JP2022523997A - 集積デバイス用の光吸収フィルタ - Google Patents
集積デバイス用の光吸収フィルタ Download PDFInfo
- Publication number
- JP2022523997A JP2022523997A JP2021552700A JP2021552700A JP2022523997A JP 2022523997 A JP2022523997 A JP 2022523997A JP 2021552700 A JP2021552700 A JP 2021552700A JP 2021552700 A JP2021552700 A JP 2021552700A JP 2022523997 A JP2022523997 A JP 2022523997A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor
- filter
- assembly
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
- G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/207—Filters comprising semiconducting materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N2021/6463—Optics
- G01N2021/6471—Special filters, filter wheel
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6408—Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Optical Integrated Circuits (AREA)
- Optical Filters (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962813997P | 2019-03-05 | 2019-03-05 | |
| US62/813,997 | 2019-03-05 | ||
| US201962831237P | 2019-04-09 | 2019-04-09 | |
| US62/831,237 | 2019-04-09 | ||
| PCT/US2020/020847 WO2020180899A1 (en) | 2019-03-05 | 2020-03-03 | Optical absorption filter for an integrated device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022523997A true JP2022523997A (ja) | 2022-04-27 |
| JP2022523997A5 JP2022523997A5 (https=) | 2023-03-09 |
| JPWO2020180899A5 JPWO2020180899A5 (https=) | 2023-03-09 |
Family
ID=70155332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021552700A Pending JP2022523997A (ja) | 2019-03-05 | 2020-03-03 | 集積デバイス用の光吸収フィルタ |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US20200284957A1 (https=) |
| EP (1) | EP3924723A1 (https=) |
| JP (1) | JP2022523997A (https=) |
| KR (1) | KR20210132176A (https=) |
| CN (1) | CN113544493A (https=) |
| AU (1) | AU2020231492A1 (https=) |
| BR (1) | BR112021016310A2 (https=) |
| CA (1) | CA3131274A1 (https=) |
| MX (1) | MX2021010690A (https=) |
| TW (1) | TW202107066A (https=) |
| WO (1) | WO2020180899A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI576617B (zh) * | 2012-07-16 | 2017-04-01 | 唯亞威方案公司 | 光學濾波器及感測器系統 |
| US11604307B1 (en) * | 2019-09-24 | 2023-03-14 | United States Of America As Represented By The Administrator Of Nasa | Dark mirror optical stack and related systems |
| US12283602B2 (en) * | 2020-10-09 | 2025-04-22 | Spectricity | Image sensor with improved color accuracy |
| CN113740961B (zh) * | 2021-08-26 | 2022-10-21 | 赛丽科技(苏州)有限公司 | 一种集成介质光波导的光吸收器和光吸收芯片 |
| CN118216003A (zh) * | 2021-10-22 | 2024-06-18 | 伊鲁米纳公司 | 半导体光感测 |
| KR102782344B1 (ko) | 2022-04-08 | 2025-03-18 | 한국전자통신연구원 | 삽입 손실과 반사 손실을 개선할 수 있는 도파관 모듈 |
| CN114936519B (zh) * | 2022-05-12 | 2025-09-05 | 中国人民解放军国防科技大学 | 一种可控模式光滤波器及优化方法 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6184015A (ja) * | 1984-08-02 | 1986-04-28 | フアウ・エ−・ベ−・ウエルク・フユ−ル・フエルンゼ−エレクトロニク・イム・フアウ・エ−・ベ−・コムビナ−ト・ミクロエレクトロニク | 種々異なる光線透過部分を有する層を造る方法 |
| JPH06174917A (ja) * | 1992-07-13 | 1994-06-24 | Hughes Aircraft Co | 半導体光フィルタ |
| JP2007041524A (ja) * | 2005-08-01 | 2007-02-15 | Ashu Kogaku Kofun Yugenkoshi | Ndフィルター |
| JP2008102363A (ja) * | 2006-10-19 | 2008-05-01 | Nidec Copal Corp | Ndフィルタ及びこれを用いた光量絞り装置 |
| US20120099188A1 (en) * | 2010-10-20 | 2012-04-26 | AEgis Technologies Group, Inc. | Laser Protection Structures and Methods of Fabrication |
