MY166289A - Alloy for soft-magnetic thin-film layer on perpendicular magnetic recording medium, and sputtering-target material - Google Patents
Alloy for soft-magnetic thin-film layer on perpendicular magnetic recording medium, and sputtering-target materialInfo
- Publication number
- MY166289A MY166289A MYPI2014700309A MYPI2014700309A MY166289A MY 166289 A MY166289 A MY 166289A MY PI2014700309 A MYPI2014700309 A MY PI2014700309A MY PI2014700309 A MYPI2014700309 A MY PI2014700309A MY 166289 A MY166289 A MY 166289A
- Authority
- MY
- Malaysia
- Prior art keywords
- alloy
- recording medium
- film layer
- soft
- sputtering
- Prior art date
Links
- 239000000956 alloy Substances 0.000 title abstract 3
- 229910045601 alloy Inorganic materials 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000005477 sputtering target Methods 0.000 title 1
- 239000013077 target material Substances 0.000 title 1
- 229910052718 tin Inorganic materials 0.000 abstract 2
- 229910052721 tungsten Inorganic materials 0.000 abstract 2
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 229910052742 iron Inorganic materials 0.000 abstract 1
- 229910052748 manganese Inorganic materials 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/667—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers including a soft magnetic layer
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/07—Alloys based on nickel or cobalt based on cobalt
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/12—Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/14—Ferrous alloys, e.g. steel alloys containing titanium or zirconium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/008—Amorphous alloys with Fe, Co or Ni as the major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/02—Amorphous alloys with iron as the major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/04—Amorphous alloys with nickel or cobalt as the major constituent
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
- H01F41/183—Sputtering targets therefor
Abstract
There is provided an alloy for a soft magnetic thin film layer in a perpendicular magnetic recording medium having a low coercive force. The alloy comprises: one or more selected from the group consisting of Ti, Zr, Hf, Nb, Ta, and B; one or two of W and Sn (wherein a part or all of one or two of W and Sn may be substituted by one or two of V and Mn); optionally, one or more selected from the group consisting of Al, Cr, Mo, Si, P, C, and Ge; optionally, one or two of Ni and Cu; and the balance Co and Fe, and satisfies, in at.%, (1) 6≤Ti%°+Zr%+Hf%+Nb%+Ta%+B%/2≤24; (2) Zr%+Hf%≤14; (3) 3≤W%+Sn%≤19; (4) 0.20≤Fe%/(Fe%+Co%)≤0.90; (5) 3≤W%+Sn%+V%+Mn%≤19 (wherein V%+Mn% may be zero (0)); (6) 0≤Al%+Cr%+Mo%+Si%+P%+C%+Ge%≤9; and (7) 0≤Ni%+Cu%≤5.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011178187A JP5917045B2 (en) | 2011-08-17 | 2011-08-17 | Alloy and sputtering target material for soft magnetic thin film layer in perpendicular magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
MY166289A true MY166289A (en) | 2018-06-25 |
Family
ID=47715162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2014700309A MY166289A (en) | 2011-08-17 | 2012-08-14 | Alloy for soft-magnetic thin-film layer on perpendicular magnetic recording medium, and sputtering-target material |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP5917045B2 (en) |
CN (1) | CN103781933B (en) |
MY (1) | MY166289A (en) |
SG (1) | SG2014011274A (en) |
TW (1) | TWI558831B (en) |
WO (1) | WO2013024845A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6405261B2 (en) * | 2014-05-01 | 2018-10-17 | 山陽特殊製鋼株式会社 | Soft magnetic alloy for magnetic recording, sputtering target material, and magnetic recording medium |
TWI602940B (en) * | 2014-06-11 | 2017-10-21 | 光洋應用材料科技股份有限公司 | Soft-magnetic sputtering target and soft-magnetic sputtering material |
AT14576U1 (en) * | 2014-08-20 | 2016-01-15 | Plansee Se | Metallization for a thin film device, method of making the same and sputtering target |
CN106029943B (en) * | 2014-09-04 | 2018-08-31 | 捷客斯金属株式会社 | Sputtering target |
TWI646208B (en) * | 2015-02-26 | 2019-01-01 | 光洋應用材料科技股份有限公司 | Amorphous soft-magnetic target and material |
TWI619817B (en) * | 2016-10-26 | 2018-04-01 | 光洋應用材料科技股份有限公司 | Co-Fe-Nb-based Sputtering Target |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006265653A (en) * | 2005-03-24 | 2006-10-05 | Hitachi Metals Ltd | Fe-Co-BASED ALLOY TARGET MATERIAL AND METHOD FOR PRODUCING THE SAME |
JP4699194B2 (en) * | 2005-12-15 | 2011-06-08 | 山陽特殊製鋼株式会社 | Method for producing FeCoB-based sputtering target material |
SG142249A1 (en) * | 2006-10-10 | 2008-05-28 | Hitachi Metals Ltd | Co-fe-zr based alloy sputtering target material and process for production thereof |
JP4953082B2 (en) * | 2006-10-10 | 2012-06-13 | 日立金属株式会社 | Co-Fe-Zr alloy sputtering target material and method for producing the same |
JP2008189996A (en) * | 2007-02-05 | 2008-08-21 | Hitachi Metals Ltd | Co-Fe-BASED ALLOY SPUTTERING TARGET MATERIAL AND METHOD FOR PRODUCING THE SAME |
JP5253781B2 (en) * | 2007-09-18 | 2013-07-31 | 山陽特殊製鋼株式会社 | Alloy target material for soft magnetic film layer in perpendicular magnetic recording media |
JP5605787B2 (en) * | 2008-07-14 | 2014-10-15 | 山陽特殊製鋼株式会社 | Sputtering target material for forming an alloy for a soft magnetic film layer in a perpendicular magnetic recording medium and its manufacturing method |
JP2010111943A (en) * | 2008-10-10 | 2010-05-20 | Hitachi Metals Ltd | Method for producing sputtering target material |
JP5714397B2 (en) * | 2010-10-26 | 2015-05-07 | 山陽特殊製鋼株式会社 | Soft magnetic alloy for magnetic recording, sputtering target material, and magnetic recording medium |
-
2011
- 2011-08-17 JP JP2011178187A patent/JP5917045B2/en active Active
-
2012
- 2012-08-14 MY MYPI2014700309A patent/MY166289A/en unknown
- 2012-08-14 SG SG2014011274A patent/SG2014011274A/en unknown
- 2012-08-14 WO PCT/JP2012/070665 patent/WO2013024845A1/en active Application Filing
- 2012-08-14 CN CN201280040073.2A patent/CN103781933B/en not_active Expired - Fee Related
- 2012-08-16 TW TW101129707A patent/TWI558831B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI558831B (en) | 2016-11-21 |
SG2014011274A (en) | 2014-04-28 |
CN103781933A (en) | 2014-05-07 |
JP5917045B2 (en) | 2016-05-11 |
JP2013040377A (en) | 2013-02-28 |
CN103781933B (en) | 2017-01-25 |
TW201323642A (en) | 2013-06-16 |
WO2013024845A1 (en) | 2013-02-21 |
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