MX2021010690A - Filtro de absorcion optica para un dispositivo integrado. - Google Patents

Filtro de absorcion optica para un dispositivo integrado.

Info

Publication number
MX2021010690A
MX2021010690A MX2021010690A MX2021010690A MX2021010690A MX 2021010690 A MX2021010690 A MX 2021010690A MX 2021010690 A MX2021010690 A MX 2021010690A MX 2021010690 A MX2021010690 A MX 2021010690A MX 2021010690 A MX2021010690 A MX 2021010690A
Authority
MX
Mexico
Prior art keywords
integrated device
optical absorption
absorption filter
sensor
excitation
Prior art date
Application number
MX2021010690A
Other languages
English (en)
Spanish (es)
Inventor
Ali Kabiri
Gerard Schmid
Jonathan M Rothberg
James Beach
Kyle Preston
Faisal R Ahmad
Bing Shen
Michael Bellos
Michael Coumans
Sharath Hosali
Original Assignee
Quantum Si Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Publication of MX2021010690A publication Critical patent/MX2021010690A/es

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/648Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6486Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/003Light absorbing elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/207Filters comprising semiconducting materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N2021/6463Optics
    • G01N2021/6471Special filters, filter wheel
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6408Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Filters (AREA)
  • Light Receiving Elements (AREA)
MX2021010690A 2019-03-05 2020-03-03 Filtro de absorcion optica para un dispositivo integrado. MX2021010690A (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962813997P 2019-03-05 2019-03-05
US201962831237P 2019-04-09 2019-04-09
PCT/US2020/020847 WO2020180899A1 (en) 2019-03-05 2020-03-03 Optical absorption filter for an integrated device

Publications (1)

Publication Number Publication Date
MX2021010690A true MX2021010690A (es) 2021-10-01

Family

ID=70155332

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2021010690A MX2021010690A (es) 2019-03-05 2020-03-03 Filtro de absorcion optica para un dispositivo integrado.

Country Status (11)

Country Link
US (2) US20200284957A1 (https=)
EP (1) EP3924723A1 (https=)
JP (1) JP2022523997A (https=)
KR (1) KR20210132176A (https=)
CN (1) CN113544493A (https=)
AU (1) AU2020231492A1 (https=)
BR (1) BR112021016310A2 (https=)
CA (1) CA3131274A1 (https=)
MX (1) MX2021010690A (https=)
TW (1) TW202107066A (https=)
WO (1) WO2020180899A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI576617B (zh) * 2012-07-16 2017-04-01 唯亞威方案公司 光學濾波器及感測器系統
US11604307B1 (en) * 2019-09-24 2023-03-14 United States Of America As Represented By The Administrator Of Nasa Dark mirror optical stack and related systems
US12283602B2 (en) * 2020-10-09 2025-04-22 Spectricity Image sensor with improved color accuracy
CN113740961B (zh) * 2021-08-26 2022-10-21 赛丽科技(苏州)有限公司 一种集成介质光波导的光吸收器和光吸收芯片
CN118216003A (zh) * 2021-10-22 2024-06-18 伊鲁米纳公司 半导体光感测
KR102782344B1 (ko) 2022-04-08 2025-03-18 한국전자통신연구원 삽입 손실과 반사 손실을 개선할 수 있는 도파관 모듈
CN114936519B (zh) * 2022-05-12 2025-09-05 中国人民解放军国防科技大学 一种可控模式光滤波器及优化方法

