MY188941A - Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material - Google Patents

Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material

Info

Publication number
MY188941A
MY188941A MYPI2018001725A MYPI2018001725A MY188941A MY 188941 A MY188941 A MY 188941A MY PI2018001725 A MYPI2018001725 A MY PI2018001725A MY PI2018001725 A MYPI2018001725 A MY PI2018001725A MY 188941 A MY188941 A MY 188941A
Authority
MY
Malaysia
Prior art keywords
alloy
recording medium
flux density
target material
sputtering target
Prior art date
Application number
MYPI2018001725A
Inventor
Toshiyuki Sawada
Noriaki Matsubara
Original Assignee
Sanyo Special Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Special Steel Co Ltd filed Critical Sanyo Special Steel Co Ltd
Publication of MY188941A publication Critical patent/MY188941A/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/64Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
    • G11B5/667Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers including a soft magnetic layer
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/07Alloys based on nickel or cobalt based on cobalt
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/10Ferrous alloys, e.g. steel alloys containing cobalt
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/12Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/14Ferrous alloys, e.g. steel alloys containing titanium or zirconium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851Coating a support with a magnetic layer by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

.There is disclosed an alloy for a soft magnetic thin film layer in a magnetic recording medium, wherein the alloy comprises one or more selected from the group consisting of Y, Ti, Zr, Hf , V, Nb, Ta, Cr, Mo, W, Mn, Ni, Cu, Al, B, C, Si, P, Zn, Ga, Ge, and Sn, and the balance Co and Fe; and in at%, the following formulae (1) to (5): (1) 0.50<Fe%/(Fe%+Co%)<0.90; (2)5<TAM<23; (3) 18<TAM+TNM<23; (4) 0<(Nb%+Ta%)/TAM+TNM)<0.74; and (5) 0<Ti%+Zr%+Hf%+B%/2<6 are satisfied, with the proviso that TAM and Tnm ARE: TAM=Y%+Ti%+Zr%+Hf%+V%+Nb%+Ta%+B%/2; and TNM=Cr%+Mo%+W%+Mn%+Ni%/3+Cu%/3+Al%+C%+Si%+P%+Zn%+Ga%+Ge%+Sn%, respectively (Fig. 1)
MYPI2018001725A 2012-02-03 2013-02-01 Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material MY188941A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012022096A JP5778052B2 (en) 2012-02-03 2012-02-03 Alloy for soft magnetic film layer having low saturation magnetic flux density used for magnetic recording medium and sputtering target material

Publications (1)

Publication Number Publication Date
MY188941A true MY188941A (en) 2022-01-13

Family

ID=48905411

Family Applications (3)

Application Number Title Priority Date Filing Date
MYPI2018001726A MY190845A (en) 2012-02-03 2013-02-01 Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material
MYPI2018001725A MY188941A (en) 2012-02-03 2013-02-01 Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material
MYPI2014702057A MY171769A (en) 2012-02-03 2013-02-01 Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material

Family Applications Before (1)

Application Number Title Priority Date Filing Date
MYPI2018001726A MY190845A (en) 2012-02-03 2013-02-01 Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material

Family Applications After (1)

Application Number Title Priority Date Filing Date
MYPI2014702057A MY171769A (en) 2012-02-03 2013-02-01 Alloy for soft magnetic film layers, which has low saturation magnetic flux density and is to be used in magnetic recording medium, and sputtering target material

Country Status (6)

Country Link
JP (1) JP5778052B2 (en)
CN (1) CN104081455B (en)
MY (3) MY190845A (en)
SG (3) SG10201510619PA (en)
TW (1) TWI547567B (en)
WO (1) WO2013115384A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6116928B2 (en) * 2013-02-18 2017-04-19 山陽特殊製鋼株式会社 CoFe-based alloy and sputtering target material for soft magnetic film layer in perpendicular magnetic recording medium
JP6405261B2 (en) * 2014-05-01 2018-10-17 山陽特殊製鋼株式会社 Soft magnetic alloy for magnetic recording, sputtering target material, and magnetic recording medium
TWI646208B (en) * 2015-02-26 2019-01-01 光洋應用材料科技股份有限公司 Amorphous soft-magnetic target and material
JP6442460B2 (en) * 2016-10-27 2018-12-19 山陽特殊製鋼株式会社 CoFe-based alloy and sputtering target material for soft magnetic film layer in perpendicular magnetic recording medium
JP6784733B2 (en) * 2018-08-20 2020-11-11 山陽特殊製鋼株式会社 Co-based alloy for soft magnetic layer of magnetic recording medium

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919162B2 (en) * 2007-04-10 2012-04-18 日立金属株式会社 Fe-Co alloy sputtering target material and method for producing Fe-Co alloy sputtering target material
JP2009070444A (en) * 2007-09-11 2009-04-02 Hitachi Global Storage Technologies Netherlands Bv Perpendicular magnetic recording medium
JP5397755B2 (en) * 2008-06-17 2014-01-22 日立金属株式会社 Fe-Co alloy sputtering target material for soft magnetic film formation
JP5605787B2 (en) * 2008-07-14 2014-10-15 山陽特殊製鋼株式会社 Sputtering target material for forming an alloy for a soft magnetic film layer in a perpendicular magnetic recording medium and its manufacturing method
JP5425530B2 (en) * 2009-06-10 2014-02-26 山陽特殊製鋼株式会社 CoFeNi alloy and sputtering target material for soft magnetic film layer in perpendicular magnetic recording medium
JP5385018B2 (en) * 2009-06-12 2014-01-08 山陽特殊製鋼株式会社 Raw material powder for sputtering target material for producing soft magnetic film having high sputtering rate and sputtering target material
JP2011181140A (en) * 2010-03-01 2011-09-15 Hitachi Metals Ltd Fe-Co BASED ALLOY SOFT MAGNETIC FILM FOR MAGNETIC RECORDING MEDIUM

Also Published As

Publication number Publication date
JP2013161497A (en) 2013-08-19
CN104081455A (en) 2014-10-01
TW201402835A (en) 2014-01-16
TWI547567B (en) 2016-09-01
MY171769A (en) 2019-10-29
SG10201609320PA (en) 2016-12-29
CN104081455B (en) 2017-05-24
SG10201510619PA (en) 2016-01-28
JP5778052B2 (en) 2015-09-16
MY190845A (en) 2022-05-12
SG11201404317QA (en) 2014-10-30
WO2013115384A1 (en) 2013-08-08

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