C2
Authority
NL
Netherlands
Prior art keywords
film
substrate
roll
during step
sacrificial layer
Prior art date
Application number
NL1016431A
Other languages
English (en)
Dutch (nl)
Inventor
John Jacobus Schermer
Original Assignee
Univ Nijmegen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nijmegen filed Critical Univ Nijmegen
Priority to NL1016431A priority Critical patent/NL1016431C2/nl
Priority to PCT/NL2001/000765 priority patent/WO2002032667A1/en
Priority to EP01982937A priority patent/EP1328403B1/en
Priority to AU2002214397A priority patent/AU2002214397A1/en
Priority to ES01982937T priority patent/ES2228963T3/es
Priority to AT01982937T priority patent/ATE276883T1/de
Priority to US10/399,418 priority patent/US6974521B2/en
Priority to DE60105836T priority patent/DE60105836T2/de
Application granted granted Critical
Publication of NL1016431C2 publication Critical patent/NL1016431C2/nl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004—Component parts, details or accessories; Auxiliary operations
    • B29C63/0013—Removing old coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1174—Using roller for delamination [e.g., roller pairs operating at differing speeds or directions, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • ing And Chemical Polishing (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Laminated Bodies (AREA)
  • Wire Bonding (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
NL1016431A 2000-10-18 2000-10-18 Werkwijze voor het scheiden van een film en een substraat. NL1016431C2 (nl)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NL1016431A NL1016431C2 (nl) 2000-10-18 2000-10-18 Werkwijze voor het scheiden van een film en een substraat.
PCT/NL2001/000765 WO2002032667A1 (en) 2000-10-18 2001-10-17 A method for separating a film and a substrate
EP01982937A EP1328403B1 (en) 2000-10-18 2001-10-17 A method for separating a film and a substrate
AU2002214397A AU2002214397A1 (en) 2000-10-18 2001-10-17 A method for separating a film and a substrate
ES01982937T ES2228963T3 (es) 2000-10-18 2001-10-17 Metodo para separar una pelicula y un sustrato.
AT01982937T ATE276883T1 (de) 2000-10-18 2001-10-17 Verfahren zum trennen eines films von einem substrat
US10/399,418 US6974521B2 (en) 2000-10-18 2001-10-17 Method for separating a film and a substrate
DE60105836T DE60105836T2 (de) 2000-10-18 2001-10-17 Verfahren zum trennen eines films von einem substrat

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1016431A NL1016431C2 (nl) 2000-10-18 2000-10-18 Werkwijze voor het scheiden van een film en een substraat.
NL1016431 2000-10-18

Publications (1)

Publication Number Publication Date
NL1016431C2 true NL1016431C2 (nl) 2002-04-22

Family

ID=19772266

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1016431A NL1016431C2 (nl) 2000-10-18 2000-10-18 Werkwijze voor het scheiden van een film en een substraat.

Country Status (8)

Country Link
US (1) US6974521B2 (es)
EP (1) EP1328403B1 (es)
AT (1) ATE276883T1 (es)
AU (1) AU2002214397A1 (es)
DE (1) DE60105836T2 (es)
ES (1) ES2228963T3 (es)
NL (1) NL1016431C2 (es)
WO (1) WO2002032667A1 (es)