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD227831A1 (de) * 1984-08-02 1985-09-25 Werk Fernsehelektronik Veb Verfahren zur herstellung einer schicht mit bereichen unterschiedlicher optischer transmission
JPH04133004A (ja) * 1990-09-25 1992-05-07 Matsushita Electric Works Ltd 紫外赤外線カットフィルタ
IL106265A (en) * 1992-07-13 1999-07-14 Hughes Aircraft Co Extrinsic semiconductor optical filter
JPH0812316A (ja) * 1994-06-29 1996-01-16 A G Technol Kk シリコン系薄膜のスパッタリング成膜方法
AU5802698A (en) * 1996-12-19 1998-07-15 Energy Conversion Devices Inc. Selective solar radiation control coatings for windows and plastic films characterized by an absence of silver
US6572975B2 (en) * 2001-08-24 2003-06-03 General Electric Company Optically coated article and method for its preparation
US7031566B2 (en) * 2002-06-04 2006-04-18 Lake Shore Cryotronics, Inc. Spectral filter for green and shorter wavelengths
AU2003302230A1 (en) * 2002-10-16 2004-06-18 Lake Shore Cryotronics, Inc. Method of manufacturing a spectral filter for green and longer wavelengths
US7221455B2 (en) * 2004-01-20 2007-05-22 The Regents Of The Unversity Of California Integrated, fluorescence-detecting microanalytical system
JP4481720B2 (ja) * 2004-05-14 2010-06-16 日本電産コパル株式会社 Ndフィルタ及び光量絞り装置
US20050287040A1 (en) * 2004-06-29 2005-12-29 Molecular Devices Corporation Fluorescence validation plate
JP4595687B2 (ja) * 2004-07-20 2010-12-08 住友金属鉱山株式会社 吸収型多層膜ndフィルター
JP4613706B2 (ja) * 2004-11-24 2011-01-19 住友金属鉱山株式会社 吸収型多層膜ndフィルター
JP2007012947A (ja) * 2005-06-30 2007-01-18 Citizen Electronics Co Ltd 半導体受光装置
TWI288252B (en) * 2005-08-01 2007-10-11 Asia Optical Co Inc Neutral filter able to improve the flatness of the spectrum of the penetrating light
WO2007095172A2 (en) * 2006-02-14 2007-08-23 Massachusetts Institute Of Technology Light-absorbing structure and methods of making
US7903338B1 (en) * 2006-07-08 2011-03-08 Cirrex Systems Llc Method and system for managing light at an optical interface
US8665520B2 (en) * 2006-08-30 2014-03-04 Canon Denshi Kabushiki Kaisha Neutral density optical filter and image pickup apparatus
JP2008102363A (ja) * 2006-10-19 2008-05-01 Nidec Copal Corp Ndフィルタ及びこれを用いた光量絞り装置
US7489402B2 (en) * 2006-12-04 2009-02-10 Finesse Solutions, Llc Optical collection geometries for phase fluorimetry
US20120099188A1 (en) * 2010-10-20 2012-04-26 AEgis Technologies Group, Inc. Laser Protection Structures and Methods of Fabrication
JP2012163756A (ja) * 2011-02-07 2012-08-30 Tanaka Engineering Inc 低反射性遮光構造
TWI576617B (zh) * 2012-07-16 2017-04-01 唯亞威方案公司 光學濾波器及感測器系統
US9727178B2 (en) * 2013-09-05 2017-08-08 Apple Inc. Opaque white coating with non-conductive mirror
CN105917003A (zh) 2013-11-17 2016-08-31 宽腾矽公司 用于生物和化学试样的快速分析的有源像素集成装置
EP2986957B1 (en) * 2014-05-01 2021-09-29 Bio-Rad Laboratories, Inc. Imaging assembly for emitted light
MX384725B (es) * 2014-08-08 2025-03-14 Quantum Si Inc Dispositivo integrado con fuente de luz externa para el sondeo, detección y análisis de moléculas.
CN106796175B (zh) * 2014-08-08 2021-01-05 宽腾矽公司 用于探测、检测和分析分子的光学系统和检测芯片
EP3186617A4 (en) * 2014-08-27 2018-04-25 Pacific Biosciences Of California, Inc. Arrays of integrated analytcal devices
KR101587643B1 (ko) * 2014-10-14 2016-01-25 광운대학교 산학협력단 비훈색성 투과형 컬러필터 및 그 제조방법
WO2016125236A1 (ja) * 2015-02-02 2016-08-11 株式会社日立ハイテクノロジーズ 多色蛍光分析装置
US20160238759A1 (en) * 2015-02-18 2016-08-18 Materion Corporation Near infrared optical interference filters with improved transmission
US10246742B2 (en) 2015-05-20 2019-04-02 Quantum-Si Incorporated Pulsed laser and bioanalytic system
AU2016264737B2 (en) * 2015-05-20 2021-09-09 Quantum-Si Incorporated Pulsed laser and bioanalytic system
US9968927B2 (en) * 2015-05-22 2018-05-15 Taiwan Semiconductor Manufacturing Co., Ltd. Optical biosensor device
WO2017010280A1 (ja) * 2015-07-13 2017-01-19 コニカミノルタ株式会社 熱線遮蔽フィルム
US9518923B1 (en) * 2015-12-07 2016-12-13 International Business Machines Corporation System and methods for fluorescence detection
US9864116B2 (en) * 2015-12-28 2018-01-09 Apple Inc. Electronic devices having infrared-transparent window coatings
BR112020000799A2 (pt) * 2017-07-24 2020-07-14 Quantum-Si Incorporated estruturas fotônicas de rejeição óptica
JP7475129B2 (ja) * 2018-11-28 2024-04-26 キヤノン電子株式会社 遮光部材、遮光部材を用いた撮像装置