| JP2012163756A (ja) * | 2011-02-07 | 2012-08-30 | Tanaka Engineering Inc | 低反射性遮光構造 |
| US20140014838A1 (en) * | 2012-07-16 | 2014-01-16 | Karen Denise Hendrix | Optical filter and sensor system |
| JP2016540310A (ja) * | 2013-09-05 | 2016-12-22 | アップル インコーポレイテッド | 非導電性ミラーを有する不透明な白色コーティング |
| US20170184764A1 (en) * | 2015-12-28 | 2017-06-29 | Apple Inc. | Electronic Devices Having Infrared-Transparent Window Coatings |
| JP2020095265A (ja) * | 2018-11-28 | 2020-06-18 | キヤノン電子株式会社 | 遮光部材、遮光部材を用いた撮像装置 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04133004A (ja) * | 1990-09-25 | 1992-05-07 | Matsushita Electric Works Ltd | 紫外赤外線カットフィルタ |
| JPH0812316A (ja) * | 1994-06-29 | 1996-01-16 | A G Technol Kk | シリコン系薄膜のスパッタリング成膜方法 |
| AU5802698A (en) * | 1996-12-19 | 1998-07-15 | Energy Conversion Devices Inc. | Selective solar radiation control coatings for windows and plastic films characterized by an absence of silver |
| US6572975B2 (en) * | 2001-08-24 | 2003-06-03 | General Electric Company | Optically coated article and method for its preparation |
| US7031566B2 (en) * | 2002-06-04 | 2006-04-18 | Lake Shore Cryotronics, Inc. | Spectral filter for green and shorter wavelengths |
| AU2003302230A1 (en) * | 2002-10-16 | 2004-06-18 | Lake Shore Cryotronics, Inc. | Method of manufacturing a spectral filter for green and longer wavelengths |
| US7221455B2 (en) * | 2004-01-20 | 2007-05-22 | The Regents Of The Unversity Of California | Integrated, fluorescence-detecting microanalytical system |
| JP4481720B2 (ja) * | 2004-05-14 | 2010-06-16 | 日本電産コパル株式会社 | Ndフィルタ及び光量絞り装置 |
| US20050287040A1 (en) * | 2004-06-29 | 2005-12-29 | Molecular Devices Corporation | Fluorescence validation plate |
| JP4595687B2 (ja) * | 2004-07-20 | 2010-12-08 | 住友金属鉱山株式会社 | 吸収型多層膜ndフィルター |
| JP4613706B2 (ja) * | 2004-11-24 | 2011-01-19 | 住友金属鉱山株式会社 | 吸収型多層膜ndフィルター |
| JP2007012947A (ja) * | 2005-06-30 | 2007-01-18 | Citizen Electronics Co Ltd | 半導体受光装置 |
| WO2007095172A2 (en) * | 2006-02-14 | 2007-08-23 | Massachusetts Institute Of Technology | Light-absorbing structure and methods of making |
| US7903338B1 (en) * | 2006-07-08 | 2011-03-08 | Cirrex Systems Llc | Method and system for managing light at an optical interface |
| US8665520B2 (en) * | 2006-08-30 | 2014-03-04 | Canon Denshi Kabushiki Kaisha | Neutral density optical filter and image pickup apparatus |
| US7489402B2 (en) * | 2006-12-04 | 2009-02-10 | Finesse Solutions, Llc | Optical collection geometries for phase fluorimetry |
| CN105917003A (zh) | 2013-11-17 | 2016-08-31 | 宽腾矽公司 | 用于生物和化学试样的快速分析的有源像素集成装置 |
| EP2986957B1 (en) * | 2014-05-01 | 2021-09-29 | Bio-Rad Laboratories, Inc. | Imaging assembly for emitted light |
| MX384725B (es) * | 2014-08-08 | 2025-03-14 | Quantum Si Inc | Dispositivo integrado con fuente de luz externa para el sondeo, detección y análisis de moléculas. |
| CN106796175B (zh) * | 2014-08-08 | 2021-01-05 | 宽腾矽公司 | 用于探测、检测和分析分子的光学系统和检测芯片 |
| EP3186617A4 (en) * | 2014-08-27 | 2018-04-25 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytcal devices |
| KR101587643B1 (ko) * | 2014-10-14 | 2016-01-25 | 광운대학교 산학협력단 | 비훈색성 투과형 컬러필터 및 그 제조방법 |
| WO2016125236A1 (ja) * | 2015-02-02 | 2016-08-11 | 株式会社日立ハイテクノロジーズ | 多色蛍光分析装置 |