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EP1314554A1 (fr) * 2001-11-23 2003-05-28 Kba-Giori S.A. Dispositif de décollage d'éléments de sécurité
CN1909982B (zh) 2004-01-21 2012-03-28 松下电器产业株式会社 显示面板的薄膜剥离方法及薄膜剥离装置
US20100203730A1 (en) * 2009-02-09 2010-08-12 Emcore Solar Power, Inc. Epitaxial Lift Off in Inverted Metamorphic Multijunction Solar Cells
US20100047959A1 (en) * 2006-08-07 2010-02-25 Emcore Solar Power, Inc. Epitaxial Lift Off on Film Mounted Inverted Metamorphic Multijunction Solar Cells
AU2008226410A1 (en) 2007-03-09 2008-09-18 Nexus Biosystems, Inc. Device and method for removing a peelable seal
CA2692126A1 (en) 2007-07-03 2009-01-08 Microlink Devices, Inc. Methods for fabricating thin film iii-v compound solar cell
EP2281301A2 (en) 2008-05-30 2011-02-09 Alta Devices, Inc. Epitaxial lift off stacks and methods
CN102084460A (zh) 2008-05-30 2011-06-01 奥塔装置公司 用于化学气相沉积反应器的方法和设备
EP2335274A4 (en) * 2008-10-10 2012-02-29 Alta Devices Inc METHOD OF GRAYING MESA AND COMPOSITION FOR EPITAXIAL WITHDRAWAL
EP2351069A4 (en) * 2008-10-10 2014-06-04 Alta Devices Inc CHEMICAL GAS PHASE DEPOSITION WITH CONTINUOUS INTRODUCTION
KR20110099029A (ko) * 2008-12-08 2011-09-05 알타 디바이씨즈, 인크. 에피택셜 리프트 오프를 위한 다중 스택 증착
CN102301456A (zh) * 2008-12-17 2011-12-28 奥塔装置公司 基于带的外延剥离设备和方法
US8778199B2 (en) 2009-02-09 2014-07-15 Emoore Solar Power, Inc. Epitaxial lift off in inverted metamorphic multijunction solar cells
CA2756857C (en) 2009-02-27 2015-08-11 Alta Devices, Inc. Tiled substrates for deposition and epitaxial lift off processes
US20120227909A1 (en) * 2009-09-15 2012-09-13 Ers Electronic Gmbh Removal Roller, Device and Method for Detaching a Film from a Disc-Shaped Workpiece
US11393683B2 (en) 2009-10-14 2022-07-19 Utica Leaseco, Llc Methods for high growth rate deposition for forming different cells on a wafer
US9834860B2 (en) * 2009-10-14 2017-12-05 Alta Devices, Inc. Method of high growth rate deposition for group III/V materials
US8691663B2 (en) * 2009-11-06 2014-04-08 Alliance For Sustainable Energy, Llc Methods of manipulating stressed epistructures
US20130186574A1 (en) * 2012-01-25 2013-07-25 Kevin D. Baker Fiber Batt Reclaiming Method and Apparatus
KR101929527B1 (ko) * 2012-09-17 2018-12-17 삼성디스플레이 주식회사 필름 박리 장치
NL2012668B1 (en) * 2014-04-23 2016-07-04 Vmi Holland Bv Foil removal device and a method for removing a foil from a tire tread.
KR20170125868A (ko) * 2015-03-04 2017-11-15 코닝 인코포레이티드 조립체의 두 시트 사이의 탈접착을 시작하기 위한 방법 및 장치
US11819806B1 (en) 2018-10-15 2023-11-21 Ampcera Inc. Methods for manufacturing a solid state ionic conductive membrane on a macro porous support scaffold
US11177498B1 (en) 2018-10-15 2021-11-16 Ampcera Inc. Redox flow batteries, components for redox flow batteries and methods for manufacture thereof
KR102154811B1 (ko) * 2018-10-29 2020-09-11 한국기계연구원 필름 전사 방법
JP2020077710A (ja) * 2018-11-06 2020-05-21 信越半導体株式会社 発光素子用半導体基板の製造方法及び発光素子の製造方法
US11498283B2 (en) 2019-02-20 2022-11-15 General Electric Company Method and apparatus for build thickness control in additive manufacturing
US11794412B2 (en) 2019-02-20 2023-10-24 General Electric Company Method and apparatus for layer thickness control in additive manufacturing
US11179891B2 (en) 2019-03-15 2021-11-23 General Electric Company Method and apparatus for additive manufacturing with shared components
US11600853B1 (en) 2019-05-14 2023-03-07 Ampcera Inc. Systems and methods for storing, transporting, and handling of solid-state electrolytes
CN111559164B (zh) * 2020-06-12 2020-12-15 清华大学 柔性电子器件的曲面转印装置和曲面转印方法
US11707883B2 (en) 2020-11-20 2023-07-25 General Electric Company Foil interaction device for additive manufacturing
US11865780B2 (en) 2021-02-26 2024-01-09 General Electric Company Accumalator assembly for additive manufacturing
US11951679B2 (en) 2021-06-16 2024-04-09 General Electric Company Additive manufacturing system
US11731367B2 (en) 2021-06-23 2023-08-22 General Electric Company Drive system for additive manufacturing
US11958249B2 (en) 2021-06-24 2024-04-16 General Electric Company Reclamation system for additive manufacturing
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US11826950B2 (en) 2021-07-09 2023-11-28 General Electric Company Resin management system for additive manufacturing
US11813799B2 (en) 2021-09-01 2023-11-14 General Electric Company Control systems and methods for additive manufacturing

