CN113544493A - 用于集成装置的光学吸收滤光器 - Google Patents

用于集成装置的光学吸收滤光器 Download PDF

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Publication number
CN113544493A
CN113544493A CN202080019075.8A CN202080019075A CN113544493A CN 113544493 A CN113544493 A CN 113544493A CN 202080019075 A CN202080019075 A CN 202080019075A CN 113544493 A CN113544493 A CN 113544493A
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CN
China
Prior art keywords
layer
semiconductor
semiconductor absorber
absorber layer
optical
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Pending
Application number
CN202080019075.8A
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English (en)
Chinese (zh)
Inventor
迈克尔·贝洛斯
费萨尔·R·阿哈默德
詹姆斯·比奇
迈克尔·库曼斯
沙拉特·侯萨利
阿里·卡比里
凯尔·普雷斯顿
杰勒德·施密德
沈冰
乔纳森·M·罗斯伯格
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Quantum Si Inc
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Quantum Si Inc
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Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Publication of CN113544493A publication Critical patent/CN113544493A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/207—Filters comprising semiconducting materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G01N2021/6471—Special filters, filter wheel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6408—Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Filters (AREA)
  • Light Receiving Elements (AREA)
CN202080019075.8A 2019-03-05 2020-03-03 用于集成装置的光学吸收滤光器 Pending CN113544493A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962813997P 2019-03-05 2019-03-05
US62/813,997 2019-03-05
US201962831237P 2019-04-09 2019-04-09
US62/831,237 2019-04-09
PCT/US2020/020847 WO2020180899A1 (en) 2019-03-05 2020-03-03 Optical absorption filter for an integrated device

Publications (1)

Publication Number Publication Date
CN113544493A true CN113544493A (zh) 2021-10-22

Family

ID=70155332

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080019075.8A Pending CN113544493A (zh) 2019-03-05 2020-03-03 用于集成装置的光学吸收滤光器

Country Status (11)

Country Link
US (2) US20200284957A1 (https=)
EP (1) EP3924723A1 (https=)
JP (1) JP2022523997A (https=)
KR (1) KR20210132176A (https=)
CN (1) CN113544493A (https=)
AU (1) AU2020231492A1 (https=)
BR (1) BR112021016310A2 (https=)
CA (1) CA3131274A1 (https=)
MX (1) MX2021010690A (https=)
TW (1) TW202107066A (https=)
WO (1) WO2020180899A1 (https=)

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TWI576617B (zh) * 2012-07-16 2017-04-01 唯亞威方案公司 光學濾波器及感測器系統
US11604307B1 (en) * 2019-09-24 2023-03-14 United States Of America As Represented By The Administrator Of Nasa Dark mirror optical stack and related systems
US12283602B2 (en) * 2020-10-09 2025-04-22 Spectricity Image sensor with improved color accuracy
CN113740961B (zh) * 2021-08-26 2022-10-21 赛丽科技(苏州)有限公司 一种集成介质光波导的光吸收器和光吸收芯片
CN118216003A (zh) * 2021-10-22 2024-06-18 伊鲁米纳公司 半导体光感测
KR102782344B1 (ko) 2022-04-08 2025-03-18 한국전자통신연구원 삽입 손실과 반사 손실을 개선할 수 있는 도파관 모듈
CN114936519B (zh) * 2022-05-12 2025-09-05 中国人民解放军国防科技大学 一种可控模式光滤波器及优化方法

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Publication number Publication date
KR20210132176A (ko) 2021-11-03
WO2020180899A1 (en) 2020-09-10
JP2022523997A (ja) 2022-04-27
EP3924723A1 (en) 2021-12-22
US20220011486A1 (en) 2022-01-13
MX2021010690A (es) 2021-10-01
CA3131274A1 (en) 2020-09-10
AU2020231492A1 (en) 2021-09-16
TW202107066A (zh) 2021-02-16
US20200284957A1 (en) 2020-09-10
BR112021016310A2 (pt) 2021-10-13

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