Also Published As

Publication number Publication date
KR20210132176A (ko) 2021-11-03
CN113544493A (zh) 2021-10-22
WO2020180899A1 (en) 2020-09-10
JP2022523997A (ja) 2022-04-27
EP3924723A1 (en) 2021-12-22
US20220011486A1 (en) 2022-01-13
CA3131274A1 (en) 2020-09-10
AU2020231492A1 (en) 2021-09-16
TW202107066A (zh) 2021-02-16
US20200284957A1 (en) 2020-09-10
BR112021016310A2 (pt) 2021-10-13

Similar Documents

Publication Publication Date Title
MX2021010690A (es) Filtro de absorcion optica para un dispositivo integrado.
TW200502048A (en) Coating apparatus, thin film forming method, thin film forming apparatus, and semiconductor device manufacturing method, electro-optic device and electronic instrument
SG11201901299SA (en) Mask blank, transfer mask, and method of manufacturing semiconductor device
CN104198434B (zh) 一种垂直透射型局域等离子谐振折射率传感器的制备方法及其应用
CN107941815A (zh) 一种偏光片的外观缺陷检测装置
CN107290314A (zh) 一种无标记微纳米粒子的荧光探测方法及装置
DE112022001791T5 (de) Schutzschicht für nichtlineare optische kristalle
US6455853B2 (en) Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data obtained from ellipsometric investigation of both front and back surfaces
TW200705023A (en) A method for manufacturing a light compensation film, and a polarizer having the light compensation film
FR2469741A1 (fr) Procede pour la fabrication de structures a diffusion mate a cote de structures opaques et /ou de structures transparentes
JPH04178539A (ja) 減衰全反射プリズムセル
KR920004831A (ko) 치환형 탄소농도 측정방법
CN204740365U (zh) 一种基于无序金属圆柱阵列的大角度的光学调色装置
CN104965253A (zh) 基于无序金属圆柱阵列的大角度的光学调色装置及其方法
JP2001108611A (ja) 光導波路分光器のための光結合法及びこれを用いた測定法
JPH0438321B2 (https=)
JP7091121B2 (ja) 石英ガラス板
CN214503358U (zh) 一种用于紫外可见分光光度计的小尺寸薄膜试样载物台
JPS5683044A (en) Wafer inspection device
Williams Investigation of thin films using total internal reflection microscopy
JPH0875652A (ja) ラマン分光測定方法
JPS6044851A (ja) 分光光度計
Krinsely et al. The application of vacuum shadowing to the examination and photography of small objects
Caccavale et al. MicroRaman investigation of optical quality lithium niobate wafers
JPS5392672A (en) Analyzing method for defect of semiconductor element