JP2022523997A - 集積デバイス用の光吸収フィルタ - Google Patents

集積デバイス用の光吸収フィルタ Download PDF

Info

Publication number
JP2022523997A
JP2022523997A JP2021552700A JP2021552700A JP2022523997A JP 2022523997 A JP2022523997 A JP 2022523997A JP 2021552700 A JP2021552700 A JP 2021552700A JP 2021552700 A JP2021552700 A JP 2021552700A JP 2022523997 A JP2022523997 A JP 2022523997A
Authority
JP
Japan
Prior art keywords
layer
semiconductor
filter
assembly
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021552700A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022523997A5 (https=
Inventor
ベロス、マイケル
アール. アフマド、ファイサル
ビーチ、ジェームズ
クーマンズ、マイケル
ホサリ、シャラト
カビリ、アリ
プレストン、カイル
シュミッド、ジェラード
シェン、ビン
エム. ロスバーグ、ジョナサン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quantum Si Inc
Original Assignee
Quantum Si Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Publication of JP2022523997A publication Critical patent/JP2022523997A/ja
Publication of JP2022523997A5 publication Critical patent/JP2022523997A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/648Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6486Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/003Light absorbing elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/207Filters comprising semiconducting materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N2021/6463Optics
    • G01N2021/6471Special filters, filter wheel
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6408Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Filters (AREA)
  • Light Receiving Elements (AREA)
JP2021552700A 2019-03-05 2020-03-03 集積デバイス用の光吸収フィルタ Pending JP2022523997A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962813997P 2019-03-05 2019-03-05
US62/813,997 2019-03-05
US201962831237P 2019-04-09 2019-04-09
US62/831,237 2019-04-09
PCT/US2020/020847 WO2020180899A1 (en) 2019-03-05 2020-03-03 Optical absorption filter for an integrated device

Publications (2)

Publication Number Publication Date
JP2022523997A true JP2022523997A (ja) 2022-04-27
JP2022523997A5 JP2022523997A5 (https=) 2023-03-09

Family

ID=70155332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021552700A Pending JP2022523997A (ja) 2019-03-05 2020-03-03 集積デバイス用の光吸収フィルタ

Country Status (11)

Country Link
US (2) US20200284957A1 (https=)
EP (1) EP3924723A1 (https=)
JP (1) JP2022523997A (https=)
KR (1) KR20210132176A (https=)
CN (1) CN113544493A (https=)
AU (1) AU2020231492A1 (https=)
BR (1) BR112021016310A2 (https=)
CA (1) CA3131274A1 (https=)
MX (1) MX2021010690A (https=)
TW (1) TW202107066A (https=)
WO (1) WO2020180899A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202522039A (zh) * 2012-07-16 2025-06-01 美商唯亞威方案公司 光學濾波器及感測器系統
US11604307B1 (en) * 2019-09-24 2023-03-14 United States Of America As Represented By The Administrator Of Nasa Dark mirror optical stack and related systems
US12283602B2 (en) * 2020-10-09 2025-04-22 Spectricity Image sensor with improved color accuracy
CN113740961B (zh) * 2021-08-26 2022-10-21 赛丽科技(苏州)有限公司 一种集成介质光波导的光吸收器和光吸收芯片
US12477852B2 (en) 2021-10-22 2025-11-18 Illumina, Inc. Semiconductor light sensing
KR102782344B1 (ko) 2022-04-08 2025-03-18 한국전자통신연구원 삽입 손실과 반사 손실을 개선할 수 있는 도파관 모듈
CN114936519B (zh) * 2022-05-12 2025-09-05 中国人民解放军国防科技大学 一种可控模式光滤波器及优化方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184015A (ja) * 1984-08-02 1986-04-28 フアウ・エ−・ベ−・ウエルク・フユ−ル・フエルンゼ−エレクトロニク・イム・フアウ・エ−・ベ−・コムビナ−ト・ミクロエレクトロニク 種々異なる光線透過部分を有する層を造る方法
JPH06174917A (ja) * 1992-07-13 1994-06-24 Hughes Aircraft Co 半導体光フィルタ
JP2007041524A (ja) * 2005-08-01 2007-02-15 Ashu Kogaku Kofun Yugenkoshi Ndフィルター
JP2008102363A (ja) * 2006-10-19 2008-05-01 Nidec Copal Corp Ndフィルタ及びこれを用いた光量絞り装置
US20120099188A1 (en) * 2010-10-20 2012-04-26 AEgis Technologies Group, Inc. Laser Protection Structures and Methods of Fabrication
JP2012163756A (ja) * 2011-02-07 2012-08-30 Tanaka Engineering Inc 低反射性遮光構造
US20140014838A1 (en) * 2012-07-16 2014-01-16 Karen Denise Hendrix Optical filter and sensor system
JP2016540310A (ja) * 2013-09-05 2016-12-22 アップル インコーポレイテッド 非導電性ミラーを有する不透明な白色コーティング
US20170184764A1 (en) * 2015-12-28 2017-06-29 Apple Inc. Electronic Devices Having Infrared-Transparent Window Coatings
JP2020095265A (ja) * 2018-11-28 2020-06-18 キヤノン電子株式会社 遮光部材、遮光部材を用いた撮像装置