| US20160238759A1 (en) * | 2015-02-18 | 2016-08-18 | Materion Corporation | Near infrared optical interference filters with improved transmission |
| US10246742B2 (en) | 2015-05-20 | 2019-04-02 | Quantum-Si Incorporated | Pulsed laser and bioanalytic system |
| AU2016264737B2 (en) * | 2015-05-20 | 2021-09-09 | Quantum-Si Incorporated | Pulsed laser and bioanalytic system |
| US9968927B2 (en) * | 2015-05-22 | 2018-05-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Optical biosensor device |
| WO2017010280A1 (ja) * | 2015-07-13 | 2017-01-19 | コニカミノルタ株式会社 | 熱線遮蔽フィルム |
| US9518923B1 (en) * | 2015-12-07 | 2016-12-13 | International Business Machines Corporation | System and methods for fluorescence detection |
| BR112020000799A2 (pt) * | 2017-07-24 | 2020-07-14 | Quantum-Si Incorporated | estruturas fotônicas de rejeição óptica |
-
2020
- 2020-03-03 BR BR112021016310-7A patent/BR112021016310A2/pt not_active Application Discontinuation
- 2020-03-03 CN CN202080019075.8A patent/CN113544493A/zh active Pending
- 2020-03-03 AU AU2020231492A patent/AU2020231492A1/en not_active Abandoned
- 2020-03-03 CA CA3131274A patent/CA3131274A1/en active Pending
- 2020-03-03 JP JP2021552700A patent/JP2022523997A/ja active Pending
- 2020-03-03 EP EP20716610.9A patent/EP3924723A1/en not_active Withdrawn
- 2020-03-03 KR KR1020217031341A patent/KR20210132176A/ko not_active Ceased
- 2020-03-03 WO PCT/US2020/020847 patent/WO2020180899A1/en not_active Ceased
- 2020-03-03 MX MX2021010690A patent/MX2021010690A/es unknown
- 2020-03-05 US US16/809,785 patent/US20200284957A1/en not_active Abandoned
- 2020-03-05 TW TW109107225A patent/TW202107066A/zh unknown
-
2021
- 2021-09-23 US US17/482,692 patent/US20220011486A1/en not_active Abandoned
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6184015A (ja) * | 1984-08-02 | 1986-04-28 | フアウ・エ−・ベ−・ウエルク・フユ−ル・フエルンゼ−エレクトロニク・イム・フアウ・エ−・ベ−・コムビナ−ト・ミクロエレクトロニク | 種々異なる光線透過部分を有する層を造る方法 |
| JPH06174917A (ja) * | 1992-07-13 | 1994-06-24 | Hughes Aircraft Co | 半導体光フィルタ |
| JP2007041524A (ja) * | 2005-08-01 | 2007-02-15 | Ashu Kogaku Kofun Yugenkoshi | Ndフィルター |
| JP2008102363A (ja) * | 2006-10-19 | 2008-05-01 | Nidec Copal Corp | Ndフィルタ及びこれを用いた光量絞り装置 |
| US20120099188A1 (en) * | 2010-10-20 | 2012-04-26 | AEgis Technologies Group, Inc. | Laser Protection Structures and Methods of Fabrication |
| JP2012163756A (ja) * | 2011-02-07 | 2012-08-30 | Tanaka Engineering Inc | 低反射性遮光構造 |
| US20140014838A1 (en) * | 2012-07-16 | 2014-01-16 | Karen Denise Hendrix | Optical filter and sensor system |
| JP2016540310A (ja) * | 2013-09-05 | 2016-12-22 | アップル インコーポレイテッド | 非導電性ミラーを有する不透明な白色コーティング |
| US20170184764A1 (en) * | 2015-12-28 | 2017-06-29 | Apple Inc. | Electronic Devices Having Infrared-Transparent Window Coatings |
| JP2020095265A (ja) * | 2018-11-28 | 2020-06-18 | キヤノン電子株式会社 | 遮光部材、遮光部材を用いた撮像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20210132176A (ko) | 2021-11-03 |
| CN113544493A (zh) | 2021-10-22 |
| WO2020180899A1 (en) | 2020-09-10 |
| EP3924723A1 (en) | 2021-12-22 |
| US20220011486A1 (en) | 2022-01-13 |
| MX2021010690A (es) | 2021-10-01 |
| CA3131274A1 (en) | 2020-09-10 |
| AU2020231492A1 (en) | 2021-09-16 |
| TW202107066A (zh) | 2021-02-16 |
| US20200284957A1 (en) | 2020-09-10 |
| BR112021016310A2 (pt) | 2021-10-13 |
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