ATE276883T1 - Verfahren zum trennen eines films von einem substrat - Google Patents
Verfahren zum trennen eines films von einem substratInfo
- Publication number
- ATE276883T1 ATE276883T1 AT01982937T AT01982937T ATE276883T1 AT E276883 T1 ATE276883 T1 AT E276883T1 AT 01982937 T AT01982937 T AT 01982937T AT 01982937 T AT01982937 T AT 01982937T AT E276883 T1 ATE276883 T1 AT E276883T1
- Authority
- AT
- Austria
- Prior art keywords
- film
- substrate
- roller
- foil
- circumferential surface
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
- B32B43/006—Delaminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/0004—Component parts, details or accessories; Auxiliary operations
- B29C63/0013—Removing old coatings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
- Y10T156/1168—Gripping and pulling work apart during delaminating
- Y10T156/1174—Using roller for delamination [e.g., roller pairs operating at differing speeds or directions, etc.]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- ing And Chemical Polishing (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Wire Bonding (AREA)
- Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1016431A NL1016431C2 (nl) | 2000-10-18 | 2000-10-18 | Werkwijze voor het scheiden van een film en een substraat. |
PCT/NL2001/000765 WO2002032667A1 (en) | 2000-10-18 | 2001-10-17 | A method for separating a film and a substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE276883T1 true ATE276883T1 (de) | 2004-10-15 |
Family
ID=19772266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT01982937T ATE276883T1 (de) | 2000-10-18 | 2001-10-17 | Verfahren zum trennen eines films von einem substrat |
Country Status (8)
Country | Link |
---|---|
US (1) | US6974521B2 (de) |
EP (1) | EP1328403B1 (de) |
AT (1) | ATE276883T1 (de) |
AU (1) | AU2002214397A1 (de) |
DE (1) | DE60105836T2 (de) |
ES (1) | ES2228963T3 (de) |
NL (1) | NL1016431C2 (de) |
WO (1) | WO2002032667A1 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1314554A1 (de) * | 2001-11-23 | 2003-05-28 | Kba-Giori S.A. | Ablösevorrichtung für Sicherheitselemente |
EP1707279B1 (de) * | 2004-01-21 | 2013-03-06 | Panasonic Corporation | Folienabziehverfahren für ein display |
US20100203730A1 (en) * | 2009-02-09 | 2010-08-12 | Emcore Solar Power, Inc. | Epitaxial Lift Off in Inverted Metamorphic Multijunction Solar Cells |
US20100047959A1 (en) * | 2006-08-07 | 2010-02-25 | Emcore Solar Power, Inc. | Epitaxial Lift Off on Film Mounted Inverted Metamorphic Multijunction Solar Cells |
WO2008112660A1 (en) | 2007-03-09 | 2008-09-18 | Nexus Biosystems, Inc. | Device and method for removing a peelable seal |
WO2009005824A1 (en) * | 2007-07-03 | 2009-01-08 | Microlink Devices, Inc. | Thin film iii-v compound solar cell |
CN102084460A (zh) | 2008-05-30 | 2011-06-01 | 奥塔装置公司 | 用于化学气相沉积反应器的方法和设备 |
CN102084464A (zh) | 2008-05-30 | 2011-06-01 | 奥塔装置公司 | 外延迁移堆栈和方法 |
TW201018746A (en) * | 2008-10-10 | 2010-05-16 | Alta Devices Inc | Mesa etch method and composition for epitaxial lift off |
KR20110069852A (ko) * | 2008-10-10 | 2011-06-23 | 알타 디바이씨즈, 인크. | 연속적인 공급 화학 기상 증착 |
EP2374146A4 (de) * | 2008-12-08 | 2013-07-17 | Alta Devices Inc | Mehrstapel-ablagerung zur epitaxialschichtanhebung |
WO2010078022A2 (en) | 2008-12-17 | 2010-07-08 | Alta Devices, Inc. | Tape-based epitaxial lift off apparatuses and methods |
US8778199B2 (en) | 2009-02-09 | 2014-07-15 | Emoore Solar Power, Inc. | Epitaxial lift off in inverted metamorphic multijunction solar cells |
JP5607081B2 (ja) | 2009-02-27 | 2014-10-15 | アルタ デバイセズ,インコーポレイテッド | 蒸着およびエピタキシャルリフトオフプロセスのためのタイル状基板 |
JP5956339B2 (ja) * | 2009-09-15 | 2016-07-27 | イーアールエス エレクトロニック ゲーエムベーハーERS electronic GmbH | モールドウエハからフィルムを分離させるための装置及び方法 |
US9834860B2 (en) * | 2009-10-14 | 2017-12-05 | Alta Devices, Inc. | Method of high growth rate deposition for group III/V materials |
US11393683B2 (en) | 2009-10-14 | 2022-07-19 | Utica Leaseco, Llc | Methods for high growth rate deposition for forming different cells on a wafer |
US8691663B2 (en) * | 2009-11-06 | 2014-04-08 | Alliance For Sustainable Energy, Llc | Methods of manipulating stressed epistructures |
US20130186574A1 (en) * | 2012-01-25 | 2013-07-25 | Kevin D. Baker | Fiber Batt Reclaiming Method and Apparatus |
KR101929527B1 (ko) * | 2012-09-17 | 2018-12-17 | 삼성디스플레이 주식회사 | 필름 박리 장치 |
NL2012668B1 (en) * | 2014-04-23 | 2016-07-04 | Vmi Holland Bv | Foil removal device and a method for removing a foil from a tire tread. |
WO2016141119A1 (en) * | 2015-03-04 | 2016-09-09 | Corning Incorporated | Methods and apparatus for initiating debonding between two sheets of an assembly |