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04133004A (ja) * 1990-09-25 1992-05-07 Matsushita Electric Works Ltd 紫外赤外線カットフィルタ
JPH0812316A (ja) * 1994-06-29 1996-01-16 A G Technol Kk シリコン系薄膜のスパッタリング成膜方法
WO1998026926A1 (en) * 1996-12-19 1998-06-25 Energy Conversion Devices, Inc. Selective solar radiation control coatings for windows and plastic films characterized by an absence of silver
US6572975B2 (en) * 2001-08-24 2003-06-03 General Electric Company Optically coated article and method for its preparation
WO2003102633A2 (en) * 2002-06-04 2003-12-11 Lake Shore Cryotronics, Inc. Spectral filter for green and shorter wavelengths and method of manufacturing same
AU2003302230A1 (en) * 2002-10-16 2004-06-18 Lake Shore Cryotronics, Inc. Method of manufacturing a spectral filter for green and longer wavelengths
US7221455B2 (en) * 2004-01-20 2007-05-22 The Regents Of The Unversity Of California Integrated, fluorescence-detecting microanalytical system
JP4481720B2 (ja) * 2004-05-14 2010-06-16 日本電産コパル株式会社 Ndフィルタ及び光量絞り装置
US20050287040A1 (en) * 2004-06-29 2005-12-29 Molecular Devices Corporation Fluorescence validation plate
JP4595687B2 (ja) * 2004-07-20 2010-12-08 住友金属鉱山株式会社 吸収型多層膜ndフィルター
JP4613706B2 (ja) * 2004-11-24 2011-01-19 住友金属鉱山株式会社 吸収型多層膜ndフィルター
JP2007012947A (ja) * 2005-06-30 2007-01-18 Citizen Electronics Co Ltd 半導体受光装置
WO2007095172A2 (en) * 2006-02-14 2007-08-23 Massachusetts Institute Of Technology Light-absorbing structure and methods of making
US7903338B1 (en) * 2006-07-08 2011-03-08 Cirrex Systems Llc Method and system for managing light at an optical interface
CN102692662B (zh) * 2006-08-30 2015-06-24 佳能电子株式会社 光学滤光器以及摄像装置
US7489402B2 (en) * 2006-12-04 2009-02-10 Finesse Solutions, Llc Optical collection geometries for phase fluorimetry
WO2015074001A1 (en) * 2013-11-17 2015-05-21 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
US9841378B2 (en) * 2014-05-01 2017-12-12 Bio-Rad Laboratories, Inc. Series absorbance glass and interference filters
CA2957543A1 (en) * 2014-08-08 2016-02-11 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
EP4421188A3 (en) * 2014-08-08 2024-10-23 Quantum-Si Incorporated Integrated device with external light source for probing, detecting, and analyzing molecules
TWI692633B (zh) * 2014-08-27 2020-05-01 美商加州太平洋生物科學公司 整合式分析裝置之陣列
KR101587643B1 (ko) * 2014-10-14 2016-01-25 광운대학교 산학협력단 비훈색성 투과형 컬러필터 및 그 제조방법
US10908083B2 (en) * 2015-02-02 2021-02-02 Hitachi High-Tech Corporation Multicolor fluorescence analysis device
KR102700673B1 (ko) * 2015-02-18 2024-08-30 마테리온 코포레이션 개선된 투과를 갖는 근적외선 광학 간섭 필터
JP6878306B2 (ja) * 2015-05-20 2021-05-26 クアンタム−エスアイ インコーポレイテッドQuantum−Si Incorporated パルスレーザ及び生物分析システム
US10246742B2 (en) 2015-05-20 2019-04-02 Quantum-Si Incorporated Pulsed laser and bioanalytic system
US9968927B2 (en) * 2015-05-22 2018-05-15 Taiwan Semiconductor Manufacturing Co., Ltd. Optical biosensor device
WO2017010280A1 (ja) * 2015-07-13 2017-01-19 コニカミノルタ株式会社 熱線遮蔽フィルム
US9518923B1 (en) * 2015-12-07 2016-12-13 International Business Machines Corporation System and methods for fluorescence detection
BR112020000799A2 (pt) * 2017-07-24 2020-07-14 Quantum-Si Incorporated estruturas fotônicas de rejeição óptica

