CA3131274A1 - Optical absorption filter for an integrated device - Google Patents

Optical absorption filter for an integrated device Download PDF

Info

Publication number
CA3131274A1
CA3131274A1 CA3131274A CA3131274A CA3131274A1 CA 3131274 A1 CA3131274 A1 CA 3131274A1 CA 3131274 A CA3131274 A CA 3131274A CA 3131274 A CA3131274 A CA 3131274A CA 3131274 A1 CA3131274 A1 CA 3131274A1
Authority
CA
Canada
Prior art keywords
absorbing layer
semiconductor
layer
optical
semiconductor absorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3131274A
Other languages
English (en)
French (fr)
Inventor
Michael BELLOS
Faisal R. Ahmad
James Beach
Michael COUMANS
Sharath Hosali
Ali KABIRI
Kyle Preston
Gerard Schmid
Bing Shen
Jonathan M. Rothberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quantum Si Inc
Original Assignee
Quantum Si Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Publication of CA3131274A1 publication Critical patent/CA3131274A1/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/207—Filters comprising semiconducting materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G01N2021/6471—Special filters, filter wheel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6408—Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Filters (AREA)
  • Light Receiving Elements (AREA)
CA3131274A 2019-03-05 2020-03-03 Optical absorption filter for an integrated device Pending CA3131274A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962813997P 2019-03-05 2019-03-05
US62/813,997 2019-03-05
US201962831237P 2019-04-09 2019-04-09
US62/831,237 2019-04-09
PCT/US2020/020847 WO2020180899A1 (en) 2019-03-05 2020-03-03 Optical absorption filter for an integrated device

Publications (1)

Publication Number Publication Date
CA3131274A1 true CA3131274A1 (en) 2020-09-10

Family

ID=70155332

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3131274A Pending CA3131274A1 (en) 2019-03-05 2020-03-03 Optical absorption filter for an integrated device

Country Status (11)

Country Link
US (2) US20200284957A1 (https=)
EP (1) EP3924723A1 (https=)
JP (1) JP2022523997A (https=)
KR (1) KR20210132176A (https=)
CN (1) CN113544493A (https=)
AU (1) AU2020231492A1 (https=)
BR (1) BR112021016310A2 (https=)
CA (1) CA3131274A1 (https=)
MX (1) MX2021010690A (https=)
TW (1) TW202107066A (https=)
WO (1) WO2020180899A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202522039A (zh) * 2012-07-16 2025-06-01 美商唯亞威方案公司 光學濾波器及感測器系統
US11604307B1 (en) * 2019-09-24 2023-03-14 United States Of America As Represented By The Administrator Of Nasa Dark mirror optical stack and related systems
US12283602B2 (en) * 2020-10-09 2025-04-22 Spectricity Image sensor with improved color accuracy
CN113740961B (zh) * 2021-08-26 2022-10-21 赛丽科技(苏州)有限公司 一种集成介质光波导的光吸收器和光吸收芯片
US12477852B2 (en) 2021-10-22 2025-11-18 Illumina, Inc. Semiconductor light sensing
KR102782344B1 (ko) 2022-04-08 2025-03-18 한국전자통신연구원 삽입 손실과 반사 손실을 개선할 수 있는 도파관 모듈
CN114936519B (zh) * 2022-05-12 2025-09-05 中国人民解放军国防科技大学 一种可控模式光滤波器及优化方法