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634413A1 (de) * 1975-07-31 1977-02-17 Fuji Photo Film Co Ltd Verfahren zum abstreifen einer abschaelbaren flexiblen folie
DE2747265A1 (de) * 1977-10-21 1979-04-26 Schmid Gmbh & Co Geb Vorrichtung zum abziehen einer auf einem plattenartigen traeger haftenden folie
US4508589A (en) * 1982-12-08 1985-04-02 Marusho Industrial Co., Ltd. Protective coating stripping apparatus
US4883561A (en) * 1988-03-29 1989-11-28 Bell Communications Research, Inc. Lift-off and subsequent bonding of epitaxial films
JPH05299362A (ja) * 1992-04-24 1993-11-12 Sumitomo Electric Ind Ltd 半導体素子用ウエハ及び半導体素子の製造方法
US5376210A (en) * 1994-03-23 1994-12-27 Hydro-Quebec Peeling aids for LPB electrolytes and method of use
US5540809A (en) * 1992-12-09 1996-07-30 Canon Kabushiki Kaisha Apparatus for removing protective films

Family Cites Families (4)

* Cited by examiner, † Cited by third party
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US5743990A (en) * 1996-11-25 1998-04-28 Hughes Electronics Thin laminate removal process tooling and method
US6452091B1 (en) * 1999-07-14 2002-09-17 Canon Kabushiki Kaisha Method of producing thin-film single-crystal device, solar cell module and method of producing the same
US6500298B1 (en) * 2000-01-14 2002-12-31 Kevin P. Wright Stripping machine and method
IT1315144B1 (it) * 2000-11-09 2003-02-03 Gisulfo Baccini Separatore automatico e procedimento di ottenimento di circuiti permicroelettronica.

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634413A1 (de) * 1975-07-31 1977-02-17 Fuji Photo Film Co Ltd Verfahren zum abstreifen einer abschaelbaren flexiblen folie
DE2747265A1 (de) * 1977-10-21 1979-04-26 Schmid Gmbh & Co Geb Vorrichtung zum abziehen einer auf einem plattenartigen traeger haftenden folie
US4508589A (en) * 1982-12-08 1985-04-02 Marusho Industrial Co., Ltd. Protective coating stripping apparatus
US4883561A (en) * 1988-03-29 1989-11-28 Bell Communications Research, Inc. Lift-off and subsequent bonding of epitaxial films
JPH05299362A (ja) * 1992-04-24 1993-11-12 Sumitomo Electric Ind Ltd 半導体素子用ウエハ及び半導体素子の製造方法
US5540809A (en) * 1992-12-09 1996-07-30 Canon Kabushiki Kaisha Apparatus for removing protective films
US5376210A (en) * 1994-03-23 1994-12-27 Hydro-Quebec Peeling aids for LPB electrolytes and method of use

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 091 (E - 1508) 15 February 1994 (1994-02-15) *

Also Published As

Publication number Publication date
ATE276883T1 (de) 2004-10-15
AU2002214397A1 (en) 2002-04-29
EP1328403B1 (en) 2004-09-22
WO2002032667A1 (en) 2002-04-25
US6974521B2 (en) 2005-12-13
DE60105836T2 (de) 2005-10-06
US20040033651A1 (en) 2004-02-19
EP1328403A1 (en) 2003-07-23
ES2228963T3 (es) 2005-04-16
DE60105836D1 (de) 2004-10-28

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Effective date: 20050501