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184015A (ja) * 1984-08-02 1986-04-28 フアウ・エ−・ベ−・ウエルク・フユ−ル・フエルンゼ−エレクトロニク・イム・フアウ・エ−・ベ−・コムビナ−ト・ミクロエレクトロニク 種々異なる光線透過部分を有する層を造る方法
JPH06174917A (ja) * 1992-07-13 1994-06-24 Hughes Aircraft Co 半導体光フィルタ
JP2007041524A (ja) * 2005-08-01 2007-02-15 Ashu Kogaku Kofun Yugenkoshi Ndフィルター
JP2008102363A (ja) * 2006-10-19 2008-05-01 Nidec Copal Corp Ndフィルタ及びこれを用いた光量絞り装置
US20120099188A1 (en) * 2010-10-20 2012-04-26 AEgis Technologies Group, Inc. Laser Protection Structures and Methods of Fabrication
JP2012163756A (ja) * 2011-02-07 2012-08-30 Tanaka Engineering Inc 低反射性遮光構造
US20140014838A1 (en) * 2012-07-16 2014-01-16 Karen Denise Hendrix Optical filter and sensor system
JP2016540310A (ja) * 2013-09-05 2016-12-22 アップル インコーポレイテッド 非導電性ミラーを有する不透明な白色コーティング
US20170184764A1 (en) * 2015-12-28 2017-06-29 Apple Inc. Electronic Devices Having Infrared-Transparent Window Coatings
JP2020095265A (ja) * 2018-11-28 2020-06-18 キヤノン電子株式会社 遮光部材、遮光部材を用いた撮像装置

Also Published As

Publication number Publication date
EP3924723A1 (en) 2021-12-22
AU2020231492A1 (en) 2021-09-16
CA3131274A1 (en) 2020-09-10
US20200284957A1 (en) 2020-09-10
BR112021016310A2 (pt) 2021-10-13
WO2020180899A1 (en) 2020-09-10
KR20210132176A (ko) 2021-11-03
TW202107066A (zh) 2021-02-16
US20220011486A1 (en) 2022-01-13
MX2021010690A (es) 2021-10-01
CN113544493A (zh) 2021-10-22

Similar Documents

Publication Publication Date Title
JP2022523997A (ja) 集積デバイス用の光吸収フィルタ
KR102786367B1 (ko) 광학 거부 광자 구조체들
US11175227B2 (en) Optical system and assay chip for probing, detecting and analyzing molecules
US12203853B2 (en) Optical nanostructure rejecter for an integrated device and related methods
US9863880B2 (en) Optical system and assay chip for probing, detecting and analyzing molecules
KR20220025853A (ko) 광학적 및 전기적 2차 경로 제거
KR20220140523A (ko) 수명 플러스 스펙트럼 특성화를 위한 센서
HK1241967A1 (en) Instrument for time resolved reading of fluorescence based assay chip
HK1228964A1 (en) Optical system and assay chip for probing, detecting and analyzing molecules

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230301

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230301

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20240219

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240220

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20240520

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240813

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20241022

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20250415