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD227831A1 (de) * 1984-08-02 1985-09-25 Werk Fernsehelektronik Veb Verfahren zur herstellung einer schicht mit bereichen unterschiedlicher optischer transmission
JPH04133004A (ja) * 1990-09-25 1992-05-07 Matsushita Electric Works Ltd 紫外赤外線カットフィルタ
IL106265A (en) * 1992-07-13 1999-07-14 Hughes Aircraft Co Extrinsic semiconductor optical filter
JPH0812316A (ja) * 1994-06-29 1996-01-16 A G Technol Kk シリコン系薄膜のスパッタリング成膜方法
WO1998026926A1 (en) * 1996-12-19 1998-06-25 Energy Conversion Devices, Inc. Selective solar radiation control coatings for windows and plastic films characterized by an absence of silver
US6572975B2 (en) * 2001-08-24 2003-06-03 General Electric Company Optically coated article and method for its preparation
WO2003102633A2 (en) * 2002-06-04 2003-12-11 Lake Shore Cryotronics, Inc. Spectral filter for green and shorter wavelengths and method of manufacturing same
AU2003302230A1 (en) * 2002-10-16 2004-06-18 Lake Shore Cryotronics, Inc. Method of manufacturing a spectral filter for green and longer wavelengths
US7221455B2 (en) * 2004-01-20 2007-05-22 The Regents Of The Unversity Of California Integrated, fluorescence-detecting microanalytical system
JP4481720B2 (ja) * 2004-05-14 2010-06-16 日本電産コパル株式会社 Ｎｄフィルタ及び光量絞り装置
US20050287040A1 (en) * 2004-06-29 2005-12-29 Molecular Devices Corporation Fluorescence validation plate
JP4595687B2 (ja) * 2004-07-20 2010-12-08 住友金属鉱山株式会社 吸収型多層膜ｎｄフィルター
JP4613706B2 (ja) * 2004-11-24 2011-01-19 住友金属鉱山株式会社 吸収型多層膜ｎｄフィルター
JP2007012947A (ja) * 2005-06-30 2007-01-18 Citizen Electronics Co Ltd 半導体受光装置
TWI288252B (en) * 2005-08-01 2007-10-11 Asia Optical Co Inc Neutral filter able to improve the flatness of the spectrum of the penetrating light
WO2007095172A2 (en) * 2006-02-14 2007-08-23 Massachusetts Institute Of Technology Light-absorbing structure and methods of making
US7903338B1 (en) * 2006-07-08 2011-03-08 Cirrex Systems Llc Method and system for managing light at an optical interface
CN102692662B (zh) * 2006-08-30 2015-06-24 佳能电子株式会社 光学滤光器以及摄像装置
JP2008102363A (ja) * 2006-10-19 2008-05-01 Nidec Copal Corp Ｎｄフィルタ及びこれを用いた光量絞り装置
US7489402B2 (en) * 2006-12-04 2009-02-10 Finesse Solutions, Llc Optical collection geometries for phase fluorimetry
US20120099188A1 (en) * 2010-10-20 2012-04-26 AEgis Technologies Group, Inc. Laser Protection Structures and Methods of Fabrication
JP2012163756A (ja) * 2011-02-07 2012-08-30 Tanaka Engineering Inc 低反射性遮光構造
TW202522039A (zh) * 2012-07-16 2025-06-01 美商唯亞威方案公司 光學濾波器及感測器系統
US9727178B2 (en) * 2013-09-05 2017-08-08 Apple Inc. Opaque white coating with non-conductive mirror
WO2015074001A1 (en) * 2013-11-17 2015-05-21 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
US9841378B2 (en) * 2014-05-01 2017-12-12 Bio-Rad Laboratories, Inc. Series absorbance glass and interference filters
CA2957543A1 (en) * 2014-08-08 2016-02-11 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
EP4421188A3 (en) * 2014-08-08 2024-10-23 Quantum-Si Incorporated Integrated device with external light source for probing, detecting, and analyzing molecules
TWI692633B (zh) * 2014-08-27 2020-05-01 美商加州太平洋生物科學公司 整合式分析裝置之陣列
KR101587643B1 (ko) * 2014-10-14 2016-01-25 광운대학교 산학협력단 비훈색성 투과형 컬러필터 및 그 제조방법
US10908083B2 (en) * 2015-02-02 2021-02-02 Hitachi High-Tech Corporation Multicolor fluorescence analysis device
KR102700673B1 (ko) * 2015-02-18 2024-08-30 마테리온 코포레이션 개선된 투과를 갖는 근적외선 광학 간섭 필터
JP6878306B2 (ja) * 2015-05-20 2021-05-26 クアンタム−エスアイ インコーポレイテッドＱｕａｎｔｕｍ−Ｓｉ Ｉｎｃｏｒｐｏｒａｔｅｄ パルスレーザ及び生物分析システム
US10246742B2 (en) 2015-05-20 2019-04-02 Quantum-Si Incorporated Pulsed laser and bioanalytic system
US9968927B2 (en) * 2015-05-22 2018-05-15 Taiwan Semiconductor Manufacturing Co., Ltd. Optical biosensor device
WO2017010280A1 (ja) * 2015-07-13 2017-01-19 コニカミノルタ株式会社 熱線遮蔽フィルム
US9518923B1 (en) * 2015-12-07 2016-12-13 International Business Machines Corporation System and methods for fluorescence detection
US9864116B2 (en) * 2015-12-28 2018-01-09 Apple Inc. Electronic devices having infrared-transparent window coatings
BR112020000799A2 (pt) * 2017-07-24 2020-07-14 Quantum-Si Incorporated estruturas fotônicas de rejeição óptica
JP7475129B2 (ja) * 2018-11-28 2024-04-26 キヤノン電子株式会社 遮光部材、遮光部材を用いた撮像装置

Also Published As

Publication number Publication date
EP3924723A1 (en) 2021-12-22
AU2020231492A1 (en) 2021-09-16
US20200284957A1 (en) 2020-09-10
BR112021016310A2 (pt) 2021-10-13
WO2020180899A1 (en) 2020-09-10
KR20210132176A (ko) 2021-11-03
TW202107066A (zh) 2021-02-16
US20220011486A1 (en) 2022-01-13
MX2021010690A (es) 2021-10-01
CN113544493A (zh) 2021-10-22
JP2022523997A (ja) 2022-04-27

Similar Documents

Publication Publication Date Title
US20220011486A1 (en) Optical absorption filter for an integrated device
US12203853B2 (en) Optical nanostructure rejecter for an integrated device and related methods
KR102786367B1 (ko) 광학 거부 광자 구조체들
AU2015300778B2 (en) Optical system and assay chip for probing, detecting, and analyzing molecules
US20200408690A1 (en) Optical and electrical secondary path rejection
EP4088320A1 (en) Integrated sensor for lifetime characterization
KR20220140523A (ko) 수명 플러스 스펙트럼 특성화를 위한 센서
KR20230116930A (ko) 개선된 전하 전송 효율을 갖는 집적 회로 및 연관된기술들
WO2021178438A1 (en) Integrated sensor for multi-dimensional signal analysis

Legal Events

Date Code Title Description
EEER Examination request

Effective date: 20240301

D15 Examination report completed

Free format text: ST27 STATUS EVENT CODE: A-2-2-D10-D15-D126 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: EXAMINER'S REPORT

Effective date: 20250312

B12 Application deemed to be withdrawn, abandoned or lapsed

Free format text: ST27 STATUS EVENT CODE: N-6-6-B10-B12-B303 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: DEEMED ABANDONED - FAILURE TO RESPOND TO AN EXAMINER'S REQUISITION

Effective date: 20250714

W00 Other event occurred

Free format text: ST27 STATUS EVENT CODE: A-2-2-W10-W00-W100 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: LETTER SENT

Effective date: 20250902

U13 Renewal or maintenance fee not paid

Free format text: ST27 STATUS EVENT CODE: N-2-6-U10-U13-U300 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: DEEMED ABANDONED - FAILURE TO RESPOND TO MAINTENANCE FEE NOTICE

Effective date: 20251103

W00 Other event occurred

Free format text: ST27 STATUS EVENT CODE: N-6-6-W10-W00-W100 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: LETTER SENT

Effective date: 20260423