US11177498B1 (en) | 2018-10-15 | 2021-11-16 | Ampcera Inc. | Redox flow batteries, components for redox flow batteries and methods for manufacture thereof |
US11819806B1 (en) | 2018-10-15 | 2023-11-21 | Ampcera Inc. | Methods for manufacturing a solid state ionic conductive membrane on a macro porous support scaffold |
KR102154811B1 (ko) * | 2018-10-29 | 2020-09-11 | 한국기계연구원 | 필름 전사 방법 |
JP2020077710A (ja) * | 2018-11-06 | 2020-05-21 | 信越半導体株式会社 | 発光素子用半導体基板の製造方法及び発光素子の製造方法 |
US11794412B2 (en) | 2019-02-20 | 2023-10-24 | General Electric Company | Method and apparatus for layer thickness control in additive manufacturing |
US11498283B2 (en) | 2019-02-20 | 2022-11-15 | General Electric Company | Method and apparatus for build thickness control in additive manufacturing |
US11179891B2 (en) | 2019-03-15 | 2021-11-23 | General Electric Company | Method and apparatus for additive manufacturing with shared components |
US11600853B1 (en) | 2019-05-14 | 2023-03-07 | Ampcera Inc. | Systems and methods for storing, transporting, and handling of solid-state electrolytes |
CN111559164B (zh) * | 2020-06-12 | 2020-12-15 | 清华大学 | 柔性电子器件的曲面转印装置和曲面转印方法 |
US11707883B2 (en) | 2020-11-20 | 2023-07-25 | General Electric Company | Foil interaction device for additive manufacturing |
US11865780B2 (en) | 2021-02-26 | 2024-01-09 | General Electric Company | Accumalator assembly for additive manufacturing |
US11951679B2 (en) | 2021-06-16 | 2024-04-09 | General Electric Company | Additive manufacturing system |
US11731367B2 (en) | 2021-06-23 | 2023-08-22 | General Electric Company | Drive system for additive manufacturing |
US11958249B2 (en) | 2021-06-24 | 2024-04-16 | General Electric Company | Reclamation system for additive manufacturing |
US11958250B2 (en) | 2021-06-24 | 2024-04-16 | General Electric Company | Reclamation system for additive manufacturing |
US11826950B2 (en) | 2021-07-09 | 2023-11-28 | General Electric Company | Resin management system for additive manufacturing |
US11813799B2 (en) | 2021-09-01 | 2023-11-14 | General Electric Company | Control systems and methods for additive manufacturing |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216538A (en) * | 1975-07-31 | 1977-02-07 | Fuji Photo Film Co Ltd | Method for peeling off a flexible film |
DE2747265A1 (de) * | 1977-10-21 | 1979-04-26 | Schmid Gmbh & Co Geb | Vorrichtung zum abziehen einer auf einem plattenartigen traeger haftenden folie |
JPS59104649A (ja) * | 1982-12-08 | 1984-06-16 | Somar Corp | 保護膜の剥離装置 |
US4883561A (en) * | 1988-03-29 | 1989-11-28 | Bell Communications Research, Inc. | Lift-off and subsequent bonding of epitaxial films |
JPH05299362A (ja) * | 1992-04-24 | 1993-11-12 | Sumitomo Electric Ind Ltd | 半導体素子用ウエハ及び半導体素子の製造方法 |
JPH06171823A (ja) * | 1992-12-09 | 1994-06-21 | Canon Inc | ドライフィルムレジスト用保護フィルム除去装置 |
US5376210A (en) * | 1994-03-23 | 1994-12-27 | Hydro-Quebec | Peeling aids for LPB electrolytes and method of use |
US5743990A (en) * | 1996-11-25 | 1998-04-28 | Hughes Electronics | Thin laminate removal process tooling and method |
US6452091B1 (en) * | 1999-07-14 | 2002-09-17 | Canon Kabushiki Kaisha | Method of producing thin-film single-crystal device, solar cell module and method of producing the same |
US6500298B1 (en) * | 2000-01-14 | 2002-12-31 | Kevin P. Wright | Stripping machine and method |
IT1315144B1 (it) * | 2000-11-09 | 2003-02-03 | Gisulfo Baccini | Separatore automatico e procedimento di ottenimento di circuiti permicroelettronica. |
-
2000
- 2000-10-18 NL NL1016431A patent/NL1016431C2/nl not_active IP Right Cessation
-
2001
- 2001-10-17 AT AT01982937T patent/ATE276883T1/de not_active IP Right Cessation
- 2001-10-17 DE DE60105836T patent/DE60105836T2/de not_active Expired - Lifetime
- 2001-10-17 EP EP01982937A patent/EP1328403B1/de not_active Expired - Lifetime
- 2001-10-17 WO PCT/NL2001/000765 patent/WO2002032667A1/en active IP Right Grant
- 2001-10-17 AU AU2002214397A patent/AU2002214397A1/en not_active Abandoned
- 2001-10-17 ES ES01982937T patent/ES2228963T3/es not_active Expired - Lifetime
- 2001-10-17 US US10/399,418 patent/US6974521B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1328403B1 (de) | 2004-09-22 |
US20040033651A1 (en) | 2004-02-19 |
DE60105836D1 (de) | 2004-10-28 |
WO2002032667A1 (en) | 2002-04-25 |
EP1328403A1 (de) | 2003-07-23 |
US6974521B2 (en) | 2005-12-13 |
NL1016431C2 (nl) | 2002-04-22 |
DE60105836T2 (de) | 2005-10-06 |
ES2228963T3 (es) | 2005-04-16 |
AU2002214397A1 (en) | 2002-04-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |