JP2022523997A - 集積デバイス用の光吸収フィルタ - Google Patents

集積デバイス用の光吸収フィルタ Download PDF

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Publication number
JP2022523997A
JP2022523997A JP2021552700A JP2021552700A JP2022523997A JP 2022523997 A JP2022523997 A JP 2022523997A JP 2021552700 A JP2021552700 A JP 2021552700A JP 2021552700 A JP2021552700 A JP 2021552700A JP 2022523997 A JP2022523997 A JP 2022523997A
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Prior art keywords
layer
semiconductor
filter
assembly
wavelength
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Pending
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JP2021552700A
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English (en)
Japanese (ja)
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JP2022523997A5 (https=
JPWO2020180899A5 (https=
Inventor
ベロス、マイケル
アール. アフマド、ファイサル
ビーチ、ジェームズ
クーマンズ、マイケル
ホサリ、シャラト
カビリ、アリ
プレストン、カイル
シュミッド、ジェラード
シェン、ビン
エム. ロスバーグ、ジョナサン
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Quantum Si Inc
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Quantum Si Inc
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Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Publication of JP2022523997A publication Critical patent/JP2022523997A/ja
Publication of JP2022523997A5 publication Critical patent/JP2022523997A5/ja
Publication of JPWO2020180899A5 publication Critical patent/JPWO2020180899A5/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/648Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6486Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/003Light absorbing elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/207Filters comprising semiconducting materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N2021/6463Optics
    • G01N2021/6471Special filters, filter wheel
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6408Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Filters (AREA)
  • Light Receiving Elements (AREA)
JP2021552700A 2019-03-05 2020-03-03 集積デバイス用の光吸収フィルタ Pending JP2022523997A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962813997P 2019-03-05 2019-03-05
US62/813,997 2019-03-05
US201962831237P 2019-04-09 2019-04-09
US62/831,237 2019-04-09
PCT/US2020/020847 WO2020180899A1 (en) 2019-03-05 2020-03-03 Optical absorption filter for an integrated device

Publications (3)

Publication Number Publication Date
JP2022523997A true JP2022523997A (ja) 2022-04-27
JP2022523997A5 JP2022523997A5 (https=) 2023-03-09
JPWO2020180899A5 JPWO2020180899A5 (https=) 2023-03-09

Family

ID=70155332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021552700A Pending JP2022523997A (ja) 2019-03-05 2020-03-03 集積デバイス用の光吸収フィルタ

Country Status (11)

Country Link
US (2) US20200284957A1 (https=)
EP (1) EP3924723A1 (https=)
JP (1) JP2022523997A (https=)
KR (1) KR20210132176A (https=)
CN (1) CN113544493A (https=)
AU (1) AU2020231492A1 (https=)
BR (1) BR112021016310A2 (https=)
CA (1) CA3131274A1 (https=)
MX (1) MX2021010690A (https=)
TW (1) TW202107066A (https=)
WO (1) WO2020180899A1 (https=)

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TWI576617B (zh) * 2012-07-16 2017-04-01 唯亞威方案公司 光學濾波器及感測器系統
US11604307B1 (en) * 2019-09-24 2023-03-14 United States Of America As Represented By The Administrator Of Nasa Dark mirror optical stack and related systems
US12283602B2 (en) * 2020-10-09 2025-04-22 Spectricity Image sensor with improved color accuracy
CN113740961B (zh) * 2021-08-26 2022-10-21 赛丽科技(苏州)有限公司 一种集成介质光波导的光吸收器和光吸收芯片
CN118216003A (zh) * 2021-10-22 2024-06-18 伊鲁米纳公司 半导体光感测
KR102782344B1 (ko) 2022-04-08 2025-03-18 한국전자통신연구원 삽입 손실과 반사 손실을 개선할 수 있는 도파관 모듈
CN114936519B (zh) * 2022-05-12 2025-09-05 中国人民解放军国防科技大学 一种可控模式光滤波器及优化方法

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JPH06174917A (ja) * 1992-07-13 1994-06-24 Hughes Aircraft Co 半導体光フィルタ
JP2007041524A (ja) * 2005-08-01 2007-02-15 Ashu Kogaku Kofun Yugenkoshi Ndフィルター
JP2008102363A (ja) * 2006-10-19 2008-05-01 Nidec Copal Corp Ndフィルタ及びこれを用いた光量絞り装置
US20120099188A1 (en) * 2010-10-20 2012-04-26 AEgis Technologies Group, Inc. Laser Protection Structures and Methods of Fabrication
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JP2016540310A (ja) * 2013-09-05 2016-12-22 アップル インコーポレイテッド 非導電性ミラーを有する不透明な白色コーティング
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JP2020095265A (ja) * 2018-11-28 2020-06-18 キヤノン電子株式会社 遮光部材、遮光部材を用いた撮像装置

Also Published As

Publication number Publication date
KR20210132176A (ko) 2021-11-03
CN113544493A (zh) 2021-10-22
WO2020180899A1 (en) 2020-09-10
EP3924723A1 (en) 2021-12-22
US20220011486A1 (en) 2022-01-13
MX2021010690A (es) 2021-10-01
CA3131274A1 (en) 2020-09-10
AU2020231492A1 (en) 2021-09-16
TW202107066A (zh) 2021-02-16
US20200284957A1 (en) 2020-09-10
BR112021016310A2 (pt) 2021-10-13

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